-
公开(公告)号:US11621264B2
公开(公告)日:2023-04-04
申请号:US16999378
申请日:2020-08-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyuncheol Kim , Yongseok Kim , Satoru Yamada , Sungwon Yoo , Kyunghwan Lee , Jaeho Hong
IPC: H01L27/102 , H01L29/24 , H01L29/66 , H01L29/87 , H01L29/74 , H01L27/108 , H01L27/06
Abstract: A semiconductor memory device may include a first electrode and a second electrode, which are spaced apart from each other in a first direction, and a first semiconductor pattern, which is in contact with both of the first and second electrodes. The first semiconductor pattern may include first to fourth sub-semiconductor patterns, which are sequentially disposed in the first direction. The first and fourth sub-semiconductor patterns may be in contact with the first and second electrodes, respectively. The first and third sub-semiconductor patterns may be of a first conductivity type, and the second and fourth sub-semiconductor patterns may be of a second conductivity type different from the first conductivity type. Each of the first to fourth sub-semiconductor patterns may include a transition metal and a chalcogen element.
-
公开(公告)号:US20220223713A1
公开(公告)日:2022-07-14
申请号:US17702856
申请日:2022-03-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Naoto Umezawa , Satoru Yamada , Junsoo Kim , Honglae Park , Chunhyung Chung
IPC: H01L29/51 , H01L27/108 , H01L29/423 , H01L29/49
Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate; an isolation layer in a first trench, defining an active region of the substrate; a gate structure in a second trench intersecting the active region; and first and second impurity regions spaced apart from each other by the gate structure. The gate structure includes a gate dielectric layer in the second trench; a first metal layer on the gate dielectric layer; and a gate capping layer on the first metal layer. The gate dielectric layer includes D+ and ND2+ in an interface region, adjacent the first metal layer, and D is deuterium, N is nitrogen, and D+ is positively-charged deuterium.
-
公开(公告)号:US11355509B2
公开(公告)日:2022-06-07
申请号:US17000857
申请日:2020-08-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok Lee , Junsoo Kim , Hui-Jung Kim , Bong-Soo Kim , Satoru Yamada , Kyupil Lee , Sunghee Han , Hyeongsun Hong , Yoosang Hwang
IPC: H01L27/11556 , H01L23/532 , G11C7/18 , H01L49/02 , G11C8/14 , H01L27/11524 , G11C11/404 , G11C11/4097
Abstract: A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.
-
公开(公告)号:US11127828B2
公开(公告)日:2021-09-21
申请号:US16432298
申请日:2019-06-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Eunae Cho , Dongjin Lee , Ji Eun Lee , Kyoung-Ho Jung , Dong Su Ko , Yongsu Kim , Jiho Yoo , Sung Heo , Hyun Park , Satoru Yamada , Moonyoung Jeong , Sungjin Kim , Gyeongsu Park , Han Jin Lim
IPC: H01L29/423 , H01L29/49 , H01L21/28 , H01L29/51
Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate including a trench. The semiconductor device further includes a gate electrode disposed in the trench, and a gate insulating film disposed between the substrate and the gate electrode. The gate electrode includes a gate conductor and a metal element, and an effective work function of the gate electrode is less than an effective work function of the gate conductor.
-
公开(公告)号:US20210249417A1
公开(公告)日:2021-08-12
申请号:US17240486
申请日:2021-04-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hui-Jung Kim , Min Hee Cho , Bong-Soo Kim , Junsoo Kim , Satoru Yamada , Wonsok Lee , Yoosang Hwang
IPC: H01L27/108 , H01L21/28 , H01L29/49 , H01L29/06
Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided.
-
公开(公告)号:US10991699B2
公开(公告)日:2021-04-27
申请号:US16820006
申请日:2020-03-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hui-Jung Kim , Min Hee Cho , Bong-Soo Kim , Junsoo Kim , Satoru Yamada , Wonsok Lee , Yoosang Hwang
IPC: H01L27/108 , H01L21/28 , H01L29/49 , H01L29/06
Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided.
-
公开(公告)号:US10784272B2
公开(公告)日:2020-09-22
申请号:US16027887
申请日:2018-07-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok Lee , Junsoo Kim , Hui-Jung Kim , Bong-Soo Kim , Satoru Yamada , Kyupil Lee , Sunghee Han , HyeongSun Hong , Yoosang Hwang
IPC: H01L27/11556 , H01L23/532 , G11C7/18 , H01L49/02 , G11C8/14 , H01L27/11524 , G11C11/404 , G11C11/4097
Abstract: A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.
-
公开(公告)号:US20200027885A1
公开(公告)日:2020-01-23
申请号:US16588360
申请日:2019-09-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongjin Lee , Ji-Eun Lee , Kyoung-Ho Jung , Satoru Yamada , Moonyoung Jeong
IPC: H01L27/108 , H01L21/28 , H01L29/49
Abstract: Provided are a semiconductor device having a gate and a method of forming the same. The method includes forming a gate dielectric, forming a first conductive material layer on the gate dielectric, forming a source material layer on the first conductive material layer, and diffusing a first element included in the source material layer into the first conductive material layer by performing a thermal treatment process to form a doped material layer.
-
公开(公告)号:US10263084B2
公开(公告)日:2019-04-16
申请号:US15868620
申请日:2018-01-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongjin Lee , Junsoo Kim , Moonyoung Jeong , Satoru Yamada , Dongsoo Woo , Jiyoung Kim
IPC: H01L29/40 , H01L29/423 , H01L27/108 , H01L27/088
Abstract: A semiconductor device may include a device isolation region configured to define an active region in a substrate, an active gate structure disposed in the active region, and a field gate structure disposed in the device isolation region. The field gate structure may include a gate conductive layer. The active gate structure may include an upper active gate structure including a gate conductive layer and a lower active gate structure formed under the upper active gate structure and vertically spaced apart from the upper active gate structure. The lower active gate structure may include a gate conductive layer. A top surface of the gate conductive layer of the field gate structure is located at a lower level than a bottom surface of the gate conductive layer of the upper active gate structure.
-
20.
公开(公告)号:US20180301456A1
公开(公告)日:2018-10-18
申请号:US15821089
申请日:2017-11-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Min Hee Cho , Jun Soo Kim , Hui Jung Kim , Tae Yoon An , Satoru Yamada , Won Sok Lee , Nam Ho Jeon , Moon Young Jeong , Ki Jae Hur , Jae Ho Hong
IPC: H01L27/108 , H01L27/12
CPC classification number: H01L27/10802 , H01L27/10814 , H01L27/10823 , H01L27/10844 , H01L27/10876 , H01L27/1207 , H01L29/4236
Abstract: A semiconductor device and a method for fabricating the same are provided. A semiconductor device having a substrate can include a lower semiconductor layer, an upper semiconductor layer on the lower semiconductor layer, and a buried insulating layer between the lower semiconductor layer and the upper semiconductor layer. A first trench can be in the upper semiconductor layer having a lowest surface above the buried insulating layer and a first conductive pattern recessed in the first trench. A second trench can be in the lower semiconductor layer, the buried insulating layer, and the upper semiconductor layer. A second conductive pattern can be in the second trench and a first source/drain region can be in the upper semiconductor layer between the first conductive pattern and the second conductive pattern.
-
-
-
-
-
-
-
-
-