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11.
公开(公告)号:US09688531B2
公开(公告)日:2017-06-27
申请号:US15191160
申请日:2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Lorenzo Baldo , Enri Duqi , Flavio Francesco Villa
CPC classification number: B81B7/0045 , B81B3/0072 , B81B2201/0228 , B81B2201/025 , B81B2203/0127 , B81B2203/0163 , B81B2203/0315 , B81B2207/012 , B81C1/00182 , B81C1/00325 , B81C2201/0116 , B81C2201/0173 , B81C2203/0785 , G02B26/0858
Abstract: A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
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公开(公告)号:US09459186B2
公开(公告)日:2016-10-04
申请号:US13858156
申请日:2013-04-08
Applicant: STMicroelectronics S.r.l.
Inventor: Ubaldo Mastromatteo , Flavio Francesco Villa , Gabriele Barlocchi
CPC classification number: G01N1/28 , B01L3/502 , B01L3/5027 , B01L2300/0681 , B01L2300/0829 , B01L2300/0864 , B01L2300/0867 , B01L2400/0478 , B01L2400/0616 , C12N15/1017 , C12Q1/6806 , G01N1/405
Abstract: The device has a fluid inlet; a filtering compartment, connected to the fluid inlet and accommodating a filtering matrix in presence of adsorption agents; a fluidic circuit connected downstream of the filtering compartment and including a discharge circuit and a loading circuit; a discharge chamber, connected downstream of the discharge circuit; a preparation outlet, connected downstream of the loading circuit; and suction pumps, connected to the fluidic circuit and configured so as to fluidically connect the filtering compartment alternatively to the discharge circuit or to the loading circuit.
Abstract translation: 该装置具有流体入口; 过滤室,连接到流体入口并在吸附剂存在下容纳过滤基质; 连接在过滤室下游的流体回路,包括一个放电回路和一个加载电路; 放电室,连接在放电电路的下游; 一个准备出口,连接在负载电路的下游; 和抽吸泵,其连接到流体回路并且构造成将过滤室与排放回路或加载回路交替地流体连接。
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公开(公告)号:US11417827B2
公开(公告)日:2022-08-16
申请号:US16215821
申请日:2018-12-11
Applicant: STMicroelectronics S.r.l.
Inventor: Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/00 , H01L41/113 , H01L41/047 , H01L41/22 , H02N2/18 , H01L41/053 , H01L41/187 , H01L41/25 , H01L41/29 , H01L41/332
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号:US11294168B2
公开(公告)日:2022-04-05
申请号:US16985818
申请日:2020-08-05
Applicant: STMicroelectronics S.r.l.
Inventor: Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the second main surface and including a suspended membrane of monocrystalline semiconductor material extending between the opening and the first main surface of the monolithic body. The suspended membrane includes a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, with the mobile mass having a width less than a width of the opening. A reflecting region extends over the mobile mass.
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公开(公告)号:US20180304259A1
公开(公告)日:2018-10-25
申请号:US16019361
申请日:2018-06-26
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Ubaldo Mastromatteo , Gabriele Barlocchi , Flavio Francesco Villa
CPC classification number: B01L3/502715 , B01L2200/025 , B01L2200/027 , B01L2200/028 , B01L2200/0684 , B01L2300/0645 , B01L2300/087 , B01L2400/049 , G01N5/02 , G01N29/022 , G01N33/54366 , G01N33/5438 , G01N33/76 , G01N2035/00237
Abstract: A device for detecting the concentration of biological materials is formed in a body having a plurality of fluidic paths connectable to a multi-microbalance structure carrying a plurality of microbalances, each microbalance having a sensitive portion facing a reaction chamber. The body and the multi-microbalance structure are configured to be mechanically coupled together and each microbalance is configured to be coupled to a respective fluidic path. Each fluidic path includes an inlet, a duct and a liquid waste, each duct being configured to be coupled with a respective reaction chamber. The plurality of fluidic paths and microbalances form at least one first and one second reference cells and one first sample cell.
