公开(公告)号：US07332921B2

公开(公告)日：2008-02-19

申请号：US11084671

申请日：2005-03-18

Applicant: James E. Nulty ,  James A. Hunter ,  Alexander J. Herrera

Inventor： James E. Nulty ,  James A. Hunter ,  Alexander J. Herrera

IPC: G01R31/02

CPC classification number: G01R1/07314 ,  G01R1/0735 ,  G01R1/07371 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49153 ,  Y10T29/49155

Abstract: In one embodiment, a probe card for testing dice on a wafer includes a substrate, a number of cantilevers formed on a surface thereof, and a number of probes extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers project over cavities on the surface of the substrate. The probes have tips to contact pads on the dice under test. The probe card may include a compressive layer above the surface of the substrate with a number of holes through which the probes extend.

公开(公告)号：US07244631B1

公开(公告)日：2007-07-17

申请号：US11145060

申请日：2005-06-03

Applicant: Wilhelmus De Groot ,  James A. Hunter ,  Josef Berger

Inventor： Wilhelmus De Groot ,  James A. Hunter ,  Josef Berger

IPC: H01L21/00

CPC classification number: B81B3/0086

Abstract: In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.

Abstract translation: 在一个实施例中，处理微机电系统（MEMS）装置的表面的方法降低或消除由于电荷迁移和积累引起的性能劣化。 简而言之，该方法可以包括处理MEMS器件的电介质表面以用电中性分子代替羟基，从而将电介质表面从亲水转变为基本上疏水的性质。 还公开了使用上述方法处理的表面的MEMS器件。

公开(公告)号：US07202988B1

公开(公告)日：2007-04-10

申请号：US10811435

申请日：2004-03-25

Applicant: Alexander P. Payne ,  Michael J. Dueweke ,  Wilhelmus De Groot ,  David T. Amm ,  Omar S. Leung ,  James A. Hunter ,  Brent D. Lunceford ,  Gregory Beach

Inventor： Alexander P. Payne ,  Michael J. Dueweke ,  Wilhelmus De Groot ,  David T. Amm ,  Omar S. Leung ,  James A. Hunter ,  Brent D. Lunceford ,  Gregory Beach

IPC: G02B26/00 ,  G02B26/08 ,  G02F1/29

CPC classification number: G02B26/0808

Abstract: In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.

Abstract translation: 在所公开的一个实施例中，光调制器可以被配置为具有基本平坦的光学有源调制器元件部分，同时偏转。 调制器可以包括基本并行布置的多个调制器元件，每个调制器元件包括在光学活性部分的任一侧上的光学活性部分和支撑部分。 此外，光学活性部分可以具有比支撑部分窄的宽度。 在所公开的另一实施例中，用于光调制的可移动膜包括基本圆形的光学活性部分和围绕圆形光学活性部分的释放膜部分。 基本上圆形的光学活性部分还可以包括被配置为暴露下表面的多个间隙。 此外，基本上圆形的光学活性部分在偏转状态下可以基本上是平坦的。

公开(公告)号：US06967760B2

公开(公告)日：2005-11-22

申请号：US10703827

申请日：2003-11-07

Applicant: James A. Hunter

Inventor： James A. Hunter

IPC: G02B5/18 ,  G02B26/00 ,  G02B26/08 ,  G02F1/00 ,  G02F1/03 ,  G02F1/07 ,  G02F1/13 ,  G02F1/1368 ,  H01L21/00 ,  H01L21/28 ,  H01L21/302 ,  H01L21/82 ,  H01L21/8234 ,  H01L27/06 ,  H01L29/423 ,  H01L29/49 ,  H01L31/153

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

Abstract translation: 包括一个或多个器件驱动器和单片耦合到所述一个或多个驱动器电路的衍射光调制器的集成器件。 一个或多个驱动器电路被配置为处理接收到的控制信号并将经处理的控制信号传送到衍射光调制器。 一种制造集成器件的方法优选包括制造用于多个晶体管中的每一个晶体管的前端部分，隔离多个晶体管的前端部分，制造衍射光调制器的前端部分，将前部 衍射光调制器的端部，制造用于多个晶体管的互连，施加开放阵列掩模和湿蚀刻以访问衍射光调制器，以及制造衍射光调制器的后端部分，从而将衍射光 调制器和多个晶体管。