摘要:
A compound semiconductor crystal growing method includes the steps of (a) setting a substrate having a substrate surface in a reaction chamber, and (b) supplying a material gas of a compound semiconductor which is to be grown in the form of a crystal on the substrate surface within the reaction chamber and a control gas to the reaction chamber under a predetermined condition, and controlling the supply of the control gas to control an adsorption rate of the material gas on the substrate surface. The control gas makes competitive adsorption with the material gas on the substrate surface but makes no chemical reaction such that no continual accumulation on the substrate surface occurs under the predetermined condition. The competitive adsorption is defined as a phenomenon in which the material gas and the control gas compete and become adsorped on the substrate surface.
摘要:
A method of growing a gallium arsenide single crystal layer on a silicon substrate comprises steps of growing a buffer layer of aluminum arsenide on the silicon substrate by atomic layer epitaxy, and growing the gallium arsenide single crystal layer on the buffer layer epitaxially.
摘要:
The present invention has an object to provide a filter device in which a filter is directly fixed to a container, thus eliminating the use of a filter frame. A fuel filter 6 of a fuel supply system 60 includes a filter element 22 for filtering fuel and a filter case 21 made of resin which houses the filter element 22. Ends 22b and 22c of the filter element 22 are directly fixed to an inner wall surface of the filter case 21 by welding. Further, the filter case 21 is formed, on the inner wall surface, with a groove 34 at each end of a weld part 36 in a longitudinal (vertical) direction. The groove 34 serves to receive a melted resin squeezed out from the weld part 36. To isolate the weld part 36 from a (filtering) body 22a of the filter element 22, protrusive ribs 32 and 33 are provided on the inner wall surface of the filter case 21.
摘要:
A throttle body comprising a main body defining a cylindrical intake air channel and including a valve member movable between an open and a fully closed position. The valve seal surface and a contact surface are configured such that the valve seal surface sealingly contacts with the corresponding contact surface when a fully closed position of the valve has been displaced due to contraction of one of the main body and the valve member. The valve seal surface and the contact surface of the valve member in the fully closed position are inclined by an angle. The contact angle of inclination gradually decreases from a first point located on a circumference of the periphery of the valve member resulting from a line perpendicular to an intersection of the central axis and the rotation axis to a second point that is proximate to the rotation axis of the valve member.
摘要:
A method of growing compound semiconductor epitaxial layer by an atomic layer epitaxy, comprises the steps of blowing on a predetermined surface a compound source material gas constituted by atoms having an ion polarity different from atoms constituting the predetermined surface so that the compound source material is adsorped on the predetermined surface in a non-decomposed state, and decomposing the adsorped compound source material on the predetermined surface into atoms constituting crystals at the predetermined surface so as to grow an atomic layer of atoms having the same ion polarity as the compound source material gas. The ion polarity of the atomic layer prevents adsorption of the compound source material after the atomic layer is grown.
摘要:
A throttle body comprising a main body defining a cylindrical intake air channel and including a valve member movable between an open and a fully closed position. The valve seal surface and a contact surface are configured such that the valve seal surface sealingly contacts with the corresponding contact surface when a fully closed position of the valve has been displaced due to contraction of one of the main body and the valve member. The valve seal surface and the contact surface of the valve member in the fully closed position are inclined by an angle. The contact angle of inclination gradually decreases from a first point located on a circumference of the periphery of the valve member resulting from a line perpendicular to an intersection of the central axis and the rotation axis to a second point that is proximate to the rotation axis of the valve member.
摘要:
A method of growing a gallium arsenide single crystal layer on a silicon substrate comprises steps of growing a buffer layer of aluminium arsenide on the silicon substrate by atomic layer epitaxy, and growing the gallium arsenide single crystal layer on the buffer layer epitaxially.
摘要:
A method of growing a gallium arsenide single crystal layer on a silicon substrate comprises steps of growing a buffer layer of aluminium arsenide on the silicon substrate by atomic layer epitaxy, and growing the gallium arsenide single crystal layer on the buffer layer epitaxially.
摘要:
A heterojunction between In-containing compound semiconductors in which the interface thereof is controlled at an atom level is provided by a process of atomic layer epitaxy (ALE) in which hydrogen gas is utilized as a carrier gas and as a purge gas for a separation of source gases. The time for which the purge gas is supplied can be utilized for controlling the ALE.
摘要:
A method of growing a group III-V compound semiconductor epitaxial layer on a substrate by use of atomic layer epitaxy grows an aluminum layer on one of {100}, (111)B, ( 111)B, (111)B, and (111)B planes of the substrate by supplying a quantity of aluminum amounting to at least two times a surface density in a group III-V compound semiconductor epitaxial layer or grows an aluminum layer on one of {110} planes of the substrate by supplying a quantity of aluminum amounting to at least three times the surface density in the group III-V compound semiconductor epitaxial layer, and grows a layer of a group V material on the aluminum layer by supplying a quantity of the group V material amounting to at least two or three times a surface density in the group III-V compound semiconductor epitaxial layer. The layer of the group V material and the aluminum layer constituting the group III-V compound semiconductor epitaxial layer.