公开(公告)号：US20090206707A1

公开(公告)日：2009-08-20

申请号：US12378139

申请日：2009-02-11

申请人： Masato Iyoki

发明人： Masato Iyoki

IPC分类号： H01L41/047

CPC分类号： H01L41/092 ,  G01Q10/04

摘要： The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.

摘要翻译： 该圆柱形压电致动器包括一个压电元件，该压电元件至少在圆筒形的内周面和外周面中设置电极，驱动电源驱动该压电元件。 并且压电元件的外侧电极覆盖基本圆周的外表面整体，并且其连接到接地电位，并且内周边表面中的电极连接以驱动电源。

公开(公告)号：US20080061232A1

公开(公告)日：2008-03-13

申请号：US11842735

申请日：2007-08-21

申请人： Masato Iyoki ,  Masatsugu Shigeno

发明人： Masato Iyoki ,  Masatsugu Shigeno

IPC分类号： G01N13/16 ,  G01B7/34

CPC分类号： G01Q10/04 ,  G01Q30/025

摘要： An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.

摘要翻译： 一种扫描探针显微镜的微动机构，其特征在于，能够高精度地进行测量，同时通过探针增强扫描速度，以及包括该探针显微镜的扫描探针显微镜。 提供在具有用于安装样品S的载物台（16）的扫描探针显微镜（SPM）（1）中的扫描探针显微镜的微动机构和靠近或接触样品表面的探针（20） S，其特征在于，所述微动机构包括独立设置的第一驱动部和第二驱动部，具有所述第一驱动部的第一驱动部和所述第一驱动部的所述探针（20）在X 方向Y方向与样品S的表面平行并且彼此交叉，并且具有第二驱动部分的台阶微动机构（27）和由第二驱动部分在Z方向垂直于 样品S的表面

公开(公告)号：US20080049223A1

公开(公告)日：2008-02-28

申请号：US11840549

申请日：2007-08-17

申请人： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

发明人： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

IPC分类号： G01J4/00 ,  G01B11/14 ,  G01N21/47

CPC分类号： G01Q20/02

摘要： The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

摘要翻译： 光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。

公开(公告)号：US07241987B2

公开(公告)日：2007-07-10

申请号：US11196104

申请日：2005-08-03

申请人： Yuika Saito ,  Takashi Murakami ,  Satoshi Kawata ,  Yasushi Inoue ,  Kazuhito Tsukagoshi ,  Masato Iyoki

发明人： Yuika Saito ,  Takashi Murakami ,  Satoshi Kawata ,  Yasushi Inoue ,  Kazuhito Tsukagoshi ,  Masato Iyoki

IPC分类号： H01J3/14 ,  H01J5/16 ,  H01J40/14 ,  G01N23/00 ,  G21K7/00

CPC分类号： G01N21/658 ,  G01N2021/656 ,  G01Q60/22 ,  Y10S977/849 ,  Y10S977/862

摘要： In a manufacture of a probe for a scattering type near-field microscope, there is provided a method of coating, with a high reproducibility, uniform metal particles efficiently inducing a surface enhanced Raman scattering. It has been adapted such that, in the probe for the scattering type near-field microscope, one part or all of the probe due to an interaction of at least an evanescent field is coated by metal particles which don't mutually adhere and have a particle diameter of 10 nm or larger and 50 nm or smaller in radius of curvature.

摘要翻译： 在用于散射型近场显微镜的探针的制造中，提供了一种以高再现性涂覆均匀的金属颗粒有效地引起表面增强的拉曼散射的方法。 已经适应使得在用于散射型近场显微镜的探针中，由至少一个消逝场的相互作用引起的探针的一部分或全部被不相互粘附的金属颗粒涂覆，并且具有 粒径为10nm以上且50nm以下的曲率半径。

公开(公告)号：US20070104079A1

公开(公告)日：2007-05-10

申请号：US11595184

申请日：2006-11-09

申请人： Masatsugu Shigeno ,  Masato Iyoki

发明人： Masatsugu Shigeno ,  Masato Iyoki

IPC分类号： G11B9/00

CPC分类号： G01Q60/32 ,  G01Q70/04

摘要： The vibration-type cantilever holder for fastening a cantilever opposed to a sample, supported on a main body part at only its base end and having a probe on its leading end. The holder includes: a cantilever-attaching stand on which the main body part is placed and fastened with the cantilever tilted at a predetermined angle with respect to the sample; a first vibration source fastened to the cantilever-attaching stand and vibrating with a phase and an amplitude depending on a predetermined waveform signal; a holder main body to which the first vibration source is fastened; and a second vibration source fastened to at least one location on the holder main body, and generating vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to vibrational characteristics of only the cantilever by counteracting additional vibrations.

