公开(公告)号：US10222526B2

公开(公告)日：2019-03-05

申请号：US15617654

申请日：2017-06-08

Applicant: Viavi Solutions, Inc.

Inventor： Karen Denise Hendrix ,  Richard A. Bradley, Jr. ,  Marius Grigonis ,  Georg J. Ockenfuss

IPC: G02B5/28 ,  G01J5/08 ,  H04N13/254 ,  G02B1/11 ,  G02B5/20 ,  G06K9/00 ,  H04N5/33

Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.

公开(公告)号：US20160149058A1

公开(公告)日：2016-05-26

申请号：US14942940

申请日：2015-11-16

Applicant: Viavi Solutions Inc.

Inventor： Richard A. Bradley, Jr. ,  Karen Denise Hendrix ,  Jeffrey James Kuna ,  Georg J. Ockenfuss

IPC: H01L31/0216 ,  H01L31/0232

CPC classification number: H01L27/14625

Abstract: An optical sensor assembly is provided in which a dark mirror coating is used to suppress stray light in the form of both unwanted reflections from non-optically active regions of the sensor assembly surface and unwanted transmission of light into the surface region of the sensor assembly. The sensor assembly includes an image sensor positioned in a substrate adjacent to substrate surface areas that are not optically active. A dark mirror coating covering those surface areas significantly reduces reflections from non-optically active surface regions and improves image sensor performance in terms of signal-to-noise ratio and reduction in the appearance of “ghost” images, in turn enhancing the accuracy and precision of the sensor. The dark mirror coating may in the alternative, or in addition, be positioned underneath an optical filter, depending on the structure, material, and requirements of a particular sensor assembly.

Abstract translation: 提供了一种光学传感器组件，其中使用暗镜涂层来抑制来自传感器组件表面的非光学活性区域的不希望的反射的形式的杂散光以及不期望地将光传播到传感器组件的表面区域中。 传感器组件包括位于基板中的图像传感器，该图像传感器邻近基板表面区域而不是光学活动的。 覆盖这些表面区域的深色镜面显着减少了非光学表面区域的反射，并提高了信噪比方面的图像传感器性能，并减少了“重影”图像的外观，从而提高了精度和精度 的传感器。 根据特定传感器组件的结构，材料和要求，可以替代地或另外地将暗镜涂层定位在滤光器下方。

公开(公告)号：US12078830B2

公开(公告)日：2024-09-03

申请号：US17457123

申请日：2021-12-01

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Jinhui Yang ,  Marius Grigonis ,  Karen Denise Hendrix ,  Andy Shkabko

IPC: G02B5/28 ,  G02B1/10

CPC classification number: G02B5/286 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US11867935B2

公开(公告)日：2024-01-09

申请号：US17449149

申请日：2021-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui Yang ,  Marius Grigonis ,  Georg J. Ockenfuss ,  Karen Denise Hendrix

IPC: G02B5/28 ,  B32B7/023 ,  B32B7/02 ,  B32B17/10 ,  C23C14/00 ,  C23C14/06 ,  C23C14/34 ,  C23C14/35 ,  G02B5/20

CPC classification number: G02B5/285 ,  B32B7/02 ,  B32B7/023 ,  B32B17/10229 ,  C23C14/0036 ,  C23C14/0617 ,  C23C14/3464 ,  C23C14/35 ,  G02B5/207 ,  Y10T428/24942 ,  Y10T428/266

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.

公开(公告)号：US11131794B2

公开(公告)日：2021-09-28

申请号：US16290612

申请日：2019-03-01

Applicant: VIAVI Solutions Inc.

Inventor： Karen Denise Hendrix ,  Richard A. Bradley, Jr. ,  Marius Grigonis ,  Georg J. Ockenfuss

IPC: G02B5/28 ,  G01J5/08 ,  H04N13/254 ,  G02B1/115 ,  C23C14/58 ,  C23C14/08 ,  C23C14/54 ,  C23C14/18 ,  G02B1/11 ,  G02B5/20 ,  G06K9/00 ,  H04N5/33

Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.

公开(公告)号：US09945995B2

公开(公告)日：2018-04-17

申请号：US15099180

申请日：2016-04-14

Applicant: Viavi Solutions, Inc.

Inventor： Karen Denise Hendrix ,  Richard A. Bradley, Jr. ,  Marius Grigonis ,  Georg J. Ockenfuss

IPC: G02B5/28 ,  G02B5/20 ,  G02B1/11 ,  G01J5/08 ,  H04N5/33 ,  G06K9/00 ,  H04N13/02

CPC classification number: G02B5/281 ,  G01J5/0862 ,  G02B1/11 ,  G02B5/207 ,  G02B5/285 ,  G06K9/00335 ,  H04N5/33 ,  H04N13/254

Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.

公开(公告)号：US09842873B2

公开(公告)日：2017-12-12

申请号：US15337489

申请日：2016-10-28

Applicant: Viavi Solutions Inc.

Inventor： Karen Denise Hendrix ,  Charles A. Hulse ,  Richard A. Bradley ,  Jeffrey James Kuna

IPC: H01L27/146 ,  G02B5/28

CPC classification number: H01L27/14621 ,  G01J3/0259 ,  G01J3/26 ,  G01J2003/1226 ,  G01J2003/1234 ,  G01J2003/1239 ,  G02B5/281 ,  G02B5/288 ,  H01L27/14623 ,  H01L27/1463 ,  H01L27/14634 ,  H01L27/14643 ,  H01L27/14685

Abstract: A variable optical filter is disclosed including a bandpass filter and a blocking filter. The bandpass filter includes a stack of alternating first and second layers, and the blocking filter includes a stack of alternating third and fourth layers. The first, second and fourth materials each comprise different materials, so that a refractive index of the first material is smaller than a refractive index of the second material, which is smaller than a refractive index of the fourth material; while an absorption coefficient of the second material is smaller than an absorption coefficient of the fourth material. The materials can be selected to ensure high index contrast in the blocking filter and low optical losses in the bandpass filter. The first to fourth layers can be deposited directly on a photodetector array.

公开(公告)号：US09261634B2

公开(公告)日：2016-02-16

申请号：US14166747

申请日：2014-01-28

Applicant: Viavi Solutions Inc.

Inventor： Karen Denise Hendrix ,  Charles A. Hulse ,  Richard A. Bradley ,  Jeffrey James Kuna

IPC: G02B5/28 ,  H01L27/146

CPC classification number: H01L27/14621 ,  G01J3/0259 ,  G01J3/26 ,  G01J2003/1226 ,  G01J2003/1234 ,  G01J2003/1239 ,  G02B5/281 ,  G02B5/288 ,  H01L27/14623 ,  H01L27/1463 ,  H01L27/14634 ,  H01L27/14643 ,  H01L27/14685

Abstract: A variable optical filter is disclosed including a bandpass filter and a blocking filter. The bandpass filter includes a stack of alternating first and second layers, and the blocking filter includes a stack of alternating third and fourth layers. The first, second and fourth materials each comprise different materials, so that a refractive index of the first material is smaller than a refractive index of the second material, which is smaller than a refractive index of the fourth material; while an absorption coefficient of the second material is smaller than an absorption coefficient of the fourth material. The materials can be selected to ensure high index contrast in the blocking filter and low optical losses in the bandpass filter. The first to fourth layers can be deposited directly on a photodetector array.