CAPACITOR AND ELECTRONIC DEVICE INCLUDING THE SAME

    公开(公告)号:US20240258366A1

    公开(公告)日:2024-08-01

    申请号:US18350397

    申请日:2023-07-11

    CPC classification number: H01L28/90 H10B12/315

    Abstract: A capacitor is provided. The capacitor includes a first electrode, a second electrode disposed to face the first electrode, a dielectric layer of a rutile phase, disposed between the first electrode and the second electrode, and an interface layer between the first electrode and the dielectric layer, wherein the interface layer includes a first interface layer and a second interface layer, the first interface layer is adjacent to the first electrode, the second interface layer is adjacent to the dielectric layer, the first interface layer includes a conductive metal oxide having a work function in a range of about 4.8 eV to about 6.0 eV, the second interface layer includes a metal oxide having a rutile-phase crystal structure, and a thickness of the second interface layer is smaller than a thickness of the first interface layer.

Patent Agency Ranking