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11.发明申请公开(公告)号：US20050281516A1
公开(公告)日：2005-12-22
申请号：US11195593
申请日：2005-08-03
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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公开(公告)号：US06960035B2
公开(公告)日：2005-11-01
申请号：US10409675
申请日：2003-04-09
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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公开(公告)号：US20050175302A1
公开(公告)日：2005-08-11
申请号：US11104598
申请日：2005-04-13
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/04
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is described, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译： 在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。 即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。 因此，描述像素部分中的像素数量，并且控制信号的传送时间变短。 这使得能够增加激光束的调制速度并执行高速曝光。 其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。 通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。 由于光纤阵列是由少数光纤获得的，所以成本低成本由于光纤数量少，所以在配置光纤时，发光区域进一步降低。
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公开(公告)号：US20050281506A1
公开(公告)日：2005-12-22
申请号：US11195840
申请日：2005-08-03
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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公开(公告)号：US06894712B2
公开(公告)日：2005-05-17
申请号：US10409686
申请日：2003-04-09
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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16.发明授权公开(公告)号：US06754007B2
公开(公告)日：2004-06-22
申请号：US10396789
申请日：2003-03-25
IPC分类号： G02B1308
CPC分类号： G02B13/08 , G02B3/06 , G02B27/0911
摘要： Provided are an optical correcting system which can form a linear image or illuminating light having a substantially uniform light intensity distribution without reducing the efficiency of use of light, and an exposure head which can perform excellent exposure by using the linear image or the illuminating light. Light flux from a light source is collimated by the function of a collimator lens, and the collimated light flux enters into an optical correcting system for correcting light intensity distribution. The optical correcting system for correcting light intensity distribution changes the width of the light flux at the exit position at which each collimated light flux exits so that the light intensity distribution of a linear image is uniform when the collimated light flux is formed into the linear image. A change of the widths of the light flux allows utilizing the light flux at the midsection generally having a high light intensity distribution for the peripheral having an insufficient light intensity, thereby uniformalizing the light intensity distribution of the linear image without reducing the efficiency of use of light as a whole.
摘要翻译： 提供了一种光学校正系统，其可以形成具有基本上均匀的光强度分布的线性图像或照明光，而不降低光的使用效率;以及可以通过使用线性图像或照明光来实现优异曝光的曝光头。 来自光源的光束通过准直透镜的功能被准直，并且准直光束进入用于校正光强度分布的光学校正系统。 用于校正光强度分布的光学校正系统改变在每个准直光束出射的出射位置处的光束的宽度，使得当准直光束形成线性图像时线性图像的光强度分布是均匀的 。 光通量宽度的变化允许利用通常具有高光强度分布的中部的光通量，对于具有不足的光强度的外围设备，从而使线性图像的光强度分布均匀化，而不降低使用效率 整体光。
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公开(公告)号：US20060237404A1
公开(公告)日：2006-10-26
申请号：US11390304
申请日：2006-03-28
申请人： Hiromi Ishikkawa , Akinori Harada , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hideo Yamanaka , Hiromitsu Yamakawa
发明人： Hiromi Ishikkawa , Akinori Harada , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hideo Yamanaka , Hiromitsu Yamakawa
IPC分类号： B23K26/00
CPC分类号： B23K26/0608 , B23K26/0604 , C23C14/28 , C23C16/483
摘要： A laser annealer has a laser light source with at least one GaN-type semiconductor laser and is configured so as to form emission points that emit laser beams having a wavelength of 350 to 450 nm, and a scanning device for scanning an annealing surface with the laser beams. The laser annealer may have a spatial light modulator for modulating the laser beams, and in which pixel portions whose light modulating states change in accordance with control signals are arranged on a substrate. The invention is applied to a laser thin-film forming apparatus. The apparatus has a laser source that has at least one semiconductor laser and is configured so as to form emission points, and an optical system for focusing laser beams into a single beam in the width direction of a substrate.
