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公开(公告)号：US5635053A
公开(公告)日：1997-06-03
申请号：US549646
申请日：1995-10-27
申请人： Hidemitsu Aoki , Masaharu Nakamori , Koji Yamanaka , Takashi Imaoka , Takashi Futatsuki , Yukinari Yamashita
发明人： Hidemitsu Aoki , Masaharu Nakamori , Koji Yamanaka , Takashi Imaoka , Takashi Futatsuki , Yukinari Yamashita
IPC分类号： B08B3/08 , C02F1/42 , C02F1/44 , C02F1/461 , C02F9/00 , C11D3/02 , C25B1/04 , H01L21/00 , H01L21/304 , H01L21/306
CPC分类号： H01L21/02052 , B08B3/08 , C02F1/4618 , H01L21/67057 , C02F1/42 , C02F1/44 , C02F2103/04 , C02F2201/4611 , C02F2201/46115 , C02F2201/46195 , C02F9/00 , Y02E60/366
摘要： Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.
摘要翻译： 包括半导体基板，玻璃基板等的电气部件用各种清洗液洗涤。 清洁后，用去离子水生产的阳极电解液或阴极电解质电解水（EIW）清洗所述部件。
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公开(公告)号：US5616221A
公开(公告)日：1997-04-01
申请号：US549570
申请日：1995-10-27
CPC分类号： C02F1/4618 , C02F1/444 , C02F2001/46133 , C02F2201/4611 , C02F2201/46195 , C02F2209/04 , C02F2209/06 , C02F9/00 , Y02E60/366
摘要： An electrolytic ionized water (EIW) producing apparatus comprises an anode, a cathode, an electrolyzer which includes an anode chamber, a cathode chamber and an intermediate chamber, inlet lines for supplying an influent water to the three chambers, and outlet lines for discharging effluent water from the chambers. Further, an acidic electrolyte supplying unit is connected to the outlet line from the anode chamber, and an alkaline electrolyte supplying unit is connected to the outlet line from the cathode chamber. The electrolyte supplying units can selectively control at least the dosage level of elelctrolyte(s) to be supplied, the composition and concentration of the electrolyte(s) or pH of EIW after the addition of the electrolyte(s).
摘要翻译： 电解电离水（EIW）制造装置包括阳极，阴极，包括阳极室，阴极室和中间室的电解槽，用于向三室供应流入水的入口管线，以及用于排出流出物的出口管线 水从房间。 此外，酸性电解质供给单元从阳极室与出口管连接，碱性电解质供给单元从阴极室与出口管连接。 电解质供应单元可选择性地控制电解质的添加量，电解质的组成和浓度或EIW的添加量之后的电解质的剂量水平。
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公开(公告)号：US5593554A
公开(公告)日：1997-01-14
申请号：US549647
申请日：1995-10-27
IPC分类号： C25B1/04 , B01D61/44 , B01D61/48 , B01D61/58 , B01J47/08 , C02F1/44 , C02F1/461 , C02F1/469 , C02F9/00 , C25B9/00 , C25B9/08
CPC分类号： C02F1/4618 , B01D61/44 , B01D61/48 , B01D61/58 , B01J47/08 , C02F1/4695 , B01D61/025 , B01D61/145 , B01D61/147 , C02F1/44 , C02F2001/46133 , C02F2201/4611 , C02F2201/46115 , C02F2201/4618 , C02F2201/4619 , C02F2201/46195 , C02F2209/04 , C02F9/00 , Y02E60/366
摘要： In an electrolytic ionized water (EIW) producing apparatus, a three-chamber electrolyzer includes an anode chamber, a cathode chamber and an intermediate chamber. An influent such as deionized water is supplied to these chamber via inlet lines. Further an electrolyte supplying units are connected to the inlet lines of the anode chamber and the inlet line of the cathode chamber.
摘要翻译： 在电解电离水（EIW）制造装置中，三室电解槽具有阳极室，阴极室和中间室。 诸如去离子水的流入物通过入口管线被供应到这些室。 此外，电解质供应单元连接到阳极室的入口管线和阴极室的入口管线。
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公开(公告)号：US5720869A
公开(公告)日：1998-02-24
申请号：US548986
申请日：1995-10-27
IPC分类号： C02F1/20 , C02F1/28 , C02F1/32 , C02F1/42 , C02F1/44 , C02F1/46 , C02F1/461 , C02F1/78 , C02F9/00
CPC分类号： C02F1/32 , C02F1/4618 , C02F9/00 , C02F1/20 , C02F1/283 , C02F1/44 , C02F1/78 , C02F2001/427 , C02F2001/46133 , C02F2103/04 , C02F2201/4611 , C02F2201/46115 , C02F2201/4618
摘要： A high-purity water producing equipment comprises a primary purification treatment system, a primary deionized water tank, a secondary purification treatment system for producing high-purity water from a primary deionized water, a circulatory system pipe for returning the produced high-purity water to a primary deionized water tank and a branch water feed system branched off from the circulatory system for feeding the high-purity water to a use point. An electrolytic unit for producing the anolyte EIW (electrolytic ionized water) to be catholyte EIW from the electrolysis of the high-purity water is provided as a bypass midway along the circulatory system. The anolyte EIW is added to the circulatory pipe downstream of the branching point toward the use point, when cleaning of units is necessary.
