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公开(公告)号:US20050179452A1
公开(公告)日:2005-08-18
申请号:US10903216
申请日:2004-07-30
申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号: G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号: G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”,这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架,至少一个具有第一端和第二端的探测杆,框架连接机构,其允许在沿着框架的选定点准备将探测杆重新定位到框架,以及多个电触点 沿着探测杆的引脚,用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中,探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常,玻璃基板是正方形的,框架也是正方形的。 以这种方式,“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动,或者可以选择性地向下推动以接触衬底上的所选择的接触垫。
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公开(公告)号:US07847566B2
公开(公告)日:2010-12-07
申请号:US11940432
申请日:2007-11-15
申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号: G01R31/26
CPC分类号: G09G3/006 , G01R31/2893 , G01R31/305
摘要: A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译: 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上,测试第一衬底,重新配置可配置的探测器,将可配置的探测器放置在第二衬底上,以及测试第二衬底。
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公开(公告)号:US20050179451A1
公开(公告)日:2005-08-18
申请号:US10889695
申请日:2004-07-12
申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号: G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号: G09G3/006 , G01R31/2893 , G01R31/305
摘要: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”,这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架,至少一个具有第一端和第二端的探测杆,框架连接机构,其允许在沿着框架的选定点准备将探测杆重新定位到框架,以及多个电触点 沿着探测杆的引脚,用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中,探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常,玻璃基板是正方形的,框架也是正方形的。 以这种方式,“x”和“y”轴由框架定义。
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公开(公告)号:US07355418B2
公开(公告)日:2008-04-08
申请号:US10903216
申请日:2004-07-30
申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号: G01R31/305
CPC分类号: G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”,这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架,至少一个具有第一端和第二端的探测杆,框架连接机构,其允许在沿着框架的选定点准备将探测杆重新定位到框架,以及多个电触点 沿着探测杆的引脚,用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中,探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常,玻璃基板是正方形的,框架也是正方形的。 以这种方式,“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动,或者可以选择性地向下推动以接触衬底上的所选择的接触垫。
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公开(公告)号:US08222911B2
公开(公告)日:2012-07-17
申请号:US12296055
申请日:2007-04-04
IPC分类号: G01R31/305
CPC分类号: G02F1/1309 , G02F2001/136254
摘要: The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译: 本发明涉及一种用于测试光电子模块的装置,包括用于产生电磁束或粒子束的第一源,用于照亮光电子模块的第二源; 和检测器。 此外,提供了一种用于测试光电子模块的方法,包括照亮光电子模块,引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见,否则将不会被检测到。
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公开(公告)号:US08009299B2
公开(公告)日:2011-08-30
申请号:US11813334
申请日:2006-01-05
申请人: Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人: Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号: G01B11/14
CPC分类号: G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要: The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.
摘要翻译: 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体,其中结构在平坦部分中具有结构周期PS,并且在每个结构内具有用于测量的位置L. 对于校准,生成校准体的平坦部分中的结构处的至少一个检测信号,其中,粒子束在束目标位置L1上被偏转器偏转,其中光束目标周期P1大于 结构周期PS,由此使用基准校准来控制偏转器,并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。
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公开(公告)号:US07256606B2
公开(公告)日:2007-08-14
申请号:US10977510
申请日:2004-10-29
申请人: Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人: Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号: G01R31/00 , G01R31/307
CPC分类号: G01N23/2251 , G02F2001/136254
摘要: The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译: 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法,电子束的直径增加,使得光束在非均匀电极区域上聚焦较少,即扩大或“模糊”。 光束的直径增加,使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形,椭圆形或其他合适的形状。
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公开(公告)号:US20090179656A1
公开(公告)日:2009-07-16
申请号:US12296055
申请日:2007-04-04
IPC分类号: G01R31/305 , G01N23/225 , G01N21/88
CPC分类号: G02F1/1309 , G02F2001/136254
摘要: The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译: 本发明涉及一种用于测试光电子模块的装置,包括用于产生电磁束或粒子束的第一源,用于照亮光电子模块的第二源; 和检测器。 此外,提供了一种用于测试光电子模块的方法,包括照亮光电子模块,引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见,否则将不会被检测到。
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公开(公告)号:US20060028230A1
公开(公告)日:2006-02-09
申请号:US10977510
申请日:2004-10-29
申请人: Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人: Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号: G01R31/00
CPC分类号: G01N23/2251 , G02F2001/136254
摘要: The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译: 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法,电子束的直径增加,使得光束在非均匀电极区域上聚焦较少,即扩大或“模糊”。 光束的直径增加,使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形,椭圆形或其他合适的形状。
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公开(公告)号:US20100188666A1
公开(公告)日:2010-07-29
申请号:US11813334
申请日:2006-01-05
申请人: Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人: Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号: G01B11/14
CPC分类号: G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要: The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.
摘要翻译: 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体,其中结构在平坦部分中具有结构周期Ps,并且在每个结构内具有用于测量的位置L. 对于校准,生成校准体的平坦部分中的结构处的至少一个检测信号,其中,粒子束在束目标位置L1上被偏转器偏转,其中光束目标周期P1大于 结构周期Ps,由此基准校准用于偏转器的控制,并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。
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