公开(公告)号：US06814536B2

公开(公告)日：2004-11-09

申请号：US10294827

申请日：2002-11-14

申请人： Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D27/0292 ,  F04D29/522

摘要： The present invention provides a vacuum pump which reduces a damaging torque produced when a rotor rotating at high-speed crashes into a screw stator or the like. The vacuum pump has a rigid ring disposed around the screw stator such that a shock load from the screw stator causes the rigid ring to rotate. When a brittle facture occurs in the rotor rotating at high-speed, for example, and a part of the rotor crashes into the screw stator, a rotating torque, i.e., a damaging torque causing the entire vacuum pump to rotate is likely to occur. However, this damaging torque is absorbed by the rotation of the rigid ring and eventually subsides.

公开(公告)号：US06705830B2

公开(公告)日：2004-03-16

申请号：US10131643

申请日：2002-04-23

申请人： Yoshihiro Yamashita ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Yoshihiro Yamashita ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D27/0292 ,  F04D29/601

摘要： A vacuum pump has an end portion and a flange extending from a periphery of the end portion. The flange portion has first and second opposed main surfaces, and first and second bolt insertion holes extending through the first and second main surfaces. An auxiliary ring is connected to the first main surface of the flange portion of the pump case. The auxiliary ring has first and second opposed main surfaces, and a third bolt insertion hole extending through the first and second main surfaces of the auxiliary ring. An auxiliary ring attaching bolt extends through the third bolt insertion hole for connecting the auxiliary ring to a chamber housing disposed opposite the end portion of the pump case. A pump case supporting bolt extends through the second bolt insertion hole of the pump case flange portion and is connected to the auxiliary ring, and a pump case fastening bolt extends through the first bolt insertion hole of the pump case flange portion and is connected to the auxiliary ring.

摘要翻译： 真空泵具有从端部的周边延伸的端部和凸缘。 凸缘部具有第一和第二相对的主表面，以及延伸穿过第一和第二主表面的第一和第二螺栓插入孔。 辅助环连接到泵壳的凸缘部分的第一主表面。 辅助环具有第一和第二相对的主表面，以及延伸穿过辅助环的第一和第二主表面的第三螺栓插入孔。 辅助环安装螺栓延伸穿过第三螺栓插入孔，用于将辅助环连接到与泵壳的端部相对设置的腔室。 泵壳支撑螺栓延伸穿过泵壳凸缘部分的第二螺栓插入孔并连接到辅助环，泵壳紧固螺栓延伸穿过泵壳凸缘部分的第一螺栓插入孔，并连接到 辅助环。

公开(公告)号：US20130164124A1

公开(公告)日：2013-06-27

申请号：US13820468

申请日：2011-07-21

申请人： Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

发明人： Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

IPC分类号： F04D1/00

CPC分类号： F04D19/042 ,  F04D1/00 ,  F04D19/044 ,  F04D29/023 ,  F04D29/058 ,  F04D29/32 ,  F04D29/644 ,  F05D2230/10

摘要： Provided is an exhaust pump that is suitable for enhancing durability, processability of connecting opening portions in a pump production stage, and evacuation performance. An exhaust pump includes: a cylindrical rotating member; a support unit of the cylindrical rotating member; a driving unit for rotationally driving the cylindrical rotating member; an outer cylindrical fixed member disposed so as to surround the outer periphery of the cylindrical rotating member; an inner cylindrical fixed member disposed so as to be surrounded by the inner periphery of the cylindrical rotating member; a helical outer thread groove exhaust passage provided between the cylindrical rotating member and the outer cylindrical fixed member; a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.

摘要翻译： 本发明提供一种适于提高泵生产阶段的连接开口部的耐久性，加工性以及排气性能的排气泵。 排气泵包括：圆筒形旋转构件; 圆柱形旋转构件的支撑单元; 用于旋转地驱动所述圆筒形旋转构件的驱动单元; 设置成围绕所述圆筒形旋转构件的外周的外圆柱形固定构件; 内圆筒状固定部件，被配置成被圆筒状旋转部件的内周围包围; 螺旋形外螺纹槽排气通道，设置在圆筒形旋转构件和外圆柱形固定构件之间; 设置在所述圆筒形旋转构件和所述内圆柱形固定构件之间的螺旋形内螺纹槽排气通道; 连接开口部，其在所述圆筒状的旋转构件中开口，并且将存在于所述圆筒状的旋转构件的外周的附近的气体的一部分朝向所述内螺纹槽排出通路。 连接开口部分的上游端和设置在圆筒形旋转部件的位于连接开口部分上游侧的外周的最下级转子叶片之间的间隙具有等于或大于能插入的尺寸的尺寸 用于打开连接开口部分的工具的间隙。

