公开(公告)号：US08156814B2

公开(公告)日：2012-04-17

申请号：US12505571

申请日：2009-07-20

申请人： Kenjiro Okaguchi ,  Michio Kadota ,  Koji Fujimoto

发明人： Kenjiro Okaguchi ,  Michio Kadota ,  Koji Fujimoto

IPC分类号： G01N29/036 ,  H01L41/04

CPC分类号： G01N29/022 ,  G01N5/02 ,  G01N29/036 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.

摘要翻译： 表面声波传感器基于频率变化来检测谐振器型表面声波滤波器的质量负载，并且包括布置在压电基板上以激发表面波的IDT电极，布置成覆盖 IDT电极和设置在绝缘膜上并与待检测的目标物质或与要检测的目标物质结合的结合物质的反应膜。 反应膜由金属或金属氧化物构成。

公开(公告)号：US07656070B2

公开(公告)日：2010-02-02

申请号：US11843527

申请日：2007-08-22

申请人： Michio Kadota ,  Koji Fujimoto

发明人： Michio Kadota ,  Koji Fujimoto

IPC分类号： H03H9/145

CPC分类号： G01N29/022 ,  G01N29/2462 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface wave sensor apparatus has a structure such that, on a first principal surface of a base substrate having first through-hole conductors, surface acoustic wave devices are bonded via thermo-compression anisotropic conductive sheets, on first principal surfaces of piezoelectric substrates of the surface acoustic wave devices, electrodes, such as IDTs, are provided, respectively. These electrodes extend toward second principal surfaces via second through-hole conductors and are provided in the piezoelectric substrates. The first through-hole conductors overlap with the second through-hole conductors with the thermo-compression anisotropic conductive sheets being disposed therebetween, respectively.

摘要翻译： 表面波传感器装置具有如下结构：在具有第一通孔导体的基底基板的第一主表面上，通过热压缩各向异性导电片将表面声波装置接合在第一通孔导体的压电基板的第一主表面上 分别提供表面声波装置，诸如IDT的电极。 这些电极经由第二通孔导体朝向第二主表面延伸，并设置在压电基板中。 第一通孔导体与第二通孔导体重叠，热压各向异性导电片分别设置在它们之间。

公开(公告)号：US07394180B2

公开(公告)日：2008-07-01

申请号：US10595317

申请日：2004-09-08

申请人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

发明人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

IPC分类号： H01L41/09

CPC分类号： G01N29/36 ,  G01N29/022 ,  G01N29/2462 ,  G01N2291/014 ,  G01N2291/0256 ,  G01N2291/0423 ,  H03B5/326 ,  H03B5/362

摘要： A surface-acoustic-wave-sensor-included oscillator circuit does not cause separation of an electrode film due to application of a bias voltage and can reliably accurate operate even if liquid is adhered thereto. The surface-acoustic-wave-sensor-included oscillator circuit includes interdigital electrode disposed on a piezoelectric substrate and a reaction film that is arranged so as to cover the interdigital electrodes and bound to a target substance or a binding material to be bound to the target substance. A surface acoustic wave sensor that is capable of detecting a bit of mass loading on the basis of a variation in frequency is connected as a resonator in the surface-acoustic-wave-sensor-included oscillator circuit. Direct-current cutting capacitors are connected in series to the surface acoustic wave sensor, and the direct-current cutting capacitors respectively define impedance matching circuits in the surface-acoustic-wave-sensor-included oscillator circuit.

