公开(公告)号：US20130042681A1

公开(公告)日：2013-02-21

申请号：US13586226

申请日：2012-08-15

Applicant: Johannes Classen ,  Jochen Reinmuth ,  Sebastian Guenther ,  Pia Bustian-Todorov

Inventor： Johannes Classen ,  Jochen Reinmuth ,  Sebastian Guenther ,  Pia Bustian-Todorov

IPC: H05K13/00 ,  G01P3/44

CPC classification number: G01C19/5783 ,  B81B2201/025 ,  B81C1/00182 ,  G01P15/0802 ,  G01P2015/0882

Abstract: A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.

Abstract translation: 微机械结构的制造方法和微机械结构。 微机械结构包括由第一材料制成的第一微机械功能层，其包括具有第一端和第二端的埋管; 微机械传感器结构，其具有位于第一微机械功能层上方的第二微机械功能层中的盖; 所述第二微机械功能层中的边缘区域使得所述边缘区域围绕所述传感器结构并限定包含所述传感器结构的内侧和远离所述传感器结构的外侧; 使得第一端位于内侧的外侧和第二端。

公开(公告)号：US20120031185A1

公开(公告)日：2012-02-09

申请号：US13195510

申请日：2011-08-01

Applicant: Johannes Classen ,  Sebastian Guenther ,  Harald Steffes

Inventor： Johannes Classen ,  Sebastian Guenther ,  Harald Steffes

IPC: G01P15/02

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.

Abstract translation: 描述了一种微机械加速度传感器，其包括基板和在检测方向上相对于基板可移动地定位的地震质量块。 微机械传感器包括至少一个阻尼装置，用于阻止垂直于检测方向的地震质量的运动。

公开(公告)号：US20110023600A1

公开(公告)日：2011-02-03

申请号：US12834953

申请日：2010-07-13

Applicant: Martin WREDE ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

Inventor： Martin WREDE ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

Abstract translation: 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

公开(公告)号：US20100181944A1

公开(公告)日：2010-07-22

申请号：US12452562

申请日：2008-06-16

Applicant: Wolfram Bauer ,  Johannes Classen

Inventor： Wolfram Bauer ,  Johannes Classen

IPC: H01L41/04 ,  H02N1/00

CPC classification number: B81B3/0094 ,  B81B2201/0242 ,  B81B2203/0136 ,  H03H9/02275 ,  H03H2009/02496

Abstract: A micromechanical component includes a first electrode and a second electrode, the first electrode being moveable relative to the second electrode in a main direction of movement, and the first electrode and/or the second electrode being configured such that a movement of the first electrode parallel to the main direction of movement results in a modification of the average distance in a region of overlap of the projection of the first electrode with the projection of the second electrode, both perpendicular to the main direction of movement and in a main plane of extension.

Abstract translation: 微机械部件包括第一电极和第二电极，第一电极可以在主移动方向上相对于第二电极移动，并且第一电极和/或第二电极被配置为使得第一电极的运动平行 主运动方向导致第一电极的突起与第二电极的突出部重叠的区域中的平均距离的修改，两者垂直于主移动方向和主延伸平面。

公开(公告)号：US20060191338A1

公开(公告)日：2006-08-31

申请号：US11317819

申请日：2005-12-22

Applicant: Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

Inventor： Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

IPC: G01P15/08 ,  G01P3/44

CPC classification number: G01C19/5755 ,  G01C19/5726

Abstract: A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

公开(公告)号：US09169116B2

公开(公告)日：2015-10-27

申请号：US13916094

申请日：2013-06-12

Applicant: Johannes Classen ,  Paul Farber

Inventor： Johannes Classen ,  Paul Farber

IPC: B81C3/00 ,  B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B3/0018 ,  B81C1/00238 ,  B81C1/00246 ,  B81C1/00261 ,  B81C2203/0735 ,  B81C2203/0771 ,  B81C2203/0785

Abstract: An expansion of the functional scope of a hybrid integrated component including an MEMS element, a cap for the micromechanical structure of the MEMS element, and an ASIC element having circuit components is provided. In this component, the circuit components of the ASIC element interact with the micromechanical structure of the MEMS element. The MEMS element is mounted on the ASIC element in such a way that the micromechanical structure of the MEMS element is situated in a cavity between the cap and the ASIC element. The ASIC element is additionally equipped with the circuit components of a magnetic sensor system. These circuit components are produced in or on the CMOS back-end stack of the ASIC element. The magnetic sensor system may thus be implemented without enlarging the chip area.

