公开(公告)号：US5851102A

公开(公告)日：1998-12-22

申请号：US931549

申请日：1997-09-16

申请人： Takashi Okawa ,  Shigeharu Iizuka, deceased

发明人： Takashi Okawa ,  Shigeharu Iizuka, deceased

IPC分类号： G01B5/00 ,  G01B5/28 ,  G01B11/00 ,  G01B21/00 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66 ,  H01L21/68 ,  B65G47/24

CPC分类号： H01L21/682 ,  Y10S414/136

摘要： A detector is provided to optically monitor the outer periphery of a wafer rotated by rotation of a rotary stage, so as to detect how much the center of the wafer placed on the rotary inspection stage is offset from the rotational center of the rotary stage as well as an angular position, on the stage, of a V-shaped notch formed in the wafer. From the detected eccentricity of the wafer, it is determined whether a precise positioning operation, using at least three positioning pins, to locate the center of the wafer at the rotational center of the rotary stage should be performed or not. When the detected eccentricity is so great as to necessitate the precise positioning operation, one of the positioning pins is caused to fit into the V-shaped notch of the wafer on the basis of the detected angular position of the notch and then the precise positioning of the wafer is performed using the other two positioning pins. In this manner, the wafer can be properly positioned so that the center of the wafer lies exactly at the rotational center of the rotary stage, using the at least three positioning pins.

摘要翻译： 提供检测器以光学监测旋转台旋转旋转的晶片的外周，以便检测放置在旋转检查台上的晶片的中心与旋转台的旋转中心偏移多少 作为在晶片上形成的V形切口的台阶上的角位置。 根据检测到的晶片的偏心率，确定是否应该执行使用至少三个定位销来将晶片的中心定位在旋转台的旋转中心处的精确定位操作。 当检测到的偏心度如此之大以至于需要精确的定位操作时，基于检测到的凹口的角位置，使定位销中的一个被配置到晶片的V形凹口中，然后精确定位 使用其他两个定位销执行晶片。 以这种方式，晶片可以被适当地定位，使得晶片的中心恰好位于旋转台的旋转中心处，使用至少三个定位销。

公开(公告)号：US5812560A

公开(公告)日：1998-09-22

申请号：US896427

申请日：1997-07-17

申请人： Hidetsugu Yuki

发明人： Hidetsugu Yuki

IPC分类号： G06F11/267 ,  G11B5/012 ,  G11B20/18 ,  G06F11/00

CPC分类号： G06F11/2221 ,  G11B20/182 ,  G11B5/012

摘要： A magnetic disk certifier according to the present invention is featured by comprising a write circuit for writing a test data having a period which is 1/n of a bit period of the test data, error of which is to be detected, in a magnetic disk, where n is an integer equal to or larger than 2, a read-out circuit for reading out the test data written in the magnetic disk, a comparator circuit for producing a detection signal by comparing a read-out signal read out from the read-out circuit with a predetermined signal or a predetermined reference level and an error detector circuit for detecting an error by receiving the detection signal from the comparator circuit with a period which is n times the bit period of the test data written in the magnetic disk, a bit data of an error detected by the error detector circuit being used as an error signal by converting each bit of the bit data into n bits.

摘要翻译： 根据本发明的磁盘验证器的特征在于包括写入电路，用于将具有要检测的误差的测试数据的1 / n的周期的测试数据写入磁盘 ，其中n是等于或大于2的整数，用于读出写入磁盘的测试数据的读出电路，用于通过比较从读取的读出读出的读出信号来产生检测信号的比较器电路 具有预定信号或预定参考电平的输出电路和误差检测器电路，用于通过以写入磁盘的测试数据的比特周期的n倍的周期从比较器电路接收检测信号来检测误差， 通过将比特数据的每个比特转换成n比特，由误差检测器电路检测的误差的位数据被用作误差信号。