摘要翻译： 包含表面声波传感器的振荡电路不会由于施加偏压而引起电极膜的分离，即使液体粘附在其上也能够可靠地进行精确的动作。 包含表面声波传感器的振荡电路包括布置在压电基片上的叉指式电极和反射膜，该反射膜布置成覆盖指状电极并结合到靶物质或结合材料上以与目标物结合 物质。 能够在基于频率变化的基础上检测质量负载量的表面声波传感器作为共振器连接在包含表面声波传感器的振荡电路中。 直流切割电容器与表面声波传感器串联连接，直流切断电容器分别在包含表面声波传感器的振荡电路中形成阻抗匹配电路。

公开(公告)号：US20070107516A1

公开(公告)日：2007-05-17

申请号：US10561251

申请日：2004-04-08

申请人： Koji Fujimoto ,  Michio Kadota ,  Yoshiharu Yoshii

发明人： Koji Fujimoto ,  Michio Kadota ,  Yoshiharu Yoshii

IPC分类号： G01H13/00

CPC分类号： B82Y30/00 ,  B82Y15/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2462 ,  G01N29/2468 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface acoustic wave sensor for detecting a target substance by measuring the change in frequency due to the mass applied to a reaction membrane placed on a surface acoustic wave element has high sensitivity due to the improvement of the structure surface acoustic wave element. The surface acoustic wave sensor includes an SH-type surface acoustic wave and a rotated Y-cut LiTaO3 substrate having Euler angles (0°, 0° to 18°, 0°±5°) or (0°, 58° to 180°, 0°±5°), electrodes, principally containing Au, for exciting a surface acoustic wave, the electrodes being arranged on the LiTaO3 substrate, and a reaction membrane, bound to a target substance or a binding substance bound to the target substance, covering the electrodes arranged on the LiTaO3 substrate. The interdigital transducers have a normalized thickness of about 0.8% to about 9.5%, the normalized thickness being determined by normalizing the thickness of the interdigital transducers by the wavelength of the surface acoustic wave.

摘要翻译： 用于通过测量施加到放置在表面声波元件上的反应膜的质量的频率变化来测量目标物质的表面声波传感器由于结构声表面波元件的改进而具有高灵敏度。 表面声波传感器包括SH型表面声波和具有欧拉角（0°，0°至18°，0°±5°）或（...）的旋转的Y切割LiTaO 3 3衬底， 0°，58°至180°，0°±5°），主要包含Au的电极用于激发表面声波，电极布置在LiTaO 3衬底上，反应膜 与目标物质结合的物质或结合物质，覆盖布置在LiTaO 3基体上的电极。 叉指式换能器具有约0.8％至约9.5％的归一化厚度，归一化厚度通过将叉指式换能器的厚度标准化为表面声波的波长来确定。

公开(公告)号：US07816837B2

公开(公告)日：2010-10-19

申请号：US10561251

申请日：2004-04-08

申请人： Koji Fujimoto ,  Michio Kadota ,  Yoshiharu Yoshii

发明人： Koji Fujimoto ,  Michio Kadota ,  Yoshiharu Yoshii

IPC分类号： H02N2/00

CPC分类号： B82Y30/00 ,  B82Y15/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2462 ,  G01N29/2468 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface acoustic wave sensor for detecting a target substance by measuring the change in frequency due to the mass applied to a reaction membrane placed on a surface acoustic wave element having high sensitivity due to the improvement of the surface acoustic wave element structure. The surface acoustic wave sensor includes an SH-type surface acoustic wave and a rotated Y-cut LiTaO3 substrate having Euler angles (0°, 120° to 140°, 0°±5°); electrodes principally containing Au, for exciting a surface acoustic wave, the electrodes being arranged on the LiTaO3 substrate; and a reaction membrane bound to a target substance or a binding substance bound to the target substance covering the electrodes arranged on the LiTaO3 substrate. The interdigital transducers have a normalized thickness of about 3.0% to about 5.0%, the normalized thickness being determined by normalizing the thickness of the interdigital transducers by the wavelength of the surface acoustic wave.

