公开(公告)号：USRE41975E1

公开(公告)日：2010-11-30

申请号：US10732888

申请日：1996-10-14

申请人： Takashi Ishigami ,  Koichi Watanabe ,  Akihisa Nitta ,  Toshihiro Maki ,  Noriaki Yagi

发明人： Takashi Ishigami ,  Koichi Watanabe ,  Akihisa Nitta ,  Toshihiro Maki ,  Noriaki Yagi

IPC分类号： H01L21/20

CPC分类号： H01L21/32051 ,  C22C21/00 ,  C23C14/14 ,  C23C14/165 ,  C23C14/3414 ,  G02F2001/136295 ,  H01L21/2855 ,  H01L23/53214 ,  H01L23/53219 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/16152 ,  H01L2924/181 ,  H03H9/14538 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

摘要： An interconnector line of thin film comprising 0.001 to 30 at % of at least one kind of a first element capable of constituting an intermetallic compound of aluminum and/or having a higher standard electrode potential than aluminum, for example, at least one kind of the first element selected from Y, Sc, La, Ce, Nd, Sm, Gd, Tb, Dy, Er, Th, Sr, Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Tc, Re, Fe, Co, Ni, Pd, Ir, Pt, Cu, Ag, Au, Cd, Si, Pb and B; and one kind of a second element selected from C, O, N and H in a proportion of 0.01 at ppm to 50 at % of the first element, with the balance comprising substantially Al. In addition to having low resistance, such an Al interconnector line of thin film can prevent the occurrence of hillocks and the electrochemical reaction with an ITO electrode. The interconnector line of thin film can be obtained by sputtering in a dust-free manner by using a sputter target having a similar composition.

摘要翻译： 包含0.001〜30原子％的至少一种能够构成铝的金属间化合物和/或具有比铝更高的标准电极电位的第一元素的互连线，例如至少一种 选自Y，Sc，La，Ce，Nd，Sm，Gd，Tb，Dy，Er，Th，Sr，Ti，Zr，V，Nb，Ta，Cr，Mo，W，Mn，Tc，Re， Fe，Co，Ni，Pd，Ir，Pt，Cu，Ag，Au，Cd，Si，Pb和B; 和一种选自C，O，N和H的第二元素，其比例为0.01〜100原子％的比例，余量基本上为Al。 除了具有低电阻之外，这种薄膜的Al互连线可以防止发生小丘和与ITO电极的电化学反应。 可以通过使用具有相似组成的溅射靶以无尘的方式溅射来获得薄膜的互连线。

公开(公告)号：US06329275B1

公开(公告)日：2001-12-11

申请号：US09051567

申请日：1998-04-10

申请人： Takashi Ishigami ,  Koichi Watanabe ,  Akihisa Nitta ,  Toshihiro Maki ,  Noriaki Yagi

发明人： Takashi Ishigami ,  Koichi Watanabe ,  Akihisa Nitta ,  Toshihiro Maki ,  Noriaki Yagi

IPC分类号： H01L2120

CPC分类号： H01L21/32051 ,  C22C21/00 ,  C23C14/14 ,  C23C14/165 ,  C23C14/3414 ,  G02F2001/136295 ,  H01L21/2855 ,  H01L23/53214 ,  H01L23/53219 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/16152 ,  H01L2924/181 ,  H03H9/14538 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

摘要： An interconnector line of thin film comprising 0.001 to 30 at % of at least one kind of a first element capable of constituting an intermetallic compound of aluminum and/or having a higher standard electrode potential than aluminum, for example, at least one kind of the first element selected from Y, Sc, La, Ce, Nd, Sm, Gd, Tb, Dy, Er, Th, Sr, Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Tc, Re, Fe, Co, Ni, Pd, Ir, Pt, Cu, Ag, Au, Cd, Si, Pb and B; and one kind of a second element selected from C, O, N and H in a proportion of 0.01 at ppm to 50 at % of the first element, with the balance comprising substantially Al. In addition to having low resistance, such an Al interconnector line of thin film can prevent the occurrence of hillocks and the electrochemical reaction with an ITO electrode. The interconnector line of thin film can be obtained by sputtering in a dust-free manner by using a sputter target having a similar composition.

