公开(公告)号：US06609564B2

公开(公告)日：2003-08-26

申请号：US10024928

申请日：2001-12-19

申请人： Takashi Imaoka ,  Hiroshi Morita ,  Isamu Sugiyama ,  Tadahiro Ohmi ,  Masaki Hirayama

发明人： Takashi Imaoka ,  Hiroshi Morita ,  Isamu Sugiyama ,  Tadahiro Ohmi ,  Masaki Hirayama

IPC分类号： G05D2300

CPC分类号： C02F1/70 ,  C02F5/00 ,  F28D2021/0019 ,  F28F19/00

摘要： A heat exchange cooling system for cooling an object of heat exchange such as machinery, air, or liquid is provided. The system includes a heat exchanger, a cooling water supply device, cooling water circulation piping, a flow rate adjustment valve, a cooling water supply system, and a controller for controlling the flow rate of cooling water. The system includes separate loops for the circulation piping and the cooling supply system. The separate loops are coupled to one another at an inlet and an outlet of the system.

摘要翻译： 提供了用于冷却诸如机械，空气或液体的热交换对象的热交换冷却系统。 该系统包括热交换器，冷却水供应装置，冷却水循环管道，流量调节阀，冷却水供应系统和用于控制冷却水流量的控制器。 该系统包括用于循环管道和冷却供应系统的单独回路。 单独的环在系统的入口和出口处彼此联接。

公开(公告)号：US5783790A

公开(公告)日：1998-07-21

申请号：US759013

申请日：1996-12-02

申请人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Koji Yamanaka ,  Takashi Imaoka ,  Tadahiro Ohmi

发明人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Koji Yamanaka ,  Takashi Imaoka ,  Tadahiro Ohmi

IPC分类号： G02F1/1333 ,  B08B3/04 ,  B08B3/12 ,  C02F1/461 ,  H01L21/304 ,  C07C1/00 ,  B08B6/00

CPC分类号： B08B3/12 ,  C02F1/4618

摘要： A surfactant is added to anodic or cathodic water obtained by electrolyzing deionized water or high-purity water. Then, an object of treatment is treated with the anodic or cathodic water containing the surfactant. The object of treatment may be treated, in this way, while irradiating it with an ultrasonic wave having a frequency between 30 kHz and 3 MHz. Furthermore, the anodic or cathodic water is continuously jetted or dropped onto the object of treatment from a nozzle, while irradiating an ultrasonic wave at least at a part in the feed pipe of the anodic or cathodic water.

摘要翻译： 将表面活性剂加入通过电解去离子水或高纯度水而获得的阳极或阴极水中。 然后，用含有表面活性剂的阳极或阴极水处理处理对象。 以这种方式，可以用频率在30kHz和3MHz之间的超声波照射处理对象。 此外，阳极或阴极水在从阳极或阴极水的供给管中至少部分照射超声波的同时，从喷嘴连续喷射或滴落到处理对象物上。

公开(公告)号：US6005396A

公开(公告)日：1999-12-21

申请号：US48117

申请日：1998-03-26

申请人： Kiichi Suyama ,  Takashi Imaoka

发明人： Kiichi Suyama ,  Takashi Imaoka

IPC分类号： G01N22/02 ,  G01R27/26

CPC分类号： G01N22/02

摘要： Electromagnetic waves are driven in the pipe to be inspected in the piping system by a transmitting antenna of a transmitter, to be propagated in the pipe; while a receiving antenna of a receiver is moved outside the pipe along the pipe, to receive leaking electromagnetic waves for inspecting elements of the piping system, and the location concerned of each element of the piping system to be inspected is detected in reference to the location of the receiving antenna where the level of electromagnetic waves received by the receiver becomes a peak. The locations to be inspected are the damaged portions such as holes formed by corrosion, cracks, etc. in the pipes, and the locations of joints, etc. It is also possible to move the transmitting antenna outside along the pipe, while arranging the receiving antenna at proper place in the pipe. Furthermore, it is also possible to move both the transmitting antenna and the receiving antenna in synchronization to effect the above inspection. When either the transmitting antenna or the receiving antenna is moved, the frequency of electromagnetic waves can be a frequency propagated in the pipe or can also be lower than the cut-off frequency. On the other hand, the antenna can be made long and kept in the pipe, to use a frequency lower than the cut-off frequency without moving the antenna