摘要翻译： 用于紧固与样品相对的悬臂的振动式悬臂支架，仅在其基端支撑在主体部分上，并且在其前端具有探针。 所述支架包括：悬臂安装台，所述主体部分放置在所述支架上，并以相对于所述样品以预定角度倾斜的所述悬臂固定; 第一振动源，其紧固到所述悬臂安装台，并且根据预定波形信号以相位和振幅振动; 固定有第一振动源的支架主体; 以及第二振动源，其紧固到所述保持器主体上的至少一个位置，并且产生振动以将从所述第一振动源行进的振动偏移到所述悬臂安装支架和保持器主体。 支架允许悬臂根据仅悬臂的振动特性通过抵消额外的振动而振动。

公开(公告)号：US07973942B2

公开(公告)日：2011-07-05

申请号：US11841445

申请日：2007-08-20

申请人： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe ,  Masatsugu Shigeno

发明人： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe ,  Masatsugu Shigeno

IPC分类号： G01B11/14 ,  G01B11/30 ,  G01N21/55 ,  G01N23/00 ,  G01N21/86 ,  G21K7/00 ,  G01V8/00 ,  G01Q20/02

CPC分类号： G01B11/024 ,  G01Q20/02

摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.

摘要翻译： 提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性， 可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。 在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度 以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率 可以使光电检测器变得可变。

公开(公告)号：US20100205697A1

公开(公告)日：2010-08-12

申请号：US12700236

申请日：2010-02-04

申请人： Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

发明人： Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

IPC分类号： G01Q10/00

CPC分类号： G01Q10/06

摘要： In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.

摘要翻译： 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。

公开(公告)号：US20100154085A1

公开(公告)日：2010-06-17

申请号：US11887348

申请日：2006-03-30

申请人： Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

发明人： Kenichi Maruyama ,  Koji Suzuki ,  Masato Iyoki

IPC分类号： G01Q70/14 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q60/60

CPC分类号： G01Q60/06 ,  G01Q60/60

摘要： A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed. A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope. Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.

摘要翻译： 公开了包括原子力显微镜和近场光学显微镜并且能够进行电化学测量并且用于显微镜的悬臂的显微镜。 用作原子力显微镜的探针的尖锐透光材料涂覆有金属层; 金属层进一步涂覆有绝缘层; 绝缘层仅在远端被去除以暴露金属层; 使用轻微暴露的金属层作为工作电极; 该探针不仅可以用作原子力显微镜和近场光学显微镜的探针，而且可以用作电化学显微镜的电极。 因此，显微镜可以具有原子力显微镜，近场光学显微镜和电化学显微镜的功能。

公开(公告)号：US07170054B2

公开(公告)日：2007-01-30

申请号：US11199290

申请日：2005-08-08

申请人： Masato Iyoki ,  Masatsugu Shigeno

发明人： Masato Iyoki ,  Masatsugu Shigeno

IPC分类号： G01N13/16 ,  G01B5/28

CPC分类号： G01Q60/34 ,  G01Q70/02

摘要： A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

摘要翻译： 提供具有悬臂支架的扫描探针显微镜，其通过可在有限空间中配置的小尺寸振动器提供悬臂极大幅度，并且即使在诸如液体的高粘性阻力的环境中也能稳定地操作。 悬臂的悬臂底部固定在扫描探针显微镜悬臂支架的固定部分上。 振动器安装在固定部分上。 当确定前侧是靠近探头的一侧，并且后侧是沿着悬臂的纵向方向靠近固定部分的支撑部分的一侧时，振动器使前侧和后侧 将悬臂支架的一部分在与样品表面正交的平面内的相反方向彼此固定，以使悬臂在液体中振动。

公开(公告)号：US20050231066A1

公开(公告)日：2005-10-20

申请号：US11045916

申请日：2005-01-28

申请人： Masato Iyoki ,  Akihiko Hidaka ,  Kazutoshi Watanabe

发明人： Masato Iyoki ,  Akihiko Hidaka ,  Kazutoshi Watanabe

IPC分类号： G01B7/16 ,  G01B7/34 ,  G01B21/30 ,  G01L1/22 ,  G01N37/00 ,  G01Q10/00 ,  G01Q10/04 ,  H01L41/04 ,  H01L41/09

CPC分类号： G01Q10/04 ,  Y10S977/872

摘要： The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.

摘要翻译： 本发明提供了一种用于具有高刚性和高测量精度的扫描探针显微镜的精细调节机构，其中可以安装在小空间中的应变片位移传感器被布置成实现温度补偿。 由压电元件构成的微调机构具有至少两片电极。 其中一个电极被配置为没有施加电压的虚拟电极，另一个电极被配置为当施加电压时产生应变的有源电极。 有源电极和虚拟电极均设置有一个或两个电阻器，桥接电路由电阻器构成。