公开(公告)号：US06408052B1

公开(公告)日：2002-06-18

申请号：US09543495

申请日：2000-04-06

Applicant: Malcolm W. McGeoch

Inventor： Malcolm W. McGeoch

IPC: H01J3500

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05H1/06

Abstract: A Z-pinch plasma X-ray source includes a chamber having an insulating wall and defining a pinch region, a pinch anode and a pinch cathode positioned at opposite ends of the pinch region, a first conductor defining an edge in close proximity to or contacting an inside surface of the insulating wall and a second conductor disposed around an outside surface of the insulating wall. A surface discharge is produced on the inside surface of the insulating wall in response to application of a voltage to the first and second conductors. The surface discharge causes the gas to ionize and to form a plasma shell near the inside surface of the insulating wall. The pinch anode and the pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in the pinch region in response to application of a high energy electric pulse to the pinch anode and the pinch cathode. The azimuthal magnetic field causes the plasma shell to collapse to the central axis and to generate X-rays.

Abstract translation: Z夹式等离子体X射线源包括具有绝缘壁并限定夹持区域的腔室，夹紧阳极和位于夹持区域的相对端的夹紧阴极，第一导体限定靠近或接触的边缘 所述绝缘壁的内表面和设置在所述绝缘壁的外表面周围的第二导体。 响应于向第一和第二导体施加电压，在绝缘壁的内表面上产生表面放电。 表面放电使得气体离子化并在绝缘壁的内表面附近形成等离子体壳。 收缩阳极和夹紧阴极在轴向方向上产生通过等离子体壳体的电流，并且响应于向收缩阳极和夹点阴极施加高能电脉冲而在夹紧区域中产生方位磁场。 方位角磁场使等离子体壳塌陷到中心轴线并产生X射线。

公开(公告)号：US06275567B1

公开(公告)日：2001-08-14

申请号：US09150555

申请日：1998-09-10

Applicant: Ulrich Hove

Inventor： Ulrich Hove

IPC: H01J3500

CPC classification number: F16C23/04 ,  H01J35/101 ,  H01J2235/106

Abstract: The invention relates to a rotary-anode X-ray tube which includes a sleeve bearing which is composed of an inner and an outer bearing segment, the outer bearing segment including intermediate pieces and a holder on which the intermediate pieces bear so as to transfer the bearing forces. Suitable shaping of the external surfaces of the intermediate pieces and the inner surfaces of the holder which contact these outer surfaces ensures that the intermediate pieces become aligned with the bearing surfaces on the inner bearing segment. This strongly reduces the complexity of manufacture.

Abstract translation: 本发明涉及一种旋转阳极X射线管，其包括由内外轴承部分组成的套筒轴承，外轴承部分包括中间件和中间件承载在其上的保持件，以便将 承载力。 中间件的外表面和接触这些外表面的保持件的内表面的合适成形确保了中间件与内轴承段上的支承表面对齐。 这大大降低了制造的复杂性。

公开(公告)号：US06240163B1

公开(公告)日：2001-05-29

申请号：US09261979

申请日：1999-03-04

Applicant: Liyan Zhang ,  Emilio Panarella ,  Albert Philippe ,  Jacob Eich ,  Stephen Drew

Inventor： Liyan Zhang ,  Emilio Panarella ,  Albert Philippe ,  Jacob Eich ,  Stephen Drew

IPC: H01J3500

CPC classification number: H01J35/22

Abstract: In an electrode combination for a radiation head for the generation of electromagnetic radiation comprising an anode means having a tip end component and a cathode means, the tip end component comprising a material able to facilitate, in response to a predetermined pulse voltage applied between the anode means and cathode means, the generation of electromagnetic radiation, the improvement wherein the electrode combination comprises a trigger electrode, the tip end component, the cathode means and the trigger electrode being spaced apart from each other by a respective predetermined distance.

Abstract translation: 在用于产生电磁辐射的辐射头的电极组合中，包括具有尖端部件和阴极装置的阳极装置，所述尖端部件包括能够响应于在阳极之间施加的预定脉冲电压的材料 装置和阴极装置，电磁辐射的产生，其中电极组合包括触发电极，尖端部件，阴极装置和触发电极彼此隔开预定距离的改进。

公开(公告)号：US06835944B2

公开(公告)日：2004-12-28

申请号：US10269760

申请日：2002-10-11

Applicant: Rocco A. Orsini ,  Michael B. Petach ,  Mark E. Michaelian ,  Henry Shields ,  Roy D. McGregor ,  Steven W. Fornaca

Inventor： Rocco A. Orsini ,  Michael B. Petach ,  Mark E. Michaelian ,  Henry Shields ,  Roy D. McGregor ,  Steven W. Fornaca

IPC: H01J3500

CPC classification number: H05G2/001 ,  H05G2/00

Abstract: An EUV radiation source that creates a stable solid filament target. The source includes a nozzle assembly having a condenser chamber for cryogenically cooling a gaseous target material into a liquid state. The liquid target material is filtered by a filter and sent to a holding chamber under pressure. The holding chamber allows entrained gas bubbles in the target material to be condensed into liquid prior to the filament target being emitted from the nozzle assembly. The target material is forced through a nozzle outlet tube to be emitted from the nozzle assembly as a liquid target stream. A thermal shield is provided around the outlet tube to maintain the liquid target material in the cryogenic state. The liquid target stream freezes and is vaporized by a laser beam from a laser source to generate the EUV radiation.

