公开(公告)号：US20100148890A1

公开(公告)日：2010-06-17

申请号：US12712144

申请日：2010-02-24

申请人： Kazunori Inoue ,  Takashi Matsuda ,  Michio Miura ,  Suguru Warashina

发明人： Kazunori Inoue ,  Takashi Matsuda ,  Michio Miura ,  Suguru Warashina

IPC分类号： H01P5/12 ,  H01P7/08 ,  H04R31/00

CPC分类号： H03H9/0222 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02937 ,  H03H9/02984 ,  H03H9/02992 ,  Y10T29/49005

摘要： An acoustic wave element includes: resonators 2 each including an electrode to excite acoustic waves; a power supply wiring portion 3 that is disposed so as to connect the resonators 2 electrically; a piezoelectric substrate 4 on which the resonators 2 and the power supply wiring portion 3 are formed; a second medium 5 that is formed on the piezoelectric substrate 4 so as to cover the resonators 2; and a third medium 6 that is formed on the piezoelectric substrate 4 so as to cover at least the second medium 5 and the power supply wiring portion 3. A side surface 34 of the power supply wiring portion 3 that is in contact with a surface of the piezoelectric substrate 4 forms an obtuse first angle θ with respect to the surface 4a of the piezoelectric substrate 4.

摘要翻译： 声波元件包括：各自包括用于激发声波的电极的谐振器2; 设置为电连接谐振器2的电源配线部3; 形成有谐振器2和电源配线部3的压电基板4; 形成在压电基板4上以覆盖谐振器2的第二介质5; 以及形成在压电基板4上以至少覆盖第二介质5和电源配线部3的第三介质6.电源配线部3的与表面接触的侧面34 压电基板4形成钝角的第一角度＆amp; 相对于压电基板4的表面4a。

公开(公告)号：US20090267707A1

公开(公告)日：2009-10-29

申请号：US12408188

申请日：2009-03-20

申请人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

发明人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

IPC分类号： H01L41/047 ,  H03H9/64

CPC分类号： H03H9/1452 ,  H03H9/1457

摘要： An elastic wave device is described which includes a piezoelectric substrate, comb-shaped electrodes having teeth electrodes that are disposed so as to face each other on the piezoelectric substrate, a non-overlapping area in which the teeth electrodes of the comb-shaped electrodes do not overlap each other, and a overlapping area in which the teeth electrodes overlap each other and the velocity of sound is higher than that in the non-overlapping area.

摘要翻译： 描述了一种弹性波装置，其包括压电基片，具有在压电基片上彼此相对配置的齿电极的梳状电极，梳状电极的齿电极的非重叠区域 齿不重叠，齿电极重叠的重叠区域，声速比非重叠区域高。

公开(公告)号：US20050242420A1

公开(公告)日：2005-11-03

申请号：US11115253

申请日：2005-04-27

申请人： Takashi Matsuda ,  Suguru Warashina ,  Masanori Ueda ,  Osamu Kawachi ,  Yasufumi Kaneda

发明人： Takashi Matsuda ,  Suguru Warashina ,  Masanori Ueda ,  Osamu Kawachi ,  Yasufumi Kaneda

IPC分类号： H01L41/09 ,  H01L23/02 ,  H01L23/06 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H03H3/08 ,  H03H9/00 ,  H03H9/10 ,  H03H9/145 ,  H03H9/25

CPC分类号： H03H9/1071 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16225 ,  H01L2924/00014 ,  H01L2924/15174 ,  H01L2924/15184 ,  H03H9/0071 ,  H03H9/059 ,  H03H9/1078 ,  H01L2224/05599

摘要： A package substrate includes signal pads provided on a main surface of the package substrate, footpads provided on a backside of the package substrate, and a sealing electrode provided on the main surface to surround the signal pads, the signal pads being electrically coupled to the footpads, the sealing electrode being insulated from the footpads.

摘要翻译： 封装衬底包括设置在封装衬底的主表面上的信号焊盘，设置在封装衬底的背面上的脚垫和设置在主表面上以围绕信号焊盘的密封电极，信号焊盘电耦合到脚垫 密封电极与脚垫绝缘。

公开(公告)号：US20050116352A1

公开(公告)日：2005-06-02

申请号：US10986448

申请日：2004-11-12

申请人： Suguru Warashina ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Kawachi ,  Yasufumi Kaneda

发明人： Suguru Warashina ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Kawachi ,  Yasufumi Kaneda

IPC分类号： H03H9/25 ,  H01L23/02 ,  H01L23/48 ,  H03H3/08 ,  H03H9/05 ,  H03H9/10 ,  H03H9/145 ,  H03H9/64

CPC分类号： H03H9/059 ,  H01L2224/05001 ,  H01L2224/05023 ,  H01L2224/05166 ,  H01L2224/05568 ,  H01L2224/05644 ,  H01L2224/16225 ,  H01L2224/48091 ,  H03H9/0538 ,  H03H9/1078 ,  H01L2924/00014

摘要： An acoustic wave device includes a device substrate on which electrodes, first terminals, and a first metal seal layer located along an outer periphery are formed, a supporting substrate on which second terminals to be connected to the first terminals, and a second metal seal layer to be joined to the first metal seal layer are formed, and a conductive seal film provided on an outer surface of the device substrate, an outer surface of the first metal seal layer, and an outer surface of the second metal seal layer. The electrodes and the first and second terminals are hermetically sealed with the first and second metal seal layers and the seal film.

