公开(公告)号：US06543080B1

公开(公告)日：2003-04-08

申请号：US09635848

申请日：2000-08-11

申请人： Hiroshi Tomita ,  Soichi Nadahara ,  Mitsuhiko Shirakashi ,  Kenya Ito ,  Yuki Inoue

发明人： Hiroshi Tomita ,  Soichi Nadahara ,  Mitsuhiko Shirakashi ,  Kenya Ito ,  Yuki Inoue

IPC分类号： B08B312

CPC分类号： B08B3/12

摘要： A semiconductor substrate cleaning apparatus and method are capable of efficiently removing contamination from both the obverse and reverse sides of a semiconductor substrate. A single cleaning liquid supply nozzle for supplying a cleaning liquid to both the obverse and reverse sides of a semiconductor substrate to be cleaned is placed at a distance from the outer peripheral edge of the substrate. An ultrasonic vibrator applies ultrasonic waves to both the obverse and reverse sides of the substrate. Four driving rollers are disposed in contact with the outer peripheral edge of the substrate. The driving rollers are adapte to rotate while being engaged with the outer peripheral edge of the substrate thereby drivingly rotating the substrate.

摘要翻译： 半导体衬底清洁装置和方法能够有效地去除半导体衬底的正面和反面两侧的污染物。 将待清洗的半导体衬底的正面和反面两侧的清洗液供给单个清洗液供给喷嘴设置在与衬底的外周边缘一定距离处。 超声波振动器对基板的正反面施加超声波。 四个驱动辊设置成与基板的外周边缘接触。 驱动辊适于旋转，同时与基板的外周边缘接合，从而驱动旋转基板。

公开(公告)号：US20060234503A1

公开(公告)日：2006-10-19

申请号：US10564980

申请日：2004-07-28

申请人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

发明人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

IPC分类号： H01L21/44 ,  B65G47/91

CPC分类号： H01L21/02052 ,  B08B1/04 ,  B08B3/02 ,  B08B2203/0229 ,  B08B2203/0288 ,  C23C18/1628 ,  C25D17/001 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051

摘要： The present invention relates to a substrate processing apparatus and a substrate processing method for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate such as a semiconductor wafer or a liquid crystal substrate. The present invention also relates to a substrate holding apparatus for holding and rotating a substrate. The substrate processing apparatus (1) for processing a substrate (W) while supplying a fluid to the substrate (W) includes a substrate holder (11) for holding and rotating the substrate (W), and a holder suction unit (24) for sucking the fluid from the substrate holder (11). The substrate holding apparatus includes a plurality of rollers (20) which are brought into contact with an edge portion of a substrate (W) so as to hold and rotate the substrate (W), and at least one moving mechanism (303a) for moving the rollers (20).

摘要翻译： 本发明涉及在旋转诸如半导体晶片或液晶基板的基板的同时进行化学液体处理，清洁处理，干燥处理等的基板处理装置和基板处理方法。 本发明还涉及用于保持和旋转衬底的衬底保持装置。 另外，在向基板（W）供给流体的同时，对基板（W）进行处理的基板处理装置（1）具备用于保持和旋转基板（W）的基板支架（11），以及用于 从基板支架（11）吸入流体。 基板保持装置包括与基板（W）的边缘部分接触以便​​保持和旋转基板（W）的多个辊（20），以及至少一个移动机构（303a），用于 移动辊子（20）。

公开(公告)号：US07578886B2

公开(公告)日：2009-08-25

申请号：US10564980

申请日：2004-07-28

申请人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

发明人： Kaoru Yamada ,  Takayuki Saito ,  Sumio Yabe ,  Kenya Ito ,  Masayuki Kamezawa ,  Masaya Seki ,  Ichiro Katakabe ,  Yuki Inoue

IPC分类号： B08B5/04

CPC分类号： H01L21/02052 ,  B08B1/04 ,  B08B3/02 ,  B08B2203/0229 ,  B08B2203/0288 ,  C23C18/1628 ,  C25D17/001 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051

摘要： A substrate processing apparatus and a substrate processing method is provided for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate such as a semiconductor wafer or a liquid crystal substrate. A substrate holding apparatus is provided for holding and rotating a substrate. The substrate processing apparatus for processing a substrate while supplying a fluid to the substrate includes a substrate holder for holding and rotating the substrate, and a holder suction unit for sucking the fluid from the substrate holder. The substrate holding apparatus includes a plurality of rollers which are brought into contact with an edge portion of a substrate so as to hold and rotate the substrate, and at least one moving mechanism for moving the rollers.

