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    Cooling station with integrated isolation valves
    11.
    发明授权
    Cooling station with integrated isolation valves 有权

    公开(公告)号：US11127606B1

    公开(公告)日：2021-09-21

    申请号：US16046051

    申请日：2018-07-26

    Applicant: Seagate Technology LLC

    Inventor： Samuel Lewis Tanaka

    IPC: H01L21/67 ,  C23C16/46 ,  H01L21/673 ,  C23C16/455

    Abstract: An apparatus comprises a chamber configured to receive a medium. The chamber comprises a first cooled structure having a first surface and a second cooled structure having a first surface. The first surface of the first cooled structure faces the first surface of the second cooled structure and is positioned a predetermined distance therefrom to form a gap, and the gap is configured to receive the medium. The chamber further includes a first gas inlet positioned proximate the center of the first cooled structure, a first slidable structure configured to seal a first side of the chamber when in a closed position, and a second slidable structure, positioned opposite the first slidable structure, and configured to seal a second side of the chamber when in a closed position.

    Electrode including a continuously smooth channel
    13.
    发明授权
    Electrode including a continuously smooth channel 有权

    公开(公告)号：US10854235B2

    公开(公告)日：2020-12-01

    申请号：US15853286

    申请日：2017-12-22

    Applicant: Seagate Technology LLC

    Inventor： Samuel Lewis Tanaka

    IPC: G11B5/84 ,  B33Y10/00 ,  B33Y80/00 ,  B29C64/153 ,  G11B5/00

    Abstract: An apparatus includes an electrode and a first channel segment within the electrode. A second channel segment is within the electrode, wherein the second channel segment is parallel to the first channel segment. A third channel segment is within the electrode. The third channel segment connects the first channel segment and the second channel segment, and the third channel segment includes a continuously smooth radial bend. A heating element is attached to the electrode.

    FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE
    15.
    发明申请
    FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE 有权
    用于热阴极PECVD源的FILAMENT HOLDER

    公开(公告)号：US20160163517A1

    公开(公告)日：2016-06-09

    申请号：US14939659

    申请日：2015-11-12

    Applicant: Seagate Technology LLC

    Inventor： Samuel Lewis Tanaka ,  Christopher L. Platt ,  Thomas Larson Greenberg

    IPC: H01J37/32 ,  H01K1/18

    CPC classification number: H01J37/32568 ,  C23C16/26 ,  C23C16/50 ,  H01J37/3233 ,  H01J37/32403 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32541 ,  H01J2237/032 ,  H01J2237/3321 ,  H01K1/18

    Abstract: A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.

    Abstract translation: 化学气相沉积源，其包括至少一个板，第一和第二电连接柱与所述至少一个板连接。 化学气相沉积源还包括具有第一端和第二端的细丝。 灯丝的第一端电连接到第一电连接柱，灯丝的第二端电连接到第二电连接柱。 化学气相沉积源还包括与至少一个板电绝缘的至少一个灯丝架。 所述至少一个灯丝保持器将所述灯丝的一部分保持在所述第一端和所述第二端之间。

    POSITIONING APPARATUS
    16.
    发明申请
    POSITIONING APPARATUS 有权
    定位装置

    公开(公告)号：US20150165578A1

    公开(公告)日：2015-06-18

    申请号：US14105065

    申请日：2013-12-12

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Daniel Peinovich ,  Samuel Lewis Tanaka ,  Thomas Larson Greenberg

    IPC: B23Q3/18

    CPC classification number: H01L21/67703 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707 ,  Y10T29/49998

    Abstract: Provided herein is an apparatus including a loader configured to position a workpiece in a holding fixture. In some embodiments, the holding fixture includes an opening configured to removably receive the workpiece therein and hold the workpiece in a target position within the opening. The apparatus also includes position detecting means configured to translate a sensor to a predetermined location relative to the holding fixture and further configured to translate the workpiece by a predetermined increment relative to the predetermined location to position the workpiece in the target position.

    Abstract translation: 本文提供了一种装置，其包括装载器，其构造成将工件定位在保持夹具中。 在一些实施例中，保持夹具包括构造成可移除地将工件接收在其中并将工件保持在开口内的目标位置的开口。 该装置还包括位置检测装置，其被配置为相对于保持夹具将传感器平移到预定位置，并进一步构造成相对于预定位置使工件平移预定的增量，以将工件定位在目标位置。

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