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公开(公告)号:US20230290783A1
公开(公告)日:2023-09-14
申请号:US18059639
申请日:2022-11-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jeongsoon Kong , Myung Gil Kang , Sanghoon Baek
IPC: H01L27/118
CPC classification number: H01L27/11807 , H01L2027/11831 , H01L2027/11853 , H01L2027/11881
Abstract: A semiconductor device includes a substrate including an N-stack cell, a buffer cell and an M-stack cell that are on the substrate, the buffer cell being between the N-stack and M-stack cells, an active pattern extending from the N-stack cell to the M-stack cell via the buffer cell, an N-stack channel pattern on the active pattern of the N-stack cell, an M-stack channel pattern on the active pattern of the M-stack cell, a dummy channel pattern on the active pattern of the buffer cell, an N-stack epitaxial pattern between the N-stack channel pattern and the dummy channel pattern, and an M-stack epitaxial pattern between the M-stack channel pattern and the dummy channel pattern. The N-stack channel pattern includes stacked N semiconductor patterns. The M-stack channel pattern includes stacked M semiconductor patterns. Each of N and M is an integer number of 2 or more, and M is greater than N.
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12.
公开(公告)号:US20220189944A1
公开(公告)日:2022-06-16
申请号:US17373510
申请日:2021-07-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung Ho Do , Sanghoon Baek
IPC: H01L27/02 , H01L27/092 , H01L23/528 , H01L29/417 , H01L29/78 , H01L29/06 , H01L29/423 , H01L29/786 , G06F30/392
Abstract: A semiconductor device includes a first logic gate defined within a first unit cell footprint on a semiconductor substrate. The first logic gate includes a first field effect transistor including a first gate electrode and a first source/drain region, and a second field effect transistor including a second gate electrode and a second source/drain region. A first wiring pattern is provided, which extends in a first direction across a portion of the first unit cell footprint. The first wiring pattern is electrically connected to at least one of the first gate electrode and the second source/drain region, and has: (i) a first terminal end within a perimeter of the first unit cell footprint, and (ii) a second terminal end, which extends outside the perimeter of the first unit cell footprint but is not electrically connected to any current carrying region of any semiconductor device that is located outside the perimeter of the first unit cell footprint.
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公开(公告)号:US09773772B2
公开(公告)日:2017-09-26
申请号:US15094586
申请日:2016-04-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seungyoung Lee , Sanghoon Baek , Jung-Ho Do
IPC: H01L23/52 , H01L21/4763 , H01L27/02 , H01L23/522 , H01L23/528 , H01L29/78 , H01L29/66
CPC classification number: H01L23/5226 , H01L23/528 , H01L27/0207 , H01L29/66628 , H01L29/7848
Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, an insulating layer on the gate electrode, first and second lower vias in the insulating layer, first and second lower metal lines provided on the insulating layer and respectively connected to the first and second lower vias, and first and second upper metal lines provided on and respectively connected to the first and second lower metal lines. When viewed in a plan view, the first lower via is overlapped with the second upper metal line, and the second lower via is overlapped with the first upper metal line.
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公开(公告)号:US09640444B2
公开(公告)日:2017-05-02
申请号:US14807220
申请日:2015-07-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jung-Ho Do , Sanghoon Baek , Sang-Kyu Oh , Kwanyoung Chun , Sunyoung Park , Taejoong Song
IPC: H01L21/70 , H01L21/8238 , H01L27/092 , H01L27/02
CPC classification number: H01L21/823871 , H01L27/0207 , H01L27/092
Abstract: Provided is a method of fabricating a semiconductor device with a field effect transistor. The method may include forming a first gate electrode and a second gate electrode extending substantially parallel to each other and each crossing a PMOSFET region on a substrate and an NMOSFET region on the substrate; forming an interlayered insulating layer covering the first gate electrode and the second gate electrode; patterning the interlayered insulating layer to form a first sub contact hole on the first gate electrode, the first sub contact hole being positioned between the PMOSFET region and the NMOSFET region, when viewed in a plan view; and patterning the interlayered insulating layer to form a first gate contact hole and to expose a top surface of the second gate electrode, wherein the first sub contact hole and the first gate contact hole form a single communication hole.
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公开(公告)号:US09449970B2
公开(公告)日:2016-09-20
申请号:US14829650
申请日:2015-08-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung-Ho Do , Sanghoon Baek , Sunyoung Park , Moo-Gyu Bae , Taejoong Song
IPC: H01L29/76 , H01L29/94 , H01L27/088 , H01L27/02 , H01L29/06 , H01L27/118
CPC classification number: H01L27/088 , H01L27/0207 , H01L27/0886 , H01L27/092 , H01L27/0924 , H01L27/11807 , H01L29/0642 , H01L2027/11874
Abstract: A semiconductor device includes first and second gate structures extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, a third gate structure extending in the first direction and provided between the first and second gate structures, a first contact connected to the first gate structure and having a first width in the second direction, a second contact connected to the second gate structure and having a second width in the second direction, and a third contact connected to the third gate structure and having a third width in the second direction. The first, second, and third contacts may be aligned with each other in the second direction to constitute one row. The first and second widths may be greater than the third width.
