公开(公告)号：US20160093041A1

公开(公告)日：2016-03-31

申请号：US14638372

申请日：2015-03-04

申请人： Samsung Display Co., Ltd.

发明人： Jiwoo LEE

IPC分类号： G06T7/00 ,  H04N5/232 ,  G06T7/40

CPC分类号： G06T7/0004 ,  G06K9/00 ,  G06T5/002 ,  G06T2207/30121

摘要： A deposition accuracy determination method, including: capturing an image of a thin film for inspection formed on a substrate by depositing a mask; and converting the image to a color profile to distinguish false measurement data.

摘要翻译： 一种沉积精度确定方法，包括：通过沉积掩模来捕获在基板上形成的用于检查的薄膜的图像; 并将图像转换为颜色配置文件以区分假测量数据。

公开(公告)号：US09075026B2

公开(公告)日：2015-07-07

申请号：US13387369

申请日：2010-08-30

申请人： Takahiro Urano ,  Kaoru Sakai ,  Toshifumi Honda

发明人： Takahiro Urano ,  Kaoru Sakai ,  Toshifumi Honda

IPC分类号： G06K9/60 ,  G01N21/95 ,  G06T7/00 ,  G01N21/956 ,  G01N21/88 ,  H01L21/66

CPC分类号： G01N21/9501 ,  G01N21/95607 ,  G01N2021/8825 ,  G01N2021/9513 ,  G06T7/0004 ,  G06T2207/10061 ,  G06T2207/30121 ,  G06T2207/30148 ,  H01L22/12

摘要： Disclosed is a defect inspection device that has an illumination optical system; a detection optical system; and a processing unit which includes a defect feature quantity calculation unit that calculates the feature quantities of each defect candidate, a defect candidate grouping unit that groups the aforementioned defect candidates on the basis of the feature quantities, a defect classification evaluation value calculation unit that calculates defect classification evaluation values for the aforementioned defect candidates, a defect classification evaluation value updating unit that, on the basis of instructions, updates the evaluation values, a defect classification threshold determination unit that, on the basis of evaluation valued updated by the aforementioned defect classification evaluation value updating unit, determines a classification boundary that is a threshold for classifying defect types of the aforementioned defect candidates, and a defect detection unit that detects defects using the thresholds.

摘要翻译： 公开了一种具有照明光学系统的缺陷检查装置， 检测光学系统; 以及处理单元，其包括：缺陷特征量计算单元，其计算每个缺陷候选的特征量;缺陷候选分组单元，其基于所述特征量对所述缺陷候选进行分组;缺陷分类评估值计算单元，其计算 上述缺陷候补的缺陷分类评价值，基于指示更新评价值的缺陷分类评价值更新部，基于上述缺陷分类更新的评价值的缺陷分类阈值判定部 评估值更新单元，确定作为用于分类上述缺陷候选的缺陷类型的阈值的分类边界，以及使用阈值来检测缺陷的缺陷检测单元。

公开(公告)号：US20140300620A1

公开(公告)日：2014-10-09

申请号：US14201983

申请日：2014-03-10

申请人： FIH (Hong Kong) Limited

发明人： Li-Chieh CHENG ,  Yi-Sheng HSU ,  Wen-Hsin CHANG

IPC分类号： G09G5/02 ,  G06F3/14 ,  G06T7/40

CPC分类号： G09G5/02 ,  G06F3/1446 ,  G06T7/90 ,  G06T2207/10024 ,  G06T2207/30121 ,  G09G2320/0626 ,  G09G2320/0666 ,  G09G2320/0693 ,  G09G2320/08

摘要： An adjustment device including a camera is connected to a display device. An image of a predetermined image displayed on the display device, and an image of a standard color image are captured by the camera. First chrominance differences and first luminance differences between the image corresponding to the standard color image and the standard color image are computed. Second chrominance differences and second luminance differences between the image corresponding to the predetermined image and the predetermined image are computed. Third chrominance differences between the first chrominance differences and the second chrominance differences, and third luminance differences between the first luminance differences and the second luminance differences are computed. According to third chrominance differences and third luminance differences, first adjustment data is obtained. The first adjustment data is sent to the display device. According to the first adjustment data, c. Chrominance and luminance of the display device is adjusted.

