利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

17 条记录 (耗时 0.021 秒)

    Anchor/support design for MEMS resonators
    11.
    发明授权
    Anchor/support design for MEMS resonators 有权
    MEMS谐振器的锚/支撑设计

    公开(公告)号：US07990232B1

    公开(公告)日：2011-08-02

    申请号：US12133934

    申请日：2008-06-05

    申请人： Seungbae Lee

    发明人： Seungbae Lee

    IPC分类号： H03H9/02 ,  H03H9/46

    CPC分类号： H03H9/02338 ,  H03H9/2436 ,  H03H2009/0244 ,  H03H2009/02496

    摘要： Micro-Electro-Mechanical Systems (MEMS) resonator designs having support structures that minimize or substantially reduce anchor losses, thereby improving a quality factor (Q) of the MEMS resonators, are provided. In general, a MEMS resonator includes a resonator body connected to anchors via support structures. The anchors are connected to or are part of a substrate on which the MEMS resonator is formed. The support structures operate to support the resonator body in free space to enable vibration. The support structures are designed to minimize or substantially reduce energy loss through the anchors into the substrate.

    摘要翻译： 提供了具有最小化或基本上减少锚固损耗从而提高MEMS谐振器的质量因子（Q）的支撑结构的微机电系统（MEMS）谐振器设计。 通常，MEMS谐振器包括通过支撑结构连接到锚的谐振器体。 锚固件连接到或者是其上形成有MEMS谐振器的基板的一部分。 支撑结构用于将谐振器主体支撑在自由空间中以实现振动。 支撑结构被设计成使通过锚固件进入衬底的能量损失最小化或基本上减少。

    MEMS vibrating structure using a single-crystal piezoelectric thin film layer
    12.
    发明授权
    MEMS vibrating structure using a single-crystal piezoelectric thin film layer 有权
    MEMS振动结构采用单晶压电薄膜层

    公开(公告)号：US07586239B1

    公开(公告)日：2009-09-08

    申请号：US12134483

    申请日：2008-06-06

    申请人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

    发明人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

    IPC分类号： H01L41/08

    CPC分类号： H03H9/02338 ,  H03H3/0072 ,  H03H9/02275 ,  H03H9/2436 ,  H03H2009/02496 ,  H03H2009/241 ,  H03H2009/2442

    摘要： The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure having dominant lateral vibrations supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer that has been grown with a specific crystal orientation. Since the MEMS vibrating structure has dominant lateral vibrations, its resonant frequency may be controlled by its size and shape, rather than layer thickness, which provides high accuracy and enables multiple resonators having different resonant frequencies on a single substrate.

    摘要翻译： 微机电系统（MEMS）振动结构技术领域本发明涉及由MEMS锚系统支撑的主要侧向振动的微电子机械系统（MEMS）振动结构，并且包括已经以特定的晶体取向生长的单晶压电薄膜层。 由于MEMS振动结构具有主要的横向振动，其谐振频率可以通过其尺寸和形状而不是层厚度来控制，其提供高精度并且使得在单个基板上具有不同谐振频率的多个谐振器。

    Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies
    15.
    发明授权
    Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies 失效
    其中具有电阻加热元件的微机电谐振器被配置为通过谐振器体的对流加热来提供频率调谐

    公开(公告)号：US08610336B1

    公开(公告)日：2013-12-17

    申请号：US13250560

    申请日：2011-09-30

    申请人： Ye Wang ,  Harmeet Bhugra ,  Seungbae Lee

    发明人： Ye Wang ,  Harmeet Bhugra ,  Seungbae Lee

    IPC分类号： H01L41/08

    CPC分类号： H03H3/0073 ,  H03H3/0077 ,  H03H9/02338 ,  H03H9/02401 ,  H03H2009/241

    摘要： A microelectromechanical resonator includes a resonator body, which is encapsulated within a sealed cavity extending between first and second substrates that are bonded together. The resonator body is anchored to the first substrate by at least a pair of tethers that suspend the resonator body opposite an underlying recess in the first substrate. A resistive heating element is provided, which is configured to indirectly heat the resonator body through convective heating of the cavity. This resistive heating element may be disposed on an inner surface of the second substrate that is exposed to the cavity. The resonator may also include first and second electrical interconnects, which extend through the second substrate and contact respective first and second portions of the resistive heating element.

    摘要翻译： 微机电谐振器包括谐振器体，该谐振器体封装在第一和第二基板之间延伸的密封腔中，所述第一和第二基板被接合在一起。 谐振器主体通过至少一对将谐振器体悬挂在第一衬底中与下面的凹槽相对的系绳来锚定到第一衬底。 提供电阻加热元件，其被配置为通过腔体的对流加热来间接加热谐振器体。 该电阻加热元件可以设置在暴露于空腔的第二基板的内表面上。 谐振器还可以包括第一和第二电互连，其延伸穿过第二基板并接触电阻加热元件的相应的第一和第二部分。

    Noise killing system of fans
    17.
    发明授权
    Noise killing system of fans 失效
    风扇噪声灭火系统

    公开(公告)号：US5791869A

    公开(公告)日：1998-08-11

    申请号：US597126

    申请日：1996-02-06

    申请人： Seungbae Lee

    发明人： Seungbae Lee

    IPC分类号： G10K11/178 ,  F04D29/66 ,  F04D29/68 ,  G10K11/16 ,  H02K5/24

    CPC分类号： F04D29/665 ,  F04D29/681

    摘要： Mounted on the body of a fan blade is a micro-electro mechanical system which includes at least one thin silicon film forming an integrated circuit, and an actuator connected to the circuit for generating vibrations. If used as a noise-killing system, the actuator generates vibrations which offset (reduce) unstable air flows along the blade body. If used in a heat exchanger to improve the heat exchange effect, the system generates vibrations which amplify the unstable air flow, e.g., to amplify turbulence and vortexes.

    摘要翻译： 安装在风扇叶片的主体上的是一种微电子机械系统，其包括形成集成电路的至少一个薄硅膜和连接到电路产生振动的致动器。 如果用作噪声消除系统，则致动器产生抵消（减少）沿着叶片主体的不稳定气流的振动。 如果在热交换器中使用以改善热交换效应，则系统产生放大不稳定气流的振动，例如放大湍流和涡流。