公开(公告)号：US20230078095A1

公开(公告)日：2023-03-16

申请号：US17695062

申请日：2022-03-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dougyong SUNG ,  Youngdo Kim ,  Byeongsang Kim ,  Yunhwan Kim ,  Jungmo Yang ,  Sejin Oh ,  Sungho Jang

IPC: H01J37/32

Abstract: A plasma etching apparatus includes a housing having a processing space; a support inside the housing, the support configured to support a substrate and including at least one lower electrode; at least one upper electrode facing the at least one lower electrode; a sidewall electrode disposed on a sidewall of the housing; a lower radiofrequency (RF) power source connected to the at least one lower electrode and configured to apply RF power; an upper RF power source connected to the at least one upper electrode and configured to apply RF power; a lower insulator adjacent to the at least one lower electrode; an upper insulator adjacent to the at least one upper electrode; at least one lower detector embedded in the lower insulator; and at least one upper detector embedded in the upper insulator.

公开(公告)号：US12125687B2

公开(公告)日：2024-10-22

申请号：US17709613

申请日：2022-03-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youngdo Kim ,  Sungyong Lim ,  Daewon Kang ,  Sungyeol Kim ,  Sangki Nam ,  Myunggeun Song ,  Byungkook Cho ,  Hyeoncheol Jin ,  Jonghun Pi

IPC: H01J37/32 ,  H01L21/683

CPC classification number: H01J37/32715 ,  H01J37/32183 ,  H01J37/32935 ,  H01J2237/24564 ,  H01J2237/3341 ,  H01L21/6833

Abstract: A semiconductor processing system includes: a semiconductor processing chamber including an electrostatic chuck disposed in a chamber housing, and a first power supplier for supplying first radio frequency (RF) power to an internal electrode disposed in the electrostatic chuck; a voltage measuring device for measuring a voltage corresponding to the first RF power to output a digital signal; and a control device for outputting an interlock control signal to the semiconductor processing chamber, when it is determined that the voltage increases to be within a predetermined reference range based on the digital signal. The electrostatic chuck is configured to enable a wafer to be seated on a surface of the electrostatic chuck.

公开(公告)号：US10330971B2

公开(公告)日：2019-06-25

申请号：US15481812

申请日：2017-04-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Song Hee Jung ,  Jin Hong Jeong ,  Youngdo Kim ,  Joohyun Kim ,  Taesung Kim ,  Hyunchang Shin ,  Hunhee Lee

IPC: G02F1/133 ,  G02F1/155 ,  H01L27/32 ,  H01L51/52 ,  G02F1/1335 ,  G02F1/1362

Abstract: A display apparatus, an electronic device including the same, and an operating method thereof are disclosed. The display apparatus may include: a window layer configured to contribute to at least one outward appearance of the display apparatus; a pixel layer including at least one pixel configured to display graphic information received from a processor that is functionally connected to the display apparatus, a driving wiring that drives the pixel, and a Black Matrix (BM) disposed in a BM area that does not include the at least one pixel; and a color layer disposed in at least one direction of the pixel layer, and configured to allow a designated color to be exposed to an outside through the window layer when the at least one pixel does not operate, wherein the pixel layer may include: a first substrate including a first plane facing a first direction, and a second plane facing a second direction opposite the first direction; and a pixel electrode, a light-emitter, a cathode, and a second substrate disposed between the first plane of the first substrate and the window layer, and wherein the color layer may be disposed in the BM area.

公开(公告)号：US20250029578A1

公开(公告)日：2025-01-23

申请号：US18905310

申请日：2024-10-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongkoo HER ,  Youngdo Kim ,  Jungbae Bae ,  Hyunchang Shin ,  Joongyu Lee ,  Songhee Jung ,  Jaeseung Choi

IPC: G09G5/10 ,  G09G3/3233

Abstract: Various embodiments disclose a method and an apparatus including a display, a memory including information on a number of duty cycles per one refresh period for emitting light by pixels of the display corresponding to each of a plurality of refresh rates of the display, and a processor, wherein the processor is configured to control the electronic device to perform an operation according to a first number of duty cycles based on the display operating at a first refresh rate, and perform an operation according to a second number of duty cycles based on the display operating at a second refresh rate, wherein the first number is less than the second number based on the first refresh rate being higher than the second refresh rate.

公开(公告)号：US11984297B2

公开(公告)日：2024-05-14

申请号：US17711181

申请日：2022-04-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sejin Oh ,  Youngdo Kim ,  Sanghun Kim ,  Sungyeol Kim ,  Younghwan Kim ,  Taemin Earmme ,  Changyun Lee ,  Sunghun Jang

IPC: H01J37/32 ,  H01L21/311

CPC classification number: H01J37/32183 ,  H01J37/32165 ,  H01J37/32568 ,  H01L21/31116 ,  H01J2237/334

Abstract: A plasma control device includes a matching circuit, a resonance circuit, and a controller. The matching circuit is connected to a first electrode of a plasma chamber including the first electrode and a second electrode, and matches impedance of a radio frequency (RF) power by an RF driving signal with an impedance of the first electrode. The RF driving signal is based on a first RF signal having a first frequency. The resonance circuit is connected between the second electrode and a ground voltage, and controls plasma distribution within the plasma chamber by providing resonance with respect to harmonics associated with the first frequency and by adjusting a ground impedance between the second electrode and the ground voltage. The controller provides the resonance circuit with a capacitance control signal associated with the resonance and switch control signals associated with the ground impedance.

公开(公告)号：US11084250B2

公开(公告)日：2021-08-10

申请号：US16075888

申请日：2017-01-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Song Hee Jung ,  Youngdo Kim ,  Joohyun Kim ,  Taesung Kim ,  Hyunchang Shin ,  Keunsik Lee

IPC: B32B3/26 ,  B32B7/14 ,  G09F9/30 ,  G02F1/1333 ,  H04M1/02 ,  G06F3/041 ,  H01L27/32 ,  G02F1/1335 ,  G06F1/16 ,  B32B5/14 ,  B32B3/30 ,  B32B7/02

Abstract: According to various embodiments, a display or an electronic device comprising the same comprises: a first layer comprising a first member; a second layer which is formed beneath the first layer, the second layer comprising a second member; and a third layer which is formed between the first layer and the second layer, the third layer comprising an adhesive member. The third layer has a first area which may be formed by using a first adhesive member having a first attribute, and a second which may be formed by using a second adhesive member having a second attribute. In addition, other various embodiments are also possible.

公开(公告)号：US11069323B2

公开(公告)日：2021-07-20

申请号：US16906385

申请日：2020-06-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongkoo Her ,  Youngdo Kim ,  Jungbae Bae ,  Hyunchang Shin ,  Joongyu Lee ,  Songhee Jung ,  Jaeseung Choi

IPC: G09G5/10 ,  G09G3/3233

Abstract: Various embodiments disclose a method and an apparatus including a display, a memory including information on a number of duty cycles per one refresh period for emitting light by pixels of the display corresponding to each of a plurality of refresh rates of the display, and a processor, wherein the processor is configured to control the electronic device to perform an operation according to a first number of duty cycles based on the display operating at a first refresh rate, and perform an operation according to a second number of duty cycles based on the display operating at a second refresh rate, wherein the first number is less than the second number based on the first refresh rate being higher than the second refresh rate.