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公开(公告)号：US09890035B2
公开(公告)日：2018-02-13
申请号：US15401259
申请日：2017-01-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B7/0038 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81C1/00285 , B81C1/00293 , B81C2201/0177 , B81C2203/0145
Abstract: A method is provided for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. A first crystalline layer or a first amorphous layer or a first nanocrystalline layer or a first polycrystalline layer is deposited on or grown on a surface of the substrate or of the cap. A recess is introduced into the substrate or into the cap for accommodating the first crystalline layer or the first amorphous layer or the first nanocrystalline layer or the first polycrystalline layer.
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公开(公告)号：US20170158497A1
公开(公告)日：2017-06-08
申请号：US15368740
申请日：2016-12-05
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
IPC: B81C1/00 , G01C19/5783 , G01P15/08 , B81B7/04
CPC classification number: B81C1/00293 , B81B7/02 , B81B7/04 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81C2203/0109 , B81C2203/0145 , B81C2203/0181 , B81C2203/019 , G01C19/5769 , G01C19/5783 , G01P15/0802
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or of the cap with the aid of a laser. A layer for protecting the sealed access opening is applied to or deposited on or grown on a material area, which transitions into a liquid aggregate state and then transitions into a solid aggregate state and seals the access opening.
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13.发明申请公开(公告)号：US20170113921A1
公开(公告)日：2017-04-27
申请号：US15333381
申请日：2016-10-25
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B7/0051 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , B81C1/00325 , B81C2201/013 , B81C2203/0145
Abstract: A method for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat via laser into an absorbing part of the substrate or the cap. During the step for forming the access opening, a first access opening section is formed generally perpendicularly to a surface of the substrate or the cap, and a second access opening section is formed generally perpendicularly to and in parallel to the surface.
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公开(公告)号：US20230219808A1
公开(公告)日：2023-07-13
申请号：US18151631
申请日：2023-01-09
Applicant: Robert Bosch GmbH
Inventor： Andreas Prinzen , Christof Schwenk , Frank Reichenbach , Friedjof Heuck , Heiko Stahl , Nicolas Schorr
IPC: B81C1/00
CPC classification number: B81C1/00571 , B81C2201/0198 , B81C2203/0109 , B81C2201/0132
Abstract: A method for producing a bonding pad for a micromechanical sensor element. The method includes: depositing a first metal layer onto a top face of the functional layer, and depositing a second metal layer onto the first metal layer, wherein only the first layer or only the second layer is formed in a border region extending around a bonding pad region; covering a protective layer over a top face of the second metal layer in the bonding pad region and over the first or second metal layer in an inner peripheral portion of the border region, which inner peripheral portion adjoins the bonding pad region; etching the first or second layer at least in an outer peripheral portion of the border region down to the top face of the functional layer; removing the protective layer; carrying out an etching process starting from the top face of the layered structure.
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Patent Agency Ranking
公开(公告)号：US10556789B2
公开(公告)日：2020-02-11
申请号：US15297794
申请日：2016-10-19
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Jochen Reinmuth , Philip Kappe , Mawuli Ametowobla
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.
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16.发明授权公开(公告)号：US10023460B2
公开(公告)日：2018-07-17
申请号：US15333381
申请日：2016-10-25
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
Abstract: A method for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat via laser into an absorbing part of the substrate or the cap. During the step for forming the access opening, a first access opening section is formed generally perpendicularly to a surface of the substrate or the cap, and a second access opening section is formed generally perpendicularly to and in parallel to the surface.
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公开(公告)号：US20170203957A1
公开(公告)日：2017-07-20
申请号：US15401808
申请日：2017-01-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B7/0041 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81B2207/056 , B81B2207/09 , B81C1/00293 , B81C2203/0109 , B81C2203/0118 , B81C2203/0145 , B81C2203/019 , B81C2203/035
Abstract: A method for manufacturing a micromechanical component is provided including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the cap together with the substrate enclosing a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity. A recess situated essentially between the first cavity and the second cavity is formed for diverting at least one first particle type of the first gas mixture and/or at least one second particle type of the second gas mixture.
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公开(公告)号：US20170113923A1
公开(公告)日：2017-04-27
申请号：US15297794
申请日：2016-10-19
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Jochen Reinmuth , Philip Kappe , Mawuli Ametowobla
CPC classification number: B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81C1/00269 , B81C1/00333 , B81C2203/0145 , B81C2203/036 , C03B23/20 , C03C23/0025
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.
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公开(公告)号：US20170113919A1
公开(公告)日：2017-04-27
申请号：US15291142
申请日：2016-10-12
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Till Schade , Jochen Reinmuth , Philip Kappe , Alexander Ilin , Mawuli Ametowobla
CPC classification number: B81B7/0035 , B81B2201/0235 , B81C1/00182 , B81C1/00277 , B81C1/00293 , B81C1/00325 , B81C1/00666 , B81C2201/0132 , B81C2201/0143 , B81C2203/0109 , B81C2203/0145
Abstract: A method is provided for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity. An access opening, connecting the first cavity to surroundings of the micromechanical component, is formed in the substrate or in the cap. The first pressure and/or the first chemical composition are adjusted in the first cavity. The access opening is sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser. A recess is formed in a surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for reducing local stresses occurring at a sealed access opening.
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