公开(公告)号：US20080049222A1

公开(公告)日：2008-02-28

申请号：US11889391

申请日：2007-08-13

申请人： Shinji Yamaguchi ,  Masahiro Horie

发明人： Shinji Yamaguchi ,  Masahiro Horie

IPC分类号： G01J3/28 ,  G01N21/55

CPC分类号： G01B11/0625

摘要： In a trench shape measuring apparatus, a substrate having a trench pattern extending in a predetermined trench direction on a measurement area is held by a holding part. A light emission part applies illumination light to the measurement area and reflected light of the illumination light from the measurement area is spectrally dispersed by a diffraction grating of a spectroscope, to acquire a measured spectral reflectance. Since the diffraction grating is arranged so that an angle formed between a direction on the substrate corresponding to a grating direction of the diffraction grating and the trench direction becomes 45 degrees, even if an oscillation direction of the reflected light from the substrate is limited by influence of the trench pattern, it is possible to accurately obtain a spectral reflectance of the measurement area without influence of polarization of the reflected light and obtain a depth of the trench pattern with accuracy.

摘要翻译： 在沟槽形状测量装置中，具有在测量区域上以预定沟槽方向延伸的沟槽图案的衬底由保持部分保持。 发光部将照明光施加到测量区域，并且通过分光镜的衍射光栅使来自测量区域的照明光的反射光被光谱地分散，以获得测量的光谱反射率。 由于衍射光栅被布置成使得对应于衍射光栅的光栅方向的基板上的方向与沟槽方向之间形成的角度成为45度，所以即使来自基板的反射光的振荡方向受到影响的限制 的沟槽图案，可以精确地获得测量区域的光谱反射率而不受反射光的偏振的影响，并且准确地获得沟槽图案的深度。

公开(公告)号：US06879408B1

公开(公告)日：2005-04-12

申请号：US09526482

申请日：2000-03-15

申请人： Ryuichi Hori ,  Masahiro Horie ,  Shuji Okamoto

发明人： Ryuichi Hori ,  Masahiro Horie ,  Shuji Okamoto

IPC分类号： G06F3/12 ,  G06F15/00

CPC分类号： G06F3/1248 ,  G06F3/1204 ,  G06F3/1254 ,  G06F3/1284 ,  G06F3/1285

摘要： A printer and a printer driver automatically execute setting processing relevant to information unique to each printer without a user's intervention. Printer language specifications indicating a correspondence between plot objects and printer languages are stored. Printer language specifications setting data predetermined for the printer language specifications are generated. Control language specifications indicating a correspondence between control elements and control languages are stored. Control language specifications setting data predetermined for the control language specifications are generated. According to a trigger instructing a host PC to start transmission, the generated language specifications setting data to a bi-directional communication part are transmitted. The bi-directional communication part transmits the received language specifications setting data through a transmission path to the host PC.

摘要翻译： 打印机和打印机驱动程序自动执行与每个打印机唯一的信息相关的设置处理，无需用户干预。 存储指示绘图对象和打印机语言之间的对应关系的打印机语言规范。 生成针对打印机语言规格预定的打印机语言规格设定数据。 存储指示控制元件和控制语言之间的对应关系的控制语言规范。 生成用于控制语言规范的控制语言规格设定数据。 根据指示主机PC开始发送的触发信号，发送生成的语言规格设置数据到双向通信部件。 双向通信部分通过传输路径将接收到的语言规范设置数据发送到主机PC。

公开(公告)号：US5686993A

公开(公告)日：1997-11-11

申请号：US677274

申请日：1996-07-09

申请人： Masahiko Kokubo ,  Masahiro Horie

发明人： Masahiko Kokubo ,  Masahiro Horie

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： A film thickness measuring apparatus measures the thickness of a thin film which is formed on a substrate with an excellent reproducibility regardless of inclination of a surface of a sample. Since an illumination system (20) includes a glass rod (GL) which corrects wavelength dependencies of luminance distributions of light sources (HL, DL), even when an eclipse in reflected light due to inclination of a sample (SP) decreases the energy of the reflected light, a spectral distribution of the reflected light entering a spectroscopic unit (40) is maintained with almost no change. A control unit (50) performs data conversion of multiplying an actual spectral reflectance by a ratio of an average of the actual spectral reflectance which is determined based on an output from the spectroscopic unit (40) to an average of a calibrated spectral reflectance and thereafter calculates a deviation between the two spectral reflectances. As a result, the film thickness is accurately measured while preventing an influence of inclination of the sample (SP).