摘要翻译： 电磁波在管道系统中通过发射器的发射天线在管道中被驱动，以在管道中传播; 而接收器的接收天线沿着管道移动到管道外部，以接收用于检查管道系统的元件的泄漏的电磁波，并且参考所述位置来检测所检查的管道系统的每个元件的相关位置 的接收天线接收到的电磁波水平成为峰值的接收天线。 要检查的位置是管道中由腐蚀，裂缝等形成的孔以及接头等的损坏部分。还可以沿着管道将发射天线移动到外部，同时布置接收 天线在管道正确的位置。 此外，也可以同步地移动发射天线和接收天线，以实现上述检查。 当发射天线或接收天线都移动时，电磁波的频率可以是在管道中传播的频率，或者也可以低于截止频率。 另一方面，天线可以做长并且保持在管道中，使用低于截止频率的频率而不移动天线

公开(公告)号：US5720869A

公开(公告)日：1998-02-24

申请号：US548986

申请日：1995-10-27

申请人： Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

发明人： Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

IPC分类号： C02F1/20 ,  C02F1/28 ,  C02F1/32 ,  C02F1/42 ,  C02F1/44 ,  C02F1/46 ,  C02F1/461 ,  C02F1/78 ,  C02F9/00

CPC分类号： C02F1/32 ,  C02F1/4618 ,  C02F9/00 ,  C02F1/20 ,  C02F1/283 ,  C02F1/44 ,  C02F1/78 ,  C02F2001/427 ,  C02F2001/46133 ,  C02F2103/04 ,  C02F2201/4611 ,  C02F2201/46115 ,  C02F2201/4618

摘要： A high-purity water producing equipment comprises a primary purification treatment system, a primary deionized water tank, a secondary purification treatment system for producing high-purity water from a primary deionized water, a circulatory system pipe for returning the produced high-purity water to a primary deionized water tank and a branch water feed system branched off from the circulatory system for feeding the high-purity water to a use point. An electrolytic unit for producing the anolyte EIW (electrolytic ionized water) to be catholyte EIW from the electrolysis of the high-purity water is provided as a bypass midway along the circulatory system. The anolyte EIW is added to the circulatory pipe downstream of the branching point toward the use point, when cleaning of units is necessary.

摘要翻译： 高纯度水生产设备包括初级净化处理系统，初级去离子水箱，用于从初级去离子水生产高纯度水的二次净化处理系统，用于将生产的高纯度水返回到的循环系统管道 从循环系统分支的主要去离子水箱和分支给水系统，用于将高纯度水供给到使用点。 在循环系统的中途设置用于从高纯度水的电解中制造阴极电解液EIW（电解电离水）的电解单元作为旁路。 阳极电解液EIW被添加到分支点下游的循环管道朝向使用点，当需要清洁单元时。

公开(公告)号：US5990690A

公开(公告)日：1999-11-23

申请号：US48115

申请日：1998-03-26

申请人： Kiichi Suyama ,  Takashi Imaoka

发明人： Kiichi Suyama ,  Takashi Imaoka

IPC分类号： G01N22/02 ,  G01R27/26

CPC分类号： G01N22/02

摘要： Electromagnetic waves are driven in the pipe to be inspected in the piping system by a transmitting antenna of a transmitter, to be propagated in the pipe; while a receiving antenna of a receiver is moved outside the pipe along the pipe, to receive leaking electromagnetic waves for inspecting elements of the piping system, and the location concerned of each element of the piping system to be inspected is detected in reference to the location of the receiving antenna where the level of electromagnetic waves received by the receiver becomes a peak. The locations to be inspected are the damaged portions such as holes formed by corrosion, cracks, etc. in the pipes, and the locations of joints, etc. It is also possible to move the transmitting antenna outside along the pipe, while arranging the receiving antenna at proper place in the pipe. Furthermore, it is also possible to move both the transmitting antenna and the receiving antenna in synchronization to effect the above inspection. When either the transmitting antenna or the receiving antenna is moved, the frequency of electromagnetic waves can be a frequency propagated in the pipe or can also be lower than the cut-off frequency. On the other hand, the antenna can be made long and kept in the pipe, to use a frequency lower than the cut-off frequency without moving the antenna.