摘要翻译： 包含0.001〜30原子％的至少一种能够构成铝的金属间化合物和/或具有比铝更高的标准电极电位的第一元素的互连线，例如至少一种 选自Y，Sc，La，Ce，Nd，Sm，Gd，Tb，Dy，Er，Th，Sr，Ti，Zr，V，Nb，Ta，Cr，Mo，W，Mn，Tc，Re， Fe，Co，Ni，Pd，Ir，Pt，Cu，Ag，Au，Cd，Si，Pb和B; 和一种选自C，O，N和H的第二元素，其比例为0.01〜100原子％的比例，余量基本上为Al。 除了具有低电阻之外，这种薄膜的Al互连线可以防止发生小丘和与ITO电极的电化学反应。 可以通过使用具有相似组成的溅射靶以无尘的方式溅射来获得薄膜的互连线。

公开(公告)号：US5530467A

公开(公告)日：1996-06-25

申请号：US689285

申请日：1991-06-19

申请人： Takashi Ishigami ,  Mituo Kawai ,  Atsuko Iida

发明人： Takashi Ishigami ,  Mituo Kawai ,  Atsuko Iida

IPC分类号： C23C14/34 ,  H01C17/12 ,  B41J2/335

CPC分类号： C23C14/3414 ,  H01C17/12

摘要： A sputtering target comprises an oxide containing niobium, a silicide containing niobium and silicon oxide substantially for the rest. The sputtering target is formed e.g. by reactive sintering a powdery niobium or a powdery niobium alloy containing silicon oxide in the range of 15 to 70 mol % by mole ratio. A film resistor formed by using the sputtering target exhibits high specific resistance, good stabilities of resistance and a film composition and excellent reproducibility and is used as a heat generating resistor in e.g. a thermal printer head.

摘要翻译： PCT No.PCT / JP91 / 00119 Sec。 371日期1991年6月19日 102（e）1991年6月19日PCT 1991年1月31日PCT PCT。 公开号WO91 / 11328 日期为1991年8月8日。溅射靶包括含有铌的氧化物，含有铌的硅化物和基本上为其余的氧化硅。 溅射靶例如形成。 通过反应性烧结含有氧化硅的粉末状铌或含有氧化硅的粉末状铌合金的比例为15〜70摩尔％。 通过使用溅射靶形成的薄膜电阻器具有高电阻率，良好的电阻稳定性和薄膜组成以及优异的再现性，并且用作例如发热电阻器。 热敏打印头。

公开(公告)号：US6165607A

公开(公告)日：2000-12-26

申请号：US101455

申请日：1998-07-17

申请人： Takashi Yamanobe ,  Naomi Fujioka ,  Takashi Ishigami ,  Nobuo Katsui ,  Hiromi Fuke ,  Kazuhiro Saito ,  Hitoshi Iwasaki ,  Masashi Sahashi ,  Takashi Watanabe

发明人： Takashi Yamanobe ,  Naomi Fujioka ,  Takashi Ishigami ,  Nobuo Katsui ,  Hiromi Fuke ,  Kazuhiro Saito ,  Hitoshi Iwasaki ,  Masashi Sahashi ,  Takashi Watanabe

IPC分类号： C23C14/06 ,  C23C14/14 ,  C23C14/34 ,  G11B5/39 ,  H01F10/32 ,  H01F41/18 ,  H01F41/30 ,  H01L43/12 ,  G11B5/66

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  B82Y40/00 ,  C23C14/14 ,  C23C14/3414 ,  G11B5/3903 ,  G11B5/3932 ,  G11B2005/3996 ,  H01F10/3218 ,  H01F10/3268 ,  H01F41/183 ,  H01F41/302 ,  H01L43/12 ,  Y10S428/90 ,  Y10T428/1121 ,  Y10T428/26 ,  Y10T428/265

摘要： A sputtering target consisting essentially of Mn and at least one kind of R element selected from a group of Ni, Pd, Pt, Co, Rh, Ir, V, Nb, Ta, Cu, Ag, Au, Ru, Os, Cr, Mo, W, and Re. The sputtering target, at least as a part of target texture, comprises one member selected from a group of an alloy phase and a compound phase formed between the R element and Mn. In addition, oxygen content in the target is 1 weight % or less (including 0). With such a sputtering target, an anti-ferromagnetic material film consisting of RMn alloy excellent in corrosion resistivity and thermal performance can be stabilized in its film composition and film quality. By employing the anti-ferromagnetic material film, when an exchange coupling film is formed by stacking the anti-ferromagnetic material film and the ferromagnetic material film, sufficient exchange coupling force is obtained stably. Such an exchange coupling film can be used in a magneto-resistance effect element and the like.