公开(公告)号：US5744097A

公开(公告)日：1998-04-28

申请号：US621888

申请日：1996-03-26

申请人： Hiroaki Machida ,  Yuusuke Miyazaki ,  Shinichi Takagi ,  Yoshinori Mishina

发明人： Hiroaki Machida ,  Yuusuke Miyazaki ,  Shinichi Takagi ,  Yoshinori Mishina

IPC分类号： G01N21/64 ,  C07H21/04 ,  C12M1/00 ,  C12Q1/68 ,  G01N27/447 ,  G01N33/50 ,  G01N15/06 ,  C12N15/00 ,  G01N33/00

CPC分类号： G01N27/44743 ,  Y10T436/143333

摘要： The improved DNA base sequencer comprising an electrophoresis plate having a gel electrolyte layer held between two glass plates, one of which is partially cut away on the top edge in the direction of width, an assay compartment for accommodating said electrophoresis plate in a vertically erect position, a lower reservoir of a buffer solution in which the lower part of the gel electrolyte layer in the electrophoresis plate is to be immersed, an upper reservoir of a buffer solution in which the upper part of said electrolyte layer is to be immersed, photoexciting laser light applying means by which laser light is emitted from a lateral side of the electrophoresis plate in such a way that it crosses the lanes in said plate at right angles, and fluorescence detecting means by which the fluorescence emitted from a DNA fragment illuminated with the laser light is picked up and converted to an electric signal, and the apparatus is characterized in that a sharkstoothcomb made of a water-swellable material is inserted from the top edge of said electrophoresis plate into the space between the two glass plates, either the top or bottom edge of said sharkstoothcomb being provided with a plurality of teeth which are each tapered from the root toward the tip. Using this apparatus, samples can be easily and yet positively injected at specified lane positions on the gel electrolyte layer.

摘要翻译： 改进的DNA碱基测序仪包括电泳板，该电泳板具有保持在两个玻璃板之间的凝胶电解质层，其中一个玻璃板在宽度方向上的顶部边缘部分地被切除;测定室，用于将所述电泳板容纳在垂直竖立位置 将要浸渍电泳板中的凝胶电解质层的下部的缓冲溶液的下部储存器，要浸渍所述电解质层的上部的缓冲溶液的上部储存器，光激发 光照射装置，其从电泳板的侧面以这样的方式从激光垂直方向穿过所述板中的通道;以及荧光检测装置，从激光照射的DNA片段发出的荧光 光拾取并转换为电信号，该装置的特征在于，由水膨胀制成的鲨鱼架 将能量材料从所述电泳板的顶部边缘插入到两个玻璃板之间的空间中，所述鲨鱼架的顶部或底部边缘设置有多个齿，其从根部朝向尖端逐渐变细。 使用该装置，可以在凝胶电解质层上的特定泳道位置容易且积极地注入样品。

公开(公告)号：US5423111A

公开(公告)日：1995-06-13

申请号：US110787

申请日：1993-08-23

申请人： Kyoichi Mori

发明人： Kyoichi Mori

IPC分类号： B24B39/06 ,  G11B5/012 ,  G11B5/82 ,  G11B33/10 ,  B24B49/00 ,  B24B51/00

CPC分类号： B24B39/06 ,  G11B33/10 ,  G11B5/012 ,  G11B5/82 ,  Y10T29/47 ,  Y10T82/11

摘要： A magnetic disk tester according to the present invention comprises a first head moving mechanism for fixedly mounting a first certification testing head and a burnishing head perpendicularly of a moving direction thereof and a second head moving mechanism for fixedly mounting a second certification testing head and a glide testing head perpendicularly of a moving direction thereof. The burnishing head and the glide testing head are switched by the first certification testing head and the second certification testing head, respectively, by moving a spindle in an orthogonal direction to the head moving direction.

