公开(公告)号：US20120223597A1

公开(公告)日：2012-09-06

申请号：US13412392

申请日：2012-03-05

申请人： Martin Hosek ,  Christopher Hofmeister ,  John F. Zettler ,  Alexander Krupyshev ,  Sergei Syssoev ,  Krzystof Majczak

发明人： Martin Hosek ,  Christopher Hofmeister ,  John F. Zettler ,  Alexander Krupyshev ,  Sergei Syssoev ,  Krzystof Majczak

IPC分类号： H02K41/02

CPC分类号： G01B7/003

摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.

摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。

公开(公告)号：US20120141235A1

公开(公告)日：2012-06-07

申请号：US13293717

申请日：2011-11-10

申请人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliot ,  Christopher Hofmeister

发明人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliot ,  Christopher Hofmeister

IPC分类号： H01L21/677

CPC分类号： B25J9/043 ,  B25J9/042

摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。

公开(公告)号：US20110118855A1

公开(公告)日：2011-05-19

申请号：US13011970

申请日：2011-01-24

申请人： Martin Hosek ,  Stuart Beale ,  Roumen Botev ,  Matthew Coady ,  Christopher Hofmeister ,  Mark Ives ,  Jairo Moura ,  Robert Caveney

发明人： Martin Hosek ,  Stuart Beale ,  Roumen Botev ,  Matthew Coady ,  Christopher Hofmeister ,  Mark Ives ,  Jairo Moura ,  Robert Caveney

IPC分类号： G05B13/04

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

摘要翻译： 控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。

公开(公告)号：US20100147181A1

公开(公告)日：2010-06-17

申请号：US12696224

申请日：2010-01-29

申请人： Michael L. Bufano ,  Gerald M. Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Michael L. Bufano ,  Gerald M. Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： E01B25/00

CPC分类号： H01L21/67715 ,  H01L21/67736 ,  H01L21/67775

摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

摘要翻译： 提供了一种示例性实施例的基板输送系统。 该系统具有导轨和至少一个运输车辆。 运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。 导轨包括用于车辆的至少一个行进车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行驶车道。

公开(公告)号：US20090162179A1

公开(公告)日：2009-06-25

申请号：US12330780

申请日：2008-12-09

申请人： Martin Hosek ,  Christopher Hofmeister ,  Alexander Krupyshev

发明人： Martin Hosek ,  Christopher Hofmeister ,  Alexander Krupyshev

IPC分类号： B65G35/00

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67766

摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

摘要翻译： 用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统 输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。

公开(公告)号：US20080298944A1

公开(公告)日：2008-12-04

申请号：US12117355

申请日：2008-05-08

申请人： Christopher Hofmeister ,  Robert T. Caveney

发明人： Christopher Hofmeister ,  Robert T. Caveney

IPC分类号： B66C23/00

CPC分类号： B25J11/0095 ,  B25J9/106 ,  B25J9/126 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。

公开(公告)号：US20070081883A1

公开(公告)日：2007-04-12

申请号：US11239272

申请日：2005-09-29

申请人： Christopher Hofmeister ,  Steve Bibeault ,  Ulysses Gilchrist

发明人： Christopher Hofmeister ,  Steve Bibeault ,  Ulysses Gilchrist

IPC分类号： B66C1/00

CPC分类号： H01L21/68707 ,  Y10S414/141

摘要： A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end effector. The end effector has a grip actuator operably connected to the movable grip. The grip actuator has more than one actuation members and a resiliently flexible member connecting the more than one actuation members. Each actuation member actuates at least one corresponding grip element of the movable grip to capture or release the workpiece. Flexure of the resiliently flexible member effects movement of at least one of the more than one actuation members for actuation of the at least one corresponding grip element. The resiliently flexible member is sandwiched by substantially rigid portions of the more than one actuation members.

摘要翻译： 具有可动臂和端部执行器的平坦工件输送装置。 末端执行器连接到手臂。 末端执行器具有用于将平坦的工件保持在末端执行器上的可动手柄。 端部执行器具有可操作地连接到可动夹具的夹紧致动器。 把手致动器具有不止一个致动构件和连接多于一个致动构件的弹性柔性构件。 每个致动构件致动可动夹具的至少一个对应的夹紧元件以捕获或释放工件。 弹性柔性构件的弯曲影响多于一个致动构件中的至少一个的运动，用于致动至少一个相应的夹紧元件。 弹性柔性构件被多于一个致动构件的基本上刚性的部分夹持。

公开(公告)号：US20060285945A1

公开(公告)日：2006-12-21

申请号：US11442509

申请日：2006-05-26

申请人： Christopher Hofmeister ,  Robert Caveney

发明人： Christopher Hofmeister ,  Robert Caveney

IPC分类号： H01L21/677

CPC分类号： H01L21/67161 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  Y10S414/139

摘要： Substrate processing apparatus having a transport chamber, a linear array of substrate holding modules alongside the transport chamber, and a substrate transport located in the chamber. The chamber can hold an isolated atmosphere, and defines more than one substantially linear transport paths extending longitudinally along the transport chamber. The transport in the chamber is capable of transporting the substrate along the linear transport paths. The transport has a transporter capable of holding and moving the substrate. The transporter interfaces a wall of the transport chamber for moving along at least one of linear paths. The transport chamber has interfaces for mating with other substrate holding modules at opposite ends of the transport chamber. Each interface has an opening through which at least one of the more than one linear transport paths extends, and the transport chamber has a selectably variable longitudinal length between the interfaces.

