公开(公告)号：US08106724B1

公开(公告)日：2012-01-31

申请号：US12508257

申请日：2009-07-23

申请人： Ye Wang ,  Seungbae Lee ,  Harmeet Bhugra

发明人： Ye Wang ,  Seungbae Lee ,  Harmeet Bhugra

IPC分类号： H03H9/00 ,  H01L41/08

CPC分类号： H03H9/2463 ,  H03H2009/02251 ,  H03H2009/0244 ,  H03H2009/241

摘要： Micro-electromechanical acoustic resonators include a substrate having a cavity therein and a resonator body suspended over the cavity. The resonator body is anchored on opposing sides thereof (by support beams) to first and second portions of the substrate. These first and second portions of the substrate, which extend over the cavity as first and second ledges, respectively, each have at least one perforation therein disposed over the cavity. These perforations may be open or filled. The first and second ledges are formed of a first material (e.g., silicon) and the first and second ledges are filled with a second material having a relatively high acoustic impedance relative to the first material. This second material may include a material selected from a group consisting of tungsten (W), copper (Cu), molybdenum (Mo).

摘要翻译： 微机电声谐振器包括其中具有空腔的基板和悬在空腔上的谐振器体。 谐振器主体被固定在基板的第一和第二部分的相对侧（通过支撑梁）上。 基板的这些第一和第二部分分别在第一和第二凸缘之上延伸到空腔上，每个在其上设置有至少一个穿孔。 这些穿孔可以是开放的或填充的。 第一和第二凸缘由第一材料（例如硅）形成，并且第一和第二凸缘由相对于第一材料具有相对较高的声阻抗的第二材料填充。 该第二材料可以包括选自钨（W），铜（Cu），钼（Mo）的材料。

公开(公告)号：US08610336B1

公开(公告)日：2013-12-17

申请号：US13250560

申请日：2011-09-30

申请人： Ye Wang ,  Harmeet Bhugra ,  Seungbae Lee

发明人： Ye Wang ,  Harmeet Bhugra ,  Seungbae Lee

IPC分类号： H01L41/08

CPC分类号： H03H3/0073 ,  H03H3/0077 ,  H03H9/02338 ,  H03H9/02401 ,  H03H2009/241

摘要： A microelectromechanical resonator includes a resonator body, which is encapsulated within a sealed cavity extending between first and second substrates that are bonded together. The resonator body is anchored to the first substrate by at least a pair of tethers that suspend the resonator body opposite an underlying recess in the first substrate. A resistive heating element is provided, which is configured to indirectly heat the resonator body through convective heating of the cavity. This resistive heating element may be disposed on an inner surface of the second substrate that is exposed to the cavity. The resonator may also include first and second electrical interconnects, which extend through the second substrate and contact respective first and second portions of the resistive heating element.

摘要翻译： 微机电谐振器包括谐振器体，该谐振器体封装在第一和第二基板之间延伸的密封腔中，所述第一和第二基板被接合在一起。 谐振器主体通过至少一对将谐振器体悬挂在第一衬底中与下面的凹槽相对的系绳来锚定到第一衬底。 提供电阻加热元件，其被配置为通过腔体的对流加热来间接加热谐振器体。 该电阻加热元件可以设置在暴露于空腔的第二基板的内表面上。 谐振器还可以包括第一和第二电互连，其延伸穿过第二基板并接触电阻加热元件的相应的第一和第二部分。

公开(公告)号：US08742854B1

公开(公告)日：2014-06-03

申请号：US13186332

申请日：2011-07-19

申请人： Seungbae Lee ,  Harmeet Bhugra ,  Ashwin Samarao

发明人： Seungbae Lee ,  Harmeet Bhugra ,  Ashwin Samarao

IPC分类号： H03B21/01 ,  H03B5/30

CPC分类号： H03H9/02448 ,  H03H9/02259 ,  H03H9/2405 ,  H03H9/2463 ,  H03H2009/0244 ,  H03H2009/02496 ,  H03H2009/2415

摘要： A periodic signal generator is configured to generate high frequency signals characterized by relatively low temperature coefficients of frequency (TCF). A microelectromechanical resonator, such as concave bulk acoustic resonator (CBAR) supporting capacitive and piezoelectric transduction, may be geometrically engineered as a signal generator that produces two periodic signals having unequal resonant frequencies with unequal temperature coefficients. Circuitry is also provided for combining the two periodic signals using a mixer to thereby yield a high frequency low-TCF periodic difference signal at an output of the periodic signal generator.