摘要翻译： 根据本发明的磁盘测试器包括：第一头移动机构，用于固定地安装第一认证测试头和垂直于其移动方向的抛光头;以及第二头移动机构，用于固定安装第二认证测试头和滑动 测试头垂直于其移动方向。 抛光头和滑行测试头通过分别沿着与头移动方向正交的方向移动主轴而由第一认证测试头和第二认证测试头切换。

公开(公告)号：US5018145A

公开(公告)日：1991-05-21

申请号：US401228

申请日：1989-08-31

申请人： Shuji Kikuchi ,  Yoshio Ouchida ,  Ryohei Kamiya

发明人： Shuji Kikuchi ,  Yoshio Ouchida ,  Ryohei Kamiya

IPC分类号： G01R31/3183 ,  G01R31/319

CPC分类号： G01R31/31921

摘要： To speed up the pattern generator which is a bottleneck for speedup of an LSI tester, a continuous address control information for generating addresses for continuous pattern memory read is generated at a speed 1/N (N is an optional number larger than 1) times the operation speed of the continuous address generator, and the address controller is divided into a 1st and a 2nd address controller. The two controllers are connected via a buffer memory to ensure the normal operation when the correspondence between address control instructions and patterns to be continuously read is not 1:N. Continuous address information generated by the 1st address controller is stored in the buffer memory. The second address controller, which actually generates continuous addresses, receives the continuous address information from the buffer memory, outputs the addresses to the pattern memory at a speed N times of the operation speed of the 1st address controller, and receives the next continuous address information from the buffer memory once again when the continuous address generation is finished to repeat the operation mentioned above.

摘要翻译： 为了加速作为LSI测试器的加速的瓶颈的模式发生器，以连续模式存储器读取的地址的连续地址控制信息以N（N是大于1的任意数量）倍的速度产生， 连续地址发生器的运行速度，地址控制器分为第一和第二地址控制器。 当地址控制指令和连续读取的模式之间的对应关系不是1：N时，两个控制器通过缓冲存储器连接，以确保正常操作。 由第一地址控制器生成的连续地址信息存储在缓冲存储器中。 实际生成连续地址的第二地址控制器从缓冲存储器接收连续的地址信息，以第一地址控制器的操作速度的N倍的速度将地址输出到模式存储器，并且接收下一个连续的地址信息 当连续地址生成完成时，再次从缓冲存储器重复上述操作。

公开(公告)号：US4588342A

公开(公告)日：1986-05-13

申请号：US520688

申请日：1983-08-05

申请人： Hideo Hirokawa ,  Seiji Kazama ,  Hisashi Takashima

发明人： Hideo Hirokawa ,  Seiji Kazama ,  Hisashi Takashima

IPC分类号： H05K13/02 ,  B65G57/03 ,  B65G59/06 ,  H01L21/677

CPC分类号： H01L21/67781 ,  B65G59/067

摘要： An IC magazine supply system including a plurality of rows of side by side magazine stackers each holding a vertical stack of IC magazines each holding an array of IC packages therein, guide bars located beneath the magazine stackers for receiving the IC magazines as they move downwardly, a moving section receiving the IC magazines when it moves downwardly, moving transversely while holding the IC magazines, discharging the IC magazine located at a leading end while transferring the rest of the IC magazines to the guide bars and thereafter moving transversely in an opposite direction, and a plurality of sensors mounted on the bottom of each one of the plurality of rows of magazine stackers for sensing the condition of movement of the IC magazines. The guide bars and the moving section are each formed with a plurality of pairs of recesses for holding the IC magazines, and the moving section moves repeatedly in a rectangular movement to enable the IC magazines to be successively supplied from the magazine stackers.

