摘要:
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle. In the formula, R1 represents a polymerizable double bond-containing group; R2 represents a fluorine atom or a fluorine-containing alkyl group; R8 represents a substituted or unsubstituted alkyl group or the like; and W1 represents a single bond, a substituted or unsubstituted methylene group or the like.
摘要:
A disk device performs feedforward servo control for moving a head to a target track. The disk device includes a calibrating portion for updating feedforward information, for moving the head, into information dedicated to the specific disk device; and a feedforward information storing portion for storing the feedforward information.
摘要:
A disk storage device includes at least one disk, a head for scanning a principal surface of the disk in a generally radial direction thereof for reproducing a servo control signal in response to a servo pattern that is recorded on the principal surface, a rotary mechanism for moving the head along the principal surface of the disk generally in the radial direction, an amplifier supplied with the servo signal reproduced at the head for amplifying the same with a predetermined gain, a signal processing circuit for extracting first and second positional control signals each having a phase that is offset with respect to the phase of the other positional control signal by 90 degrees, from the servo control signal, a level detection circuit for detecting a head position at which the first and second positional control signals have simultaneously an identical level and further for detecting the level of the first and second positional control signals at the detected head position, a gain control circuit for controlling the gain of the amplifier such that an absolute value of the foregoing level is set to a predetermined value, and a head position control circuit for controlling a driving circuit in response to a combination of the first and second positional control signals, the head position control circuit locating the head on a predetermined recording track based upon a head position in which the first and second positional control signals have the same level simultaneously.
摘要:
A method of steering a vehicle having a set of steerable front wheels and a set of steerable rear wheels. The front and rear wheels are both secondarily steered in addition to a main steer of the front wheels caused by an operation of a front wheel steering gear in response to an operation of a steering wheel. The method comprises providing to the front wheels a secondary steer angle corresponding to at least a differentiated value of a steer angle of a steering wheel in such a way as to increase an overall steer angle of the front wheels and providing to the rear wheels a secondary steer angle proportional to the steer angle of the steering wheel and in the same direction as the steer angle of the front wheels.
摘要:
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle. In the formula, R1 represents a polymerizable double bond-containing group; R2 represents a fluorine atom or a fluorine-containing alkyl group; R8 represents a substituted or unsubstituted alkyl group or the like; and W1 represents a single bond, a substituted or unsubstituted methylene group or the like.
摘要:
According to the present invention, there is provided a polymerizable fluorine-containing sulfonic acid onium salt of the following general formula (2) and a resin obtained by polymerization thereof. It is possible by the use of this sulfonate resin of the present invention to provide a resist composition with high resolution, board depth of focus tolerance (DOF), small line edge roughness (LER) and high sensitivity. In the formula, Z represents a substituted or unsubstituted C1-C6 straight or branched alkylene group, or a divalent moiety in which substituted or unsubstituted C1-C6 straight or branched alkylene groups are bonded in series to a divalent group obtained by elimination of two hydrogen atoms from an alicyclic or aromatic hydrocarbon; R represents a hydrogen atom, a halogen atom, or a C1-C3 alkyl or fluorine-containing alkyl group; and Q+ represents a sulfonium cation or an iodonium cation.
摘要:
According to the present invention, there are provided a fluorine-containing sulfonate salt resin or fluorine-containing sulfonate ester resin having a structure of the following general formula (A) and a fluorine-containing N-sulfonyloxyimide resin having a repeating unit of the general formula (17). It is possible obtain a resist composition using the above resin such that the resist composition can attain high resolution, wide DOF, small LER and high sensitivity and form a good pattern shape.
摘要:
There is disclosed a fluorine-containing polymer compound comprising a repeating unit (a) of the following general formula (2) and having a weight-average molecular weight of 1000 to 1000000 where R1 represents a polymerizable double bond-containing group; R2 represents a fluorine atom or a fluorine-containing alkyl group; R3 represents a hydrogen atom, an acid labile group, a cross-linking site or the other monovalent organic group; and W1 represents a linking moiety.When the fluorine-containing polymer compound is used in a resist compound for pattern formation by high energy radiation of 300 nm or less wavelength or electron beam radiation, it is possible to form a resist pattern with a good rectangular profile.
摘要:
A method of controlling a disk drive is disclosed that is capable of precise and real-time detection of an abnormal floating height of a magnetic head over an entire area of a magnetic disk. The method of controlling the disk drive includes the steps of: calculating a servo gain difference between a servo gain value obtained from a servo frame of the disk drive and a normal servo gain value recorded in the servo frame, the normal servo gain value being a servo gain value when a magnetic head flies normally relative to a magnetic disk; and forbidding the magnetic head writing data into the magnetic disk when the servo gain difference is equal to or greater than a predetermined value.
摘要:
A throttle device for engine has a throttle valve, a shaft, and a valve gear. The valve gear is driven to rotate by a motor. The shaft and the valve gear are unitarily molded of a continuous resinous material. In the coupled area between the shaft and the valve, a recess section is provided. The recess section is formed, from the outer end face of the gear, coaxially with the shaft. The recess section serves as a thin-walled section, and prevents deformation of the gear likely to be caused by heat shrinkage. Furthermore, the recess section includes a through hole, which is effective for moving the ball bearing along the axial direction. A press-fitting tool is inserted into the through hole to install the ball bearing by pressing.