公开(公告)号：US20080314870A1

公开(公告)日：2008-12-25

申请号：US11883831

申请日：2006-01-30

申请人： Yuki Inoue ,  Akira Fukunaga ,  Takahiro Ogawa

发明人： Yuki Inoue ,  Akira Fukunaga ,  Takahiro Ogawa

IPC分类号： C23F1/00 ,  B08B5/00 ,  B08B1/00 ,  B08B13/00 ,  B05C21/00 ,  C23F1/08 ,  B08B5/04 ,  B05D3/00

CPC分类号： H01L21/68728 ,  B08B1/04 ,  H01L21/67034 ,  H01L21/67046 ,  H01L21/67051 ,  Y10S134/902

摘要： This invention provides a substrate processing method including a step of covering in advance the surface of a substrate W with water (28), a step of holding the substrate W generally horizontally with the surface facing upward and rotating it in a horizontal plane (10), and a step of blowing to the substrate top surface drying gas flow that is thin in area in comparison with the substrate W surface (30, 40), in which the water is removed from the substrate top surface by the rotation in the horizontal plane while blowing the drying gas flow, a substrate processing apparatus for implementing the above method, and a control program for use with the above method and apparatus. With this invention, it is possible to dry a cleaned substrate without locally leaving water droplets.

摘要翻译： 本发明提供了一种基板处理方法，其包括以下步骤：预先用水（28）覆盖基板W的表面;将基板W大致水平地保持在表面朝上并在水平面（10）中旋转的步骤， 以及与基板W表面（30,40）相比面积薄的基板顶面干燥气体流动的步骤，其中通过水平面中的旋转从基板顶表面去除水 同时吹干燥气流，用于实现上述方法的基板处理装置以及与上述方法和装置一起使用的控制程序。 利用本发明，可以在不局部地留下水滴的情况下干燥清洁的基板。

公开(公告)号：US06543080B1

公开(公告)日：2003-04-08

申请号：US09635848

申请日：2000-08-11

申请人： Hiroshi Tomita ,  Soichi Nadahara ,  Mitsuhiko Shirakashi ,  Kenya Ito ,  Yuki Inoue

发明人： Hiroshi Tomita ,  Soichi Nadahara ,  Mitsuhiko Shirakashi ,  Kenya Ito ,  Yuki Inoue

IPC分类号： B08B312

CPC分类号： B08B3/12

摘要： A semiconductor substrate cleaning apparatus and method are capable of efficiently removing contamination from both the obverse and reverse sides of a semiconductor substrate. A single cleaning liquid supply nozzle for supplying a cleaning liquid to both the obverse and reverse sides of a semiconductor substrate to be cleaned is placed at a distance from the outer peripheral edge of the substrate. An ultrasonic vibrator applies ultrasonic waves to both the obverse and reverse sides of the substrate. Four driving rollers are disposed in contact with the outer peripheral edge of the substrate. The driving rollers are adapte to rotate while being engaged with the outer peripheral edge of the substrate thereby drivingly rotating the substrate.

摘要翻译： 半导体衬底清洁装置和方法能够有效地去除半导体衬底的正面和反面两侧的污染物。 将待清洗的半导体衬底的正面和反面两侧的清洗液供给单个清洗液供给喷嘴设置在与衬底的外周边缘一定距离处。 超声波振动器对基板的正反面施加超声波。 四个驱动辊设置成与基板的外周边缘接触。 驱动辊适于旋转，同时与基板的外周边缘接合，从而驱动旋转基板。

