公开(公告)号：US20010025600A1

公开(公告)日：2001-10-04

申请号：US09780951

申请日：2001-02-09

Inventor： Kazuhito Ikeda ,  Eisuke Nishitani ,  Harunobu Sakuma ,  Kazuhiro Nakagomi

IPC: B05C011/02

CPC classification number: H01L21/67748 ,  C23C16/45521 ,  C23C16/4585 ,  C23C16/54 ,  H01L21/67751 ,  H01L21/68735

Abstract: A substrate processing apparatus comprises a chamber, a gas introducing portion, a gas discharge port, a substrate transfer gate, and a substrate moving member which moves the substrate between a substrate processing position where the substrate is processed in the chamber and a substrate transferring in-out position in the chamber where the substrate transferred into the chamber from the substrate transfer gate is located and where the substrate is located when the substrate is transferred out from the chamber through the substrate transfer gate. The gas introducing portion, the substrate processing position, the gas discharge port and the substrate transfer gate are disposed in this order. A gas restraining member which restrains processing gas for processing the substrate from flowing toward the substrate transfer gate is provided between the gas discharge port and the substrate transfer gate.

Abstract translation: 基板处理装置包括：室，气体导入部，气体排出口，基板转移栅极和基板移动部件，其使基板在基板处理位置和基板之间移动;基板处理位置， 在基板从衬底传送门转移到室中的衬底的位置以及当衬底通过衬底传送门从腔室传出时位于衬底的位置。 气体导入部，基板处理位置，气体排出口和基板输送口以该顺序设置。 在气体排出口和基板输送口之间设置限制用于处理基板的处理气体朝向基板输送口流动的气体抑制构件。

公开(公告)号：US20010004477A1

公开(公告)日：2001-06-21

申请号：US09733084

申请日：2000-12-11

Inventor： Akira Fukunaga ,  Hiroshi Nagasawa ,  Takao Kato

IPC: B05D003/02 ,  B05C011/02

CPC classification number: B22F1/0022 ,  B22F1/0014 ,  B22F1/0018 ,  B22F1/0059 ,  B22F1/0062 ,  B22F2998/00 ,  B82Y30/00 ,  C23C4/123 ,  C23C24/08 ,  C23C26/00 ,  H01L21/288 ,  H01L21/6715 ,  H01L21/76877 ,  H01L21/76882 ,  H01L23/53228 ,  H01L23/53238 ,  H01L23/5328 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A solution containing a metal component comprises composite ultrafine metal particles each having a core substantially made of a metal component and a covering layer made of an organic compound chemically bonded to the core. The core has an average diameter ranging from 1 to 10 nm. The composite ultrafine metal particles are uniformly dispersed in a solvent.

Abstract translation: 含有金属成分的溶液包含复合超细金属颗粒，每个复合超细金属颗粒具有基本上由金属组分制成的芯和由化学键合到芯上的有机化合物制成的覆盖层。 芯的平均直径为1〜10nm。 复合超细金属颗粒均匀分散在溶剂中。

公开(公告)号：US20040247794A1

公开(公告)日：2004-12-09

申请号：US10858369

申请日：2004-06-02

Applicant: FUJI PHOTO FILM CO., LTD.

Inventor： Yasuhiko Tokimasa ,  Akio Tsuji

IPC: B05D003/12 ,  B05C011/00 ,  B05C011/02

CPC classification number: G03C1/74 ,  B05C5/0254 ,  B05C9/06 ,  G03C2001/7459 ,  G11B5/848

Abstract: A coater to coat web includes an extrusion die, which has a die slot, for ejecting coating solution. A valve is disposed downstream from first and second conduits, for selectively feeding coating solution and bubble removing liquid to the extrusion die. A shifting mechanism moves the extrusion die between an offset position and a coating position. A controller causes the shifting mechanism to set the extrusion die in the offset position, feeds the bubble removing liquid to the extrusion die by setting the valve at the first conduit, feeds the coating solution by setting the valve at the second conduit, and causes the shifting mechanism to move the extrusion die to the coating position, to eject the coating solution from the extrusion die in the coating position. A bead of the coating solution is formed, for applying the coated layer to the web.

Abstract translation: 涂布纸的涂布机包括具有用于喷射涂布溶液的模具槽的挤出模头。 阀设置在第一和第二导管的下游，用于选择性地将涂布溶液和除泡液体输送到挤出模头。 移动机构将挤压模移动到偏移位置和涂覆位置之间。 控制器使换档机构将挤出模具设定在偏移位置，通过将阀设置在第一导管处将气泡去除液体供给到挤出模具，通过将阀设置在第二导管处来供给涂布溶液，并且使得 移动机构以将挤出模移动到涂覆位置，以将涂布溶液从涂布位置的挤出模头喷出。 形成涂布溶液的珠，用于将涂层施加到网。

公开(公告)号：US20040241337A1

公开(公告)日：2004-12-02

申请号：US10856258

申请日：2004-05-28

Applicant: EAC Operations, Inc.