摘要翻译： 声波装置包括其上形成有电极，第一端子和沿着外周设置的第一金属密封层的器件基板，与第一端子连接的第二端子的支撑基板和第二金属密封层 形成与第一金属密封层接合的导电性密封膜，设置在器件基板的外表面的导电性密封膜，第一金属密封层的外表面和第二金属密封层的外表面。 电极和第一和第二端子用第一和第二金属密封层和密封膜密封。

公开(公告)号：US08258891B2

公开(公告)日：2012-09-04

申请号：US12608397

申请日：2009-10-29

申请人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

发明人： Michio Miura ,  Suguru Warashina ,  Takashi Matsuda ,  Shogo Inoue ,  Kazunori Inoue ,  Satoru Matsuda

IPC分类号： H03H9/25 ,  H03H9/15 ,  H03H9/70 ,  H03H9/72 ,  H03H3/02 ,  H03H3/08 ,  H03H3/04 ,  H03H3/10

CPC分类号： H03H3/10 ,  H03H9/0222 ,  H03H9/25 ,  Y10T29/42 ,  Y10T29/49005

摘要： An acoustic wave device includes a piezoelectric substrate, interdigital electrodes arranged on the piezoelectric substrate, a first dielectric element arranged between the interdigital electrodes, a second dielectric element that covers the interdigital electrodes and the first dielectric element, and an adjustment element that has been formed on the first dielectric element. The adjustment element has been formed from a material whose specific gravity is greater than that of the first dielectric element and that of the second dielectric element.

摘要翻译： 声波装置包括：压电基板，布置在压电基板上的叉指电极，布置在叉指电极之间的第一电介质元件，覆盖指状电极和第一电介质元件的第二电介质元件和已形成的调节元件 在第一电介质元件上。 调整元件由比重大于第一电介质元件和第二电介质元件的比重的材料形成。

公开(公告)号：US20090152982A1

公开(公告)日：2009-06-18

申请号：US12336139

申请日：2008-12-16

申请人： Michio MIURA ,  Suguru Warashina ,  Takashi Matsuda

发明人： Michio MIURA ,  Suguru Warashina ,  Takashi Matsuda

IPC分类号： H01L41/053

CPC分类号： H03H9/02559 ,  H03H9/02834

摘要： An elastic wave device including a piezoelectric substrate, comb-like electrodes formed on the piezoelectric substrate, and a dielectric layer formed on the piezoelectric substrate. The dielectric layer formed on the piezoelectric substrate covers the comb-like electrodes and the thickness of the dielectric layer formed on the piezoelectric substrate is larger than the sum of the thickness of the comb-like electrodes and the thickness of the dielectric layer formed on the comb-like electrodes.

摘要翻译： 一种弹性波装置，包括压电基片，形成在压电基片上的梳状电极和形成在压电基片上的电介质层。 形成在压电基板上的电介质层覆盖梳状电极，并且形成在压电基板上的电介质层的厚度大于梳状电极的厚度和形成在其上的电介质层的厚度之和 梳状电极。

公开(公告)号：US07227429B2

公开(公告)日：2007-06-05

申请号：US10809926

申请日：2004-03-26

申请人： Osamu Kawachi ,  Osamu Ikata ,  Masanori Ueda ,  Suguru Warashina

发明人： Osamu Kawachi ,  Osamu Ikata ,  Masanori Ueda ,  Suguru Warashina

IPC分类号： H03H9/72 ,  H03H9/64 ,  H03H3/08

CPC分类号： H03H9/1092 ,  H01L2224/48091 ,  H01L2224/48227 ,  H03H9/0547 ,  H03H9/0585 ,  H03H9/059 ,  Y10T29/42 ,  H01L2924/00014

摘要： A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes, first pads connected thereto, and a first film are provided. The first film is located so as to surround the comb-like electrodes. A base substrate has a second surface on which second pads joined to the first pads and a second film joined to the first film are provided. The first and second films joined by a surface activation process define a cavity in which the comb-like electrodes and the first and second pads are hermetically sealed.

摘要翻译： 声表面波装置包括具有第一表面的压电基片，其上设有梳状电极，与其连接的第一焊盘和第一膜。 第一膜定位成围绕梳状电极。 基底基板具有第二表面，第二焊盘在其上连接到第一焊盘，并且提供连接到第一膜的第二膜。 通过表面激活工艺连接的第一和第二膜限定了其中梳状电极和第一和第二焊盘被气密地密封的空腔。

公开(公告)号：US07188525B2

公开(公告)日：2007-03-13

申请号：US10126750

申请日：2002-04-22

申请人： Atsushi Machida ,  Suguru Warashina ,  Hiroshi Ishikawa ,  Tsutomu Miyashita ,  Yoshio Satoh

发明人： Atsushi Machida ,  Suguru Warashina ,  Hiroshi Ishikawa ,  Tsutomu Miyashita ,  Yoshio Satoh

IPC分类号： G01P9/04

CPC分类号： G01C19/5607

摘要： An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

摘要翻译： 提供了一种角速度传感器，其包括将振荡器连接到框架的框架，振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板，将框架，振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件，两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面，该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器，以及用于检测振荡器的平面外振荡的压电检测器。