摘要:
A method of manufacturing a semiconductor storage device includes providing an opening portion in a plurality of positions in an insulating film formed on a silicon substrate, and thereafter forming an amorphous silicon film on the insulating film, in which the opening portions are formed, and in the opening portions. Then, trenches are formed to divide the amorphous silicon film, in the vicinity of a midpoint between adjacent opening portions, into a portion on one opening portion side and a portion on the other opening portion side. Next, the amorphous silicon film, in which the trenches are formed, is annealed and subjected to solid-phase crystallization to form a single crystal with the opening portions used as seeds, and thereby a silicon single-crystal layer is formed. Then, a memory cell array is formed on the silicon single-crystal layer.
摘要:
According to the present invention, there is provided a selectivity monitoring method in a selective film growth method of selectively growing a film in a predetermined region on a semiconductor substrate, comprising: selectively growing the film on a surface of the semiconductor substrate while measuring temperature of the surface of the semiconductor substrate by at least one pyrometer placed in a non-contact state above the surface of the semiconductor substrate; and determining that selectivity of the growth of the film has decreased, when the temperature changes from a predetermined value or changes from a predetermined angle in a graph showing change of the temperature during film formation.
摘要:
A laminate film has a clear layer (B) comprising an acrylic-based polymer (B1) having at least one longer unsaturated double bond group and at least one shorter unsaturated double bond group as side chains, and having a weight-average molecular weight not less than 50,000 but not more than 500,000, the longer unsaturated double bond group introduced in the acrylic-based polymer (B1) by a long-chain unsaturated carboxylic acid having a molecular weight of 150 or more, and the shorter unsaturated double bond group introduced in the acrylic-based polymer (B1) by a short-chain unsaturated carboxylic acid having a molecular weight of less than 150. Compared with laminate films prepared by spray coating, dip coating, or other coating methods, this laminate film is excellent in processability, coating film properties, and ornamental properties. Thus, an article can be excellently decorated with the laminate film provided by the present invention.
摘要:
A semiconductor element of this invention includes a drift layer of a first conductivity type formed on a semiconductor substrate of the first conductivity type, a well layer of a second conductivity type selectively formed in the surface of the drift layer, a source layer of the first conductivity type selectively formed in the surface of the well layer, a trench formed to reach at least the inside of the drift layer from the surface of the source layer through the well layer, a buried electrode formed in the trench through a first insulating film, and a control electrode formed on the drift layer, the well layer, and the source layer through a second insulating film.
摘要:
A semiconductor element of this invention includes a drift layer of a first conductivity type formed on a semiconductor substrate of the first conductivity type, a well layer of a second conductivity type selectively formed in the surface of the drift layer, a source layer of the first conductivity type selectively formed in the surface of the well layer, a trench formed to reach at least the inside of the drift layer from the surface of the source layer through the well layer, a buried electrode formed in the trench through a first insulating film, and a control electrode formed on the drift layer, the well layer, and the source layer through a second insulating film.
摘要:
A process for producing methanol or mixed alcohol which comprises reacting a synthesis gas containing hydrogen and carbon monoxide and/or carbon dioxide in a fluidized catalyst bed.Catalyst particles having an average particle diameter of not more than 150 microns and a particle density of at least 1.7 g/cm.sup.3 are used as the fluidized catalyst.The catalyst particles are contacted with the synthesis gas at a superficial linear velocity of at least 0.2 m/sec. under a pressure of 40 to 200 atmospheres.
摘要翻译:一种生产甲醇或混合醇的方法,其包括在流化催化剂床中使含氢和一氧化碳和/或二氧化碳的合成气反应。 作为流化催化剂,使用平均粒径为150μm以下,粒子密度为1.7g / cm 3以上的催化剂粒子。 催化剂颗粒以至少0.2m / sec的表观线速度与合成气体接触。 在40至200个大气压的压力下。
摘要:
A water-borne primer coating composition including a water-borne non-chlorinated polyolefin resin (A), a water-borne polyurethane resin (B), a water-borne epoxy resin (C) and an internally crosslinked acrylic particle emulsion (D), wherein the content of resin (A) is 15 to 60%, the content of resin (B) is 10 to 50%, the content of resin (C) is 20 to 50%, and the content of emulsion (D) is 5 to 20%, all by weight on the solid equivalent basis in 100% by weight of the total amount of resin (A), resin (B), resin (C) and emulsion (D), and resin (A) is a polypropylene resin having crystallinity of 35 to 55% and a weight average molecular weight of 50000 to 200000. The composition can achieve an adhesion property to a substrate, gasohol resistance, inhibition of peeling of a multilayer coating film in washing by high pressure cleaning and moisture resistance.
摘要:
An impurity is ion-implanted into the major surface of an Si substrate having a bulk microdefect density of 5×106 to 5×107 cm−3, a bulk microdefect size smaller than 100 nm, and a dissolved oxygen concentration of 1.1×1018 to 1.2×1018 cm−3. The Si substrate then undergoes ultra-rapid thermal annealing whose heating/cooling rate is higher than 1×105° C./sec, thereby electrically activating the impurity to form at least a partial impurity diffusion layer of a semiconductor element.
摘要翻译:将杂质离子注入到具有体积微密度为5×10 -6至5×10 -7 cm -3以下的Si衬底的主表面中, 体积微观尺寸小于100nm,溶解氧浓度为1.1×10 18至1.2×10 -8 cm -3。 然后,Si衬底经历其加热/冷却速率高于1×10 5℃/秒的超快速热退火,从而电激活杂质以形成半导体的至少部分杂质扩散层 元件。
摘要:
As and B are implanted to side surfaces of trenches 3 by a rotation ion implanting method, and by using a difference between these impurities in diffusion coefficient, the structure in which an n−-type epitaxial Si layer is interposed between trenches 3 is converted into a semiconductor structure consisting of n-type pillar layer 5/p-type pillar layer 4/n-type pillar layer 5 lining up. The structure can function substantially the same role as that of a super junction structure.
摘要:
A semiconductor element of this invention includes a drift layer of a first conductivity type formed on a semiconductor substrate of the first conductivity type, a well layer of a second conductivity type selectively formed in the surface of the drift layer, a source layer of the first conductivity type selectively formed in the surface of the well layer, a trench formed to reach at least the inside of the drift layer from the surface of the source layer through the well layer, a buried electrode formed in the trench through a first insulating film, and a control electrode formed on the drift layer, the well layer, and the source layer through a second insulating film.