摘要翻译： 薄膜厚度测量装置测量形成在基板上的薄膜的厚度，其重复性优异，而与样品表面的倾斜度无关。 由于照明系统（20）包括校正光源（HL，DL）的亮度分布的波长依赖性的玻璃棒（GL），即使当由于样品（SP）的倾斜而在反射光中的日食降低时，能量 反射光，进入分光单元（40）的反射光的光谱分布几乎保持不变。 控制单元（50）执行数据转换，将实际的光谱反射率乘以基于分光单元（40）的输出确定的实际光谱反射率的平均值与校准的光谱反射率的平均值之比 计算两个光谱反射率之间的偏差。 结果，在防止样品（SP）的倾斜的影响的同时精确测量膜厚度。

公开(公告)号：US5493401A

公开(公告)日：1996-02-20

申请号：US309164

申请日：1994-09-20

申请人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

发明人： Masahiro Horie ,  Nariaki Fujiwara ,  Masahiko Kokubo

IPC分类号： G01B11/06

CPC分类号： G01B11/0625

摘要： Light of an observation wavelength range is irradiated upon a sample object to measure spectral reflection ratios, and an waveform is developed from the spectral reflection ratios. Based on the total number of peaks and valleys found in the interference waveform and two wavelengths specified within the observation wavelength range, possible ranges for the film thicknesses of the respective transparent films are determined. While changing tentative film thicknesses of the respective transparent films each by a predetermined film thickness pitch within the film thickness ranges, a deviation between theoretical spectral reflectance and measured spectral reflectance with respect to the tentative film thicknesses is calculated to thereby find a film thickness combination which causes the deviation to be minimum.

摘要翻译： 将观察波长范围的光照射在样品物体上，以测量光谱反射率，并从光谱反射率展开波形。 基于在干涉波形中发现的峰和谷的总数以及在观察波长范围内指定的两个波长，确定各透明膜的膜厚的可能范围。 在膜厚度范围内，通过预定的膜厚度间距改变各透明膜的临时膜厚度，计算理论光谱反射率和测定的光谱反射率相对于试样膜厚度的偏差，从而找到膜厚组合， 导致偏差最小。

公开(公告)号：US09841688B2

公开(公告)日：2017-12-12

申请号：US14978916

申请日：2015-12-22

申请人： Kang-Woong Ko ,  Hyoung-Jo Jeon ,  Masahiro Horie ,  Gil-Woo Song

发明人： Kang-Woong Ko ,  Hyoung-Jo Jeon ,  Masahiro Horie ,  Gil-Woo Song

IPC分类号： G03F7/20 ,  H01L21/66 ,  G01B11/27 ,  G01B11/14 ,  H01L23/544

CPC分类号： G03F7/70633 ,  G01B11/14 ,  G01B11/27 ,  H01L22/12 ,  H01L23/544

摘要： A method for detecting an overlay error includes: forming a first overlay key including a plurality of spaced apart first target patterns having a first pitch on a first layer of a substrate; forming a second overlay key including a plurality of spaced apart second target patterns having a second pitch different than the first pitch on a second layer of the substrate below the first layer; irradiating the first layer and the second layer with incident light having a first wavelength; obtaining a phase pattern of light reflected from the first layer and the second layer; calculating a position of a peak point or a valley point of the phase pattern of the reflected light; and detecting an overlay error of the first layer and the second layer using the position of the peak point or the valley point of the phase pattern.

公开(公告)号：US07612873B2

公开(公告)日：2009-11-03

申请号：US11979116

申请日：2007-10-31

申请人： Kumiko Akashika ,  Masahiro Horie

发明人： Kumiko Akashika ,  Masahiro Horie

IPC分类号： G01B11/16

CPC分类号： G01B11/0625 ,  G01L5/0047

摘要： In a stress measuring apparatus, reflected light of light emitted to a substrate through an objective lens is received by a light shielding pattern imaging part, to acquire an image of a light shielding pattern positioned at an aperture stop part of an optical system. A control part obtains gradient vectors of the substrate in a plurality of gradient vector measurement areas and surface form of the substrate on the basis of outputs of the light shielding pattern imaging part, to obtain a stress in a film formed on the substrate. Since light directed through the objective lens becomes approximately parallel rays of light on the substrate, measurement can be performed without focusing on each gradient vector measurement area and the surface form of the substrate can be obtained easily and rapidly. Consequently, it is possible to obtain a stress in the film formed on the substrate easily and rapidly.