公开(公告)号：US09680537B2

公开(公告)日：2017-06-13

申请号：US14238273

申请日：2012-08-14

申请人： Yuki Inoue ,  Tetsushi Abe

发明人： Yuki Inoue ,  Tetsushi Abe

IPC分类号： H04L5/00 ,  H04B7/06 ,  H04L1/00 ,  H04B7/04 ,  H04L27/26 ,  H04W16/28 ,  H04B7/10 ,  H04B7/0417 ,  H04B7/0456

CPC分类号： H04B7/0417 ,  H04B7/0456 ,  H04B7/0617 ,  H04B7/0626 ,  H04B7/063 ,  H04B7/0632 ,  H04B7/0639 ,  H04B7/0695 ,  H04B7/10 ,  H04L1/0026 ,  H04L5/0057 ,  H04L27/261 ,  H04W16/28

摘要： The present invention is designed to reduce the increase in the amount of the calculation process in a mobile station and the amount of CSI feedback data, and also prevent the amount of overall system capacity from decreasing. This radio communication system (1) has a radio base station (200) which can form a plurality of beams that are vertically sectorized. The radio base station (200), using an array antenna (10), forms at least the first beam that is directed to the cell edge side and a second beam that is directed to the cell center side, in parallel. A mobile station (100) measures channel quality by extracting reference signals from each of the first beam and the second beam, generates a communication quality feedback signal including channel quality measured from at least one of the beams, and feeds this back to the radio base station (200) via the uplink.

公开(公告)号：US20140211731A1

公开(公告)日：2014-07-31

申请号：US14238273

申请日：2012-08-14

申请人： Yuki Inoue ,  Tetsushi Abe

发明人： Yuki Inoue ,  Tetsushi Abe

IPC分类号： H04B7/04 ,  H04L5/00

CPC分类号： H04B7/0417 ,  H04B7/0456 ,  H04B7/0617 ,  H04B7/0626 ,  H04B7/063 ,  H04B7/0632 ,  H04B7/0639 ,  H04B7/0695 ,  H04B7/10 ,  H04L1/0026 ,  H04L5/0057 ,  H04L27/261 ,  H04W16/28

摘要： The present invention is designed to reduce the increase in the amount of the calculation process in a mobile station and the amount of CSI feedback data, and also prevent the amount of overall system capacity from decreasing. This radio communication system (1) has a radio base station (200) which can form a plurality of beams that are vertically sectorized. The radio base station (200), using an array antenna (10), forms at least the first beam that is directed to the cell edge side and a second beam that is directed to the cell center side, in parallel. A mobile station (100) measures channel quality by extracting reference signals from each of the first beam and the second beam, generates a communication quality feedback signal including channel quality measured from at least one of the beams, and feeds this back to the radio base station (200) via the uplink.

摘要翻译： 本发明旨在减少移动台中的计算处理量的增加和CSI反馈数据量的增加，并且还防止整个系统容量的减少。 该无线电通信系统（1）具有可以形成垂直分割的多个波束的无线电基站（200）。 使用阵列天线（10）的无线电基站（200）至少形成指向小区边缘侧的第一波束和并行地指向小区中心侧的第二波束。 移动站（100）通过从第一波束和第二波束中的每一个提取参考信号来测量信道质量，产生包括从至少一个波束测量的信道质量的通信质量反馈信号，并将其馈送回无线电基站 站（200）。

公开(公告)号：US08781407B2

公开(公告)日：2014-07-15

申请号：US13207561

申请日：2011-08-11

申请人： Yuki Inoue ,  Keizo Cho

发明人： Yuki Inoue ,  Keizo Cho

IPC分类号： H04B1/38

CPC分类号： H01Q21/061 ,  H01Q1/246 ,  H01Q3/26 ,  H01Q21/28 ,  H01Q21/29 ,  H04B7/0413 ,  H04B7/0691

摘要： An antenna equipment includes an array antenna including a plurality of antenna elements configured to be grouped into at least one group according to each of N communication types, where N is an integer greater than or equal to 2, a selecting part selecting one of the N communication types, a transmitting part modulating outgoing data to generate an outgoing signal for antenna element or antenna elements belonging to each group for the selected communication type, and a receiving part demodulating an incoming signal from antenna element or antenna elements belonging to each group for the selected communication type to generate incoming data.