摘要翻译： 周期性信号发生器被配置为产生由频率相对较低的温度系数（TCF）表征的高频信号。 支持电容和压电转换的诸如凹体积声共振器（CBAR）的微电子机械谐振器可以被几何地设计为信号发生器，其产生具有不等于具有不等温度系数的不等谐振频率的两个周期信号。 还提供电路用于使用混频器组合两个周期信号，从而在周期信号发生器的输出处产生高频低TCF周期性差分信号。

公开(公告)号：US08901459B2

公开(公告)日：2014-12-02

申请号：US13535005

申请日：2012-06-27

申请人： Wonhaeng Lee ,  Seungbae Lee

发明人： Wonhaeng Lee ,  Seungbae Lee

IPC分类号： F27D11/00 ,  H01L21/67 ,  F26B19/00

CPC分类号： H01L21/67103

摘要： Provided is a substrate supporting unit, which includes a support plate on which a substrate is placed, and a heating member disposed within the support plate to heat the support plate. The heating member includes a plurality of first heating wires disposed in a first region of the support plate, and a plurality of second heating wires disposed in a second region of the support plate, which is different from the first region. The first heating wires are connected to each other through one of a series connection and a parallel connection, and the second heating wires are connected to each other through the other of the series connection and the parallel connection.

摘要翻译： 提供了一种基板支撑单元，其包括其上放置基板的支撑板和设置在支撑板内以加热支撑板的加热构件。 所述加热构件包括设置在所述支撑板的第一区域中的多个第一加热丝，以及设置在所述支撑板的与所述第一区域不同的第二区域中的多个第二加热线。 第一加热线通过串联连接和并联连接而彼此连接，第二加热线通过串联和并联中的另一个相互连接。

公开(公告)号：US5649807A

公开(公告)日：1997-07-22

申请号：US593431

申请日：1996-01-29

申请人： Seungbae Lee ,  Jin-kyu Choi

发明人： Seungbae Lee ,  Jin-kyu Choi

IPC分类号： F04D29/38

CPC分类号： F04D29/384 ,  Y10S416/02

摘要： A structure of a ventilation fan provided with a plurality of blades has a performance curve characterized by a gentle slope throughout the wide operating range instead of an S-hysteresis curve, in order to overcome a fluctuation phenomena of the operating flow rate. The blade tip cross-section lies on a first imaginary cylindrical surface and an angle of attack and pitch angle of the blade tip are formed as respective trajections by intersecting the first cylindrical surface by a second cylindrical surface whose center axis has been rotated about two axes.

摘要翻译： 设置有多个叶片的通风扇的结构具有特征在于整个宽操作范围内的平缓斜率而不是S形滞后曲线的性能曲线，以克服操作流量的波动现象。 叶片尖端横截面位于第一假想圆柱形表面上，并且叶片尖端的迎角和俯仰角通过与第一圆柱形表面相交而形成为相应的外形，第二圆柱形表面的中心轴线绕两个轴线旋转 。

公开(公告)号：US08035280B2

公开(公告)日：2011-10-11

申请号：US13037584

申请日：2011-03-01

申请人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

发明人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

IPC分类号： H01L41/08

CPC分类号： H03H9/2405 ,  H03H9/02228 ,  H03H9/02275 ,  H03H2009/241

摘要： The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate.

摘要翻译： 微机电系统技术领域本发明涉及由MEMS锚定系统支撑的微电子机械系统（MEMS）振动结构，并且包括确定MEMS振动结构的某些振动特性的具有畴反转的单晶压电薄膜层。 MEMS振动结构可能具有主要的横向振动或主要厚度振动。 单晶压电薄膜层可以包括钽酸锂或铌酸锂，并且可以提供具有精确尺寸和形状的MEMS振动结构，其可以提供高精度并且能够在单个衬底上制造具有不同谐振频率的多个谐振器。

公开(公告)号：US20110148252A1

公开(公告)日：2011-06-23

申请号：US13037584

申请日：2011-03-01

申请人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

发明人： Sheng-Shian Li ,  Seungbae Lee ,  Kushal Bhattacharjee

IPC分类号： H01L41/04

CPC分类号： H03H9/2405 ,  H03H9/02228 ,  H03H9/02275 ,  H03H2009/241

摘要： The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate.