摘要翻译： PCT No.PCT / JP97 / 04232 Sec。 371日期：1998年7月17日 102（e）日期1998年7月17日PCT 1997年11月20日PCT公布。 公开号WO98 / 22636 日期1998年5月28日一种主要由Mn和选自Ni，Pd，Pt，Co，Rh，Ir，V，Nb，Ta，Cu，Ag，Au，Ru中的至少一种R元素组成的溅射靶， Os，Cr，Mo，W和Re。 至少作为目标结构的一部分的溅射靶包括选自由R元素和Mn之间形成的合金相和化合物相的组中的一种。 此外，靶中的氧含量为1重量％以下（包括0）。 通过这样的溅射靶，可以在其膜组成和膜质量中稳定由耐腐蚀性和耐热性优异的RMn合金构成的反铁磁性材料膜。 通过采用反铁磁材料膜，当通过堆叠反铁磁材料膜和铁磁材料膜形成交换耦合膜时，稳定地获得了充分的交换耦合力。 这种交换耦合膜可用于磁阻效应元件等。

公开(公告)号：US09369018B2

公开(公告)日：2016-06-14

申请号：US13702260

申请日：2011-06-06

申请人： Yuichiro Tanaka ,  Takashi Ishigami

发明人： Yuichiro Tanaka ,  Takashi Ishigami

IPC分类号： H02K15/00 ,  H02K3/04 ,  H02K15/095 ,  H02K15/04 ,  H02K3/28 ,  H02K3/18

CPC分类号： H02K3/04 ,  H02K3/18 ,  H02K3/28 ,  H02K15/045 ,  H02K15/095 ,  Y10T29/49009 ,  Y10T29/49073

摘要： A manufacturing method for manufacturing a rotating electrical machine equipped with a stator that includes a continuously wound coil unit achieved by continuously winding concentrated winding-type coils via cross wires, with coil wire having a rectangular section. The manufacturing method includes: mounting core segments, at which the coil wire is yet to be wound, at a core segment forward/backward moving mechanism; winding the coil wire with a winding track secured by driving the core segments forward/backward via the core segment forward/backward moving mechanism; setting faces of the coil wire in alignment by holding orientations of winding start wire and winding end wire at the concentrated winding-type coils at approximately 90° via open/close type chucks each equipped with a chuck forward/backward moving mechanism, with the open/close type chucks mounted at the core segment forward/backward moving mechanism; and forming the continuously wound coil unit by driving the core segments forward/backward via the core segment forward/backward moving mechanism, driving the open/close type chucks forward/backward and opening/closing the open/close type chucks.

摘要翻译： 一种制造具有定子的旋转电机的制造方法，该定子包括通过交叉线连续卷绕集中绕组线圈而实现的连续卷绕的线圈单元，其具有矩形截面的线圈线。 制造方法包括：在芯部前进/后退移动机构上安装线圈线未被缠绕的芯部段; 通过经由芯段前进/后退移动机构将线芯段向前/向后驱动而固定的缠绕轨道卷绕线圈线; 通过使夹紧前后移动机构的开闭型卡盘将保持卷绕起始线和卷绕端部线的卷绕起始线和卷绕端部线的方向保持在集中绕线型线圈大约90°处， /关闭型卡盘安装在芯段前进/后退移动机构; 并且通过芯部前进/后退移动机构向前/向后驱动芯部段，形成连续卷绕的线圈单元，驱动打开/关闭型卡盘向前/向后并打开/关闭打开/关闭型卡盘。

