公开(公告)号：US08351632B2

公开(公告)日：2013-01-08

申请号：US12546073

申请日：2009-08-24

Applicant: Kieran P. Harney ,  Jason Weigold ,  Gary Elko

Inventor： Kieran P. Harney ,  Jason Weigold ,  Gary Elko

IPC: H04R11/04

CPC classification number: H04R1/04 ,  H04M1/0214 ,  H04M1/03 ,  H04M1/035 ,  H04M1/19 ,  H04M1/6008 ,  H04R1/245 ,  H04R3/005 ,  H04R2410/05

Abstract: A microphone system has a base coupled with first and second microphone apparatuses. The first microphone apparatus is capable of producing a first output signal having a noise component, while the second microphone apparatus is capable of producing a second output signal. The first microphone apparatus may have a first back-side cavity and the second microphone may have a second back-side cavity. The first and second back-side cavities may be fluidly unconnected. The system also has combining logic operatively coupled with the first microphone apparatus and the second microphone apparatus. The combining logic uses the second output signal to remove at least a portion of the noise component from the first output signal.

公开(公告)号：US20070070821A1

公开(公告)日：2007-03-29

申请号：US11535807

申请日：2006-09-27

Applicant: Jason Weigold

Inventor： Jason Weigold

IPC: G04B17/00

CPC classification number: H03H9/2431 ,  H03H2009/02354 ,  H03H2009/02496 ,  H03H2009/02503

Abstract: A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.

Abstract translation: MEMS谐振器具有外部元件，其具有内表面，内表面限定区域，内部元件联接到外部元件并且设置在该区域内。 MEMS谐振器还具有与外部元件连通的致动电极，用于产生使内部元件以周期性方式弯曲的静电信号。

公开(公告)号：US20070064968A1

公开(公告)日：2007-03-22

申请号：US11476378

申请日：2006-06-28

Applicant: Jason Weigold

Inventor： Jason Weigold

IPC: H04R17/02

CPC classification number: H04R31/003 ,  G01L9/0042 ,  H04R7/14 ,  H04R19/005 ,  H04R19/04 ,  H04R27/00 ,  H04R31/00 ,  H04R2499/11 ,  Y10T29/43 ,  Y10T29/49005

Abstract: A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably coupled with the backplate. The diaphragm has a bottom surface (facing the backplate) with a convex portion aligned with the hole in the backplate.

Abstract translation: 麦克风被形成为具有被配置为提高信噪比的隔膜。 为此，麦克风具有穿过其中的孔的背板，以及与该背板可移动地联接的隔膜。 隔膜具有与背板中的孔对准的凸部的底面（面对背板）。

公开(公告)号：US09002036B2

公开(公告)日：2015-04-07

申请号：US13454508

申请日：2012-04-24

Applicant: Kieran P. Harney ,  Jason Weigold ,  Gary Elko

Inventor： Kieran P. Harney ,  Jason Weigold ,  Gary Elko

IPC: H04R3/00 ,  H04R1/24

CPC classification number: H04R3/005 ,  H04R1/245 ,  H04R2410/05

Abstract: A microphone system has a primary microphone for producing a primary signal, a secondary microphone for producing a secondary signal, and a selector operatively coupled with both the primary microphone and the secondary microphone. The system also has an output for delivering an output audible signal principally produced by one of the to microphones. The selector selectively permits either 1) at least a portion of the primary signal and/or 2) at least a portion of the secondary signal to be forwarded to the output as a function of the noise in the primary signal.

Abstract translation: 麦克风系统具有用于产生主信号的主麦克风，用于产生辅助信号的次麦克风，以及可操作地与主麦克风和次麦克风耦合的选择器。 该系统还具有用于传送主要由麦克风之一产生的输出可听信号的输出。 选择器选择性地允许1）主信号的至少一部分和/或2）辅助信号的至少一部分作为主信号中的噪声的函数被转发到输出。

公开(公告)号：US20120207324A1

公开(公告)日：2012-08-16

申请号：US13454508

申请日：2012-04-24

Applicant: Kieran P. Harney ,  Jason Weigold ,  Gary Elko

Inventor： Kieran P. Harney ,  Jason Weigold ,  Gary Elko

IPC: H04R3/00 ,  H04B15/00

CPC classification number: H04R3/005 ,  H04R1/245 ,  H04R2410/05

Abstract: A microphone system has a primary microphone for producing a primary signal, a secondary microphone for producing a secondary signal, and a selector operatively coupled with both the primary microphone and the secondary microphone. The system also has an output for delivering an output audible signal principally produced by one of the to microphones. The selector selectively permits either 1) at least a portion of the primary signal and/or 2) at least a portion of the secondary signal to be forwarded to the output as a function of the noise in the primary signal.

