Distance measuring system utilizing an object with at least one inclined
surface
    11.
    发明授权
    Distance measuring system utilizing an object with at least one inclined surface 失效
    距离测量系统使用至少一个内置表面的对象

    公开(公告)号:US5122660A

    公开(公告)日:1992-06-16

    申请号:US671657

    申请日:1991-03-19

    IPC分类号: G01D5/38 G02B7/32 G11B7/085

    CPC分类号: G11B7/085 G01D5/38 G02B7/32

    摘要: A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.

    摘要翻译: 公开了一种用于测量两个相对移动的物体的相对移动距离的装置。 该装置包括形成在一个物体上的多个倾斜表面,并且沿相对移动的方向以预定间距排列,每个倾斜表面相对于相对移动的方向倾斜。 测量部分设置在另一物体上,用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离,并且检测部分检测两个物体在相对移动方向上的相对移动的距离 由测量部分测量的基础。

    Reading apparatus
    13.
    发明授权
    Reading apparatus 失效
    阅读器

    公开(公告)号:US4539482A

    公开(公告)日:1985-09-03

    申请号:US309380

    申请日:1981-10-07

    申请人: Noriyuki Nose

    发明人: Noriyuki Nose

    摘要: An apparatus for dividing an original surface having image information into a plurality of areas and reading the image information with the use of a photosensor through a plurality of imaging systems provided correspondingly to said plurality of areas. The imaging systems for imaging the image information of the original surface on the photosensor include zone plates.

    摘要翻译: 一种用于将具有图像信息的原始表面划分成多个区域并且通过与所述多个区域相对应地设置的多个成像系统通过使用光电传感器来读取图像信息的装置。 用于对光电传感器上原始表面的图像信息进行成像的成像系统包括区域板。

    Mask for lithography
    16.
    发明授权
    Mask for lithography 失效
    光刻面具

    公开(公告)号:US5262257A

    公开(公告)日:1993-11-16

    申请号:US3867

    申请日:1993-01-11

    IPC分类号: G03F1/22 G03F9/00

    CPC分类号: G03F1/22 G03F9/70

    摘要: A mask structure according to an aspect of the invention includes a base having a first zone for an alignment pattern and a second zone for a circuit pattern; an alignment pattern forming material with which the alignment pattern is formed in the first zone; and a circuit pattern forming material with which the circuit pattern is formed in the second zone; wherein the alignment pattern forming material and the circuit pattern forming material are different from each other.

    摘要翻译: 根据本发明的一个方面的掩模结构包括具有用于对准图案的第一区域和用于电路图案的第二区域的底座; 对准图案形成材料,其中在所述第一区域中形成所述对准图案; 以及在所述第二区域中形成所述电路图案的电路图案形成材料; 其中所述对准图案形成材料和所述电路图案形成材料彼此不同。

    Three-dimensional shape measuring apparatus
    18.
    发明授权
    Three-dimensional shape measuring apparatus 失效
    三维形状测量仪

    公开(公告)号:US5033856A

    公开(公告)日:1991-07-23

    申请号:US517514

    申请日:1990-04-30

    IPC分类号: G01B11/24

    CPC分类号: G01B11/24

    摘要: A three-dimensional shape measuring apparatus having a high performance and a reduced drive energy is disclosed. At least a portion of an in-focus state detection optical system having an internal light source is movable while maintaining a light path near an object lens of the optical system. A distance of movement of the movable portion which is moved with auto-focusing operation for an object is measured and the three-dimensional shape is measured precisely with a high stroke. An inclination angle measuring optical system which shares the light path near the object lens with the in-focus state detection optical system and has an internal light source is provided in a common casing. Thus, the distance of movement of the movable part of the in-focus state detection optical system and an inclination angle are simultaneously measured so that the three-dimensional shape can be more precisely measured.

    摘要翻译: 公开了具有高性能和降低的驱动能量的三维形状测量装置。 具有内部光源的聚焦状态检测光学系统的至少一部分可移动,同时保持靠近光学系统的物镜的光路。 测量用于物体的自动聚焦操作移动的可移动部分的移动距离,并且以高冲程精确地测量三维形状。 在共同的壳体内设置倾斜角度测量光学系统,该倾斜角度测量光学系统与聚焦状态检测光学系统共享物镜附近的光路并具有内部光源。 因此,可以同时测量对焦状态检测光学系统的可动部分的移动距离和倾斜角度,从而可以更精确地测量三维形状。

    Variable-focus optical device
    19.
    发明授权
    Variable-focus optical device 失效
    可变焦光学装置

    公开(公告)号:US4783153A

    公开(公告)日:1988-11-08

    申请号:US942791

    申请日:1986-12-17

    CPC分类号: G02B1/00 G02B26/0875 G02B3/14

    摘要: A variable-focus optical device comprises an elastomeric member having a gradient of shear modulus along its optical axis, and a deforming member having an aperture adapted for causing projection or sinking of the elastomeric member therethrough or thereat to deform the surface of the elastomeric member. The gradient of shear modulus is preferably one of continuously decreasing from the surface toward the inside of the elastomeric member. The gradient of shear modulus is provided by a concentration gradient of an inorganic substance such as silica dispersed in an elastomeric substance such as polysilioxane.

    摘要翻译: 可变焦光学装置包括具有沿其光轴的剪切模量梯度的弹性体构件,以及具有孔的变形构件,其适于使弹性构件穿过其中或在其上突出或下沉以使弹性体构件的表面变形。 剪切模量的梯度优选是从弹性体构件的表面向内部连续减小的梯度。 剪切模量的梯度由分散在诸如聚硅氧烷的弹性体物质中的无机物质如二氧化硅的浓度梯度提供。

    Device for splitting part of light incident on an image forming optical
system
    20.
    发明授权
    Device for splitting part of light incident on an image forming optical system 失效
    用于分离入射在成像光学系统上的一部分光的装置

    公开(公告)号:US4436398A

    公开(公告)日:1984-03-13

    申请号:US476398

    申请日:1983-03-22

    摘要: A device for splitting an incident light on an image forming optical system by a relief type diffraction grating. The device is constructed of a transparent substrate and a transparent filling layer having substantially the same refractive index as that of the transparent substrate, and the relief type diffraction grating is formed on the interface between the substrate and the filling layer. With such an arrangement, the reflectively diffracted light is detected by the photodetector without any undue influence in the image-formation based on the transmissively diffracted light.

    摘要翻译: 一种用于通过浮雕型衍射光栅将入射光分解在成像光学系统上的装置。 该装置由透明基板和与透明基板的折射率基本相同的透明填充层构成,并且浮雕型衍射光栅形成在基板和填充层之间的界面上。 通过这样的布置,由光检测器检测反射衍射光,而不会在基于透射衍射光的图像形成中产生任何不适当的影响。