摘要翻译： 一种表面声波传感器，用于通过由于表面声波元件结构的改善而通过测量施加到具有高灵敏度的表面声波元件的反应膜上的质量而测量频率变化。 表面声波传感器包括SH型表面声波和具有欧拉角（0°，120°至140°，0°±5°）的旋转的Y切割LiTaO 3基板; 主要包含Au的电极，用于激发表面声波，电极布置在LiTaO 3衬底上; 以及与覆盖设置在LiTaO 3基板上的电极的目标物质结合的目标物质或结合物质结合的反应膜。 叉指式换能器具有约3.0％至约5.0％的归一化厚度，归一化厚度通过将叉指式换能器的厚度归一化由声表面波的波长来确定。

公开(公告)号：US08256275B2

公开(公告)日：2012-09-04

申请号：US12555894

申请日：2009-09-09

申请人： Hajime Yamada ,  Naoko Aizawa ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Toru Yabe ,  Michio Kadota

发明人： Hajime Yamada ,  Naoko Aizawa ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Toru Yabe ,  Michio Kadota

IPC分类号： G01N29/00

CPC分类号： G01N29/022 ,  G01N29/222 ,  G01N2291/022 ,  G01N2291/0423

摘要： An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.

摘要翻译： 实现尺寸减小和检测精度提高的液体内物质检测传感器包括压电基板，设置在压电基板的一个主表面上的至少两个SAW器件，每个具有限定感测部分的至少一个IDT电极，外部电极 设置在压电基板的另一个主表面上，并且通过延伸穿过压电基板的通孔电连接到SAW器件，设置在压电基板的一个主表面上以便包围SAW器件的通道限定元件和区域 将所述SAW器件彼此连接，由此限定通道的侧壁，以及保护构件，其与所述压电基板的所述一个主表面接合，并且所述通道限定构件插入其间，从而密封所述通道，所述保护构件具有至少两个 通道与通道相通。

公开(公告)号：US20070252475A1

公开(公告)日：2007-11-01

申请号：US10595317

申请日：2004-09-08

申请人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

发明人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

IPC分类号： G01N29/02

CPC分类号： G01N29/36 ,  G01N29/022 ,  G01N29/2462 ,  G01N2291/014 ,  G01N2291/0256 ,  G01N2291/0423 ,  H03B5/326 ,  H03B5/362

摘要： A surface-acoustic-wave-sensor-included oscillator circuit does not cause separation of an electrode film due to application of a bias voltage and can reliably accurate operate even if liquid is adhered thereto. The surface-acoustic-wave-sensor-included oscillator circuit includes interdigital electrode disposed on a piezoelectric substrate and a reaction film that is arranged so as to cover the interdigital electrodes and bound to a target substance or a binding material to be bound to the target substance. A surface acoustic wave sensor that is capable of detecting a bit of mass loading on the basis of a variation in frequency is connected as a resonator in the surface-acoustic-wave-sensor-included oscillator circuit. Direct-current cutting capacitors are connected in series to the surface acoustic wave sensor, and the direct-current cutting capacitors respectively define impedance matching circuits in the surface-acoustic-wave-sensor-included oscillator circuit.

摘要翻译： 包含表面声波传感器的振荡电路不会由于施加偏压而引起电极膜的分离，即使液体粘附在其上也能够可靠地进行精确的动作。 包含表面声波传感器的振荡电路包括布置在压电基片上的叉指式电极和反射膜，该反射膜布置成覆盖指状电极并结合到靶物质或结合材料上以与目标物结合 物质。 能够在基于频率变化的基础上检测质量负载量的表面声波传感器作为共振器连接在包含表面声波传感器的振荡电路中。 直流切割电容器与表面声波传感器串联连接，直流切断电容器分别在包含表面声波传感器的振荡电路中形成阻抗匹配电路。

公开(公告)号：US06847154B2

公开(公告)日：2005-01-25

申请号：US10255968

申请日：2002-09-27

申请人： Yoshihiro Ito ,  Michio Kadota ,  Koji Fujimoto

发明人： Yoshihiro Ito ,  Michio Kadota ,  Koji Fujimoto

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/14552 ,  H03H9/02543 ,  H03H9/6496

