公开(公告)号：US08540837B2

公开(公告)日：2013-09-24

申请号：US12712981

申请日：2010-02-25

申请人： Eijirou Iwase ,  Jun Fujinawa ,  Toyoaki Hieda ,  Toshiyuki Katagiri ,  Hiroshi Arakatsu

发明人： Eijirou Iwase ,  Jun Fujinawa ,  Toyoaki Hieda ,  Toshiyuki Katagiri ,  Hiroshi Arakatsu

IPC分类号： B32B38/10 ,  B32B27/00

CPC分类号： C23C14/562 ,  B05D7/04 ,  B05D2252/02 ,  B32B37/003 ,  B32B37/12 ,  B32B37/203 ,  B32B38/10 ,  B32B2037/243 ,  B32B2305/02 ,  B32B2309/68 ,  B32B2457/00 ,  C23C14/024 ,  C23C14/081 ,  C23C16/0272 ,  C23C16/545

摘要： A method for manufacturing a functional film includes steps of: feeding a support continuously from a first film roll, forming a coating film on the support, providing a laminate film on a surface of the coating film, and taking up the support to a second film roll; and loading the second film roll made by the aforementioned step in a vacuum film-forming apparatus, feeding the support provided with the laminate film continuously from the film roll, peeling off the laminate film, forming an inorganic film on the coating film on the support, and taking up the support to a third film roll.

摘要翻译： 一种功能膜的制造方法，其特征在于，包括以下步骤：从第一胶片辊连续地供给载体，在所述载体上形成涂膜，在所述涂膜的表面上设置层叠膜，并将所述支持体吸附到第二膜 滚; 并将由上述步骤制成的第二薄膜辊装载到真空成膜装置中，从薄膜辊连续地供给具有层叠膜的支撑体，剥离层压膜，在支撑体上的涂膜上形成无机膜 ，并支持第三部电影卷。

公开(公告)号：US08039373B2

公开(公告)日：2011-10-18

申请号：US11798708

申请日：2007-05-16

申请人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

发明人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

IPC分类号： H01L21/20 ,  H01L21/40

CPC分类号： C03C17/42 ,  B44C1/1733 ,  C03C17/3405 ,  H01L51/0013 ,  H01L51/56

摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.

摘要翻译： 图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序 具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。 图案成膜装置包括片材供应装置，按压装置和基板输送装置。 可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

公开(公告)号：US08592004B2

公开(公告)日：2013-11-26

申请号：US12880615

申请日：2010-09-13

申请人： Tatsuya Fujinami ,  Shinsuke Takahashi ,  Jun Fujinawa ,  Kouji Tonohara

发明人： Tatsuya Fujinami ,  Shinsuke Takahashi ,  Jun Fujinawa ,  Kouji Tonohara

IPC分类号： C23C16/458

CPC分类号： C23C16/50 ,  C23C16/44 ,  C23C16/503 ,  C23C16/505 ,  C23C16/509 ,  C23C16/517 ,  C23C16/54 ,  C23C16/545

摘要： A film deposition method deposits a film on a surface of a substrate in strip form traveling on a peripheral surface of a cylindrical drum in at least one film deposition compartment around the peripheral surface of the drum. The method disposes previously a differential compartment between one film deposition compartment and a compartment including a wrapping space containing at least one of a first position at which the substrate starts to travel on the drum and a second position at which the substrate separates from the drum, the differential compartments communicating with the compartment including the wrapping space and the film deposition compartment, sets a first pressure of the wrapping space lower than a second pressure of the at least one film deposition compartment and performs film deposition in the film deposition compartment with electric power supplied to the drum.

摘要翻译： 薄膜沉积方法将薄膜沉积在基板的表面上，以条带形式在圆筒形滚筒的圆周表面上行进，在至少一个薄膜沉积室周围的圆筒表面上。 该方法事先将一个薄膜沉积隔室和隔室之间的差分隔室置于包含一个包装空间的隔间，该包装空间包含基板开始在滚筒上行进的第一位置和基板与滚筒分离的第二位置中的至少一个， 与包括所述包装空间和所述成膜室的所述隔室连通的所述差动隔间将所述包装空间的第一压力设定为低于所述至少一个成膜室的第二压力，并且利用电力在所述成膜室中进行膜沉积 提供给鼓。

