公开(公告)号：US06532073B2

公开(公告)日：2003-03-11

申请号：US09944357

申请日：2001-09-04

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01B9/02083 ,  G01B9/0207 ,  G01B9/02084

摘要： Fringe image data obtained by use of the phase shift method is Fourier-transformed, so as to determine the carrier frequency and the complex amplitude which occur due to the deviation between the respective wavefronts from the object to be observed and a reference. According to the carrier frequency and the complex amplitude, the amount of translational displacement of phase shift and the amount of inclination are detected, so as to correct the results determined by the phase shift method. Thus, the influences of errors in the amount of inclination/amount of displacement in the phase shift element can be eliminated easily.

公开(公告)号：US07982882B2

公开(公告)日：2011-07-19

申请号：US12571993

申请日：2009-10-01

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01M11/025 ,  G01M11/0271

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 在由Mirau物镜干涉光学系统会聚的同时行进的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US07719691B2

公开(公告)日：2010-05-18

申请号：US12193975

申请日：2008-08-19

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B9/02

CPC分类号： G01J9/02 ,  G01B9/02083 ,  G01B9/02084 ,  G11B7/22

摘要： A wavefront measuring apparatus for optical pickup includes: a beam splitting section; a wavefront shaping section; a beam combining section that generate interference light; an interference fringe image-acquiring section that acquires an interference fringe image including wavefront information of the light beam; and an analyzing section that analyzes a wavefront of the light beam on the basis of the interference fringe image. The analyzing section includes: an image processing section that performs a filtering process on the interference fringe image to eliminate a frequency component corresponding to the sub beam, so as to acquire the filtering-processed interference fringe image, and a wavefront analyzing section that analyzes a wavefront of the main beam on the basis of the filtering-processed interference fringe image.

摘要翻译： 一种用于光学拾取器的波前测量装置，包括：分束部分; 波前成形部分; 产生干涉光的光束组合部分; 干涉条纹图像获取部，其获取包括所述光束的波前信息的干涉条纹图像; 以及分析部，其基于干涉条纹图像分析光束的波前。 分析部分包括：图像处理部分，对干涉条纹图像执行滤波处理以消除与子光束相对应的频率分量，以获取滤波处理的干涉条纹图像;以及波前分析部分，其分析 基于滤波处理干涉条纹图像的主波束的波前。

公开(公告)号：US20050270543A1

公开(公告)日：2005-12-08

申请号：US11144709

申请日：2005-06-06

申请人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

发明人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

IPC分类号： G01B9/02 ,  G01J1/42 ,  G01J9/02 ,  G02B5/00

CPC分类号： G01J9/02 ,  G01J1/4257 ,  G02B5/005

摘要： The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite direction to the direction of incidence as a sample luminous flux, and reflection-type reference light producing means that converts part of the luminous flux transmitted through the semi-transmitting/reflecting surface into a wavefront-shaped reference luminous flux and outputs this reference luminous flux; this light beam measurement apparatus can carry out both wavefront measurement and light beam spot characteristic measurement on a light beam simultaneously.

摘要翻译： 光束测量装置包括：分束器，其将从光源单元发射的光束分成两个光束;半透射/反射表面，其将一个分割光束的一部分反向与方向相反的方向 作为样品光通量的入射角，以及反射型参照光产生装置，其将通过半透射/反射表面透射的光束的一部分转换为波前参考光通量并输出该参考光通量; 该光束测量装置可以同时对光束进行波前测量和光束点特性测量。

公开(公告)号：US06950191B2

公开(公告)日：2005-09-27

申请号：US10449790

申请日：2003-06-02

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B11/24 ,  G06T5/00 ,  G01B9/02

CPC分类号： G06T7/0004 ,  G06T7/11 ,  G06T7/136 ,  G06T2207/10056 ,  G06T2207/20012 ,  G06T2207/20056 ,  G06T2207/30108

摘要： A circular region extracting method captures onto a coordinate system a fringe image of a sample having a circular region to be analyzed within an area to be observed, binary-codes the fringe image of the area by a fringe analysis method on the coordinate system, places a plurality of linear gratings in parallel with each other with a predetermined interval on thus binary-coded coordinate system, and uses the linear gratings so as to extract a circular image region representing the region to be analyzed on the coordinate system.

摘要翻译： 圆形区域提取方法将待观察区域内具有要分析的圆形区域的样本的条纹图像捕获到坐标系上，通过边缘分析方法在坐标系上对该区域的边缘图像进行二进制编码，地方 多个线性光栅在这样的二进制编码的坐标系上以预定的间隔彼此平行，并且使用线性光栅以便在坐标系上提取表示要分析的区域的圆形图像区域。

公开(公告)号：US06778281B2

公开(公告)日：2004-08-17

申请号：US10051169

申请日：2002-01-22

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01J9/00

摘要： A phase shift fringe image analysis method comprises the steps of shifting an object to be observed and a reference relative to each other by using a phase shift device, obtaining fringe image data at three or more phase shift positions having a given phase gap therebetween, and determining a phase of the object by analyzing thus obtained plurality of fringe image data items. The positional data of at least three phase positions are specified, and the whole or part of the fringe image data on which carrier fringes at these phase positions are superposed is subjected to a predetermined arithmetic operation so as to carry out a phase analysis and determine the phase of the object.

摘要翻译： 相移条纹图像分析方法包括以下步骤：通过使用相移装置移动待观察物体和相对于基准的步骤，获得在三个或更多个具有给定相位间隙的相移位置处的条纹图像数据;以及 通过分析由此获得的多个边缘图像数据项来确定对象的相位。 指定至少三个相位位置的位置数据，并且将在这些相位位置的载体边缘叠加的条纹图像数据的全部或部分重叠进行预定的算术运算，以进行相位分析，并确定 物体的相位。

公开(公告)号：US06693715B2

公开(公告)日：2004-02-17

申请号：US09732921

申请日：2000-12-11

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01B11/002 ,  G01B11/2441

摘要： When analyzing the fringe pattern of an object to be observed by using Fourier transform method with respect to closed interference fringe image data, the original data expressed by an orthogonal coordinate system are once converted into fringe image data represented by a polar coordinate system, the converted data are analyzed by the conventional Fourier transform method, and then the resulted data are converted back into the original orthogonal coordinate system by inverse coordinate transformation, so as to obtain the wavefront corresponding to the original wavefront to be observed.

摘要翻译： 通过使用傅立叶变换方法分析相对于封闭干涉条纹图像数据观察的对象的条纹图案，由正交坐标系表示的原始数据被一次转换为由极坐标系表示的条纹图像数据，转换 数据通过常规傅立叶变换方法进行分析，然后通过逆坐标变换将所得数据转换回原始正交坐标系，以获得与要观察的原始波前相对应的波阵面。