Abstract translation: 产生稳定的固体灯丝目标的EUV辐射源。 源包括具有用于将气态目标材料低温冷却成液态的冷凝器室的喷嘴组件。 液体目标材料通过过滤器过滤并在压力下送到保持室。 在从喷嘴组件发射灯丝目标之前，容纳室允许目标材料中的夹带气泡被冷凝成液体。 目标材料被迫通过喷嘴出口管，作为液体目标流从喷嘴组件发射。 在出口管周围设置热屏蔽以将液体目标材料保持在低温状态。 液体目标物流冻结并通过来自激光源的激光束蒸发以产生EUV辐射。

公开(公告)号：US06771737B2

公开(公告)日：2004-08-03

申请号：US09902659

申请日：2001-07-12

Applicant: Graham S. Kerslick ,  Victor I. Chornenky ,  Ali Jaafar

Inventor： Graham S. Kerslick ,  Victor I. Chornenky ,  Ali Jaafar

IPC: H01J3500

CPC classification number: A61N5/1001 ,  A61N5/1002 ,  H01J35/32 ,  H01J2235/062 ,  H01J2235/164

Abstract: A cathode for a miniature X-ray device includes an insulating shell, a cathode and an anode. The cathode includes a focusing cup formed into an end. The focusing cup can include a thin metal layer that conforms to an inner surface of the cathode. An emitting material having a low work function, such as diamond, is deposited directly onto the internal surface of the focusing cup. The anode has a flat receiving surface for collecting electrons emitted from the anode. An interior coating is applied as a circumferential belt on the interior surface of the insulating shell. The interior coating, formed of a negative secondary emission yield material, extends lengthwise in the region of the cathode to an anode gap, covering the region of the insulating shell most likely to be subject to stray electrons emitted from the cathode.

Abstract translation: 用于微型X射线装置的阴极包括绝缘壳，阴极和阳极。 阴极包括形成在一端的聚焦杯。 聚焦杯可以包括符合阴极内表面的薄金属层。 具有低功函数的发射材料（例如金刚石）直接沉积在聚焦杯的内表面上。 阳极具有用于收集从阳极发射的电子的平坦的接收表面。 内部涂层作为周向带施加在绝缘壳体的内表面上。 由负二次发射产生材料形成的内部涂层在阴极的区域中纵向延伸到阳极间隙，覆盖最可能经受从阴极发射的杂散电子的绝缘壳体的区域。

公开(公告)号：US06714625B1

公开(公告)日：2004-03-30

申请号：US08483731

申请日：1995-06-07

Applicant: Glenn Joseph Leedy

Inventor： Glenn Joseph Leedy

IPC: H01J3500

CPC classification number: H01L25/50 ,  B81B2203/0127 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/014 ,  B81C2203/075 ,  G02F1/13452 ,  G02F2001/136281 ,  G03F7/70658 ,  G11C29/006 ,  H01L21/762 ,  H01L21/76264 ,  H01L21/76289 ,  H01L21/764 ,  H01L23/481 ,  H01L23/538 ,  H01L23/5381 ,  H01L23/5383 ,  H01L23/5386 ,  H01L23/5387 ,  H01L25/0652 ,  H01L25/0655 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/1305 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15312 ,  H01L2924/3011 ,  H01L2924/3025 ,  Y10S438/949 ,  H01L2924/00

Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.

Abstract translation: 由非常薄的低应力电介质材料（例如二氧化硅或氮化硅）和半导体层形成的柔性膜制造集成电路的通用方法。 半导体器件形成在膜的半导体层中。 半导体膜层最初由标准厚度的衬底形成，然后将衬底的薄表面层全部蚀刻或抛光。 在另一个版本中，柔性膜用作与其连接的常规集成电路管芯的支撑和电互连，其中互连在膜中形成多层。 多个管芯可以连接到一个这样的膜，然后将其封装成多芯片模块。 其他应用基于用于双极和MOSFET晶体管制造，低阻抗导体互连制造，平板显示器，无掩模（直写））光刻和3D IC制造的（电路）膜处理。

公开(公告)号：US06546077B2

公开(公告)日：2003-04-08

申请号：US09760815

申请日：2001-01-17

Applicant: Victor I. Chornenky ,  Eunsung Park ,  Graham S. Kerslick ,  Ali Jaafar ,  Mark Gailloux

Inventor： Victor I. Chornenky ,  Eunsung Park ,  Graham S. Kerslick ,  Ali Jaafar ,  Mark Gailloux

