公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

Applicant: Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

Inventor： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC: C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US07002298B2

公开(公告)日：2006-02-21

申请号：US10775218

申请日：2004-02-11

Applicant: Kensuke Fukushima

Inventor： Kensuke Fukushima

IPC: H01J17/16

CPC classification number: H01J61/86 ,  C03C3/06 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/32 ,  H01J61/302 ,  H01J61/822

Abstract: An ultra-high pressure discharge lamp in which the disadvantage of the reduction of the illuminance maintenance factor due to formation of blackening and milky opacification in the discharge vessel and the disadvantage of formation of cracks in the discharge vessel is eliminated by the discharge vessel being made of a silica glass that contains 0.1 ppm by weight to 290 ppm by weight hydrogen. Further advantages are obtained by the silica glass having a content of OH radicals that is at most 1 ppm by weight and a content of aluminum in a range of 2 ppm by weight to 30 ppm by weight.

Abstract translation: 通过放电容器被消除，由于在放电容器中形成黑化和乳白色混浊而导致的照度维持系数降低的缺点和放电容器中形成裂缝的缺点的超高压放电灯 的含有0.1重量ppm至290重量ppm氢的二氧化硅玻璃。 通过具有至多1重量ppm的OH基含量的二氧化硅玻璃和在2重量ppm至30重量ppm的范围内的铝的含量可获得其它优点。

公开(公告)号：US20050155388A1

公开(公告)日：2005-07-21

申请号：US11034359

申请日：2005-01-10

Applicant: Gerald Burke ,  Steven Dawes ,  V. Srikant ,  Pushkar Tandon

Inventor： Gerald Burke ,  Steven Dawes ,  V. Srikant ,  Pushkar Tandon

IPC: C03B37/018 ,  C03B19/14 ,  C03B37/012 ,  C03B37/014 ,  C03C3/06 ,  F23D14/22 ,  F23D14/32 ,  G03F1/00 ,  G03F7/20

CPC classification number: G03F7/70216 ,  C03B19/1407 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B37/01202 ,  C03B37/01406 ,  C03B37/01413 ,  C03B37/0142 ,  C03B37/0146 ,  C03B2201/12 ,  C03B2203/22 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/30 ,  C03B2207/38 ,  C03B2207/40 ,  C03B2207/42 ,  C03B2207/46 ,  C03B2207/54 ,  C03B2207/70 ,  C03B2207/81 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/20 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  F23D14/22 ,  F23D14/32 ,  G03F1/60 ,  G03F7/70958

Abstract: Methods, apparatus and precursors for producing substantially water-free silica soot, preforms and glass. The methods and apparatus make substantially water-free fused silica preforms or glass by removing water as a reaction product, removing water from the atmosphere, removing water from the transport process, or combinations thereof. In a first embodiment, substantially water-free soot, preforms or glass are achieved by using a hydrogen-free fuel, such as carbon monoxide, in the deposition process. In another embodiment, a soot producing burner has parameters that enable operation on a substantially hydrogen-free fuel. End burners, which minimize water production, are also described. Such water-free methods are useful in depositing fluorine-doped soot because of the low water present and the efficiency in which fluorine is incorporated. In another embodiment, glassy barrier layer methods and apparatus are described for minimizing dopant migration, especially fluorine. Laser and induction methods and apparatus for forming the barrier layer are depicted. A chlorine, fluorine and silica precursor, such as chlorofluorosilane, may be utilized to form fluorinated soot. Other methods and apparatus are directed to combinations of conventional and substantially water-free processes. One embodiment is directed to combustion enhancing additives for addition to the substantially hydrogen-free fuels. The methods and apparatus in accordance with the invention are particularly useful for producing photomask substrates and optical fiber preforms.

公开(公告)号：US20040234762A1

公开(公告)日：2004-11-25

申请号：US10481895

申请日：2004-01-05

Inventor： Laurent Molins

IPC: B32B019/00

CPC classification number: C03C13/00 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/42 ,  D01F9/08 ,  Y10T428/29 ,  Y10T428/2933

Abstract: The invention relates to a silica yarn and to woven or nonwoven fabrics produced from said yarn, which comprises 30 to 1500 ppm by weight of aluminum and 10 to 200 ppm by weight of titanium in oxidized form, the sum of the mass of the chemical elements different from Si and 0 being less than 5000 ppm by weight, the following elements being absent or present in a very small quantity: boron, sodium, calcium, potassium and lithium. The fabrics comprising this silica yarn have an excellent high-temperature withstand and thus retain their flexibility for a long time at above 600null C. They are useful especially in uses requiring good high-temperature flexibility, such as for furnace seals.