摘要翻译： 高纯度水生产设备包括初级净化处理系统，初级去离子水箱，用于从初级去离子水生产高纯度水的二次净化处理系统，用于将生产的高纯度水返回到的循环系统管道 从循环系统分支的主要去离子水箱和分支给水系统，用于将高纯度水供给到使用点。 在循环系统的中途设置用于从高纯度水的电解中制造阴极电解液EIW（电解电离水）的电解单元作为旁路。 阳极电解液EIW被添加到分支点下游的循环管道朝向使用点，当需要清洁单元时。
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公开(公告)号：US06884344B2
公开(公告)日：2005-04-26
申请号：US10329899
申请日：2002-12-26
IPC分类号： B08B3/08 , B01D19/00 , B01D61/08 , B01D61/18 , C01B3/00 , C02F1/20 , C02F1/28 , C02F1/32 , C02F1/42 , C02F1/44 , C02F1/52 , C02F1/66 , C02F1/68 , C02F1/70 , C02F1/72 , C02F9/00 , H01L21/304
CPC分类号： C02F9/00 , C02F1/20 , C02F1/283 , C02F1/32 , C02F1/441 , C02F1/444 , C02F1/52 , C02F1/66 , C02F1/68 , C02F1/722 , C02F1/725 , C02F2001/427 , C02F2103/04 , C02F2209/04 , C02F2209/06 , C02F2209/30 , C02F2303/18 , Y02E60/324 , Y10S210/90
摘要： A degassing device (10), a hydrogen dissolving device (12), and a palladium catalyst column (17) are provided in that order downstream of a high-purity water production device (1), and an impurity removal device (19) is connected to the exit side of treated water of the palladium catalyst column (17). The impurity removal device (19) removes impurity ions which are eluted into the water to be treated or impurity particulates which mix in with the water to be treated during the treatment in the palladium catalyst column (17). The impurity removal device (19) comprises an ion exchange device (20) and a membrane treatment device (21) such as a ultrafiltration membrane device, a reverse osmosis membrane device or the like. By providing an impurity removal device (19) in this manner, it is possible to remove impurities generated during hydrogen peroxide removal treatment by the palladium catalyst and to prevent degradation in quality of hydrogen-dissolved water.
摘要翻译： 在高纯度水生产装置（1）的下游设有脱气装置（10），氢溶解装置（12）和钯催化剂塔（17），杂质除去装置（19）为 连接到钯催化剂塔（17）的处理水的出口侧。 杂质去除装置（19）在钯催化剂塔（17）中除去在待处理的水中洗脱的杂质离子或与处理中的待处理水相混合的杂质颗粒。 杂质去除装置（19）包括离子交换装置（20）和膜处理装置（21），例如超滤膜装置，反渗透膜装置等。 通过以这种方式提供杂质去除装置（19），可以通过钯催化剂除去在过氧化氢去除处理期间产生的杂质，并且防止氢溶解水的质量降低。
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公开(公告)号：US07892322B2
公开(公告)日：2011-02-22
申请号：US11912125
申请日：2006-04-19
CPC分类号： B01D53/047 , B01D53/0423 , B01D53/75 , B01D2253/102 , B01D2253/108 , B01D2256/10 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/40001 , B01D2259/402 , B01D2259/416 , C23C16/4412 , Y02C20/30
摘要： An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.
摘要翻译： 一种用于从含有至少一种成分的特定气体的待处理气体中分离特定气体的装置和方法，其包括使得待处理的气体在不使用另一种气体的情况下流经柱而将气体转移到 同时在减压下保持填充有填料的柱的内部。 上述装置和方法可以适当地用于以低成本分离具有高纯度的特定气体。
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公开(公告)号：US06551387B2
公开(公告)日：2003-04-22
申请号：US09915915
申请日：2001-07-26
IPC分类号： B01D5302
CPC分类号： B01D53/02 , B01D53/04 , B01D2253/102 , B01D2253/106 , B01D2257/2066 , B01D2259/40086 , Y02C20/30 , Y02P70/605
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).
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公开(公告)号：US07527676B2
公开(公告)日：2009-05-05
申请号：US10566489
申请日：2004-06-02
IPC分类号： B01D53/02
CPC分类号： B01D53/025 , Y02C20/30 , Y02P70/605
摘要： A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.
摘要翻译： 一种用于分离在生产过程中产生的包含CF4和C2F6的PFC气体的排气的单元，其中废气在浓缩装置中浓缩，然后在使用氮气作为载气的色谱分离装置中色谱分离。 色谱分离装置装有分子筛13X或F-9等。 该单元能够有效分离CF4和C2F6。
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公开(公告)号：US06530980B2
公开(公告)日：2003-03-11
申请号：US09915473
申请日：2001-07-26
IPC分类号： B01D1508
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).
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公开(公告)号：US08016916B2
公开(公告)日：2011-09-13
申请号：US12171972
申请日：2008-07-11
CPC分类号： B01D53/0454 , B01D53/0423 , B01D53/0446 , B01D53/30 , B01D2253/108 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/41
摘要： There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.
摘要翻译： 提供了一种用于从含有多种气体的被处理气体中分离出特定气体的气体分离装置。 气体分离装置包括多个串联连接的分离单元，其通过使用塔将特定气体与其它气体分离;以及抽吸单元，其将塔内减压。 多个分离单元中的至少两个在至少一个分离条件中彼此不同。
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