IPC: H01J3500

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2235/164

Abstract: An emitter for a miniature X-ray apparatus comprises an insulating shell, an anode, and a cathode. The insulating shell includes a conical brazing surface, brazed to a conical brazing surface on the anode. The braze consists of a pure titanium layer and a pure tin layer. During brazing, the pure metals react and bond to the insulating shell and create a titanium-tin alloy between the pure layers. Pure tin is sputtered from tin sputter target onto the exposed brazing surfaces of the cathode cap and the anode. The insulating shell is placed in a vacuum chamber of deposition applicator, which deposits an active metal onto the shell brazing surface. In a brazing oven, the anode is placed within insulating shell such that the anode conical brazing surface and the shell conical brazing surface are contacting and aligned with each other. During brazing, the cathode is brought into contact with the insulating shell. The sealed emitters are placed in a sputtering machine's vacuum chamber. A metal is sputtered from a sputtering target to form a metal layer on the exterior of insulating shell.

公开(公告)号：US06516048B2

公开(公告)日：2003-02-04

申请号：US10060064

申请日：2002-01-31

Applicant: Kuniyoshi Mori

Inventor： Kuniyoshi Mori

IPC: H01J3500

CPC classification number: H01J35/065 ,  H01J35/14

Abstract: A voltage control section for controlling a pulsed acceleration voltage applied between a photoelectron releasing layer and an X-ray target in order to accelerate a photoelectron is further provided, so that the acceleration voltage is maintained at a pulse top voltage until the X-ray target is bombarded with the photoelectron after the photoelectron is released from the photoelectron releasing layer. The pulse width of acceleration voltage can be set narrower to such an extent that no discharge occurs, which enables the pulse top voltage to become higher, whereby the energy of pulse X-rays can be made higher by enhancing the speed of photoelectrons.

公开(公告)号：US06415016B1

公开(公告)日：2002-07-02

申请号：US09756287

申请日：2001-01-09

Applicant: Victor I. Chornenky ,  Ali Jaafar ,  Graham S. Kerslick

Inventor： Victor I. Chornenky ,  Ali Jaafar ,  Graham S. Kerslick

IPC: H01J3500

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2235/164

Abstract: An insulating housing shell for a miniature x-ray emitter is provided. The housing shell is cut from a quartz monocrystal which is a suitable material for the insulating housing shell due to its resistivity and dielectric strength properties. The x-ray emitter can be inserted into a subject's body to deliver x-ray radiation. The emitter includes a cable, having a proximal and a distal portion. The insulating housing shell is coupled to the distal portion of the cable, and an anode and a cathode are disposed within the insulating housing shell. The cathode has a granular surface and is operative with the anode and the connector to produce the x-ray radiation. The cathode is composed of a material that also allows it to act as a getter.

Abstract translation: 提供了一种用于微型x射线发射器的绝缘外壳。 壳体由石英单晶切割，由于其电阻率和介电强度特性，绝缘外壳是合适的材料。 X射线发射器可插入受试者的身体以传送X射线辐射。 发射器包括具有近端部分和远端部分的电缆。 绝缘壳体壳体耦合到电缆的远端部分，阳极和阴极设置在绝缘外壳壳体内。 阴极具有颗粒表面并且与阳极和连接器一起工作以产生x射线辐射。 阴极由也可以用作吸气剂的材料组成。

公开(公告)号：US06252933B1

公开(公告)日：2001-06-26

申请号：US09609615

申请日：2000-07-05

Applicant: Christopher F. Artig

Inventor： Christopher F. Artig

IPC: H01J3500

CPC classification number: H01J35/18 ,  H01J35/10 ,  H01J35/106 ,  H01J35/16 ,  H01J2235/1245 ,  H01J2235/1262 ,  H01J2235/166 ,  H05G1/025 ,  H05G1/04

Abstract: Air cooled x-ray generating apparatus is provided with a unitary vacuum enclosure having a rotating anode target and a cathode assembly for generating x-rays. The cathode assembly may be placed within the vacuum enclosure through an opening in the top wall thereof, and comprises a disk which completely covers this opening. The unitary vacuum enclosure and the disk form a radiation shield. A plurality of fins are disposed on the exterior side wall of the vacuum enclosure, and a shroud is attached to the fins to provide additional protection of ambient against radiation. The cathode assembly may be placed through a side wall of the vacuum enclosure. The additional protection against excessive radiation in this design is provided by a shielding member placed in proximity to the anode target. The shielding member extends from the side wall of the enclosure and is substantially parallel to the top wall.

Abstract translation: 空气冷却的x射线产生装置设置有具有用于产生X射线的旋转阳极靶和阴极组件的整体真空外壳。 阴极组件可以通过其顶壁中的开口放置在真空外壳内，并且包括完全覆盖该开口的盘。 整体真空外壳和磁盘形成辐射屏蔽。 多个翅片设置在真空外壳的外侧壁上，并且护罩附接到翅片以提供对辐射的环境的附加保护。 阴极组件可以通过真空外壳的侧壁放置。 通过设置在阳极靶附近的屏蔽构件提供在该设计中防止过度辐射的附加保护。 屏蔽构件从外壳的侧壁延伸并且基本上平行于顶壁。