摘要翻译： 微机电系统技术领域本发明涉及由MEMS锚定系统支撑的微电子机械系统（MEMS）振动结构，并且包括确定MEMS振动结构的某些振动特性的具有畴反转的单晶压电薄膜层。 MEMS振动结构可能具有主要的横向振动或主要厚度振动。 单晶压电薄膜层可以包括钽酸锂或铌酸锂，并且可以提供具有精确尺寸和形状的MEMS振动结构，其可以提供高精度并且能够在单个衬底上制造具有不同谐振频率的多个谐振器。

公开(公告)号：US07750759B1

公开(公告)日：2010-07-06

申请号：US12112278

申请日：2008-04-30

申请人： Seungbae Lee ,  Kushal Bhattacharjee

发明人： Seungbae Lee ,  Kushal Bhattacharjee

IPC分类号： H03H9/00 ,  H03H9/54

CPC分类号： H03H9/2452 ,  H03H9/462 ,  H03H9/485 ,  H03H2009/02496

摘要： The present invention relates to a multi-mode micro-electromechanicalsystems (MEMS) resonator system that may provide low motional resistance and a high quality factor by using a resonating structure that includes multiple parallel-coupled longitudinally resonating bodies, each of which has multiple resonating segments adjacent to one another along an axis. The multi-mode MEMS resonator system may provide high acoustic velocity by using the micro-structure of MEMS technology. The multi-mode MEMS resonator system may include electrostatic transducers, piezoelectric transducers, or both. The present invention includes multiple embodiments that may include different configurations of the resonating structure.

摘要翻译： 本发明涉及通过使用包括多个并联耦合纵向谐振体的谐振结构来提供低运动电阻和高品质因数的多模式微机电系统（MEMS）谐振器系统，其中每个具有多个谐振段 沿轴线彼此相邻。 多模MEMS谐振器系统可以通过使用MEMS技术的微结构来提供高声速。 多模MEMS谐振器系统可以包括静电换能器，压电换能器或两者。 本发明包括可以包括谐振结构的不同配置的多个实施例。

公开(公告)号：US08376711B2

公开(公告)日：2013-02-19

申请号：US12607094

申请日：2009-10-28

申请人： Seungbae Lee

发明人： Seungbae Lee

IPC分类号： F03D3/04

CPC分类号： F03D3/02 ,  F03D3/0418 ,  F03D3/0427 ,  F03D3/061 ,  F03D13/20 ,  F03D80/70 ,  F05B2240/40 ,  Y02E10/728 ,  Y02E10/74

摘要： Provided is a dual rotor wind turbine having two rotor assemblies. In the dual rotor wind turbine, an inlet guide vane is placed at a lower location in front of each rotor assembly and a rotor shaft of the rotor assemblies is placed in back of a vertical shaft, so that the rotor shaft is offset from the vertical shaft. Thus, the gravity center of the wind turbine is located in a lower portion of the wind turbine, so that a stable balance of the wind turbine can be realized and the vertical shaft can be smoothly rotated relative to a fixed shaft.

摘要翻译： 提供了具有两个转子组件的双转子风力涡轮机。 在双转子风力涡轮机中，入口引导叶片放置在每个转子组件前面的下部位置处，并且转子组件的转子轴被放置在垂直轴的后面，使得转子轴从垂直轴 轴。 因此，风力涡轮机的重心位于风力涡轮机的下部，从而可以实现风力涡轮机的稳定平衡，并且垂直轴可以相对于固定轴平滑地旋转。

公开(公告)号：US20130020279A1

公开(公告)日：2013-01-24

申请号：US13598962

申请日：2012-08-30

申请人： Seungbae Lee ,  Sheng-Shian Li ,  Kushal Bhattacharjee

发明人： Seungbae Lee ,  Sheng-Shian Li ,  Kushal Bhattacharjee

IPC分类号： B05D5/12 ,  H01L41/22 ,  B05D3/10

CPC分类号： B81C1/00476 ,  Y10T29/42

摘要： A method of forming a device is provided. The method includes providing a substrate, forming a sacrificial layer over the substrate, and forming a field layer around the sacrificial layer. After formation, both the sacrificial layer and the field layer are planarized. A component is then formed over the planarized sacrificial layer and the planarized field layer. The component has a first electrode and a second electrode and a single crystal wafer disposed between the first and second electrodes. The component includes anchors disposed substantially over the field layer. Once the component is formed, the sacrificial layer is released with an etchant having a selectivity for the sacrificial layer wherein a cavity is formed beneath the component. The cavity allows free movement within the cavity during operation of the device. The etchant does not release the field layer and the component so the field layer remains below the anchors.

摘要翻译： 提供了一种形成装置的方法。 该方法包括提供衬底，在衬底上形成牺牲层，以及在牺牲层周围形成场层。 在形成之后，牺牲层和场层都被平坦化。 然后在平坦化的牺牲层和平坦化的场层上形成一个分量。 该部件具有设置在第一和第二电极之间的第一电极和第二电极以及单晶晶片。 该部件包括基本上设置在场层上的锚。 一旦形成了部件，牺牲层就可以用对牺牲层具有选择性的蚀刻剂来释放，其中在部件之下形成空腔。 空腔允许在设备操作期间在空腔内自由移动。 蚀刻剂不释放场层和组分，因此场层保持在锚点下方。