Inventor： Slawomir Nachilo ,  Paul J. Shanahan

IPC: B05C011/02 ,  B05B017/00

CPC classification number: B05C19/04 ,  B05C19/06

Abstract: A coloring agent addition system which generally includes a processing module having an in-feed conveyor for receiving and processing a raw material and a coloring unit connected to the in-feed conveyor for adding a coloring agent to the raw material. The coloring unit is driven by the processing module to deliver the coloring agent depending on operation of the processing module. The coloring unit includes a motor that is in fluid communication with a hydraulic fluid line of a processing module motor, whereby the processing module motor is connected in series to the coloring unit motor to drive the coloring unit.

Abstract translation: 一种着色剂添加系统，其通常包括具有用于接收和处理原料的进料输送机的处理模块和连接到所述进料输送机的着色单元，用于向所述原料添加着色剂。 着色单元由处理模块驱动，以根据处理模块的操作递送着色剂。 着色单元包括与处理模块电动机的液压流体管线流体连通的电动机，由此处理模块电动机与着色单元电动机串联连接以驱动着色单元。

公开(公告)号：US20040180141A1

公开(公告)日：2004-09-16

申请号：US10795269

申请日：2004-03-09

Inventor： Shinji Kobayashi ,  Tetsushi Miyamoto ,  Masahito Hamada ,  Masatoshi Kaneda

IPC: B05D003/12 ,  B05C011/02

CPC classification number: H01L21/68721 ,  B05D1/005 ,  G03F7/162 ,  H01L21/6715 ,  H01L21/68735 ,  H01L21/6875

Abstract: There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.

Abstract translation: 提供一种涂布处理装置，其包括水平保持四边形基板并旋转基板在水平面中的旋转卡盘，用于将涂布溶液供给到由旋转卡盘水平保持的基板的前表面的涂布溶液喷嘴，以及 溶剂供给机构，设置在旋转卡盘中，用于向基板的背面供给溶剂，其中供给到基板的背面的溶剂被允许到达基板的每个角部的背面和侧面 通过离心力，从而除去附着的涂布溶液。

公开(公告)号：US20040062877A1

公开(公告)日：2004-04-01

申请号：US10261050

申请日：2002-09-30

Applicant: Stora Enso North America Corp.

Inventor： Wayne A. Damrau ,  John F. Bergin

IPC: B05C011/02 ,  B05D003/12 ,  B05D003/04 ,  B05D001/28

CPC classification number: B05C1/0834 ,  B05C1/083 ,  B05C11/04 ,  D21H23/56 ,  D21H25/08 ,  D21H25/12

Abstract: An improved film coater which utilizes one or more coater or applicators to transfer coating to the outer surfaces of at least one more rolls, which in turn transfers the coating from the roll surface to one or more sides of the web for coating paper is disclosed. The coater or applicator includes a smoothing doctor on the web and downstream of the one or more rolls, and may also utilize humidity from one of steam showers or a humidity enclosure to assist smoothing. The web may run in any direction, but preferably runs upwardly from the roll toward the doctor to reduce nullfilm splitnull droplets effect. The present invention also reduces the fiber rise and arrange peel pattern on the coated web, resulting in a smooth uniform coated paper.

Abstract translation: 公开了一种改进的薄膜涂布机，其利用一个或多个涂布机或涂布器将涂层转印到至少一个以上的辊的外表面上，其又将涂层从辊表面转移到用于涂布纸的幅材的一个或多个侧面。 涂布机或涂布器包括在幅材上的平滑刮刀和一个或多个辊的下游，并且还可以利用来自蒸汽淋浴或湿度外壳之一的湿度来辅助平滑化。 网可以沿任何方向运行，但是优选地从卷朝向医生向上延伸以减少“膜分裂”液滴效应。 本发明还减少了纤维上升并且在涂布的织物上布置了剥离图案，导致光滑均匀的涂布纸。

公开(公告)号：US20040047991A1

公开(公告)日：2004-03-11

申请号：US10238730

申请日：2002-09-11

Applicant: S & S Technology Corp.

Inventor： Ching-I Yu ,  Lang-Ching Chih ,  Kang-Tsun Liu ,  Kung-Ming Yen

IPC: B05D001/28 ,  B05D005/10 ,  B05C011/02 ,  B05C001/00 ,  B05D005/00

CPC classification number: B05C1/16 ,  B05C1/083 ,  B05C1/0834 ,  B05D1/28 ,  H05K3/0091 ,  H05K3/022 ,  H05K3/4626 ,  H05K2201/0358 ,  H05K2203/0143 ,  H05K2203/0156 ,  H05K2203/1545

Abstract: A resin coated carrier fabrication method and the related apparatus in which a metered material feeder is controlled to apply a bonding agent to the periphery of a continuously rotated material-transferring cylinder subject to a predetermined thickness and simultaneously a tape of carrier is extended over an impression cylinder, and then a driving mechanism is controlled to adjust the gap between the material-transferring cylinder and the impression cylinder for enabling the bonding agent to be transferred to the tape of carrier, leaving a blank area around the applied layer of bonding agent on the tape of carrier.