摘要翻译： 天线设备包括：阵列天线，其包括多个天线元件，所述多个天线元件被配置为根据N个通信类型中的每一个被组合成至少一个组，其中N是大于或等于2的整数;选择部分，选择N 通信类型，调制输出数据以产生属于所选通信类型的每个组的天线元件或天线元件的发送部分的发送部分，以及对属于每个组的天线元件或天线元件的输入信号进行解调的接收部分， 选择的通信类型来生成传入数据。

公开(公告)号：US20140192761A1

公开(公告)日：2014-07-10

申请号：US14238264

申请日：2012-08-14

申请人： Yuki Inoue ,  Tetsushi Abe

发明人： Yuki Inoue ,  Tetsushi Abe

IPC分类号： H04B7/04 ,  H04W72/04

CPC分类号： H04B7/0417 ,  H04B7/024 ,  H04B7/0456 ,  H04B7/0473 ,  H04B7/0626 ,  H04B7/063 ,  H04B7/0632 ,  H04B7/0639 ,  H04B7/10 ,  H04W16/28 ,  H04W24/10 ,  H04W72/0413

摘要： The present invention is designed to reduce the space to install antennas and still increase the system capacity despite the state of the distribution of user terminals in cells. According to the radio communication method of the present invention, a radio base station apparatus selects precoding vectors from a codebook that is set in advance to be uneven with respect to the direction of the arrangement of antenna elements, based on communication quality information of the user terminals in the cell, multiplies signals to supply to each antenna element by the selected precoding vectors, and transmits the signals multiplied by the precoding vectors to the user terminals, and the user terminal receives a signal from the radio base station apparatus, extracts a reference signal from the received signal and measures channel quality; and feeds back a communication quality feedback signal, including the measured channel quality, to the radio base station apparatus, via the uplink.

摘要翻译： 本发明旨在减少安装天线的空间，尽管用户终端在小区中的分布状态仍然增加系统容量。 根据本发明的无线通信方法，无线基站装置基于用户的通信质量信息，从预先设定的码本中选择相对于天线元件的配置方向不均匀的预编码矢量 单元中的终端乘以信号以通过所选择的预编码向量提供给每个天线元件，并将乘以预编码矢量的信号发送给用户终端，并且用户终端从无线基站装置接收信号，提取参考 来自接收信号的信号并测量信道质量; 并且经由上行链路将包括所测量的信道质量的通信质量反馈信号反馈给无线基站装置。

公开(公告)号：US20140177466A1

公开(公告)日：2014-06-26

申请号：US14238268

申请日：2012-08-15

申请人： Yuki Inoue ,  Tetsushi Abe

发明人： Yuki Inoue ,  Tetsushi Abe

IPC分类号： H04W72/08 ,  H04B7/04 ,  H04L5/00

CPC分类号： H04W72/085 ,  H04B7/0456 ,  H04B7/0469 ,  H04B7/0617 ,  H04B7/0619 ,  H04B7/0639 ,  H04B7/0689 ,  H04L5/0023 ,  H04L5/0048 ,  H04L5/0053 ,  H04L25/0204 ,  H04L25/0228 ,  H04L25/03343 ,  H04L25/03891 ,  H04W72/046

摘要： The present invention is designed to execute adequate signaling even when individual user terminals perform communication to support separate types of communication, in MIMO transmission to use antennas having varying antenna configurations depending on the type of communication. A radio base station (200) has an antenna that has varying antenna configurations between at least two types of communication and that can transmit signals to all areas which the radio base station covers, in an antenna configuration to support at least one communication type 1, allocates radio resources to a downlink signal including capacities of a user terminal and a signal type to match a communication type, multiplexes a plurality of reference signals to be used in each communication type on the same resource block, generates precoding weights which allow the antenna to form a number of beams to match the communication type, and multiplies a downlink signal to supply to the antenna by the generated precoding weights.

