Apparatus and Method for Making Fiducials on a Substrate
    11.
    发明申请
    Apparatus and Method for Making Fiducials on a Substrate 有权
    在基板上制作基准的装置和方法

    公开(公告)号:US20110247511A1

    公开(公告)日:2011-10-13

    申请号:US13130610

    申请日:2009-12-09

    摘要: Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.

    摘要翻译: 在基板上具有基本上连续的部分的基准允许确定基板的位置。 用于制造基准的方法涉及使第一和第二基准装置沿着具有沿着基板的横向轴线的分量的轨迹穿过基板一起来回移动,同时基板和第一和第二基准装置沿着纵向轴线相对运动 的基底。 第一个基准装置用于在轨迹和相对运动的运动过程中在基板上形成一个基准点。 第二基准装置在沿着轨迹和相对运动的运动期间操作以在基底上形成另一基准。 基准可以被形成为使得它们具有恒定的空间频率,其中第一基准相对于第二基准是异相的。

    Phase-locked Web Position Signal Using Web Fiducials
    12.
    发明申请
    Phase-locked Web Position Signal Using Web Fiducials 有权
    使用Web基准信号的锁相位置信号

    公开(公告)号:US20110257779A1

    公开(公告)日:2011-10-20

    申请号:US13130592

    申请日:2009-12-07

    IPC分类号: G06F19/00 G01R25/00

    摘要: Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    摘要翻译: 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准,并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差,并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈,以调整编码器信号,提高纸幅位置确定的精度。

    METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE
    13.
    发明申请
    METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE 有权
    用于照射基板的方法和装置

    公开(公告)号:US20100304309A1

    公开(公告)日:2010-12-02

    申请号:US12472618

    申请日:2009-05-27

    IPC分类号: G03F7/20 G03B27/54

    CPC分类号: G03B27/54 G03F7/70791

    摘要: A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.

    摘要翻译: 一种方法包括提供其上具有感光材料层的基底和具有相邻的第一,第二和第三部分的掩模; 并且顺序地:i)以第一速率用光束扫描第一部分,随后在曝光区域处撞击感光材料; ii)将扫描固定在第二部分内; 和iii)通过第三部分恢复扫描。 在整个过程中,基板移动通过曝光区。 用于执行该处理的装置包括光束源,掩模座,掩模台,传送器组件以及用于将光束操纵成矩形光束的至少一个光学元件。

    Method and apparatus for photoimaging a substrate
    16.
    发明授权
    Method and apparatus for photoimaging a substrate 有权
    用于光刻成像的方法和装置

    公开(公告)号:US08339573B2

    公开(公告)日:2012-12-25

    申请号:US12472618

    申请日:2009-05-27

    IPC分类号: G03B27/42

    CPC分类号: G03B27/54 G03F7/70791

    摘要: A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.

    摘要翻译: 一种方法包括提供其上具有感光材料层的基底和具有相邻的第一,第二和第三部分的掩模; 并且顺序地:i)以第一速率用光束扫描第一部分,随后在曝光区域处撞击感光材料; ii)将扫描固定在第二部分内; 和iii)通过第三部分恢复扫描。 在整个过程中,基板移动通过曝光区。 用于执行该处理的装置包括光束源,掩模座,掩模台,传送器组件以及用于将光束操纵成矩形光束的至少一个光学元件。