摘要翻译： 电磁波在管道系统中通过发射器的发射天线在管道中被驱动，以在管道中传播; 而接收器的接收天线沿着管道移动到管道外部，以接收用于检查管道系统的元件的泄漏的电磁波，并且参考所述位置来检测所检查的管道系统的每个元件的相关位置 的接收天线接收到的电磁波水平成为峰值的接收天线。 要检查的位置是管道中由腐蚀，裂缝等形成的孔以及接头等的损坏部分。还可以沿着管道将发射天线移动到外部，同时布置接收 天线在管道正确的位置。 此外，也可以同步地移动发射天线和接收天线，以实现上述检查。 当发射天线或接收天线都移动时，电磁波的频率可以是在管道中传播的频率，或者也可以低于截止频率。 另一方面，天线可以制造得很长并保持在管道中，使用的频率低于截止频率，而不会移动天线。

公开(公告)号：US5635053A

公开(公告)日：1997-06-03

申请号：US549646

申请日：1995-10-27

申请人： Hidemitsu Aoki ,  Masaharu Nakamori ,  Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

发明人： Hidemitsu Aoki ,  Masaharu Nakamori ,  Koji Yamanaka ,  Takashi Imaoka ,  Takashi Futatsuki ,  Yukinari Yamashita

IPC分类号： B08B3/08 ,  C02F1/42 ,  C02F1/44 ,  C02F1/461 ,  C02F9/00 ,  C11D3/02 ,  C25B1/04 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

CPC分类号： H01L21/02052 ,  B08B3/08 ,  C02F1/4618 ,  H01L21/67057 ,  C02F1/42 ,  C02F1/44 ,  C02F2103/04 ,  C02F2201/4611 ,  C02F2201/46115 ,  C02F2201/46195 ,  C02F9/00 ,  Y02E60/366

摘要： Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.

摘要翻译： 包括半导体基板，玻璃基板等的电气部件用各种清洗液洗涤。 清洁后，用去离子水生产的阳极电解液或阴极电解质电解水（EIW）清洗所述部件。

公开(公告)号：US5963042A

公开(公告)日：1999-10-05

申请号：US48002

申请日：1998-03-26

申请人： Kiichi Suyama ,  Takashi Imaoka

发明人： Kiichi Suyama ,  Takashi Imaoka

IPC分类号： G01N22/02 ,  G01R27/26

CPC分类号： G01N22/02

摘要： Electromagnetic waves are driven in the pipe to be inspected in the piping system by a transmitting antenna of a transmitter, to be propagated in the pipe; while a receiving antenna of a receiver is moved outside the pipe along the pipe, to receive leaking electromagnetic waves for inspecting elements of the piping system, and the location concerned of each element of the piping system to be inspected is detected in reference to the location of the receiving antenna where the level of electromagnetic waves received by the receiver becomes a peak. The locations to be inspected are the damaged portions such as holes formed by corrosion, cracks, etc. in the pipes, and the locations of joints, etc. It is also possible to move the transmitting antenna outside along the pipe, while arranging the receiving antenna at proper place in the pipe. Furthermore, it is also possible to move both the transmitting antenna and the receiving antenna in synchronization to effect the above inspection. When either the transmitting antenna or the receiving antenna is moved, the frequency of electromagnetic waves can be a frequency propagated in the pipe or can also be lower than the cut-off frequency. On the other hand, the antenna can be made long and kept in the pipe, to use a frequency lower than the cut-off frequency without moving the antenna

公开(公告)号：US6008658A

公开(公告)日：1999-12-28

申请号：US47932

申请日：1998-03-26

申请人： Kiichi Suyama ,  Takashi Imaoka

发明人： Kiichi Suyama ,  Takashi Imaoka

IPC分类号： G01N22/02 ,  G01R27/26

CPC分类号： G01N22/02

摘要： Electromagnetic waves are driven in the pipe to be inspected in the piping system by a transmitting antenna of a transmitter, to be propagated in the pipe; while a receiving antenna of a receiver is moved outside the pipe along the pipe, to receive leaking electromagnetic waves for inspecting elements of the piping system, and the location concerned of each element of the piping system to be inspected is detected in reference to the location of the receiving antenna where the level of electromagnetic waves received by the receiver becomes a peak. The locations to be inspected are the damaged portions such as holes formed by corrosion, cracks, etc. in the pipes, and the locations of joints, etc. It is also possible to move the transmitting antenna outside along the pipe, while arranging the receiving antenna at proper place in the pipe. Furthermore, it is also possible to move both the transmitting antenna and the receiving antenna in synchronization to effect the above inspection. When either the transmitting antenna or the receiving antenna is moved, the frequency of electromagnetic waves can be a frequency propagated in the pipe or can also be lower than the cut-off frequency. On the other hand, the antenna can be made long and kept in the pipe, to use a frequency lower than the cut-off frequency without moving the antenna