摘要翻译： 本发明被设计为即使在各个用户终端执行通信以支持单独类型的通信时，也可以在MIMO传输中执行适当的信令，以根据通信类型使用具有变化的天线配置的天线。 无线电基站（200）具有在至少两种类型的通信之间具有变化的天线配置的天线，并且可以以天线配置来发送信号到无线电基站所覆盖的所有区域以支持至少一种通信类型1， 将无线电资源分配给包括用户终端的容量和信号类型的下行链路信号以匹配通信类型，在同一资源块上复用要在每种通信类型中使用的多个参考信号，生成预编码权重，其允许天线 形成多个波束以匹配通信类型，并且通过所生成的预编码权重将下行链路信号乘以天线。

公开(公告)号：US20130012225A1

公开(公告)日：2013-01-10

申请号：US13618233

申请日：2012-09-14

申请人： Yuki Inoue ,  Keizo Cho ,  Shinichi Mori ,  Hiroyuki Hosono ,  Akira Ishii ,  Kei Igarashi

发明人： Yuki Inoue ,  Keizo Cho ,  Shinichi Mori ,  Hiroyuki Hosono ,  Akira Ishii ,  Kei Igarashi

IPC分类号： H04W72/08

CPC分类号： H04W16/08 ,  H04W4/02 ,  H04W24/02 ,  H04W84/045

摘要： A disclosed base station includes a communication unit configured to receive from a mobile station a first report signal including base station specification information specifying a base station, reception quality information indicating reception quality of a signal received from the specified base station, and change request information requesting to change communication quality between the mobile station and the specified base station; and an automatic area control unit configured to determine whether the base station is specified by the base station specification information, to obtain location information indicating the location of the mobile station if the base station is specified by the base station specification information, and to change at least one base station parameter based on the reception quality information and the location information to change the reception quality at the location of the mobile station.

摘要翻译： 所公开的基站包括：通信单元，被配置为从移动台接收包括指定基站的基站指定信息的第一报告信号，指示从指定基站接收到的信号的接收质量的接收质量信息，以及请求的改变请求信息 改变移动台与指定基站之间的通信质量; 以及自动区域控制单元，被配置为通过基站指定信息来确定基站是否被指定，以便如果基站由基站指定信息指定的，则获得指示移动台的位置的位置信息，并且在 基于接收质量信息和位置信息的至少一个基站参数来改变移动台位置处的接收质量。

公开(公告)号：US20100311456A1

公开(公告)日：2010-12-09

申请号：US12666414

申请日：2008-07-02

申请人： Yuki Inoue ,  Keizo Cho

发明人： Yuki Inoue ,  Keizo Cho

IPC分类号： H04B7/00

CPC分类号： H04W16/28 ,  H04W24/08

摘要： A disclosed base station apparatus for a mobile communication system includes a collection unit collecting measured data from one or more user equipment terminals with respect to each direction of arrival, the measured data including at least quality information of a downlink signal, a conversion unit converting the measured data into an evaluation value in accordance with a predetermined evaluation function, a deriving unit deriving a weight update amount determining directivity based on an angular distribution of the plural evaluation values, and a transmission unit transmitting a downlink signal weighted based on the weight update amount.

摘要翻译： 所公开的用于移动通信系统的基站装置包括收集单元，用于收集来自一个或多个用户设备终端相对于每个到达方向的测量数据，测量数据至少包括下行链路信号的质量信息，转换单元 根据预定的评估函数将测量数据转换成评估值;导出单元，基于多个评估值的角度分布导出确定方向性的权重更新量;以及发送单元，基于权重更新量发送加权的下行链路信号 。

公开(公告)号：USD624954S1

公开(公告)日：2010-10-05

申请号：US29357321

申请日：2010-03-10

申请人： Masao Yoshikawa ,  Shigeyuki Takao ,  Yuki Inoue

设计人： Masao Yoshikawa ,  Shigeyuki Takao ,  Yuki Inoue