Information recording apparatus having magnetic shield means
    11.
    发明授权
    Information recording apparatus having magnetic shield means 失效
    具有磁屏蔽装置的信息记录装置

    公开(公告)号:US5446722A

    公开(公告)日:1995-08-29

    申请号:US132958

    申请日:1993-10-07

    摘要: An information recording apparatus including a device for driving an optical-disk's master disk, an electron lens barrel for having an electron beam irradiate a recording surface of a disk, a translational device for producing, between the disk and the electron lens barrel, a relative movement in a direction parallel to the recording surface and a container for enclosing the elements of the apparatus adapted to support a vacuum atmosphere. The driving device includes a turn table 4, a spindle 14a for supporting the turn table, a motor 14 for driving the spindle, and a magnetic shield for preventing magnetic fields of the motor from leaking outward. The motor is enclosed in the shield to prevent its magnetic fields from affecting the electron beam, which makes it possible to record information with high accuracy. The use of the motor as a drive source realizes easier and more responsive control of the turn table than that in the prior art.

    摘要翻译: 一种信息记录装置,包括用于驱动光盘的主盘的装置,具有照射盘的记录表面的电子束的电子透镜镜筒,用于在光盘和电子镜头镜筒之间产生的平移装置, 在与记录表面平行的方向上的运动和用于封闭适于支撑真空气氛的装置的元件的容器。 驱动装置包括转台4,用于支撑转台的主轴14a,用于驱动主轴的电动机14和用于防止电动机的磁场向外泄漏的磁屏蔽。 电机被封闭在屏蔽中,以防止其磁场影响电子束,这样可以高精度地记录信息。 使用电动机作为驱动源实现了与现有技术相比,转台更容易和更灵敏的控制。

    MOLD AND METHOD FOR MANUFACTURING THE SAME
    13.
    发明申请
    MOLD AND METHOD FOR MANUFACTURING THE SAME 失效
    模具及其制造方法

    公开(公告)号:US20110272850A1

    公开(公告)日:2011-11-10

    申请号:US13121348

    申请日:2009-01-29

    IPC分类号: B29C31/00

    摘要: A mold is provided, at an outer circumferential region thereof, with portions to be gripped, to allow a transfer apparatus to perform transferring to an object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. For a mold set including two molds, each of the molds is provided, at an outer circumferential region thereof, with portions to be gripped, to allow the transfer apparatus to perform transferring to the object.The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. The portions to be gripped of one of the molds and the portions to be gripped of the other mold are disposed at different angular positions.

    摘要翻译: 在其外周区域处设置有要夹持的部分的模具,以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 对于包括两个模具的模具组,每个模具在其外周区域处设置有要夹持的部分,以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 要将其中一个模具夹紧的部分和另一个模具夹紧的部分设置在不同的角度位置。

    MASTER DISK EXPOSING APPARATUS AND THE ADJUSTING METHOD THEREFOR
    14.
    发明申请
    MASTER DISK EXPOSING APPARATUS AND THE ADJUSTING METHOD THEREFOR 有权
    主磁盘曝光装置及其调整方法

    公开(公告)号:US20090204983A1

    公开(公告)日:2009-08-13

    申请号:US12294164

    申请日:2007-03-22

    IPC分类号: G11B17/028

    摘要: A master disk exposing apparatus having: a turntable for rotating a master disk; moving means for horizontally moving the turntable in at least one direction; beam irradiating means for irradiating an electron beam toward the turntable, thereby forming a beam spot onto the turntable or the master disk; beam deflecting means for deflecting the beam; and control means for controlling the moving means, the beam irradiating means, and the beam deflecting means, wherein the control means includes initializing means for executing an initial operation to drive at least either the moving means or the beam deflecting means and make an origin of the beam spot coincide with a rotational center of the turntable at the time of activation. An apparatus and a method for easily adjusting a deviation between an origin of an irradiating position of the recording beam and the rotational center of the turntable are, thus, provided.

    摘要翻译: 一种主盘曝光装置,具有:用于旋转主盘的转盘; 用于沿至少一个方向水平移动转台的移动装置; 光束照射装置,用于向转盘辐射电子束,从而在光盘或母盘上形成光斑; 用于偏转光束的光束偏转装置; 以及用于控制移动装置,光束照射装置和光束偏转装置的控制装置,其中控制装置包括初始化装置,用于执行初始操作以驱动移动装置或光束偏转装置中的至少一个, 光束点在激活时与转台的旋转中心重合。 因此,提供了用于容易地调节记录光束的照射位置的原点与转台的旋转中心之间的偏差的装置和方法。

    Electron Beam Recording Apparatus
    15.
    发明申请
    Electron Beam Recording Apparatus 有权
    电子束记录装置

    公开(公告)号:US20070286036A1

    公开(公告)日:2007-12-13

    申请号:US10594056

    申请日:2005-03-22

    IPC分类号: G11B5/84

    摘要: An electron beam recording apparatus provided with control means for forming a latent image in a resist layer on a disk substrate corresponding to a predetermined pattern by controlling the irradiation position of an electron beam irradiation unit on the surface of the resist layer in accordance with the rotation angle of the disk substrate by a rotational drive unit, the shift position by a shift drive unit and the recording data that represent the predetermined pattern, and beam-adjusting means for irradiating an electron beam so as to spread over a plurality of tracks in the direction of traversing the tracks in response to the irradiation position control due to the control means, and an electron beam recording method using the apparatus.

    摘要翻译: 一种电子束记录装置,其具有控制装置,用于根据旋转方向控制电子束照射单元的表面上的电子束照射单元的照射位置,在与预定图案相对应的盘基片上的抗蚀剂层中形成潜像 通过旋转驱动单元的盘基片的角度,由移位驱动单元的移位位置和表示预定图案的记录数据,以及用于照射电子束以便分散在多个轨道上的光束调节装置 响应于由于控制装置的照射位置控制而横越轨道的方向,以及使用该装置的电子束记录方法。

    Master disk exposing apparatus and the adjusting method therefor
    19.
    发明授权
    Master disk exposing apparatus and the adjusting method therefor 有权
    主盘曝光装置及其调整方法

    公开(公告)号:US08335146B2

    公开(公告)日:2012-12-18

    申请号:US12294164

    申请日:2007-03-22

    IPC分类号: G11B17/03

    摘要: A master disk exposing apparatus having: a turntable for rotating a master disk; moving means for horizontally moving the turntable in at least one direction; beam irradiating means for irradiating an electron beam toward the turntable, thereby forming a beam spot onto the turntable or the master disk; beam deflecting means for deflecting the beam; and control means for controlling the moving means, the beam irradiating means, and the beam deflecting means, wherein the control means includes initializing means for executing an initial operation to drive at least either the moving means or the beam deflecting means and make an origin of the beam spot coincide with a rotational center of the turntable at the time of activation. An apparatus and a method for easily adjusting a deviation between an origin of an irradiating position of the recording beam and the rotational center of the turntable are, thus, provided.

    摘要翻译: 一种主盘曝光装置,具有:用于旋转主盘的转盘; 用于沿至少一个方向水平移动转台的移动装置; 光束照射装置,用于向转盘辐射电子束,从而在光盘或母盘上形成光斑; 用于偏转光束的光束偏转装置; 以及用于控制移动装置,光束照射装置和光束偏转装置的控制装置,其中控制装置包括初始化装置,用于执行初始操作以驱动移动装置或光束偏转装置中的至少一个, 光束点在激活时与转台的旋转中心重合。 因此,提供了用于容易地调节记录光束的照射位置的原点与转台的旋转中心之间的偏差的装置和方法。