摘要翻译： 包括相机的调节装置连接到显示装置。 通过照相机拍摄显示在显示装置上的预定图像的图像和标准彩色图像的图像。 计算与标准彩色图像对应的图像与标准彩色图像之间的第一色差和第一亮度差。 计算与预定图像对应的图像与预定图像之间的第二色差和第二亮度差。 计算第一色度差和第二色差之间的第三色差，以及第一亮度差与第二亮度差之间的第三亮度差。 根据第三色度差和第三亮度差，获得第一调整数据。 第一个调整数据被发送到显示设备。 根据第一调整数据，c。 调整显示装置的色度和亮度。

公开(公告)号：US08532395B2

公开(公告)日：2013-09-10

申请号：US13014171

申请日：2011-01-26

申请人： Tadashi Mitsui

发明人： Tadashi Mitsui

IPC分类号： G06K9/48

CPC分类号： G01N21/95684 ,  G06T7/001 ,  G06T2207/10016 ,  G06T2207/10061 ,  G06T2207/30121 ,  G06T2207/30141 ,  G06T2207/30148

摘要： In one embodiment, a pattern inspection method is disclosed. The method can include predicting an edge shape at a given future time with respect to the same inspection target pattern, setting a threshold corresponding to a required specification of the inspection target pattern, and predicting the time when the inspection target pattern fails to meet the required specification from the predicted edge shape and the threshold. The method can further include taking a plurality of images concerning the inspection target pattern at different times by use of an imaging apparatus, detecting edges of the obtained images, respectively, matching the detected edges of different imaging times, and obtaining a difference between corresponding edges to generate a difference vector after the matching. The edge shape of the future time can be predicted based on the generated difference vector and an interval between the imaging times.

摘要翻译： 在一个实施例中，公开了一种图案检查方法。 该方法可以包括相对于相同的检查目标图案在给定的未来时间预测边缘形状，设置对应于检查目标图案的所需指定的阈值，以及预测检查目标图案不能满足所需要的时间 规格从预测的边缘形状和阈值。 该方法还可以包括通过使用成像装置在不同时间拍摄关于检查对象图案的多个图像，分别检测所获得的图像的边缘，以匹配不同成像时间的检测到的边缘，并获得相应边缘之间的差 以在匹配之后生成差矢量。 可以基于生成的差矢量和成像时间之间的间隔来预测未来时间的边缘形状。

公开(公告)号：US20130141408A1

公开(公告)日：2013-06-06

申请号：US13376675

申请日：2011-12-06

申请人： Hao Kou

发明人： Hao Kou

IPC分类号： G09G5/00

CPC分类号： G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95646 ,  G06T7/0004 ,  G06T2207/10024 ,  G06T2207/10152 ,  G06T2207/30121

摘要： The present invention relates to an automatic optical detection method and an optical automatic detector. The automatic optical detection method includes the following steps: in the step of colored light projection, the lamplight with tricolor light is uniformly projected on an object to be detected to form images with different colors; gray-scale information corresponding to different zones of the images is obtained, then, an automatic optical inspection standard image is generated, and the automatic optical inspection standard image and a prestored reference image are contrastively detected. In the present invention, only the gray-scale information of the images needs processing, so the data quantity and the processing difficulty of an image processing unit and a statistical analysis unit are reduced, which is favorable for increasing the reliability, accuracy, repeatability and speed of data acquisition, and the present invention reduces the requirement of the detector, which is favorable for reducing the input cost of the detector.