公开(公告)号：US06290777B1

公开(公告)日：2001-09-18

申请号：US09242601

申请日：1999-02-19

申请人： Takashi Imaoka ,  Yukinari Yamashita

发明人： Takashi Imaoka ,  Yukinari Yamashita

IPC分类号： B08B312

CPC分类号： B08B3/08 ,  B08B3/12 ,  C02F1/20 ,  C02F1/66 ,  C02F1/70 ,  C02F2103/04 ,  C02F2209/23 ,  H01L21/02052

摘要： An electronic parts members, or the like, such as the silicon wafer, etc., is washed with wash water. The wash water is prepared by dissolving a hydrogen gas or ozone gas in ultra pure water and has a negative or positive oxidation-reduction potential. This wash water has remarkably improved detergency for electronic parts. In addition, when the pH of the wash water is adjusted, the electronic parts members can be washed more effectively.

摘要翻译： 诸如硅晶片等的电子部件等被用洗涤水洗涤。 洗涤水通过将氢气或臭氧气体溶解在超纯水中并具有负或正的氧化还原电位来制备。 这种洗涤水对于电子部件具有显着改善的去污力。 此外，当调节洗涤水的pH时，可以更有效地洗涤电子部件。

公开(公告)号：US6008657A

公开(公告)日：1999-12-28

申请号：US687450

申请日：1996-08-15

申请人： Kiichi Suyama ,  Takashi Imaoka

发明人： Kiichi Suyama ,  Takashi Imaoka

IPC分类号： G01N22/02 ,  G01R27/26

CPC分类号： G01N22/02

摘要： Electromagnetic waves are driven in the pipe to be inspected in the piping system by a transmitting antenna of a transmitter, to be propagated in the pipe; while a receiving antenna of a receiver is moved outside the pipe along the pipe, to receive leaking electromagnetic waves for inspecting elements of the piping system, and the location concerned of each element of the piping system to be inspected is detected in reference to the location of the receiving antenna where the level of electromagnetic waves received by the receiver becomes a peak. The locations to be inspected are the damaged portions such as holes formed by corrosion, cracks, etc. in the pipes, and the locations of joints, etc. It is also possible to move the transmitting antenna outside along the pipe, while arranging the receiving antenna at proper place in the pipe. Furthermore, it is also possible to move both the transmitting antenna and the receiving antenna in synchronization to effect the above inspection. When either the transmitting antenna or the receiving antenna is moved, the frequency of electromagnetic waves can be a frequency propagated in the pipe or can also be lower than the cut-off frequency. On the other hand, the antenna can be made long and kept in the pipe, to use a frequency lower than the cut-off frequency without moving the antenna.

摘要翻译： PCT No.PCT / JP95 / 02604 Sec。 371日期：1996年8月15日 102（e）日期1996年8月15日PCT 1995年12月18日PCT PCT。 公开号WO96 / 18884 日期1996年6月20日电磁波通过发射机的发射天线在管道系统中被驱动，在管道中传播; 而接收器的接收天线沿着管道移动到管道外部，以接收用于检查管道系统的元件的泄漏的电磁波，并且参考所述位置来检测所检查的管道系统的每个元件的相关位置 的接收天线接收到的电磁波水平成为峰值的接收天线。 要检查的位置是管道中由腐蚀，裂缝等形成的孔以及接头等的损坏部分。还可以沿着管道将发射天线移动到外部，同时布置接收 天线在管道正确的位置。 此外，也可以同步地移动发射天线和接收天线，以实现上述检查。 当发射天线或接收天线都移动时，电磁波的频率可以是在管道中传播的频率，或者也可以低于截止频率。 另一方面，天线可以制造得很长并保持在管道中，使用的频率低于截止频率，而不会移动天线。