公开(公告)号：US08471428B2

公开(公告)日：2013-06-25

申请号：US12846432

申请日：2010-07-29

申请人： Takashi Naganawa ,  Kenji Miyata ,  Takashi Ishigami ,  Yoshihisa Ishikawa

发明人： Takashi Naganawa ,  Kenji Miyata ,  Takashi Ishigami ,  Yoshihisa Ishikawa

IPC分类号： H02K3/28

CPC分类号： H02K3/28 ,  H02K19/34

摘要： A rotating electrical machine includes a rotor, in which a plurality of magnetic poles are provided in circumferential direction, and a stator, within which the rotor is disposed. In the stator, two stator magnetic poles are formed by winding coils of one phase and by a stator core of the stator within 360° of electrical angle defined by the magnetic poles of the rotor. The coils that form respective stator magnetic poles have angular widths in circumferential direction of less than 180° of electrical angle, the coils that form the respective two stator magnetic poles are provided so as not to mutually overlap and are wound so that adjacent ones of the stator magnetic poles have mutually opposite polarities, and, in the stator, each winding of each coil consists of an external bridge wire, a turn portion, an internal bridge wire, and a turn portion, in that order.

摘要翻译： 旋转电机包括在圆周方向上设置有多个磁极的转子和设置转子的定子。 在定子中，两个定子磁极通过将一个相的线圈和定子的定子铁芯缠绕在由转子的磁极限定的电角度的360°内而形成。 形成各个定子磁极的线圈的圆周方向的角度宽度小于电角度的180°，形成相应的两个定子磁极的线圈被设置为不相互重叠并缠绕，使得相邻的 定子磁极具有相互相反的极性，并且在定子中，每个线圈的每个绕组按顺序由外部桥接线，匝部分，内部桥接线和匝部组成。

公开(公告)号：US08330318B2

公开(公告)日：2012-12-11

申请号：US12197085

申请日：2008-08-22

申请人： Yasuyuki Saito ,  Takashi Ishigami ,  Kenichi Nakayama ,  Akira Toba ,  Toru Mita

发明人： Yasuyuki Saito ,  Takashi Ishigami ,  Kenichi Nakayama ,  Akira Toba ,  Toru Mita

IPC分类号： H02K3/48

CPC分类号： H02K3/487 ,  H02K3/12 ,  H02K3/28 ,  H02K3/345 ,  H02K2203/09 ,  Y10T29/49009

摘要： A rotating electrical machine includes: a stator that has a stator core and a stator coil; and a rotor disposed rotatably on an inner circumferential side of the stator core. The stator core includes a plurality of slots opening on the inner circumferential side and the slots are each formed as an open slot with a width of an inner circumferential-side opening thereof ranging along a circumferential direction set substantially equal to or greater than a width of a bottom side measured along the circumferential direction. The stator further includes a slot insulator disposed between inner wall of each of the slots at the stator core and the stator coil and a holding member constituted with a nonmagnetic material and inserted in each of the slots at the stator core so as to hold the slot insulator between two side surfaces present along the circumferential direction at the slot. The stator is formed by winding the stator coil through the plurality of slots.

摘要翻译： 旋转电机包括：具有定子芯和定子线圈的定子; 以及可转动地设置在定子铁芯的内周侧的转子。 定子铁芯包括在内周侧开口的多个槽，并且槽各自形成为开口槽，其内周侧开口的宽度沿着圆周方向设置，该圆周方向设定为基本上等于或大于 沿圆周方向测量的底侧。 定子还包括设置在定子铁芯和定子线圈之间的每个槽的内壁之间的槽绝缘体，以及由非磁性材料构成并插入定子铁心中的每个槽中的保持构件，以便将该槽 两个侧表面之间的绝缘体沿着圆周方向在槽处存在。 定子通过将定子线圈卷绕在多个槽中而形成。

公开(公告)号：US20120038050A1

公开(公告)日：2012-02-16

申请号：US13280873

申请日：2011-10-25

申请人： Koichi WATANABE ,  Yasuo Kohsaka ,  Takashi Watanabe ,  Takashi Ishigami ,  Yukinobu Suzuki ,  Naomi Fujioka

发明人： Koichi WATANABE ,  Yasuo Kohsaka ,  Takashi Watanabe ,  Takashi Ishigami ,  Yukinobu Suzuki ,  Naomi Fujioka

IPC分类号： H01L23/532 ,  H01L21/768

CPC分类号： H01L21/76843 ,  C23C14/3414

摘要： A sputtering target consists of high purity Nb of which Ta content is 3000 ppm or less and oxygen content is 200 ppm or less. Dispersion of the Ta content in all the sputtering target is within ±30% as a whole target. Dispersion of the oxygen content is within ±80% as a whole target. According to such sputtering target, an interconnection film of low resistivity can be realized. In addition, each grain of Nb in the sputtering target has a grain diameter in the range of 0.1 to 10 times an average grain diameter and ratios of grain sizes of adjacent grains are in the range of 0.1 to 10. According to such sputtering target, giant dust can be largely suppressed from occurring. The sputtering target is suitable for forming a Nb film as liner material of an Al interconnection.

