METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE
    1.
    发明申请
    METHOD AND APPARATUS FOR PHOTOIMAGING A SUBSTRATE 有权
    用于照射基板的方法和装置

    公开(公告)号:US20100304309A1

    公开(公告)日:2010-12-02

    申请号:US12472618

    申请日:2009-05-27

    IPC分类号: G03F7/20 G03B27/54

    CPC分类号: G03B27/54 G03F7/70791

    摘要: A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.

    摘要翻译: 一种方法包括提供其上具有感光材料层的基底和具有相邻的第一,第二和第三部分的掩模; 并且顺序地:i)以第一速率用光束扫描第一部分,随后在曝光区域处撞击感光材料; ii)将扫描固定在第二部分内; 和iii)通过第三部分恢复扫描。 在整个过程中,基板移动通过曝光区。 用于执行该处理的装置包括光束源,掩模座,掩模台,传送器组件以及用于将光束操纵成矩形光束的至少一个光学元件。

    Method and apparatus for photoimaging a substrate
    2.
    发明授权
    Method and apparatus for photoimaging a substrate 有权
    用于光刻成像的方法和装置

    公开(公告)号:US08339573B2

    公开(公告)日:2012-12-25

    申请号:US12472618

    申请日:2009-05-27

    IPC分类号: G03B27/42

    CPC分类号: G03B27/54 G03F7/70791

    摘要: A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.

    摘要翻译: 一种方法包括提供其上具有感光材料层的基底和具有相邻的第一,第二和第三部分的掩模; 并且顺序地:i)以第一速率用光束扫描第一部分,随后在曝光区域处撞击感光材料; ii)将扫描固定在第二部分内; 和iii)通过第三部分恢复扫描。 在整个过程中,基板移动通过曝光区。 用于执行该处理的装置包括光束源,掩模座,掩模台,传送器组件以及用于将光束操纵成矩形光束的至少一个光学元件。

    ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY
    3.
    发明申请
    ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY 有权
    滚动到滚动数字光刻技术

    公开(公告)号:US20110253425A1

    公开(公告)日:2011-10-20

    申请号:US13141108

    申请日:2009-12-17

    IPC分类号: H05K1/00 G03F7/20 G03B27/42

    摘要: Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.

    摘要翻译: 制造柔性电路膜的方法包括提供具有多个对准标记的聚合物膜或其它柔性基板和其上的感光材料。 衬底绕合适的辊,带或其它非弹性输送机穿过,使得衬底和输送器至少从第一位置到第二位置一起移动。 当这些部分处于第一位置时,测量第一组对准标记在基板的第一部分上的位置,并且可以使用测量位置来计算基板的变形。 当基片的第一部分移动到第二位置时,感光材料然后以图形方式露出。 图案曝光基于第一组对准标记的测量位置,并且可以包括用变形调整图案曝光幅材。 还公开了相关系统和物品。

    Roll-to-roll digital photolithography
    4.
    发明授权
    Roll-to-roll digital photolithography 有权
    卷对卷数字光刻

    公开(公告)号:US08486593B2

    公开(公告)日:2013-07-16

    申请号:US13141108

    申请日:2009-12-17

    IPC分类号: G03F9/00

    摘要: Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.

    摘要翻译: 制造柔性电路膜的方法包括提供具有多个对准标记的聚合物膜或其它柔性基板和其上的感光材料。 衬底绕合适的辊,带或其它非弹性输送机穿过,使得衬底和输送器至少从第一位置到第二位置一起移动。 当这些部分处于第一位置时,测量第一组对准标记在基板的第一部分上的位置,并且可以使用测量位置来计算基板的变形。 当基片的第一部分移动到第二位置时,感光材料然后以图形方式露出。 图案曝光基于第一组对准标记的测量位置,并且可以包括用变形调整图案曝光幅材。 还公开了相关系统和物品。

    APPARATUS AND METHOD FOR MICROCONTACT PRINTING ON INDEFINITE LENGTH WEBS
    5.
    发明申请
    APPARATUS AND METHOD FOR MICROCONTACT PRINTING ON INDEFINITE LENGTH WEBS 有权
    用于微距离印刷在不同长度织物上的装置和方法

    公开(公告)号:US20140102327A1

    公开(公告)日:2014-04-17

    申请号:US14116363

    申请日:2012-06-25

    IPC分类号: B41F17/00

    摘要: An apparatus and a method for micro-contact printing on a substrate. A roll having very low drag is supported for rotation by air bearings and has a micro-contact printing stamp mounted to its outer surface. Contact between the substrate and the micro-contact printing stamp drives the roll and repeatedly imprints the pattern onto the web. In convenient embodiments, the roll is a sleeve positioned over a core with the sleeve supported for rotation by a layer of air between the sleeve and the core.

    摘要翻译: 一种用于在基板上进行微接触印刷的装置和方法。 具有非常低的阻力的辊被空气轴承支撑以旋转,并且具有安装到其外表面的微接触印刷印章。 基板和微接触印刷印版之间的接触驱动辊并将图案重复地印在卷材上。 在方便的实施例中,辊是位于芯上的套筒,其中套筒被套筒和芯之间的一层空气支撑。

    Phase-locked web position signal using web fiducials
    8.
    发明授权
    Phase-locked web position signal using web fiducials 有权
    相位锁定位置信号使用网络基准

    公开(公告)号:US08847185B2

    公开(公告)日:2014-09-30

    申请号:US13130592

    申请日:2009-12-07

    IPC分类号: G01N21/86 G05B19/404

    摘要: Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    摘要翻译: 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准,并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差,并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈,以调整编码器信号,提高纸幅位置确定的精度。

    Apparatus and method for microcontact printing on indefinite length webs
    9.
    发明授权
    Apparatus and method for microcontact printing on indefinite length webs 有权
    用于在不定长纤维网上微接触印刷的装置和方法

    公开(公告)号:US08794150B2

    公开(公告)日:2014-08-05

    申请号:US14116363

    申请日:2012-06-25

    IPC分类号: B41F17/00 B41F13/02 B41M1/26

    摘要: An apparatus and a method for micro-contact printing on a substrate. A roll having very low drag is supported for rotation by air bearings and has a micro-contact printing stamp mounted to its outer surface. Contact between the substrate and the micro-contact printing stamp drives the roll and repeatedly imprints the pattern onto the web. In convenient embodiments, the roll is a sleeve positioned over a core with the sleeve supported for rotation by a layer of air between the sleeve and the core.

    摘要翻译: 一种用于在基板上进行微接触印刷的装置和方法。 具有非常低的阻力的辊被空气轴承支撑以旋转,并且具有安装到其外表面的微接触印刷印章。 基板和微接触印刷印版之间的接触驱动辊并将图案重复地印在卷材上。 在方便的实施例中,辊是位于芯上的套筒,其中套筒被套筒和芯之间的一层空气支撑。