摘要翻译： 在应力测量装置中，通过遮光图案成像部分接收通过物镜发射到基板的光的反射光，以获取位于光学系统的孔径光阑部分的遮光图案的图像。 控制部分基于遮光图案成像部的输出，在多个梯度矢量测量区域和基板的表面形式中获得衬底的梯度向量，以获得在衬底上形成的膜中的应力。 由于通过物镜引导的光在基板上变成大致平行的光线，因此可以在不关注各梯度矢量测量区域的情况下进行测量，并且可以容易且快速地获得基板的表面形状。 因此，可以容易且快速地获得在基板上形成的膜的应力。

公开(公告)号：US07254318B2

公开(公告)日：2007-08-07

申请号：US10304755

申请日：2002-11-27

申请人： Masayuki Imada ,  Ryuichi Hori ,  Masahiro Horie ,  Masahiro Kawasaki ,  Toru Suetomo

发明人： Masayuki Imada ,  Ryuichi Hori ,  Masahiro Horie ,  Masahiro Kawasaki ,  Toru Suetomo

IPC分类号： H04N7/26

CPC分类号： G11B27/034 ,  G11B27/329 ,  G11B27/34 ,  G11B27/36 ,  G11B2220/213 ,  G11B2220/216 ,  G11B2220/218 ,  G11B2220/2516 ,  G11B2220/2525 ,  G11B2220/2545 ,  G11B2220/2562 ,  G11B2220/2575 ,  G11B2220/455 ,  H04N9/8045 ,  H04N19/115 ,  H04N19/149 ,  H04N19/15 ,  H04N19/152 ,  H04N19/162 ,  H04N19/172 ,  H04N19/42 ,  H04N19/61 ,  H04N19/625 ,  H04N21/4147 ,  H04N21/42646 ,  H04N21/4334 ,  H04N21/4402 ,  H04N21/440209

摘要： Disclosed is a recording apparatus for recording a plurality of audio-visual contents stored in a HD to a writable DVD. A drive controller copies at least one of the contents stored in the HD to the DVD. If the available capacity of the DVD left after the copying falls short to copy a remaining content, the remaining content is re-encoded prior to being recorded in the DVD. The bit rate to be allocated to the remaining content upon re-encoding is calculated from the available capacity of the DVD and the reproduction time of the remaining content to be re-encoded.

摘要翻译： 公开了一种用于将存储在HD中的多个视听内容记录到可写DVD的记录装置。 驱动器控制器将存储在HD中的至少一个内容复制到DVD。 如果复制后留下的DVD的可用容量不足以复制剩余内容，则剩余内容在被记录在DVD中之前被重新编码。 根据DVD的可用容量和要重新编码的剩余内容的再现时间来计算重新编码时要分配给剩余内容的比特率。

公开(公告)号：US07177531B2

公开(公告)日：2007-02-13

申请号：US10001195

申请日：2001-12-04

申请人： Masahiro Horie ,  Masako Ninomiya ,  Ryuichi Hori ,  Shuji Okamoto ,  Atsushi Hashimoto

发明人： Masahiro Horie ,  Masako Ninomiya ,  Ryuichi Hori ,  Shuji Okamoto ,  Atsushi Hashimoto

IPC分类号： H04N5/00

CPC分类号： G11B27/28 ,  G11B27/034 ,  G11B27/105 ,  G11B27/34 ,  G11B33/10 ,  G11B2220/216 ,  G11B2220/2562 ,  G11B2220/2575 ,  H04N5/76 ,  H04N5/85

摘要： The present invention provides a record and playback apparatus including: a quantitative display unit of visually quantitative displaying a record time of a record-completed image recorded in the storage medium and the remaining recordable time; a record indicator control unit of displaying at least one of a playback position in the quantitative display of an in-playing back image or a record position in the quantitative display of an in-recording image; and an indicator selection and execution unit of selecting at least one of the playback indicator, the record indicator and the quantitative display each of which is a display object, and of executing a predetermined process based on a predetermined command to be inputted and the display object to be selected, and a record medium.