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18.发明授权公开(公告)号：US06995912B2
公开(公告)日：2006-02-07
申请号：US10444084
申请日：2003-05-23
CPC分类号： H01S5/4031 , G02B19/0014 , G02B19/0057 , G02B19/0095 , G02B27/0961 , H01S5/005 , H01S5/02248 , H01S5/02284 , H01S5/4012 , H04N1/06 , H04N1/0678 , H04N1/1911
摘要： A condensing lens is integrally formed with collimator-lens portions which respectively collimate light beams and a condensing lens portion which makes the collimated light beams converge at a common point. In addition, an optically-multiplexed-laser-light source is constituted by semiconductor lasers, a multimode optical fiber, and the above condensing lens, where the collimator-lens portions in the condensing lens are respectively arranged in correspondence with the semiconductor lasers, and the condensing lens portion couples the light beams collimated by the collimator-lens portions, to the multimode optical fiber.
摘要翻译： 聚光透镜与准直透镜部分一体地形成，该准直透镜部分分别准直光束，并使聚光透镜部分使准直光束在共同点处会聚。 此外，光复用激光光源由半导体激光器，多模光纤和上述聚光透镜构成，其中聚光透镜中的准直透镜部分分别对应于半导体激光器布置，以及 聚光透镜部分将由准直透镜部分准直的光束耦合到多模光纤。
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公开(公告)号：US20110026109A1
公开(公告)日：2011-02-03
申请号：US12673909
申请日：2008-08-14
摘要： In a surveillance camera 2, an optical system unit for use in imaging is provided with a first lens 7, a second lens 8, a third lens 9, and a fourth lens 10, and a subject image is formed on a photoelectric surface 12 of an imaging element through a cover glass 11. The third lens 9 is an optical lens made of a nanocomposite material of the invention in which inorganic fine particles are dispersed. A thin film layer 15 that blocks UV rays is formed on a light incident surface of the third lens 9. After passing through the first lens 7 and the second lens 8, UV rays contained in subject light are blocked by the thin film layer 15 and therefore cannot enter the third lens 9.
摘要翻译： 在监视摄像机2中，用于成像的光学系统单元设置有第一透镜7，第二透镜8，第三透镜9和第四透镜10，并且在光电表面12上形成被摄体图像 通过盖玻璃11的成像元件。第三透镜9是由无机细颗粒分散的本发明的纳米复合材料制成的光学透镜。 在第三透镜9的光入射面上形成阻挡紫外线的薄膜层15.在通过第一透镜7和第二透镜8之后，包含在被摄体光中的紫外线被薄膜层15阻挡， 因此不能进入第三透镜9。
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20.发明授权Objective optical system for optical recording media and optical pickup device using it 失效用于光学记录介质的物镜光学系统和使用它的光学拾取装置公开(公告)号：US07443779B2
公开(公告)日：2008-10-28
申请号：US11019203
申请日：2004-12-23
申请人： Yu Kitahara , Tetsuya Ori , Toshiaki Katsuma , Masao Mori , Hiromitsu Yamakawa
发明人： Yu Kitahara , Tetsuya Ori , Toshiaki Katsuma , Masao Mori , Hiromitsu Yamakawa
IPC分类号： G11B7/00
CPC分类号： G11B7/1367 , G11B7/1374 , G11B7/13922 , G11B2007/0006 , G11B2007/13727
摘要： An objective optical system includes a diffractive optical element on the light source side of an objective lens for focusing incident light of three different wavelengths with two different numerical apertures onto three different optical recording media. The diffractive optical element is formed of two lens elements made of different materials that are cemented together at a diffractive surface. Three conditions are satisfied so as to achieve optimum imaging. The diffractive surface may be shaped so that the order of the diffracted light of the shortest wavelength λ2 having the largest diffracted intensity is different from the order of the diffracted light of the second wavelength λ2 having the largest diffracted intensity, and the order of the diffracted light of the first wavelength λ1 having the largest diffracted intensity is also different from the order of the diffracted light of the third wavelength λ3 having the largest diffracted intensity.
摘要翻译： 物镜光学系统包括在物镜的光源侧的衍射光学元件，用于将具有两个不同数值孔径的三种不同波长的入射光聚焦到三种不同的光记录介质上。 衍射光学元件由在衍射表面上胶合在一起的不同材料制成的两个透镜元件形成。 满足三个条件以实现最佳成像。 衍射表面可以被成形为使得具有最大衍射强度的最短波长λ1的衍射光的次序与具有最大衍射强度的第二波长λ2的衍射光的次序不同， 具有最大衍射强度的第一波长λ1的衍射光也与具有最大衍射强度的第三波长λ3的衍射光的顺序不同。
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