公开(公告)号：US06465924B1

公开(公告)日：2002-10-15

申请号：US09537940

申请日：2000-03-29

申请人： Yasushi Maejima

发明人： Yasushi Maejima

IPC分类号： H02K709

CPC分类号： F04D29/058 ,  F04D19/048 ,  F16C32/0459 ,  F16C2360/45

摘要： To facilitate the fabrication work of a stator column assembly and improve full and wise use of resources, as well as to prevent contact accident between a mold portion of a stator column and a rotor shaft due to the thermal inflation. A first electromagnet unit (30), a stator coil unit (20), and a second electromagnet unit (40) are engaged to and arranged in a cylindrical stator column (11) in the order stated, the first electromagnet unit (30) comprising an electromagnet (31) of a first active radial magnetic bearing and a radial displacement sensor (32) for the electromagnet (31) which are attached in a first circular holding member (30c) to be coated and molded with a resin mold (30d), the stator coil unit (20) comprising a stator coil (21a) that is attached in a circular yoke member (20c) to be coated and molded with a resin mold (20d), the second electromagnet unit (40) comprising an electromagnet (41) of a second active radial magnetic bearing and a radial displacement sensor (42) for the electromagnet (41) which are attached in a second circular holding member (40c) to be coated and molded with a resin mold (40d).

摘要翻译： 为了促进定子柱组件的制造工作，并改善资源的充分和明智的使用，并且防止由于热膨胀引起的定子柱的模具部分和转子轴之间的接触事故。 第一电磁体单元（30），定子线圈单元（20）和第二电磁体单元（40）按照所述顺序接合并布置在圆柱形定子柱（11）中，第一电磁体单元（30）包括 第一有源径向磁轴承的电磁体（31）和用于电磁体（31）的径向位移传感器（32），其安装在待涂覆并用树脂模具（30d）模制的第一圆形保持构件（30c）中， 定子线圈单元（20）包括定子线圈（21a），该定子线圈（21a）被安装在待涂覆的环形轭构件（20c）中并用树脂模具（20d）模制，第二电磁体单元（40）包括电磁体 41）和用于电磁体（41）的径向位移传感器（42），所述径向位移传感器（42）安装在第二圆形保持构件（40c）中以被涂覆并用树脂模具（40d）模制。

公开(公告)号：US20110103934A1

公开(公告)日：2011-05-05

申请号：US12999137

申请日：2009-07-14

申请人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

发明人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

IPC分类号： F04B49/00

CPC分类号： F04D19/042 ,  F04D27/001 ,  F04D27/0292 ,  F04D29/661 ,  F05D2260/607

摘要： Provided is a vacuum pump which can detect precisely physical contact between a rotor portion and a stator portion, and contact between the rotor portion and the stator portion that occurs as the amount of deposited solid product reaches the clearance between the rotor portion and the stator portion.A vibration sensor is provided, taking advantage of a clearance, at the outer peripheral of a thread groove spacer. Contact between the rotor portion and the stator portion is decided, when a particular vibration during contact between the rotor portion and the stator portion exceeds a predetermined threshold value. The vibration sensor is mounted on the outer peripheral of the thread groove spacer at the end of the side of an exhaust port. The thread groove spacer is fixed on a casing via an elastic member (an O-ring) that have a vibration absorption (vibration damping) function of a cutoff frequency (fc1). A vibration signal outputted from the vibration sensor is converted into a digital vibration signal, and is inputted to a digital filter having a passing band of fc1 to fc2 [Hz]. If the vibration level of the vibration signal having passed through the digital filter exceeds a predetermined threshold value, it is detected that contact between the rotor portion and the stator portion has occurred in a turbo-molecular pump.

摘要翻译： 提供一种真空泵，其可精确地检测转子部分和定子部分之间的物理接触，以及转子部分和定子部分之间的接触，其随着沉积的固体产物的量达到转子部分和定子部分之间的间隙而发生 。 在螺纹槽间隔件的外周设有利用间隙的振动传感器。 当转子部分和定子部分之间的接触期间的特定振动超过预定阈值时，决定转子部分和定子部分之间的接触。 振动传感器安装在排气口侧端部的螺纹槽隔离件的外周上。 螺纹槽间隔件通过具有截止频率（fc1）的振动吸收（减振）功能的弹性部件（O形环）固定在壳体上。 从振动传感器输出的振动信号被转换为数字振动信号，并被输入到具有通过频带fc1至fc2 [Hz]的数字滤波器。 如果通过数字滤波器的振动信号的振动水平超过预定阈值，则检测到在涡轮分子泵中发生了转子部分和定子部分之间的接触。

公开(公告)号：US20090081056A1

公开(公告)日：2009-03-26

申请号：US12225041

申请日：2007-03-15

申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/60 ,  F16L19/03

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

摘要： To form a shock absorbing structure more easily.A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation. By this plastic deformation of the shock absorbing member, the energy for rotating the molecular pump is consumed, so that a shock produced in the molecular pump can be absorbed.