摘要翻译： 本发明涉及自动光学检测方法和光学自动检测器。 自动光学检测方法包括以下步骤：在彩色光投影步骤中，将三色光的灯光均匀地投射到待检测物体上以形成具有不同颜色的图像; 获得与图像的不同区域对应的灰度信息，然后生成自动光学检查标准图像，并且对比地检测自动光学检查标准图像和预先存储的参考图像。 在本发明中，只有图像的灰度信息需要处理，所以图像处理单元和统计分析单元的数据量和处理难度降低，有利于提高可靠性，准确性，重复性和 数据采集​​速度快，本发明降低了检测器的要求，有利于降低检测器的输入成本。

公开(公告)号：US20130057768A1

公开(公告)日：2013-03-07

申请号：US13643149

申请日：2011-02-07

申请人： Takaji Numao ,  Seiichi Gohshi ,  Takashi Mine

发明人： Takaji Numao ,  Seiichi Gohshi ,  Takashi Mine

IPC分类号： H04N5/21

CPC分类号： H04N5/21 ,  G06T5/002 ,  G06T2207/10016 ,  G06T2207/20182 ,  G06T2207/30121 ,  H04N1/409

摘要： An image processing system for processing a target pixel to be processed, which target pixel corresponds to inputted image data, a plurality of pixels including the target pixel being arranged in a matrix manner, includes an NR circuit (106). The NR circuit (106) includes a signal processing process circuit (114) for carrying out subtraction or addition, with respect to a pixel value Aij of the target pixel, of a value equivalent to a noise quantity Er calculated in advance, in a case where the pixel value Aij of the target pixel is larger or smaller, respectively, than a first couple of estimated values Bij and Cij for the pixel value Aij of the target pixel, the first couple of estimated values Bij and Cij being estimated from pixel values of respective pixels adjacent to the target pixel, centered at the target pixel, in a temporal axis or in a spatial axis. It is therefore possible to provide an image processing system which further reduces noise and is less likely to blur a video as compared with a conventional noise reduction process.

摘要翻译： 一种用于处理目标像素对应于输入图像数据的处理目标像素的图像处理系统，包括以矩阵方式布置的目标像素的多个像素包括NR电路（106）。 NR电路（106）包括信号处理处理电路（114），用于相对于目标像素的像素值Aij执行相当于预先计算出的噪声量Er的值的减法或相加 其中目标像素的像素值Aij分别比目标像素的像素值Aij的第一对估计值Bij和Cij大或小，从像素值估计第一对估计值Bij和Cij 在与目标像素相邻的各像素中，以时间轴或空间轴为中心。 因此，与传统的降噪处理相比，可以提供进一步降低噪声并且不太可能模糊视频的图像处理系统。

公开(公告)号：US08254663B2

公开(公告)日：2012-08-28

申请号：US12395840

申请日：2009-03-02

申请人： Akira Kataoka ,  Ikunao Isomura ,  Ryoichi Hirano ,  Nobutaka Kikuiri ,  Susumu Iida

发明人： Akira Kataoka ,  Ikunao Isomura ,  Ryoichi Hirano ,  Nobutaka Kikuiri ,  Susumu Iida

IPC分类号： G06K9/00

CPC分类号： G06K9/209 ,  G03F1/84 ,  G06T7/0004 ,  G06T2207/30121 ,  G06T2207/30148

摘要： A workpiece inspection apparatus includes a measured image generator unit configured to measure a pattern of a workpiece and generate a measured image; and a comparator unit configured to compare the measured image to a fiducial image, wherein said measured image generator unit includes a light-receiving device having an interconnection of two or more time delay integration (TDI) sensors each being arranged by two or more line sensors each being arranged by two or more pixels, for generating as the measured image an average value of pixel values excluding an abnormal pixel value from pixels of each TDI sensor with respect to a position of the pattern of the workpiece.

摘要翻译： 工件检查装置包括测量图像发生器单元，被配置为测量工件的图案并产生测量图像; 以及比较器单元，被配置为将所测量的图像与基准图像进行比较，其中所述测量的图像生成器单元包括具有两个或更多个时间延迟积分（TDI）传感器的互连的光接收装置，每个传感器由两个或更多个线传感器 每个由两个或更多个像素排列，用于相对于工件的图案的位置产生除了每个TDI传感器的像素之外的异常像素值的像素值的平均值作为测量图像。

公开(公告)号：US20120188361A1

公开(公告)日：2012-07-26

申请号：US13355358

申请日：2012-01-20

申请人： Youngil Kwon ,  Byoungkuk Kim ,  Jinseo Park ,  Taewon Kim ,  Youngseok Song ,  Inhwan Sul ,  Kiyeon Jo