摘要翻译： 提供了一种基板处理装置和基板处理方法，用于在旋转诸如半导体晶片或液晶基板的基板的同时进行化学液体处理，清洁处理，干燥处理等。 提供用于保持和旋转衬底的衬底保持装置。 用于在向衬底供应流体的同时处理衬底的衬底处理设备包括用于保持和旋转衬底的衬底保持器，以及用于从衬底保持器吸取流体的保持器抽吸单元。 基板保持装置包括与基板的边缘部分接触以便​​保持和旋转基板的多个辊以及用于移动辊的至少一个移动机构。

公开(公告)号：US09379793B2

公开(公告)日：2016-06-28

申请号：US14238264

申请日：2012-08-14

申请人： Yuki Inoue ,  Tetsushi Abe

发明人： Yuki Inoue ,  Tetsushi Abe

IPC分类号： H04L1/00 ,  H04B7/04 ,  H04B7/02 ,  H04B7/06 ,  H04W16/28 ,  H04W72/04 ,  H04B7/10 ,  H04W24/10

CPC分类号： H04B7/0417 ,  H04B7/024 ,  H04B7/0456 ,  H04B7/0473 ,  H04B7/0626 ,  H04B7/063 ,  H04B7/0632 ,  H04B7/0639 ,  H04B7/10 ,  H04W16/28 ,  H04W24/10 ,  H04W72/0413

摘要： The present invention is designed to reduce the space to install antennas and still increase the system capacity despite the state of the distribution of user terminals in cells. According to the radio communication method of the present invention, a radio base station apparatus selects precoding vectors from a codebook that is set in advance to be uneven with respect to the direction of the arrangement of antenna elements, based on communication quality information of the user terminals in the cell, multiplies signals to supply to each antenna element by the selected precoding vectors, and transmits the signals multiplied by the precoding vectors to the user terminals, and the user terminal receives a signal from the radio base station apparatus, extracts a reference signal from the received signal and measures channel quality; and feeds back a communication quality feedback signal, including the measured channel quality, to the radio base station apparatus, via the uplink.

摘要翻译： 本发明旨在减少安装天线的空间，尽管用户终端在小区中的分布状态仍然增加系统容量。 根据本发明的无线通信方法，无线基站装置基于用户的通信质量信息，从预先设定的码本中选择相对于天线元件的配置方向不均匀的预编码矢量 单元中的终端乘以信号以通过所选择的预编码向量提供给每个天线元件，并将乘以预编码矢量的信号发送给用户终端，并且用户终端从无线基站装置接收信号，提取参考 来自接收信号的信号并测量信道质量; 并且经由上行链路将包括所测量的信道质量的通信质量反馈信号反馈给无线基站装置。

公开(公告)号：US08588835B2

公开(公告)日：2013-11-19

申请号：US12666414

申请日：2008-07-02

申请人： Yuki Inoue ,  Keizo Cho

发明人： Yuki Inoue ,  Keizo Cho

IPC分类号： H04B7/00

CPC分类号： H04W16/28 ,  H04W24/08

摘要： A disclosed base station apparatus for a mobile communication system includes a collection unit collecting measured data from one or more user equipment terminals with respect to each direction of arrival, the measured data including at least quality information of a downlink signal, a conversion unit converting the measured data into an evaluation value in accordance with a predetermined evaluation function, a deriving unit deriving a weight update amount determining directivity based on an angular distribution of the plural evaluation values, and a transmission unit transmitting a downlink signal weighted based on the weight update amount.

摘要翻译： 所公开的用于移动通信系统的基站装置包括收集单元，用于收集来自一个或多个用户设备终端相对于每个到达方向的测量数据，测量数据至少包括下行链路信号的质量信息，转换单元 根据预定的评估函数将测量数据转换成评估值;导出单元，基于多个评估值的角度分布导出确定方向性的权重更新量;以及发送单元，基于权重更新量发送加权的下行链路信号 。

公开(公告)号：USD691655S1

公开(公告)日：2013-10-15

申请号：US29431638

申请日：2012-09-10

申请人： Yuki Inoue ,  Masahiro Yasunaga

设计人： Yuki Inoue ,  Masahiro Yasunaga

公开(公告)号：US07578887B2

公开(公告)日：2009-08-25

申请号：US10765182

申请日：2004-01-28

申请人： Shinji Kajita ,  Ichiro Katakabe ,  Haruko Ono ,  Yuki Inoue ,  Sachiko Takeda

发明人： Shinji Kajita ,  Ichiro Katakabe ,  Haruko Ono ,  Yuki Inoue ,  Sachiko Takeda

IPC分类号： B08B3/00

CPC分类号： H01L21/67051

摘要： An apparatus for processing a substrate through successive steps including spin-drying the substrate with a single processing facility while preventing the substrate from being contaminated by a substrate processing liquid, etc. The apparatus for processing a substrate includes a substrate holder for holding and rotating a substrate, a scattering prevention cup for circumferentially surrounding the substrate held by the substrate holder to prevent a substrate processing liquid supplied to the substrate from being scattered around, and a scattering prevention cup cleaner for cleaning an inner wall surface of the scattering prevention cup.