摘要翻译： 更容易形成减震结构。 在分子泵的凸缘上设有用于消耗冲击能量的减震结构。 在凸缘中设置有插入孔，并且将由独立且小的部分形成的冲击吸收部件嵌合并固定在该插入孔中。 提供螺栓孔以使得用于固定凸缘的螺栓和冲击吸收构件中的真空容器通过。 冲击吸收构件通过形成空腔部分而设置有薄壁部分。 在分子泵中产生转子部分的旋转方向的冲击，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。 因此，将凸缘固定到真空泵的凸缘上的螺栓撞击减震构件，从而冲击吸收构件受到塑性变形。 通过冲击吸收构件的塑性变形，消耗了分子泵旋转的能量，从而可以吸收分子泵产生的冲击。

公开(公告)号：US20070031270A1

公开(公告)日：2007-02-08

申请号：US10571642

申请日：2004-08-27

申请人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

发明人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

IPC分类号： F04D19/04 ,  F04B17/00

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/266

摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).

摘要翻译： 提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以 防止振动，以及具有这种固定结构的涡轮分子泵。 在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。 此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。 因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265） 位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

公开(公告)号：US08403652B2

公开(公告)日：2013-03-26

申请号：US12225041

申请日：2007-03-15

申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

IPC分类号： F04D19/04

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

摘要： A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.

摘要翻译： 分子泵具有圆筒形壳体，形成在壳体中的定子部分，设置在定子部分中的轴，相对于定子部分枢转地支撑轴的轴承，转子，其附接到轴并与其一体旋转 轴，用于旋转地驱动轴的电动机，减震构件和设置在壳体的端部处的凸缘部。 凸缘部分具有螺栓孔，通过该螺栓孔将用于固定壳体和固定构件的螺栓彼此延伸，以及插入孔，其邻近螺栓孔设置并且其中缓冲构件插入其中，使得至少一端 沿着螺栓的轴向延伸的减震构件的侧面与螺栓间隔开。

公开(公告)号：US06559568B2

公开(公告)日：2003-05-06

申请号：US10068833

申请日：2002-02-06

申请人： Yasushi Maejima ,  Masayoshi Takamine

发明人： Yasushi Maejima ,  Masayoshi Takamine

IPC分类号： H02K709

CPC分类号： F16C32/0446 ,  F04D19/048 ,  F16C32/0459 ,  F16C32/0489 ,  F16C2360/45

摘要： To provide a magnetic bearing type vacuum pump, which can suppress the generation of eddy current on a shaft to be small in heat generation on the shaft and to be excellent in efficiency. In a shaft, an electromagnet target composing a target for electromagnets composing a radial magnetic bearing portion, a radial sensor target composing a target for a coil detecting a displacement of the shaft in the vicinity of the magnetic bearing portion and a collar between the electromagnet target and the radial sensor target are composed of laminated steel plates, so that the generation of eddy current caused on the shaft due to magnetic field generated in the magnetic bearing portion is reduced.

公开(公告)号：US6023115A

公开(公告)日：2000-02-08

申请号：US794212

申请日：1997-01-30

申请人： Yasushi Maejima

发明人： Yasushi Maejima

IPC分类号： F04D19/04 ,  F16C32/04 ,  F16C39/06 ,  H02K5/24 ,  F04D29/04

CPC分类号： F16C32/044 ,  F16C2360/45

摘要： To prevent the problem of dragging on an auxiliary bearing which tends to occur in a motor in the vicinity of a resonance point of rigid mode during the start-up of a three axis control magnetic bearing apparatus, a radial position correcting electromagnet is provided. The radial position correcting electromagnet has a magnetic pole extending in the direction of a radius of a metal disc of the motor through which the motor shaft passes. A voltage having a short period is applied to the radial position correcting electromagnet at a plurality of times in the vicinity of the resonance point of rigid mode upon start-up of the motor to attract the metal disc and thereby adjust the radial position of the shaft to prevent excessive contact between the shaft and other parts of the three axis control magnetic bearing apparatus.

摘要翻译： 为了防止在三轴控制磁轴承装置启动期间在刚性模式的共振点附近的电动机中容易发生的辅助轴承上拖动的问题，提供了径向位置校正电磁体。 径向位置校正电磁体具有沿电动机通过的电动机的金属盘的半径方向延伸的磁极。 在马达启动时，刚性模式的共振点附近多次施加短周期的电压，以吸引金属盘，从而调整轴的径向位置 以防止轴与三轴控制磁轴承装置的其他部件之间的过度接触。