Abstract translation: 一种树脂涂布载体制造方法和相关装置，其中控制计量材料给料器以将粘合剂施加到经受预定厚度的连续旋转的材料转移滚筒的周边，同时载体带延伸超过印模 然后控制驱动机构以调整材料转移筒和压印滚筒之间的间隙，以使粘合剂能够转移到载体带上，在施加的粘合剂层周围留下空白区域 载体胶带。

公开(公告)号：US20040007172A1

公开(公告)日：2004-01-15

申请号：US10194733

申请日：2002-07-12

Inventor： Scott L. Sakoff

IPC: B05C011/02

CPC classification number: B65H37/007 ,  B65H35/0033

Abstract: A tape dispenser apparatus includes: a generally egg-shaped hollow housing that has first and second separable longitudinal sections; the first section including an internal annular tape-mounting mandrel on a transverse axis perpendicular to the longitudinal direction of the housing; the housing having a tape slot in the transverse direction; and a cutting blade externally on the housing, spaced from and generally parallel to the tape slot.

Abstract translation: 胶带分配器装置包括：大致卵形的中空壳体，其具有第一和第二可分离纵向部分; 所述第一部分包括垂直于所述壳体的纵向的横向轴线上的内部环形带安装心轴; 所述壳体在横向方向上具有带槽; 以及外壳上的与刀片间隔开并且大致平行于带槽的切割刀片。

公开(公告)号：US20030079679A1

公开(公告)日：2003-05-01

申请号：US10021317

申请日：2001-10-30

Inventor： Toru Ikeda ,  Lily Pang

IPC: B05C011/02 ,  B05C013/00

CPC classification number: H01L21/6715

Abstract: Within a container b 2 of a spin coater 1, a rotatable support table 4 for supporting a wafer W and an arm 6 for dropping a chemical liquid onto the wafer W are arranged. Also, the spin coater 1 comprises a gas introducing path 12 for introducing a laminar flow forming gas into the container 2. The gas introducing path 12 has a glass filter 13 provided in an upper part of the container 2, whereas the laminar flow forming gas is introduced into the container 2 by way of the glass filter 13. The container 2 is provided with a wall portion 15 formed so as to continuously spread like a curve downward from a lower end edge part of the glass filter 13. As a consequence, a downflow of the laminar flow forming gas occurs in the whole horizontal section of the region surrounded by the wall portion 15 within the container 2, thereby reliably preventing turbulent flows from occurring.

Abstract translation: 在旋转涂布机1的容器b 2中，布置有用于支撑晶片W的可旋转支撑台4和用于将化学液滴落到晶片W上的臂6。 此外，旋转涂布机1包括用于将层流形成气体引入容器2的气体导入路径12.气体导入路径12具有设置在容器2的上部的玻璃过滤器13，而层流形成气体 通过玻璃过滤器13被引入到容器2中。容器2设置有壁部分15，其形成为从玻璃过滤器13的下端边缘部分向下延伸的曲线。因此， 在由容器2内的壁部15包围的区域的整个水平截面中发生层流形成气体的下降，从而可靠地防止发生湍流。

公开(公告)号：US20020108513A1

公开(公告)日：2002-08-15

申请号：US10119940

申请日：2002-04-11

Inventor： Hiroaki Onishi ,  Shoji Sato ,  Takao Naito ,  Takaaki Higashida ,  Akira Kabeshita

IPC: B05C011/02 ,  B41M001/12

CPC classification number: H05K3/1233 ,  B41F15/42 ,  H05K2203/0139

Abstract: A filling squeegee and a scraping squeegee are provided in a printing apparatus. The filling squeegee is moved without contacting a surface of a mask in order to fill a solder paste into openings of the mask. Unnecessary solder paste on the surface of the mask is scraped by the scraping squeegee. The solder paste is prevented from being improperly filled in or scraped from the openings even if a speed of the squeegee is increased, so that the solder paste can be printed stably on circuit board.

Abstract translation: 在打印装置中设置填充刮板和刮刮刮板。 使填充刮板移动而不接触掩模的表面，以便将焊​​膏填充到掩模的开口中。 面罩表面的不必要的焊膏被刮刮刮刀刮掉。 即使刮板的速度增加，也可以防止焊膏不适当地填充或者从开口部刮下来，从而能够将电镀锡膏稳定地印刷在电路基板上。