Abstract translation: 麦克风系统具有用于产生主信号的主麦克风，用于产生辅助信号的次麦克风，以及可操作地与主麦克风和次麦克风耦合的选择器。 该系统还具有用于传送主要由麦克风之一产生的输出可听信号的输出。 选择器选择性地允许1）主信号的至少一部分和/或2）辅助信号的至少一部分作为主信号中的噪声的函数被转发到输出。

公开(公告)号：US20100285628A1

公开(公告)日：2010-11-11

申请号：US12804213

申请日：2010-07-16

Applicant: John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

Inventor： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

IPC: H01L21/02 ,  H01L21/84

CPC classification number: H04R3/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H01L2224/48137 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/15151 ,  H04R19/005 ,  H04R2499/11

Abstract: A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

公开(公告)号：US07825484B2

公开(公告)日：2010-11-02

申请号：US11113925

申请日：2005-04-25

Applicant: John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

Inventor： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

IPC: H01L29/82

CPC classification number: H04R3/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H01L2224/48137 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/15151 ,  H04R19/005 ,  H04R2499/11

Abstract: A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

Abstract translation: 微机械麦克风由硅或绝缘体上硅（SOI）晶片形成。 用于麦克风的固定感测电极由晶片的顶部硅层形成。 通过沉积形成结构的至少一个氧化物层，然后通过形成的沟槽从顶部硅层的背面去除结构物下面的氧化物的一部分，形成在顶部硅层前侧上的各种多晶硅麦克风结构 通过顶层硅层。 沟槽允许声波从顶部硅层的背面到达隔膜。 在SOI晶片中，通过底部硅层和中间氧化物层形成空腔，以露出沟槽，以去除氧化物并允许声波到达隔膜。 惯性传感器可以形成在相同的晶片上，其中各种惯性传感器结构基本上在同一时间形成并且使用与对应的麦克风结构基本上相同的过程。

公开(公告)号：US20070165888A1

公开(公告)日：2007-07-19

申请号：US11625553

申请日：2007-01-22

Applicant: Jason Weigold

Inventor： Jason Weigold

IPC: H04R25/00

CPC classification number: H04R19/005 ,  B81B3/0037 ,  B81B3/0072 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0307 ,  H04R7/20 ,  H04R2307/201 ,  H04R2410/00 ,  H04R2499/11

Abstract: A microphone includes a diaphragm assembly supported by a substrate. The diaphragm assembly includes at least one carrier, a diaphragm, and at least one spring coupling the diaphragm to the at least one carrier such that the diaphragm is spaced from the at least one carrier. An insulator (or separate insulators) between the substrate and the at least one carrier electrically isolates the diaphragm and the substrate.

Abstract translation: 麦克风包括由基板支撑的隔膜组件。 隔膜组件包括至少一个载体，隔膜和至少一个弹簧，其将隔膜耦合到至少一个载体，使得隔膜与至少一个载体间隔开。 衬底和至少一个载体之间的绝缘体（或单独的绝缘体）电隔离隔膜和衬底。

公开(公告)号：US20070087466A1

公开(公告)日：2007-04-19

申请号：US11535804

申请日：2006-09-27

Applicant: Jason Weigold ,  John Martin ,  Timothy Brosnihan

Inventor： Jason Weigold ,  John Martin ,  Timothy Brosnihan

IPC: H01L21/00

CPC classification number: H04R19/005 ,  B81B2201/0257 ,  B81C1/00246 ,  B81C2203/0728 ,  H04R1/04 ,  H04R19/04 ,  H04R31/006

Abstract: A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

Abstract translation: 形成具有可变电容的麦克风的方法首先将高温沉积材料沉积在模具上。 高温材料最终形成有助于可变电容的结构。 该方法然后在沉积沉积材料之后在管芯上形成电路。 电路被配置为检测可变电容。

公开(公告)号：US20070072327A1

公开(公告)日：2007-03-29

申请号：US11535698

申请日：2006-09-27

Applicant: Jason Weigold

Inventor： Jason Weigold

IPC: H01L21/00

CPC classification number: B81C1/00246 ,  B81B2201/0271 ,  B81C2203/0728 ,  H03H3/0073 ,  H03H9/2431 ,  H03H2009/02354 ,  H03H2009/02503

Abstract: A method of producing an integrated MEMS resonator includes providing a substrate including single crystal silicon and partially forming a resonator in a first portion of the substrate, the resonator having a resonating element formed by the substrate and an electrode, the resonating element and the electrode forming a variable capacitor. The method also includes forming circuitry in a second portion of the substrate, the circuitry configured for detecting capacitance of the variable capacitor and finish forming the resonator and integrating the resonator with the circuitry so that the electrode is in communication with the circuitry.

Abstract translation: 一种制造集成MEMS谐振器的方法包括提供包括单晶硅的衬底并在衬底的第一部分中部分地形成谐振器，所述谐振器具有由衬底和电极形成的谐振元件，谐振元件和形成电极的电极 一个可变电容器。 该方法还包括在衬底的第二部分中形成电路，所述电路被配置用于检测可变电容器的电容并完成形成谐振器并且将谐振器与电路集成，使得电极与电路连通。