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公开(公告)号：US07978337B2
公开(公告)日：2011-07-12
申请号：US12267077
申请日：2008-11-07
CPC分类号： G02B21/0004
摘要： In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.
摘要翻译： 在一个方面，本发明的特征在于包括使用显微镜将光引导到测试对象并将从测试对象反射的光引导到检测器的方法，其中光包括具有正交偏振态的分量，改变光路长度差 （OPD），在改变组件之间的OPD的同时获取来自检测器的干扰信号，并且基于所获取的干扰信号确定关于测试对象的信息。
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12.发明授权Interferometer and method for measuring characteristics of optically unresolved surface features 有权用于测量光学未解析表面特征的干涉仪和方法公开(公告)号：US07948636B2
公开(公告)日：2011-05-24
申请号：US12701690
申请日：2010-02-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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13.发明授权Interferometry for determining characteristics of an object surface, with spatially coherent illumination 有权用于确定物体表面特征的干涉测量，具有空间相干照明公开(公告)号：US07884947B2
公开(公告)日：2011-02-08
申请号：US11758252
申请日：2007-06-05
IPC分类号： G01B11/02
CPC分类号： G01B9/02027 , G01B9/02043 , G01B9/02044 , G01B9/02057 , G01B9/02074 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/45 , G01B2290/70 , G01N21/211
摘要： Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
摘要翻译： 公开了一种装置，其包括：干涉仪，其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面，并随后将其与参考光组合以形成干涉图案，所述测试和参考光为 源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件，被配置为将组合的光的至少一部分引导到检测器，使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。
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14.发明申请Interferometer and method for measuring characteristics of optically unresolved surface features 有权用于测量光学未解析表面特征的干涉仪和方法公开(公告)号：US20070046953A1
公开(公告)日：2007-03-01
申请号：US11525355
申请日：2006-09-21
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中，多个模型通过一系列与一个 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。
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15.发明申请公开(公告)号：US20050088663A1
公开(公告)日：2005-04-28
申请号：US10974466
申请日：2004-10-27
申请人： Peter De Groot , Xavier De Lega
发明人： Peter De Groot , Xavier De Lega
IPC分类号： G01B9/02 , G01B11/06 , G02F1/1333 , G02F1/1339
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/0207 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G02F1/13392 , G02F2001/133354
摘要： A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
摘要翻译： 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。
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公开(公告)号：US20050078319A1
公开(公告)日：2005-04-14
申请号：US10941651
申请日：2004-09-15
申请人： Peter De Groot
发明人： Peter De Groot
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译： 用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。 扫描低相干干涉信号包括两个或多个重叠的低相干干涉信号，每个干涉信号由相应的接口产生。 基于低相干干扰信号，确定至少一个接口的空间属性。 在某些情况下，确定是基于低相干干扰信号的子集而不是整个信号。 或者或另外，该确定可以基于模板，其可以指示用于获得低相干干扰信号的干涉仪的仪器响应。
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17.发明申请Methods and systems for interferometric analysis of surfaces and related applications 有权用于表面和相关应用的干涉测量分析的方法和系统公开(公告)号：US20050078318A1
公开(公告)日：2005-04-14
申请号：US10941649
申请日：2004-09-15
申请人： Peter De Groot
发明人： Peter De Groot
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译： 用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。 扫描低相干干涉信号包括两个或多个重叠的低相干干涉信号，每个干涉信号由相应的接口产生。 基于低相干干扰信号，确定至少一个接口的空间属性。 在某些情况下，确定是基于低相干干扰信号的子集而不是整个信号。 或者或另外，该确定可以基于模板，其可以指示用于获得低相干干扰信号的干涉仪的仪器响应。
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公开(公告)号：US07924435B2
公开(公告)日：2011-04-12
申请号：US11963693
申请日：2007-12-21
IPC分类号： G01B11/02
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/70 , G01N21/8422 , G01N21/9501 , G01N2021/9513
摘要： An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature.
摘要翻译： 公开了一种装置，其包括被配置为以第一模式操作以产生对应于测试光的测试对象的不同照明角度的第一组多个干涉测量信号的干涉测量系统，并且在第二模式中产生第二组多个干涉测量信号 对应于测试对象的不同表面位置。 耦合到干涉测量系统的电子处理器被配置为接收第一组干涉测量信号，并被编程以将可从第一组多个干涉测量信号导出的信息与对应于测试对象的多个模型的信息进行比较，以确定与一个或多个特征相关的信息 的测试对象，并输出信息。 在一些实施例中，特征包括欠分辨特征。
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公开(公告)号：US07636168B2
公开(公告)日：2009-12-22
申请号：US11546119
申请日：2006-10-11
IPC分类号： G01B11/02
CPC分类号： G01B9/02044 , G01B9/02022 , G01B9/02037 , G01B9/02072 , G01B9/0209 , G01B2290/70
摘要： In general, in one aspect, the disclosure features a method that includes directing measurement light to reflect from a measurement surface and combining the reflected measurement light with reference light, where the measurement light and reference light are derived from a common source, and there is a non-zero optical path length difference between the measurement light and reference light that is greater than a coherence length of the measurement light. The method further includes spectrally dispersing the combined light onto a multi-element detector to detect a spatially-varying intensity pattern, determining spatial information about the measurement surface based on the spatially-varying intensity pattern, and outputting the spatial information.
摘要翻译： 通常，在一个方面，本发明的特征在于一种方法，其包括引导测量光从测量表面反射并将反射的测量光与参考光组合，其中测量光和参考光源自公共源，并且存在 测量光和参考光之间的非零光程长度差大于测量光的相干长度。 该方法还包括将组合的光谱分散到多元素检测器上以检测空间变化的强度图案，基于空间变化的强度图案确定关于测量表面的空间信息，并输出空间信息。
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公开(公告)号：US07417743B2
公开(公告)日：2008-08-26
申请号：US11079946
申请日：2005-03-15
申请人： Peter De Groot
发明人： Peter De Groot
IPC分类号： G01B9/02
CPC分类号： G01B9/02032 , G01B9/02057 , G01B9/02079 , G01B11/2441 , G01B2290/70
摘要： In general, in a first aspect, the invention features apparatus that include an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference to a multi-element detector to interfere with one another to form an interference pattern.
摘要翻译： 通常，在第一方面中，本发明的特征在于包括具有主腔和辅助参考表面的干涉仪的装置，所述主腔包括主参考表面和测试表面。 所述干涉仪被配置为将输入电磁辐射的主要部分引导到所述主腔和所述输入电磁辐射的辅助部分以从所述辅助参考表面反射，其中所述主腔中的所述主要部分的第一部分从所述主腔 参考表面和主腔中的主要部分的第二部分从测试表面反射。 干涉仪还被配置为将从测试表面反射的电磁辐射引导到多元件检测器，以将干涉图形相互干扰。
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