摘要： A Shear Horizontal-type end-surface-reflection-type surface acoustic wave device includes a piezoelectric substrate having end surfaces. The most appropriate positions of the end surfaces of the piezoelectric substrate are determined. Interdigital transducers are disposed on the main surface of the piezoelectric substrate having a comparatively low relative dielectric constant ∈11T (for example, a relative dielectric constant of about 40 or less). The positions of the end surfaces are determined so that the distance from the center of the second electrode finger, counting from the outermost side in the surface acoustic wave propagation direction among the interdigital transducers, to the end surfaces (end surfaces for reflecting the surface acoustic wave) of the piezoelectric substrate satisfy the relationship (N+⅝)λs≦L≦(N+⅞)λs, where λs is the wavelength of the surface acoustic wave, and N is 0 or a positive integer.

摘要翻译： 剪切水平型端面反射型表面声波装置包括具有端面的压电基板。 确定压电基片的端面最合适的位置。 叉指换能器设置在压电基片的相对介电常数ε11（例如相对介电常数约为40或更小）的主表面上。 端面的位置被确定为使得从叉指式换能器之间的表面声波传播方向上的最外侧的第二电极指的中心到端面（用于反射表面声学的端面） （N + 5/8）lambdas <= L <=（N + 7/8）lambdas，其中lambdas是表面声波的波长，N是0或正整数 。

公开(公告)号：US06725513B2

公开(公告)日：2004-04-27

申请号：US09875216

申请日：2001-06-06

申请人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Takeshi Nakao

发明人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Takeshi Nakao

IPC分类号： H04R1700

CPC分类号： H03H3/08 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a surface acoustic wave apparatus decreases a specific resistance of an electrode film by removing hydrogen occluded in the electrode film that is primarily composed of tantalum, so that the device properties are stabilized. An electrode film primarily composed of tantalum is formed on a piezoelectric substrate. Subsequently, this electrode film is heat-treated in a vacuum at a temperature of about 200° C. to about 700° C. for several hours. Thereafter, the electrode film is patterned so as to produce an interdigital electrode transducer.

摘要翻译： 制造声表面波装置的方法通过去除主要由钽构成的电极膜中吸收的氢而使电极膜的比电阻降低，使得器件特性稳定。 在压电基板上形成主要由钽构成的电极膜。 随后，将该电极膜在约200℃至约700℃的温度下在真空中热处理数小时。 此后，对电极膜进行图案化以产生叉指式电极换能器。

公开(公告)号：US08183963B2

公开(公告)日：2012-05-22

申请号：US12714319

申请日：2010-02-26

申请人： Koji Fujimoto ,  Shinichi Furusho ,  Akifumi Fujino

发明人： Koji Fujimoto ,  Shinichi Furusho ,  Akifumi Fujino

IPC分类号： H01H51/22

CPC分类号： H01H50/043 ,  H01H50/24 ,  H01H50/36 ,  Y10T29/49073

摘要： A electromagnetic relay in which bad electrical contact and failure of operation are prevented even when shavings are produced while an iron core is press-fitted into and mounted on a base. The electromagnetic relay includes an electromagnetic block supported by press-fitting both ends of an iron core of the electromagnetic block into an upper surface of a base and open or close a contact by a movable iron piece rotated by magnetization or demagnetization of the iron core with a coil, where shaving receptacles are made by forming separating ribs adjacent to at least one side of press-fit projections that are formed in press-fit concave portions provided on the upper surface of the base.

摘要翻译： 一种电磁继电器，其中即使在将铁芯压配合到基座上并安装在基座上时，也可以防止在生产刨花时产生不良的电接触和操作故障。 电磁继电器包括电磁块，其通过将电磁块的铁芯的两端压配合到基座的上表面中并通过由铁芯的磁化或退磁而旋转的可动铁片打开或闭合触点而支撑， 线圈，其中通过形成与形成在设置在基座的上表面上的压入凹部中的压配突起的至少一侧相邻的分隔肋来制造剃须容器。