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公开(公告)号:US10029254B2
公开(公告)日:2018-07-24
申请号:US14869718
申请日:2015-09-29
Applicant: STMicroelectronics S.r.l.
Inventor: Ubaldo Mastromatteo , Gabriele Barlocchi , Flavio Francesco Villa
Abstract: A device for detecting the concentration of biological materials is formed in a body having a plurality of fluidic paths connectable to a multi-microbalance structure carrying a plurality of microbalances, each microbalance having a sensitive portion facing a reaction chamber. The body and the multi-microbalance structure are configured to be mechanically coupled together and each microbalance is configured to be coupled to a respective fluidic path. Each fluidic path includes an inlet, a duct and a liquid waste, each duct being configured to be coupled with a respective reaction chamber. The plurality of fluidic paths and microbalances form at least one first and one second reference cells and one first sample cell.
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17.
公开(公告)号:US20170144881A1
公开(公告)日:2017-05-25
申请号:US15191160
申请日:2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Lorenzo Baldo , Enri Duqi , Flavio Francesco Villa
CPC classification number: B81B7/0045 , B81B3/0072 , B81B2201/0228 , B81B2201/025 , B81B2203/0127 , B81B2203/0163 , B81B2203/0315 , B81B2207/012 , B81C1/00182 , B81C1/00325 , B81C2201/0116 , B81C2201/0173 , B81C2203/0785 , G02B26/0858
Abstract: A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
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公开(公告)号:US12134556B2
公开(公告)日:2024-11-05
申请号:US17534286
申请日:2021-11-23
Inventor: Enri Duqi , Lorenzo Baldo , Paolo Ferrari , Benedetto Vigna , Flavio Francesco Villa , Laura Maria Castoldi , Ilaria Gelmi
IPC: B81B7/00
Abstract: A semiconductor device includes: a substrate; a transduction microstructure integrated in the substrate; a cap joined to the substrate and having a first face adjacent to the substrate and a second, outer, face; and a channel extending through the cap from the second face to the first face and communicating with the transduction microstructure. A protective membrane made of porous polycrystalline silicon permeable to aeriform substances is set across the channel.
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公开(公告)号:US11696504B2
公开(公告)日:2023-07-04
申请号:US17321252
申请日:2021-05-14
Applicant: STMICROELECTRONICS S.r.l.
Inventor: Paolo Ferrari , Flavio Francesco Villa , Lucia Zullino , Andrea Nomellini , Luca Seghizzi , Luca Zanotti , Bruno Murari , Martina Scolari
IPC: H10N10/855 , H10N10/01 , H10N10/17
CPC classification number: H10N10/855 , H10N10/01 , H10N10/17
Abstract: A method of fabricating a thermoelectric converter that includes providing a layer of a Silicon-based material having a first surface and a second surface, opposite to and separated from the first surface by a Silicon-based material layer thickness; forming a plurality of first thermoelectrically active elements of a first thermoelectric semiconductor material having a first Seebeck coefficient, and forming a plurality of second thermoelectrically active elements of a second thermoelectric semiconductor material having a second Seebeck coefficient, wherein the first and second thermoelectrically active elements are formed to extend through the Silicon-based material layer thickness, from the first surface to the second surface; forming electrically conductive interconnections in correspondence of the first surface and of the second surface of the layer of Silicon-based material, for electrically interconnecting the plurality of first thermoelectrically active elements and the plurality of second thermoelectrically active elements, and forming an input electrical terminal and an output electrical terminal electrically connected to the electrically conductive interconnections, wherein the first thermoelectric semiconductor material and the second thermoelectric semiconductor material comprise Silicon-based materials selected among porous Silicon or polycrystalline SiGe or polycrystalline Silicon.
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公开(公告)号:US20200024132A1
公开(公告)日:2020-01-23
申请号:US16207035
申请日:2018-11-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Lorenzo Baldo , Enri Duqi , Flavio Francesco Villa
Abstract: A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
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