Coating and method for forming the same

    公开(公告)号:US11504738B2

    公开(公告)日:2022-11-22

    申请号:US17009315

    申请日:2020-09-01

    Abstract: A coating is formed on a surface of a base material of a furnace, and includes a base layer and a sliding material layer that is formed on a surface of the base layer and contains an oxide ceramic and a compound having a layered crystal structure. The sliding material layer causes the collided ashes to be slipped and facilitates the drop off of the adhered ashes. The base material forms a heat transfer tube or a wall surface of the furnace. The coating is also applied to a coal gasification furnace, a pulverized coal fired boiler, a combustion apparatus, or a reaction apparatus containing a furnace.

    MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
    20.
    发明申请
    MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE 审中-公开
    半导体制造设备会员

    公开(公告)号:US20140300064A1

    公开(公告)日:2014-10-09

    申请号:US14355085

    申请日:2012-04-11

    Abstract: Provided is a member for semiconductor manufacturing device which hardly causes component contamination and is capable of sufficiently reducing generation of particles in a semiconductor manufacturing device. A spray coating is formed by spraying a ceramic onto a mounting member of a transfer arm, and laser beam is irradiated to the spray coating to remelt and resolidify the ceramic composition for modification to thereby form a high-strength ceramic layer made from a ceramic recrystallized material and having a net-like crack, whereby particles dropped out from the mounting member due to external factors in a semiconductor manufacturing device are reduced to an extent not affecting a semiconductor manufacturing process.

    Abstract translation: 提供了一种半导体制造装置的构件,其难以引起部件污染并且能够充分减少半导体制造装置中的颗粒的产生。 通过将陶瓷喷涂到转印臂的安装构件上形成喷涂,并且将激光束照射到喷涂层上,以重新熔融并重新固化陶瓷组合物进行改性,从而形成由陶瓷重结晶制成的高强度陶瓷层 材料并且具有网状裂纹,由此由于半导体制造装置中的外部因素而从安装构件掉出的颗粒被减少到不影响半导体制造工艺的程度。

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