公开(公告)号：US20100297473A1

公开(公告)日：2010-11-25

申请号：US12782204

申请日：2010-05-18

申请人： Eijirou Iwase ,  Jun Fujinawa

发明人： Eijirou Iwase ,  Jun Fujinawa

IPC分类号： B32B9/00 ,  B05D1/36 ,  B05C13/00

CPC分类号： B05D7/04 ,  B05D3/067 ,  B05D2252/02 ,  B05D2502/00 ,  C23C14/562 ,  C23C16/545

摘要： A method for manufacturing a functional film, includes the steps of: continuously feeding a support from a first film roll, forming, on the support, a coating film having a degree of hardness of 3B or more, and winding up the support into a second film roll at a tension of 30 N/m or more; and loading the second film roll which has been wound up in the prior step in a vacuum film forming apparatus, continuously feeding the support from the second film roll, forming an inorganic film on the coating film formed on the support, and winding up the support into a third film roll.

摘要翻译： 一种功能性膜的制造方法，其特征在于，包括以下步骤：从第一膜卷连续供给载体，在所述载体上形成硬度为3B以上的涂膜，将所述载体卷绕成第二膜 薄膜卷张力为30N / m以上; 并将在先前步骤中卷绕的第二胶片卷装载到真空成膜装置中，从第二胶片辊连续地供给载体，在形成于支持体上的涂膜上形成无机膜，并将载体 进入第三部电影卷。

公开(公告)号：US07462927B2

公开(公告)日：2008-12-09

申请号：US11034805

申请日：2005-01-14

申请人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

发明人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

IPC分类号： H01L23/02 ,  H01L21/00 ,  H01L21/20

CPC分类号： C03C17/42 ,  B44C1/1733 ,  C03C17/3405 ,  H01L51/0013 ,  H01L51/56

摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.

摘要翻译： 图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序 具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。 图案成膜装置包括片材供应装置，按压装置和基板输送装置。 可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

公开(公告)号：US20050150865A1

公开(公告)日：2005-07-14

申请号：US11034805

申请日：2005-01-14

申请人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

发明人： Jun Fujinawa ,  Junji Nakada ,  Norio Shibata ,  Takashi Kataoka

IPC分类号： B41M5/00 ,  B44C1/17 ,  C03C17/34 ,  C03C17/42 ,  H01L51/40 ,  H01L51/50 ,  H01L51/56 ,  H05B33/10 ,  C23F1/00 ,  B44C1/22 ,  C03C15/00 ,  H01L21/469

CPC分类号： C03C17/42 ,  B44C1/1733 ,  C03C17/3405 ,  H01L51/0013 ,  H01L51/56

摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.

摘要翻译： 图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序 具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。 图案成膜装置包括片材供应装置，按压装置和基板输送装置。 可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

公开(公告)号：US06833600B2

公开(公告)日：2004-12-21

申请号：US10252390

申请日：2002-09-24

申请人： Jun Fujinawa ,  Junji Nakada

发明人： Jun Fujinawa ,  Junji Nakada

IPC分类号： H01L310232

CPC分类号： G02B1/115 ,  G02B1/113

摘要： The optical component includes a substrate made of a resin material, a silicon oxide film formed on a surface of the substrate, and a multilayer light reflection preventing film formed on the silicon oxide film, and having at least one layer of a low-refractive-index material and at least one layer of a high-refractive-index material being alternately formed. The silicon oxide film is thick and/or formed by introducing oxygen during film forming by vacuum deposition so that a preset elasticity is imparted to the silicon oxide film. Other optical component includes a substrate made of a resin material and a plurality of films formed by vacuum deposition, and directions of internal stresses in each adjacent pair of the plurality of films are different from each other or a thickness of an impurity existing on a surface of the substrate is 0.2 nm or less. The plurality of films are formed by performing melting of film forming materials other than a film forming material for a film formed on the surface of the substrate after the film is formed on the surface of the substrate.

摘要翻译： 光学部件包括由树脂材料制成的基板，形成在基板的表面上的氧化硅膜和形成在氧化硅膜上的多层光反射防止膜，并且具有至少一层低折射率膜， 折射率材料和交替形成的至少一层高折射率材料层。 氧化硅膜通过在成膜期间通过真空沉积引入氧来形成和/或形成，从而赋予氧化硅膜预定的弹性。 其他光学部件包括由树脂材料制成的基板和通过真空沉积形成的多个膜，并且每个相邻的多个膜中的内部应力的方向彼此不同或存在于表面上的杂质的厚度 的基板为0.2nm以下。 在膜形成在基板的表面上之后，通过对形成在基板表面上的膜的成膜材料以外的成膜材料进行熔融而形成多个膜。