摘要翻译： 本发明提供了一种记录和重放装置，包括：定量显示单元，其可视地定量显示记录在存储介质中的记录完成图像的记录时间和剩余可记录时间; 记录指示器控制单元，用于在记录图像的定量显示中显示在播放后图像或记录位置的定量显示中的重放位置中的至少一个; 以及指示器选择和执行单元，其选择重放指示符，记录指示符和定量显示中的至少一个，每个显示对象是显示对象，并且基于要输入的预定命令执行预定处理，并且显示对象 被选择，以及记录介质。

公开(公告)号：US20060140219A1

公开(公告)日：2006-06-29

申请号：US10533585

申请日：2003-11-10

申请人： Kojiro Kawasaki ,  Hiroyuki Kondo ,  Masahiro Horie

发明人： Kojiro Kawasaki ,  Hiroyuki Kondo ,  Masahiro Horie

IPC分类号： H04H1/04 ,  H04J3/04

CPC分类号： H04N9/8042 ,  G11B20/00086 ,  G11B20/00159 ,  G11B2020/10537 ,  H04H60/27 ,  H04H60/47

摘要： When a digital broadcast is decoded and then re-encoded and digitally recorded, detailed program information contained in the original digital broadcast and information such as age-based viewer control information or parental control information may be lost. This problem is solved by providing a digital tuner to demodulate the digital broadcast signal and output the MPEG-TS, a demultiplexer to demultiplex the MPEG-TS into the component packet streams, an AV decoder to decode the demultiplexed AV data packets, and an AV encoder to re-encode the demultiplexed AV data packets into AV data packets for recording. A control microprocessor reads, reconstructs, and sends the PSI or SI packets demultiplexed by the demultiplexer to save the viewer control information to the system multiplexer. The system multiplexer multiplexes the PSI or SI packets with the re-encoded AV data packets, and the multiplexed stream is then written to the recording medium.

摘要翻译： 当数字广播被解码然后被重新编码和数字记录时，包含在原始数字广播中的详细节目信息和诸如基于年龄的观众控制信息或家长控制信息之类的信息可能会丢失。 通过提供数字调谐器来解调数字广播信号并输出​​MPEG-TS，解复用器将MPEG-TS解复用到分量分组流中，解码数字调谐器以解码解复用的AV数据分组的AV解码器和AV 编码器将解复用的AV数据分组重新编码为用于记录的AV数据分组。 控制微处理器读取，重建并发送由解复用器解复用的PSI或SI分组，以将观众控制信息保存到系统多路复用器。 系统复用器将PSI或SI分组与重新编码的AV数据分组复用，然后将多路复用流写入记录介质。

公开(公告)号：US06862095B2

公开(公告)日：2005-03-01

申请号：US10235648

申请日：2002-09-06

申请人： Masahiro Horie

发明人： Masahiro Horie

IPC分类号： G01N21/27 ,  G01N21/21 ,  G01N21/33 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/41 ,  G01N21/84 ,  H01L21/02 ,  H01L21/66 ,  G01N21/55

CPC分类号： G01N21/211 ,  G01N21/8422

摘要： In a dielectric constant measuring apparatus provided are a light source for irradiating a substrate with light in a visible or near-ultraviolet wavelength range, a spectroscope for receiving reflected light from the substrate, and a first optical characteristic acquiring unit for acquiring the spectral reflectance of the substrate. Further are provided therein a light source for irradiating the substrate with light in an infrared wavelength range, a spectroscope for receiving transmission light from the substrate, and a second optical characteristic acquiring unit for acquiring the spectral transmittance of the substrate. The dielectric constant of a dielectric film on the substrate is obtained by a first parameter set calculation unit, a second parameter set calculation unit and a dielectric constant calculation unit, using the spectral reflectance and spectral transmittance of the substrate. It is thereby possible to achieve a noncontact measurement of the dielectric constant of the dielectric film on the substrate.

摘要翻译： 所提供的介电常数测量装置是用于用可见光或近紫外线波长范围的光照射基板的光源，用于接收来自基板的反射光的分光镜，以及第一光学特性获取单元，用于获取 底物。 此外还设置有用于用红外线波长范围的光照射基板的光源，用于接收来自基板的透射光的分光器，以及用于获取基板的光谱透射率的第二光学特性获取单元。 通过使用基板的光谱反射率和光谱透射率的第一参数组计算单元，第二参数组计算单元和介电常数计算单元来获得基板上的电介质膜的介电常数。 由此，能够实现基板上的电介质膜的介电常数的非接触式的测量。