摘要翻译： 溅射靶由Ta含量为3000ppm以下，氧含量为200ppm以下的高纯Nb构成。 所有溅射靶中的Ta含量的分散在整个靶内的±30％以内。 氧含量的分散在整个目标的±80％以内。 根据这样的溅射靶，可以实现低电阻率的互连膜。 此外，溅射靶中的每个晶粒的晶粒直径在平均粒径的0.1〜10倍的范围内，相邻晶粒的晶粒比例在0.1〜10的范围内。根据这样的溅射靶， 巨大的尘埃可以大大的抑制发生。 溅射靶适合于形成作为Al互连的衬垫材料的Nb膜。

公开(公告)号：US07651941B2

公开(公告)日：2010-01-26

申请号：US11892925

申请日：2007-08-28

申请人： Takashi Ishigami

发明人： Takashi Ishigami

IPC分类号： H01L21/4763

CPC分类号： H01L21/76844 ,  H01L21/76805 ,  H01L21/76814 ,  H01L21/76849 ,  H01L21/76886

摘要： Provided are: a method of manufacturing semiconductor device which has multilayer interconnection in a damascene structure and a conductive barrier film such as CoWP film, and which has more excellent electric characteristics than a conventional one. To this end, when a via hole reaching a lower wiring is formed, a reaction layer formed between a conductive barrier film and the lower wiring and remaining on the surface of the lower wiring is removed. Thus, at an interface where a lower surface of the via and the lower wiring are joined, the reaction layer, formed between the conductive barrier film and the lower wiring, does not exist, so that the via resistance can be sufficiently reduced.

摘要翻译： 提供：一种制造在镶嵌结构中具有多层互连并且具有诸如CoWP膜的导电阻挡膜的半导体器件的方法，并且具有比常规的更优异的电特性。 为此，当形成到达下布线的通孔时，除去形成在导电阻挡膜和下布线之间并保留在下布线表面上的反应层。 因此，在通孔的下表面和下布线接合的界面处，形成在导电阻挡膜和下布线之间的反应层不存在，从而可以充分降低通孔电阻。

公开(公告)号：US20090200888A1

公开(公告)日：2009-08-13

申请号：US12370307

申请日：2009-02-12

申请人： Yuichiro Tanaka ,  Takashi Ishigami ,  Kenichi Nakayama ,  Yasuyuki Saito

发明人： Yuichiro Tanaka ,  Takashi Ishigami ,  Kenichi Nakayama ,  Yasuyuki Saito

IPC分类号： H02K3/28

CPC分类号： H02K3/28 ,  H02K3/12 ,  H02K15/0081

摘要： Each pair of coils mutually connected in a stator winding is arranged in a fashion that a first coil of each pair of coils has an inner-circumferential-side coil terminal (212) led out from an inner-circumferential-side slot position in the direction of a coil end (220) of the stator winding, and that a second coil of each pair of coils has an outer-circumferential-side coil terminal (211) led out from an outer-circumferential-side slot position in the direction of the coil end (220) of the stator winding for connection to the inner-circumferential-side coil terminal (212), wherein there is provided a coil terminal connection structure in which the inner-circumferential-side coil terminal (212) is connected to the outer-circumferential-side coil terminal (211) across the coil end (220), and joint parts (211a, 212a) thereof are bent close to the coil end (220).

摘要翻译： 互相连接在定子绕组中的每对线圈以每一对线圈的第一线圈的内周侧线圈端子（212）的方式配置，内周侧线圈端子（212）从内周侧槽位置朝向 定子绕组的线圈端部（220），并且每对线圈的第二线圈具有从外周侧槽位置沿着该方向从外周侧槽位置引出的外周侧线圈端子（211​​） 用于与内周侧线圈端子（212）连接的定子绕组的线圈端部（220），其中，设置有内周侧线圈端子（212）连接到所述内周侧线圈端子 跨越线圈端（220）的外周侧线圈端子（211​​）及其接合部（211a，212a）在线圈端（220）附近弯曲。