Electron beam irradiating apparatus
    13.
    发明授权
    Electron beam irradiating apparatus 有权
    电子束照射装置

    公开(公告)号:US07518131B2

    公开(公告)日:2009-04-14

    申请号:US11385483

    申请日:2006-03-21

    IPC分类号: A61N5/00

    摘要: An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.

    摘要翻译: 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。

    Micro reactor
    14.
    发明申请
    Micro reactor 失效
    微反应堆

    公开(公告)号:US20050008545A1

    公开(公告)日:2005-01-13

    申请号:US10886258

    申请日:2004-07-06

    摘要: A micro reactor comprising: a first substrate comprising a predetermined number each of micro channels, reactors connected to micro channels at respective connection points, injection ports for feeding/receiving a sample solution, and discharge ports for recovering a sample solution after reaction from respective reactors; and a second substrate in which at least one micro pump is disposed so as to be faced to the injection ports and the discharge ports, the at least one micro pump being provided with a substrate including a cavity made of a ceramic in the inner surface thereof; a piezoelectric/electrostrictive operation section formed on the outer surface of the substrate, and at least two connection ports for feeding/receiving a sample solution in the cavity; and the micro reactor being formed integrally by laminating the first substrate and the second substrate.

    摘要翻译: 一种微反应器,包括:包含预定数量的每个微通道的第一基板,在相应连接点处连接到微通道的反应器,用于进料/接收样品溶液的注入口和用于从各个反应器反应后回收样品溶液的排出口 ; 以及第二基板,其中至少一个微泵设置成面对所述喷射口和所述排出口,所述至少一个微型泵设置有在其内表面中包括由陶瓷制成的空腔的基板 ; 形成在所述基板的外表面上的压电/电致伸缩操作部,以及用于在所述空腔内供给/接收样品溶液的至少两个连接端口; 并且所述微反应器通过层叠所述第一基板和所述第二基板而一体地形成。

    Electron beam irradiating apparatus
    16.
    发明申请
    Electron beam irradiating apparatus 有权
    电子束照射装置

    公开(公告)号:US20070040130A1

    公开(公告)日:2007-02-22

    申请号:US11385483

    申请日:2006-03-21

    IPC分类号: A61N5/00

    摘要: An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.

    摘要翻译: 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。

    Aluminum nitride sintered body, metal embedded article, electronic
functional material and electrostatic chuck
    18.
    发明授权
    Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 失效
    氮化铝烧结体,金属嵌入制品,电子功能材料和静电吸盘

    公开(公告)号:US6001760A

    公开(公告)日:1999-12-14

    申请号:US824560

    申请日:1997-03-25

    IPC分类号: C04B35/581 H01L21/683

    摘要: In AlN crystal grains constituting a sintered body, is contained: 150 ppm-0.5 wt. %, preferably at most 0.1 wt.%, of at least one rare earth element (as oxide thereof); at most 900 ppm, preferably at most 500 ppm of at least one metal impurity except rare earth elements; and preferably at least 0.5 wt. % of oxygen measured by an electron probe X-ray microanalyzer. The grains have an average grain diameter of preferably at least 3.0 .mu.m and show a main peak in the wavelength range of 350-370 nm of spectrum obtained by a cathode luminescence method. The sintered body composed of AlN crystal grains has a volume resistivity at room temperature of at most 1.0.times.10.sup.12 .OMEGA..multidot.cm.

    摘要翻译: 在构成烧结体的AlN晶粒中含有150ppm-0.5wt。 %,优选至多0.1重量%的至少一种稀土元素(作为其氧化物); 至少一个金属杂质除了稀土元素之外,最多900ppm,优选至多500ppm; 优选至少0.5wt。 通过电子探针X射线微量分析仪测量的氧的百分比。 晶粒的平均粒径优选为3.0μm以上,在通过阴极发光法得到的光谱的350〜370nm的波长范围内呈现主峰。 由AlN晶粒构成的烧结体的体积电阻率在室温下为1.0×10 12Ω以下,OMEGA×cm。