Abstract translation: 本发明涉及一种二氧化硅丝以及由所述纱线制成的机织或非织造织物，其包含30至1500重量ppm的铝和10至200重量ppm的氧化形式的钛，化学元素的质量之和 不同于Si和0小于5000重量ppm，以下元素不存在或以非常少的量存在：硼，钠，钙，钾和锂。 包含该二氧化硅纱线的织物具有优异的耐高温性，因此在600℃以上长时间保持其柔韧性。它们特别适用于要求良好的高温柔韧性的用途，例如炉密封。

公开(公告)号：US20040160189A1

公开(公告)日：2004-08-19

申请号：US10775218

申请日：2004-02-11

Applicant: Ushiodenki Kabushiki Kaisha

Inventor： Kensuke Fukushima

IPC: H01J017/16 ,  H01J061/30

CPC classification number: H01J61/86 ,  C03C3/06 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/32 ,  H01J61/302 ,  H01J61/822

Abstract: An ultra-high pressure discharge lamp in which the disadvantage of the reduction of the illuminance maintenance factor due to formation of blackening and milky opacification in the discharge vessel and the disadvantage of formation of cracks in the discharge vessel is eliminated by the discharge vessel being made of a silica glass that contains 0.1 ppm by weight to 290 ppm by weight hydrogen. Further advantages are obtained by the silica glass having a content of OH radicals that is at most 1 ppm by weight and a content of aluminum in a range of 2 ppm by weight to 30 ppm by weight.

Abstract translation: 通过放电容器被消除，由于在放电容器中形成黑化和乳白色混浊而导致的照度维持系数降低的缺点和放电容器中形成裂缝的缺点的超高压放电灯 的含有0.1重量ppm至290重量ppm氢的二氧化硅玻璃。 通过具有至多1重量ppm的OH基含量的二氧化硅玻璃和在2重量ppm至30重量ppm的范围内的铝的含量可获得其它优点。

公开(公告)号：US20030175003A1

公开(公告)日：2003-09-18

申请号：US10387565

申请日：2003-03-14

Applicant: ALCATEL

Inventor： Laurent Gasca ,  Alain Pastouret ,  Christine Moreau ,  Pascal Baniel ,  Christian Belouet

IPC: G02B006/16

CPC classification number: C03C14/006 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/10 ,  C03C13/04 ,  C03C13/045 ,  C03C14/004 ,  C03C2201/20 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3476 ,  C03C2201/3482 ,  C03C2201/36 ,  H01S3/06716 ,  H01S3/1616 ,  H01S3/169

Abstract: The present invention concerns an optical guide (100) comprising an amplifier medium including: a core (10) in a main matrix of a transparent material, the main matrix containing particules (1, 2), each particule being formed of a submicronic matrix distinct from the main matrix and doped by an active metal element, an external guiding cladding (11) in contact with the core (10). The size of the particules (1, 2) is smaller than 20 nm. The present invention also concerns a method for producing this guide.

Abstract translation: 本发明涉及一种包括放大器介质的光导（100），该放大器介质包括：在透明材料的主矩阵中的芯（10），所述主矩阵包含微粒（1,2），每个微粒由亚微米矩阵形成 从主矩阵并由有源金属元件掺杂，与芯（10）接触的外部引导包层（11）。 颗粒（1,2）的尺寸小于20nm。 本发明还涉及一种用于生产该指南的方法。

公开(公告)号：US20030139277A1

公开(公告)日：2003-07-24

申请号：US10319739

申请日：2002-12-13

Inventor： John E. Maxon ,  Christine E. Heckle

IPC: C03C003/06

CPC classification number: C03C3/06 ,  C03C2201/32 ,  G02B6/13

Abstract: Fused silica articles exhibiting improved internal transmission and decreased absorption change when irradiated with a laser when compared with fused silica articles containing lower levels of aluminum. The articles also exhibit induced transmission when irradiated with a laser. The articles also exhibit improved off-axis refractive index homogeneity.

Abstract translation: 当与含有较低含量的铝的熔融石英制品相比时，用激光照射时，熔融二氧化硅制品表现出改善的内部透光性和降低的吸收变化。 当用激光照射时，制品也表现出诱导的传播。 这些制品还表现出改进的离轴折射率均匀性。

公开(公告)号：US06263706B1

公开(公告)日：2001-07-24

申请号：US09280464

申请日：1999-03-30

Applicant: Evelyn M. Deliso ,  Claud E. Lacy ,  Deborah L. Marlatt

Inventor： Evelyn M. Deliso ,  Claud E. Lacy ,  Deborah L. Marlatt

IPC: C03B37018

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01446 ,  C03B2201/12 ,  C03B2203/26 ,  C03C2201/12 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/46

Abstract: A method for controlling the refractive index achieved using a fluorine dopant gas, wherein CF4 is employed as the dopant gas, and the soot preform is doped using the CF4 for a time and temperature sufficient to result in a decrease in fluorine dopant nearest the surface which is in contact with the CF4 gas.

