Phase-locked web position signal using web fiducials
    4.
    发明授权
    Phase-locked web position signal using web fiducials 有权
    相位锁定位置信号使用网络基准

    公开(公告)号:US08847185B2

    公开(公告)日:2014-09-30

    申请号:US13130592

    申请日:2009-12-07

    IPC分类号: G01N21/86 G05B19/404

    摘要: Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    摘要翻译: 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准,并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差,并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈,以调整编码器信号,提高纸幅位置确定的精度。

    Apparatus and method for making fiducials on a substrate
    5.
    发明授权
    Apparatus and method for making fiducials on a substrate 有权
    在基板上制作基准的装置和方法

    公开(公告)号:US08992104B2

    公开(公告)日:2015-03-31

    申请号:US13130610

    申请日:2009-12-09

    摘要: Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.

    摘要翻译: 在基板上具有基本上连续的部分的基准允许确定基板的位置。 用于制造基准的方法涉及使第一和第二基准装置沿着具有沿着基板的横向轴线的分量的轨迹穿过基板一起来回移动,同时基板和第一和第二基准装置沿着纵向轴线相对运动 的基底。 第一个基准装置用于在轨迹和相对运动的运动过程中在基板上形成一个基准点。 第二基准装置在沿着轨迹和相对运动的运动期间操作以在基底上形成另一基准。 基准可以被形成为使得它们具有恒定的空间频率,其中第一基准相对于第二基准是异相的。

    Apparatus and Method for Making Fiducials on a Substrate
    6.
    发明申请
    Apparatus and Method for Making Fiducials on a Substrate 有权
    在基板上制作基准的装置和方法

    公开(公告)号:US20110247511A1

    公开(公告)日:2011-10-13

    申请号:US13130610

    申请日:2009-12-09

    摘要: Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.

    摘要翻译: 在基板上具有基本上连续的部分的基准允许确定基板的位置。 用于制造基准的方法涉及使第一和第二基准装置沿着具有沿着基板的横向轴线的分量的轨迹穿过基板一起来回移动,同时基板和第一和第二基准装置沿着纵向轴线相对运动 的基底。 第一个基准装置用于在轨迹和相对运动的运动过程中在基板上形成一个基准点。 第二基准装置在沿着轨迹和相对运动的运动期间操作以在基底上形成另一基准。 基准可以被形成为使得它们具有恒定的空间频率,其中第一基准相对于第二基准是异相的。

    Phase-locked Web Position Signal Using Web Fiducials
    7.
    发明申请
    Phase-locked Web Position Signal Using Web Fiducials 有权
    使用Web基准信号的锁相位置信号

    公开(公告)号:US20110257779A1

    公开(公告)日:2011-10-20

    申请号:US13130592

    申请日:2009-12-07

    IPC分类号: G06F19/00 G01R25/00

    摘要: Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    摘要翻译: 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准,并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差,并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈,以调整编码器信号,提高纸幅位置确定的精度。

    Roll-to-roll digital photolithography
    8.
    发明授权
    Roll-to-roll digital photolithography 有权
    卷对卷数字光刻

    公开(公告)号:US08486593B2

    公开(公告)日:2013-07-16

    申请号:US13141108

    申请日:2009-12-17

    IPC分类号: G03F9/00

    摘要: Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.

    摘要翻译: 制造柔性电路膜的方法包括提供具有多个对准标记的聚合物膜或其它柔性基板和其上的感光材料。 衬底绕合适的辊,带或其它非弹性输送机穿过,使得衬底和输送器至少从第一位置到第二位置一起移动。 当这些部分处于第一位置时,测量第一组对准标记在基板的第一部分上的位置,并且可以使用测量位置来计算基板的变形。 当基片的第一部分移动到第二位置时,感光材料然后以图形方式露出。 图案曝光基于第一组对准标记的测量位置,并且可以包括用变形调整图案曝光幅材。 还公开了相关系统和物品。

    ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY
    9.
    发明申请
    ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY 有权
    滚动到滚动数字光刻技术

    公开(公告)号:US20110253425A1

    公开(公告)日:2011-10-20

    申请号:US13141108

    申请日:2009-12-17

    IPC分类号: H05K1/00 G03F7/20 G03B27/42

    摘要: Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.

    摘要翻译: 制造柔性电路膜的方法包括提供具有多个对准标记的聚合物膜或其它柔性基板和其上的感光材料。 衬底绕合适的辊,带或其它非弹性输送机穿过,使得衬底和输送器至少从第一位置到第二位置一起移动。 当这些部分处于第一位置时,测量第一组对准标记在基板的第一部分上的位置,并且可以使用测量位置来计算基板的变形。 当基片的第一部分移动到第二位置时,感光材料然后以图形方式露出。 图案曝光基于第一组对准标记的测量位置,并且可以包括用变形调整图案曝光幅材。 还公开了相关系统和物品。