Abstract translation: 提供了包括MEMS元件，MEMS元件的微机械结构的盖和具有电路部件的ASIC元件的混合集成部件的功能范围的扩展。 在该部件中，ASIC元件的电路部件与MEMS元件的微机械结构相互作用。 MEMS元件以这样的方式安装在ASIC元件上，使得MEMS元件的微机械结构位于盖和ASIC元件之间的空腔中。 ASIC元件另外配备有磁传感器系统的电路部件。 这些电路元件在ASIC元件的CMOS后端堆叠中或其上产生。 因此可以在不扩大芯片面积的情况下实现磁传感器系统。

公开(公告)号：US08866238B2

公开(公告)日：2014-10-21

申请号：US13869692

申请日：2013-04-24

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: H01L29/84 ,  H01L21/50 ,  B81C1/00 ,  B81B3/00 ,  B81C3/00 ,  B81B7/00

CPC classification number: B81B3/004 ,  B81B3/0018 ,  B81B3/0075 ,  B81B7/008 ,  B81C1/00134 ,  B81C1/00246 ,  B81C1/00261 ,  B81C1/00674 ,  B81C3/001 ,  B81C2203/0109 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01L24/13 ,  H01L2224/11 ,  H01L2224/48463

Abstract: Hybrid integrated components including an MEMS element and an ASIC element are described, whose capacitor system allows both signal detection with comparatively high sensitivity and sensitive activation of the micromechanical structure of the MEMS element. The hybrid integrated component includes an MEMS element having a micromechanical structure which extends over the entire thickness of the MEMS substrate. At least one structural element of this micromechanical structure is deflectable and is operationally linked to at least one capacitor system, which includes at least one movable electrode and at least one stationary electrode. Furthermore, the component includes an ASIC element having at least one electrode of the capacitor system. The MEMS element is mounted on the ASIC element, so that there is a gap between the micromechanical structure and the surface of the ASIC element. According to the invention, at least one electrode of the capacitor system is separated from the layered structure of the ASIC element and instead mechanically and electrically connected to the deflectable structural element of the MEMS element, so that this electrode functions as a movable electrode of the capacitor system.

Abstract translation: 描述了包括MEMS元件和ASIC元件的混合集成部件，其电容器系统允许具有较高灵敏度的信号检测和MEMS元件的微机械结构的敏感激活。 混合集成部件包括具有在MEMS基板的整个厚度上延伸的微机械结构的MEMS元件。 该微机械结构的至少一个结构元件是可偏转的并且可操作地连接至至少一个电容器系统，其包括至少一个可移动电极和至少一个固定电极。 此外，该部件包括具有电容器系统的至少一个电极的ASIC元件。 MEMS元件安装在ASIC元件上，使得微机械结构和ASIC元件的表面之间存在间隙。 根据本发明，电容器系统的至少一个电极与ASIC元件的分层结构分离，而是机械地和电连接到MEMS元件的可偏转结构元件，使得该电极用作可移动电极 电容器系统。

公开(公告)号：US08726731B2

公开(公告)日：2014-05-20

申请号：US12683316

申请日：2010-01-06

Applicant: Johannes Classen ,  Christoph Gauger

Inventor： Johannes Classen ,  Christoph Gauger

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.

Abstract translation: 一种微机械结构，包括具有主平面延伸的基板，并且包括第一抗震块，所述第一抗震块包括由相交的第一质量线形成的格栅结构，并且所述第一抗震块借助于第一弯曲弹簧而被灵活地固定 元件，此外，平行于主延伸平面的第一质量线的第一线宽度在平行于主延伸平面的第一弯曲弹簧元件的另一第一线宽的20％至50％之间。

公开(公告)号：US08573054B2

公开(公告)日：2013-11-05

申请号：US12553090

申请日：2009-09-02

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01C19/00

CPC classification number: G01C25/00 ,  G01C19/5712

Abstract: A device and manufacturing method for a rotation sensor device includes a holding device, an oscillating mass, and a spring, via which the oscillating mass is connected to the holding device. The spring is designed so that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive. The steps include: producing a layer sequence having a first layer made of semiconductor material and/or metal and a second layer made of semiconductor material and/or a metal, a boundary surface of the first layer, at least partially being covered by an insulating layer; structuring the spring out of the first layer; and structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer.

Abstract translation: 用于旋转传感器装置的装置和制造方法包括保持装置，振动块和弹簧，振动块通过该弹簧连接到保持装置。 弹簧被设计成使得振荡质量可以借助于驱动而相对于保持装置围绕振荡轴线设置成摆动运动。 步骤包括：制备具有由半导体材料和/或金属制成的第一层的层序列和由半导体材料和/或金属制成的第二层，第一层的边界表面至少部分被绝缘体覆盖 层; 将弹簧结构化成第一层; 并且构造振荡块的至少一个振荡质量子单元，其可以借助于驱动器被设置为围绕振荡轴的振荡运动而离开第二层。

公开(公告)号：US08443666B2

公开(公告)日：2013-05-21

申请号：US12747846

申请日：2008-11-10

Applicant: Johannes Classen ,  Sebastian Gracki

Inventor： Johannes Classen ,  Sebastian Gracki

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the first Coriolis element in a third direction running generally perpendicular to the first direction; characterized by the first Coriolis element being developed as balancing rocker.

Abstract translation: 提供具有基板和第一科里奥利元件的转速传感器，提供激励装置，用于在第一方向上激发第一科里奥利元件的振动，第一检测装置被提供用于检测第一偏转 第三方向上的第一科里奥利元件大致垂直于第一方向运行; 其特征在于第一科里奥利元件被开发为平衡摇杆。