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    Composite MEMS flow sensor on silicon-on-insulator device and method of making the same
    11.
    发明授权
    Composite MEMS flow sensor on silicon-on-insulator device and method of making the same 有权

    公开(公告)号：US10480974B2

    公开(公告)日：2019-11-19

    申请号：US16017917

    申请日：2018-06-25

    申请人： Liji Huang ,  Chih-Chang Chen

    发明人： Liji Huang ,  Chih-Chang Chen

    IPC分类号： G01F1/692 ,  G01F1/708 ,  G01F7/00 ,  G01F1/684 ,  G01F1/696

    摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

    Smart device for gas range
    12.
    发明授权
    Smart device for gas range 有权

    公开(公告)号：US09752783B2

    公开(公告)日：2017-09-05

    申请号：US14621043

    申请日：2015-02-12

    申请人： Liji Huang ,  Chih-Chang Chen

    发明人： Liji Huang ,  Chih-Chang Chen

    IPC分类号： F24C1/00 ,  F24C3/12 ,  F23N5/24

    CPC分类号： F24C3/126 ,  F23N5/242 ,  F23N2025/06 ,  F23N2031/00 ,  F23N2041/08 ,  F23N2900/01001

    摘要： The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the users via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.

    Smart Electronic Vaporizer
    13.
    发明申请
    Smart Electronic Vaporizer 审中-公开
    智能电子蒸发器

    公开(公告)号：US20160255878A1

    公开(公告)日：2016-09-08

    申请号：US14639824

    申请日：2015-03-05

    申请人： LIJI HUANG ,  CHIH-CHANG CHEN

    发明人： Liji Huang ,  Chih-Chang Chen

    IPC分类号： A24F47/00 ,  H04W88/02 ,  H04L29/08 ,  A61B5/087 ,  A61B5/083

    CPC分类号： A24F47/008 ,  A61B5/0833 ,  A61B5/0836 ,  A61B5/087 ,  A61B5/0878 ,  A61B2562/028 ,  H04L67/10 ,  H04W4/80

    摘要： The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.

    摘要翻译： 智能电子蒸发器装置的设计和结构以及控制方案具有微加工（即MEMS，微机电系统）质量流量传感器和控制电子装置，其提供与用户吸入流量或强度成比例的蒸发过程 为传统香烟体验的最佳模拟。 该装置还包括与质量流量传感器耦合的MEMS气体组成传感器，以测量用户的呼吸健康数据，包括但不限于哮喘状态和新陈代谢相关呼吸交换率。 该设备还能够将数据中继到指定的移动设备，并进一步传送到指定的云以进行大数据处理和共享。

    Micromachined oxygen sensor and method of making the same
    14.
    发明授权
    Micromachined oxygen sensor and method of making the same 有权
    微加工氧传感器及其制作方法

    公开(公告)号：US09354197B2

    公开(公告)日：2016-05-31

    申请号：US13870914

    申请日：2013-04-25

    申请人： Liji Huang ,  Chih-Chang Chen

    发明人： Liji Huang ,  Chih-Chang Chen

    IPC分类号： G01N27/409 ,  G01N27/407

    CPC分类号： G01N27/4073 ,  G01N27/4071 ,  G01N27/409

    摘要： The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.

    摘要翻译： 在本发明中公开了用硅微加工（a.k.a.MicroSystem，Micro Electro Mechanical Systems）制造的氧浓度传感器的设计和制造方法，该方法用于具有快速响应时间和低功耗的氧测量应用。 所述硅氧浓度传感器用支撑在由氮化硅制成的膜上的钇稳定的氧化锆氧化物电流计单元进行操作，或者具有用于机械强度实施的硅插头的氮化硅膜。

    Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods
    16.
    发明申请
    Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods 有权
    微加工热质量流量传感器和插入式流量计及其制造方法

    公开(公告)号：US20070017285A1

    公开(公告)日：2007-01-25

    申请号：US11157604

    申请日：2005-06-21

    申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845

    摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.

    摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。 该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围 速率测量，同时保持高度的测量精度。

    Tunable multi-channel optical attenuator (TMCOA)
    18.
    发明授权
    Tunable multi-channel optical attenuator (TMCOA) 失效
    可调谐多通道光衰减器（TMCOA）

    公开(公告)号：US06509998B2

    公开(公告)日：2003-01-21

    申请号：US09877367

    申请日：2001-06-07

    申请人： Liji Huang ,  Jian Li ,  Naiqian Han ,  James Yang

    发明人： Liji Huang ,  Jian Li ,  Naiqian Han ,  James Yang

    IPC分类号： G02F103

    CPC分类号： G02B26/02 ,  G02B26/001

    摘要： A conductive substrate supports an array of multi-channel optical attenuating devices. Each attenuating device includes a membrane with an optically transparent portion And a flexible support for positioning the optically transparent portion of the membrane spaced from the substrate for defining an air gap. The air gap constitutes a cross-shaped gap-chamber having a horizontally and vertically elongated chambers extended from a central intersection area functioning as an optical active area. A voltage bias circuit applies an electrical bias between the conductive substrate and the membrane to adjust and control an air-gap thickness at the optical active area between the conductive substrate and the membrane. Each of the devices can be manufactured on the same silicon wafer using the same process and can be individually controlled to accommodate different wavelength attenuation at each channel. Production costs, and time and efforts required for aligning the array to optical fibers are also reduced.

    摘要翻译： 导电衬底支持多通道光衰减器件的阵列。 每个衰减装置包括具有光学透明部分的膜和柔性支撑件，用于将膜的光学透明部分与衬底间隔开以限定气隙。 气隙构成十字形间隙室，其具有从用作光学有源区域的中心交叉区域延伸的水平和垂直细长室。 电压偏置电路在导电基板和膜之间施加电偏压，以调节和控制导电基板和膜之间的光学有效面积处的气隙厚度。 每个器件可以使用相同的工艺在相同的硅晶片上制造，并且可以单独控制以适应每个通道的不同波长衰减。 生产成本以及将阵列对准光纤所需的时间和努力也减少了。

    Digital regulated gas dispensing apparatus with a MEMS mass flow meter
    20.
    发明授权
    Digital regulated gas dispensing apparatus with a MEMS mass flow meter 有权

    公开(公告)号：US10240723B2

    公开(公告)日：2019-03-26

    申请号：US15609518

    申请日：2017-05-31

    申请人： Liji Huang ,  Chih-Chang Chen

    发明人： Liji Huang ,  Chih-Chang Chen

    IPC分类号： F17C13/02 ,  F17C13/04 ,  G01F1/684 ,  G01F1/696 ,  A61M16/10 ,  A61M16/16 ,  A61M16/00

    摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.