Abstract translation: 控制使用氟掺杂剂气体实现的折射率的方法，其中使用CF 4作为掺杂气体，并且使用CF 4掺杂烟灰预制体足够的时间和温度，以使得最接近表面的氟掺杂剂减少 与CF4气体接触。

公开(公告)号：US6158244A

公开(公告)日：2000-12-12

申请号：US39450

申请日：1998-03-16

Applicant: John F. Poco ,  Lawrence W. Hrubesh

Inventor： John F. Poco ,  Lawrence W. Hrubesh

IPC: C03B8/02 ,  C03B19/12 ,  C03C1/00 ,  C03C3/06 ,  C03C11/00

CPC classification number: C03C1/006 ,  C03B19/12 ,  C03C11/00 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/26

Abstract: Optical quality glass having a selected refractive index is produced by a two stage drying process. A gel is produced using sol-gel chemistry techniques and first dried by controlled evaporation until the gel volume reaches a pre-selected value. This pre-selected volume determines the density and refractive index of the finally dried gel. The gel is refilled with solvent in a saturated vapor environment, and then dried again by supercritical extraction of the solvent to form a glass. The glass has a refractive index less than the full density of glass, and the range of achievable refractive indices depends on the composition of the glass. Glasses having different refractive indices chosen from an uninterrupted range of values can be produced from a single precursor solution.

Abstract translation: 具有选择的折射率的光学品质的玻璃是通过两阶段干燥方法制造的。 使用溶胶 - 凝胶化学技术制备凝胶，并首先通过受控蒸发干燥直到凝胶体积达到预先选择的值。 该预选择的体积确定最终干燥的凝胶的密度和折射率。 在饱和蒸汽环境中用溶剂重新填充凝胶，然后通过超临界萃取溶剂再次干燥以形成玻璃。 玻璃的折射率小于玻璃的全密度，可实现折射率的范围取决于玻璃的组成。 可以从单一前体溶液产生具有从不间断值范围选择的折射率不同的玻璃。

公开(公告)号：US5808411A

公开(公告)日：1998-09-15

申请号：US759439

申请日：1996-12-05

Applicant: Manfred Deisenhofer ,  Dieter Meiss ,  Ekkehard Messner

Inventor： Manfred Deisenhofer ,  Dieter Meiss ,  Ekkehard Messner

IPC: C03C3/06 ,  C03C4/08 ,  C09K11/77 ,  H01J61/30 ,  H01J1/62 ,  H01J63/04

CPC classification number: H01J61/302 ,  C03C3/06 ,  C03C4/085 ,  C09K11/7706 ,  C03C2201/10 ,  C03C2201/32 ,  C03C2201/3423 ,  C03C2201/42 ,  C03C2201/54

Abstract: To inhibit, or at least sharply attenuate, fluorescence of a quartz-glass velope (10) surrounding a light source (11), such as a halogen incandescent lamp, a high-pressure discharge lamp, or the like, when the quartz glass is subjected to ultraviolet (UV) radiation from the light source, and has been doped with a UV radiation absorbing material, typically a cerium, or cerium-titanium doping, the quartz-glass envelope is additionally doped with barium and boron. The barium/boron in the doping is, preferably, present in quantities of between about 0.008 and 1.25%, by weight, with reference to the undoped quartz glass. Barium metaborate can be used, optionally together with praseodymium to attenuate the fluorescence. Preferably, barium and boron form a combined doping substance with cerium, in form of a cerium aluminate and metaborate, added to the starting material for the quartz glass, and before the quartz glass is fused from quartz sand or pulverized quartz crystal.

Abstract translation: 为了抑制或至少急剧衰减围绕光源（11）的石英玻璃外壳（10）的荧光，例如卤素白炽灯，高压放电灯等，当石英玻璃是 经受来自光源的紫外（UV）辐射，并且已经掺杂有紫外线吸收材料，通常为铈或铈 - 钛掺杂，石英玻璃外壳另外掺杂有钡和硼。 相对于未掺杂的石英玻璃，掺杂中的钡/硼优选以约0.008和1.25重量％的量存在。 可以使用偏硼酸钡，任选地与镨一起减弱荧光。 优选地，钡和硼与被添加到石英玻璃的起始材料中以及石英玻璃从石英砂或粉碎的石英晶体熔融之前形成具有铈铝酸盐和偏硼酸铈形式的铈的组合掺杂物质。