摘要翻译： 一种IC仓库供应系统，包括多排并排的堆叠堆积器，每个储存堆叠的IC杂志的垂直堆叠，每个IC盒包含一组IC封装，位于盒式堆积机下方的导杆，用于在IC盒向下移动时接收IC盒， 移动部分当其向下移动时接收IC盒，当夹持IC盒时横向移动，将位于前端的IC盒排出，同时将其余IC盒传送到导杆，然后沿相反方向横向移动， 以及多个传感器，其安装在所述多个行堆叠器的每一个的底部上，用于感测所述IC盒的运动状态。 引导杆和移动部分各自形成有用于保持IC盒的多对凹部，并且移动部分以矩形运动重复移动，以使IC盒从盒式堆料机连续地供给。

公开(公告)号：US08072597B2

公开(公告)日：2011-12-06

申请号：US12138889

申请日：2008-06-13

申请人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ooshima ,  Akira Hamamatsu ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Takahiro Jingu

发明人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ooshima ,  Akira Hamamatsu ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Takahiro Jingu

IPC分类号： G01N15/02

CPC分类号： G01N21/4738 ,  G01N21/8806 ,  G01N21/93 ,  G01N21/94 ,  G01N21/9501 ,  G01N2015/1486 ,  G01N2015/1493

摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

摘要翻译： 通常，作为检测结果，粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。 对于制造过程中的故障采取对策，分析检查装置检测到的颗粒/缺陷。 由于检查装置输出大量检测到的粒子/缺陷，所以需要巨大的时间来分析检测到的粒子/缺陷，从而导致制造过程中的失败的对策的延迟。 在本发明中，用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。 数据处理电路从检查结果统计中指出故障原因，并显示检查结果信息。 通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析，以统计学评价检测出的粒子。

公开(公告)号：US07499157B2

公开(公告)日：2009-03-03

申请号：US11727037

申请日：2007-03-23

申请人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Tetsuya Watanabe ,  Takuaki Sekiguchi

发明人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Tetsuya Watanabe ,  Takuaki Sekiguchi

IPC分类号： G01N21/00

CPC分类号： G01N21/94 ,  G01N21/9501 ,  Y02P90/04 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/265

摘要： A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.

摘要翻译： 用于监测异物的系统包括具有多个处理处理装置的生产线，管理制造线中的工件的处理的生产管理系统，与至少一个工件相关地监视异物的多个光学头，以及 提供指示其的输出信号，以及至少一个图像信号处理单元，其以比用于处理其输出信号的多个光学头的数量少的数量提供。

公开(公告)号：US20070001132A1

公开(公告)日：2007-01-04

申请号：US11516344

申请日：2006-09-05

申请人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ooshima ,  Akira Hamamatsu ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Takahiro Jingu

发明人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ooshima ,  Akira Hamamatsu ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Takahiro Jingu

IPC分类号： G01N21/86

CPC分类号： G01N21/4738 ,  G01N21/8806 ,  G01N21/93 ,  G01N21/94 ,  G01N21/9501 ,  G01N2015/1486 ,  G01N2015/1493

摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

摘要翻译： 通常，作为检测结果，粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。 对于制造过程中的故障采取对策，分析检查装置检测到的颗粒/缺陷。 由于检查装置输出大量检测到的粒子/缺陷，所以需要巨大的时间来分析检测到的粒子/缺陷，从而导致制造过程中的失败的对策的延迟。 在本发明中，用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。 数据处理电路从检查结果统计中指出故障原因，并显示检查结果信息。 通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析，以统计学评价检测出的粒子。

公开(公告)号：US07035039B2

公开(公告)日：2006-04-25

申请号：US10309882

申请日：2002-12-05

申请人： Kenichi Shitara ,  Akihiro Matsumoto

发明人： Kenichi Shitara ,  Akihiro Matsumoto

IPC分类号： G11B5/596

CPC分类号： G11B5/5552

摘要： A piezo actuator is provided between a suspension spring and a head carriage. When a predetermined track of a magnetic disk is accessed by positioning a magnetic head in the predetermined track, the piezo actuator maintains the magnetic head in an ON track state by dynamically moving a light weight head cartridge according to a servo information or dynamically moving a head assembly in the head cartridge according the servo information.