摘要翻译： 具有输送室的基板处理装置，位于输送室旁的基板保持模块的线性阵列，以及位于所述室中的基板输送。 腔室可以保持隔离的气氛，并且限定沿着传送室纵向延伸的不止一个基本线性的传送路径。 腔室中的输送能够沿着线性输送路径输送基底。 运输具有能够保持和移动基板的运输机。 输送器与输送室的壁接触，用于沿着至少一个线性路径移动。 运输室具有用于与运输室的相对端处的其它衬底保持模块配合的界面。 每个界面具有开口，多于一个的线性传送路径中的至少一个延伸穿过该开口，并且传送室在界面之间具有可选择地可变的纵向长度。

公开(公告)号：US06364593B1

公开(公告)日：2002-04-02

申请号：US09588392

申请日：2000-06-06

申请人： Christopher Hofmeister ,  Glenn L Sindledecker

发明人： Christopher Hofmeister ,  Glenn L Sindledecker

IPC分类号： B65G2504

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted position, and a movable closure for the charging opening for opening and closing a horizontal path through the charging opening. In the deployed position, the platform has a generally level orientation adjacent the charging opening and projects away from the frame for receiving thereon a cassette adapted to support therein a plurality of the semiconductor wafers to be passed though the charging opening. In one embodiment, the platform is elevationally movable on the frame between a retracted lowered position distant from the charging opening and a deployed raised position adjacent the charging opening. In another embodiment, the platform is rotationally movable on the frame between the deployed position having a generally level orientation located generally adjacent the charging opening and the retracted position folded against the frame. The loading and unloading system includes a transport system for advancing a cassette from a remote location and delivering the cassette onto the platform in the deployed position. The transport system includes a nest member for supporting a cassette at spaced apart locations enabling reception therebetween of the platform in the deployed position so that the cassette can selectively be transferred, in one instance, from the nest member to the platform and, in another instance, from the platform to the nest member.

摘要翻译： 用于装载和卸载半导体晶片的系统包括具有充电开口的框架，安装在框架上并可在展开位置和缩回位置之间移动的平台以及用于打开和关闭通过 充电开口。 在展开位置，平台具有与充电开口相邻的大致水平方向并且远离框架突出，以便在其上容纳适于在其中支撑多个待通过充电开口的半导体晶片的盒。 在一个实施例中，平台在框架之间在远离充电开口的缩回降低位置和邻近充电开口的展开的升高位置之间可升高。 在另一个实施例中，平台可在框架之间旋转移动，该展开位置具有位于大体上相邻于充电开口的大致水平的定位位置和与框架折叠的缩回位置。 装载和卸载系统包括用于从远程位置推进盒式磁带的传送系统并且在展开位置将胶卷传送到平台上。 运输系统包括用于在间隔开的位置处支撑盒子的座部件，从而能够在展开位置之间接收平台，使得盒子可以选择性地从套筒部件传递到平台，并且在另一种情况下 ，从平台到巢成员。

公开(公告)号：US06364592B1

公开(公告)日：2002-04-02

申请号：US09452306

申请日：1999-12-01

申请人： Christopher Hofmeister

发明人： Christopher Hofmeister

IPC分类号： B65G4907

CPC分类号： H01L21/67781 ,  Y10S414/139 ,  Y10S414/141

摘要： An apparatus for moving substrates between a loading section and a working chamber includes at least two loading locations at which the substrates may be supplied or received in stacked form therein. Load locks are provided at a second station each located directly oppositely of the locations at the loading station and corresponding in number to those locations. A substrate handling mechanism is disposed between the loading and the second stations for picking up and moving the substrates between the loading and second stations and includes linear positioning apparatus movable along a track of given width for positioning the handling mechanism along the given line, and the loading and second stations being separated from one another substantially only by the given width of the linear positioning apparatus.

摘要翻译： 用于在装载部分和工作室之间移动基板的装置包括至少两个装载位置，在该装载位置可以以堆叠的形式在其中供应或接收基板。 负载锁提供在第二站，每个位于与装载站处的位置直接相对的位置处，并且数量对应于这些位置。 衬底处理机构设置在负载和第二站之间，用于拾取和移动装载和第二站之间的衬底，并且包括沿着给定宽度的轨道移动的线性定位装置，用于沿着给定的线定位处理机构， 装载和第二站基本上仅通过线性定位装置的给定宽度彼此分离。