Abstract translation: 半导体器件包括在第一方向上延伸并且沿与第一方向相交的第二方向彼此间隔开的第一和第二栅极结构,在第一方向上延伸并设置在第一和第二栅极结构之间的第三栅极结构, 连接到第一栅极结构并且具有在第二方向上的第一宽度的第二接触,连接到第二栅极结构并且在第二方向上具有第二宽度的第二接触,以及连接到第三栅极结构并具有第三栅极结构的第三接触 宽度在第二个方向。 第一,第二和第三触点可以在第二方向上彼此对准以构成一行。 第一和第二宽度可以大于第三宽度。
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公开(公告)号:US12159834B2
公开(公告)日:2024-12-03
申请号:US17532052
申请日:2021-11-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungho Do , Sanghoon Baek
IPC: H01L23/528 , H01L21/8238 , H01L27/02 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/78 , H01L29/786
Abstract: Disclosed is a semiconductor device comprising a mixed height cell on a substrate, and a first power line and a second power line that run across the mixed height cell. First to third line tracks are defined between the first power line and the second power line. A fourth line track is defined adjacent to the second power line. The second power line is between the third line track and the fourth line track. The mixed height cell includes a plurality of lower lines aligned with the first to fourth line tracks. A cell height of the mixed height cell is about 1.25 times to about 1.5 times a distance between a first point of the first power line and a corresponding second point of the second power line.
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17.
公开(公告)号:US12019965B2
公开(公告)日:2024-06-25
申请号:US17225773
申请日:2021-04-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jisu Yu , Jaeho Park , Sanghoon Baek , Hyeongyu You , Seungyoung Lee , Seungman Lim
IPC: G06F30/392 , G06F30/3953 , G06F30/398 , H01L23/528 , H01L29/423 , G06F117/12
CPC classification number: G06F30/392 , G06F30/3953 , G06F30/398 , H01L23/5283 , H01L23/5286 , H01L29/42376 , G06F2117/12
Abstract: A method includes placing standard cells based on a standard cell library and generating layout data, and placing a filler cell selected from among a first type filler cell and a second type filler cell by using the layout data. The filler cell is placed based on a density of a pattern formed in the standard cell. The standard cell library includes data defining the first and second type filler cells. A density of a contact formed on an active region of the second type filler cell to contact the active region of the second type filler cell is lower than a density of a contact formed on an active region of a first type filler cell to contact the active region of the first type filler cell.
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公开(公告)号:USRE49780E1
公开(公告)日:2024-01-02
申请号:US16916419
申请日:2020-06-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejoong Song , Sanghoon Baek , Sungwe Cho , Jung-Ho Do , Giyoung Yang , Jinyoung Lim
IPC: H01L27/02 , H01L27/118 , G06F30/394
CPC classification number: G06F30/394 , H01L27/0207 , H01L27/11807
Abstract: A method of designing a semiconductor device includes preparing a standard cell layout including a layout out a preliminary pin pattern in at least one interconnection layout, performing a routing step to connect the preliminary pin pattern to a high-level interconnection layout, and generating a pin pattern in the interconnection layout, based on hitting information obtained at the completion of the routing step. The pin pattern is smaller than the preliminary pin pattern.
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公开(公告)号:US11705456B2
公开(公告)日:2023-07-18
申请号:US17200179
申请日:2021-03-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sanghoon Baek , Jungho Do , Jaewoo Seo , Jisu Yu
IPC: H01L27/118 , H01L27/02 , H01L23/48
CPC classification number: H01L27/11807 , H01L23/481 , H01L27/0207 , H01L2027/11829 , H01L2027/11864 , H01L2027/11881
Abstract: A semiconductor device includes a first standard cell disposed on a substrate in a first row and having a first cell height; a second standard cell disposed on the substrate in a second row, adjacent to the first row, second standard cell having a second cell height, different from the first cell height; and a power line extending in a first direction along a boundary between the first standard cell and the second standard cell.
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公开(公告)号:US11626516B2
公开(公告)日:2023-04-11
申请号:US17138027
申请日:2020-12-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sanghoon Baek , Jeong Soon Kong , Jung Ho Do
IPC: H01L29/78 , H01L27/088 , H01L29/66 , H01L29/417
Abstract: Provided is an integrated circuit implemented by a plurality of vertical field effect transistors (VFETs) in one or more semiconductor cells, wherein a distance between a pair of second vertical channel structures of a first cell and an adjacent pair of first vertical channel structures in a second cell, all facing a cell boundary between the first and second cells, is the same as a distance between the pair of the first vertical channel structures and a pair of second vertical channel structures arranged next to the pair of the first vertical channel structures in the first cell.
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