摘要翻译： 一种用于通过连续步骤处理衬底的装置，包括用单一处理设备旋转衬底，同时防止衬底被衬底处理液体等污染。用于处理衬底的设备包括用于保持和旋转衬底的衬底保持器 衬底，用于周向地围绕由衬底保持器保持的衬底的防散射杯，以防止供应到衬底的衬底处理液体被散射;以及用于清洁散射防止杯的内壁表面的防散射杯清洁器。

公开(公告)号：US08688130B2

公开(公告)日：2014-04-01

申请号：US13618233

申请日：2012-09-14

申请人： Yuki Inoue ,  Keizo Cho ,  Shinichi Mori ,  Hiroyuki Hosono ,  Akira Ishii ,  Kei Igarashi

发明人： Yuki Inoue ,  Keizo Cho ,  Shinichi Mori ,  Hiroyuki Hosono ,  Akira Ishii ,  Kei Igarashi

IPC分类号： H04W40/00

CPC分类号： H04W16/08 ,  H04W4/02 ,  H04W24/02 ,  H04W84/045

摘要： A disclosed base station includes a communication unit configured to receive from a mobile station a first report signal including base station specification information specifying a base station, reception quality information indicating reception quality of a signal received from the specified base station, and change request information requesting to change communication quality between the mobile station and the specified base station; and an automatic area control unit configured to determine whether the base station is specified by the base station specification information, to obtain location information indicating the location of the mobile station if the base station is specified by the base station specification information, and to change at least one base station parameter based on the reception quality information and the location information to change the reception quality at the location of the mobile station.

摘要翻译： 所公开的基站包括：通信单元，被配置为从移动台接收包括指定基站的基站指定信息的第一报告信号，指示从指定基站接收到的信号的接收质量的接收质量信息，以及请求的改变请求信息 改变移动台与指定基站之间的通信质量; 以及自动区域控制单元，被配置为通过基站指定信息来确定基站是否被指定，以便如果基站由基站指定信息指定的，则获得指示移动台的位置的位置信息，并且在 基于接收质量信息和位置信息的至少一个基站参数来改变移动台位置处的接收质量。

公开(公告)号：US20100241299A1

公开(公告)日：2010-09-23

申请号：US12729287

申请日：2010-03-23

申请人： Takahiro Ito ,  Yuki Inoue

发明人： Takahiro Ito ,  Yuki Inoue

IPC分类号： G06F7/00 ,  H02J7/00

CPC分类号： B60L53/16 ,  B60L53/18 ,  B60W2520/10 ,  Y02T10/7005 ,  Y02T10/7088 ,  Y02T90/121 ,  Y02T90/14

摘要： An electrical charging apparatus includes: an electrical charging control ECU that makes a determination about motion of a hybrid vehicle; and a charging-purpose plug which engages with the hybrid vehicle if the amount of movement of the vehicle is less than a predetermined value, and which releases the engagement with the hybrid vehicle if the amount of movement of the vehicle is greater than or equal to the predetermined value. According to the invention, even if the vehicle moves while being charged, the dragging of the charging cable is prevented.

摘要翻译： 充电装置包括：充电控制ECU，其对混合动力车辆的运动进行判定; 以及如果所述车辆的移动量小于预定值，则与所述混合动力车辆接合的充电用插头，并且如果所述车辆的移动量大于或等于，则释放与所述混合动力车辆的接合 预定值。 根据本发明，即使车辆在被充电的同时移动，也阻止了充电电缆的拖动。

公开(公告)号：US5623272A

公开(公告)日：1997-04-22

申请号：US407289

申请日：1995-03-20

申请人： Yasunori Mori ,  Yuki Inoue ,  Yoshihisa Narui

发明人： Yasunori Mori ,  Yuki Inoue ,  Yoshihisa Narui

IPC分类号： H04N3/23 ,  H04N3/233 ,  H04N5/44 ,  G09G1/08

CPC分类号： H04N3/2335

摘要： An image signal display device includes program data readout circuitry by which at least one second adjustment data not to be adjusted takes a proper value relative to a first adjustment data to be adjusted, in accordance with a predetermined relational expression. Data calculating circuitry is provided to calculate the second adjustment data in accordance with the predetermined relational expression, in response to a change in the first adjustment data. Data changing circuitry is provided to change the second adjustment data together with the first adjustment data. A memory is provided to store at least a coefficient data of the relational expression, wherein the memory can be read out from and written to. A digital/analog conversion circuit is provided to convert an output signal from the memory into an analog signal. Additionally, a display is provided to represent an output signal from the digital/analog conversion circuit as an image.

摘要翻译： 图像信号显示装置包括程序数据读出电路，根据预定的关系式，至少一个不被调整的第二调整数据相对于要调整的第一调整数据取适当的值。 提供数据计算电路，以响应于第一调整数据的变化，根据预定关系表达式计算第二调整数据。 提供数据改变电路以与第一调整数据一起改变第二调整数据。 提供存储器以存储关系表达式的至少系数数据，其中可以从存储器读出和写入。 提供数字/模拟转换电路以将来自存储器的输出信号转换为模拟信号。 此外，提供了一种显示器来表示来自数字/模拟转换电路的输出信号作为图像。