发明人： Youngil Kwon ,  Byoungkuk Kim ,  Jinseo Park ,  Taewon Kim ,  Youngseok Song ,  Inhwan Sul ,  Kiyeon Jo

IPC分类号： H04N7/18 ,  G06K9/46

CPC分类号： G06T7/401 ,  G06T7/41 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30121

摘要： A system for image analysis and a method thereof are disclosed. In one embodiment, the system includes a detector configured to receive an image of a sample, isolate particles from a background image of the sample image and detect positions of the isolated particles and a first operator configured to calculate a static degree of randomness values of the particles using Lennard-Jones potentials based on the detected positions. The system may further include a second operator configured to obtain a dynamic degree of randomness values of particles based at least in part on the sum of tensile forces between particles by implicit integration added until the particles reach a dynamic equilibrium, and calculate a positional degree of randomness of particles based at least in part on subtraction of the dynamic degree of randomness values from the static degree of randomness values.

摘要翻译： 公开了一种图像分析系统及其方法。 在一个实施例中，系统包括检测器，其被配置为接收样本的图像，从样本图像的背景图像中分离粒子并检测孤立粒子的位置，以及第一操作器，被配置为计算静态随机度值 基于检测到的位置使用Lennard-Jones电位的粒子。 该系统可以进一步包括第二操作器，其被配置为至少部分地通过添加的隐式积分至少部分地获得颗粒之间的拉伸力的总和来获得粒子的随机值的动态度，直到粒子达到动态平衡，并且计算粒子的位置度 至少部分地基于从静态随机度值中减去动态随机性值的粒子的随机性。

公开(公告)号：US20120133761A1

公开(公告)日：2012-05-31

申请号：US12957325

申请日：2010-11-30

申请人： Gyoung Il Cho ,  Hye Young Kim ,  Cheong Soo Seo

发明人： Gyoung Il Cho ,  Hye Young Kim ,  Cheong Soo Seo

IPC分类号： H04N7/18

CPC分类号： H04N7/18 ,  G01B11/306 ,  G06T7/001 ,  G06T2207/30121

摘要： An uneven area inspection system of the present invention comprises a patterned panel comprising a panel, wherein the panel have a surface on which a pattern is formed, an object with at least one surface reflecting light from the patterned panel, an imaging unit optically coupled to the patterned panel and the object and configured to capture the image of the patterned panel reflected by the surface of the object, and an image processing unit configured to process the captured image to compare the pattern in the patterned panel and the pattern in the captured image. The object can have uneven area and the uneven area of the object is inspected by comparing the pattern in the patterned panel and the pattern in the captured image.

摘要翻译： 本发明的不均匀区域检查系统包括：图案化面板，包括面板，其中面板具有形成有图案的表面，具有反射来自图案化面板的光的至少一个表面的物体，光学耦合到 所述图案化面板和所述对象并且被配置为捕获由所述对象的表面反射的所述图案化面板的图像;以及图像处理单元，被配置为处理所述拍摄图像以比较所述图案化面板中的图案和所捕获图像中的图案 。 物体可以具有不平坦的区域，并且通过比较图案化面板中的图案和捕获图像中的图案来检查物体的不平坦区域。

公开(公告)号：US08121395B2

公开(公告)日：2012-02-21

申请号：US12393827

申请日：2009-02-26

申请人： Takashi Hiroi ,  Takeyuki Yoshida ,  Naoki Hosoya ,  Toshifumi Honda

发明人： Takashi Hiroi ,  Takeyuki Yoshida ,  Naoki Hosoya ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G01N21/95607 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30121 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A circuit-pattern inspection apparatus and related method provide a highly sensitive defect inspection of an area including the most circumferential portion of a memory mat of a semiconductor chip formed on a semiconductor wafer. In certain examples, an image of a circuit pattern of a die formed on the semiconductor wafer is acquired to judge whether or not the circuit pattern contains a defect.

摘要翻译： 电路图案检查装置及相关方法提供对形成在半导体晶片上的半导体芯片的存储垫的最周围部分的区域进行高灵敏度的缺陷检查。 在某些示例中，获取形成在半导体晶片上的芯片的电路图案的图像，以判断电路图案是否包含缺陷。