公开(公告)号：US09234586B2

公开(公告)日：2016-01-12

申请号：US14519426

申请日：2014-10-21

Applicant: CKD CORPORATION

Inventor： Masayuki Kouketsu ,  Hiroshi Itafuji

IPC: F16K31/00 ,  F16K31/02 ,  F16J1/01 ,  F16K51/02 ,  G05D16/10 ,  F16K31/122 ,  F16K41/04 ,  F15B15/14 ,  G05D16/20

CPC classification number: F16J1/01 ,  F15B15/1461 ,  F16K31/1221 ,  F16K41/04 ,  F16K51/02 ,  G05D16/10 ,  G05D16/2013

Abstract: A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.

Abstract translation: 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件，构造成使移动构件往复移动的驱动部分，覆盖移动构件的盖 以及滑动密封部分，其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围，移动部件移动到真空室的内部和外部，同时移动部件通过驱动部分往复运动，并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。

公开(公告)号：US09200721B2

公开(公告)日：2015-12-01

申请号：US14119756

申请日：2012-07-17

Applicant: Michio Miyashita ,  Yukie Nakamura

Inventor： Michio Miyashita ,  Yukie Nakamura

IPC: F16K31/122 ,  F16K49/00 ,  F16K7/12 ,  F16K7/17

CPC classification number: F16K31/122 ,  F16K7/12 ,  F16K7/17 ,  F16K49/005

Abstract: In a fluid control valve, a valve part houses a diaphragm in a valve body including a valve seat, first and second ports, and a drive part includes a piston dividing a piston chamber in a cylinder body into first and second chambers, and a rubber sealing member attached to the outer peripheral surface of the piston. A constriction is provided between the piston chamber and the surface of the cylinder body contacting the valve body. The cylinder body is formed with an exhaust port communicating with the first chamber, an operation port communicating with the second chamber, and a purge port communicating with a fluid non-contact chamber. The piston is formed with a flow path which enables communication between the first chamber and the fluid non-contact chamber. Accordingly, a temperature increase of the drive part can be restricted, and degradation of internal parts can be prevented.

Abstract translation: 在流体控制阀中，阀部容纳在阀体中包括阀座，第一和第二端口的隔膜，驱动部分包括活塞将缸体中的活塞室分成第一和第二室，橡胶 密封构件附接到活塞的外周表面。 在活塞室和与阀体接触的缸体的表面之间提供收缩。 缸体形成有与第一室连通的排气口，与第二室连通的操作口，以及与流体非接触室连通的吹扫口。 活塞形成有能够使第一室和流体非接触室之间连通的流路。 因此，可以限制驱动部的温度上升，能够防止内部部件的劣化。

公开(公告)号：US20140262199A1

公开(公告)日：2014-09-18

申请号：US14354198

申请日：2012-11-13

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Atsushi Kobayashi ,  Atsuhiko Tabuchi ,  Hideki Wakai ,  Kazutoshi Itoh ,  Yasuhisa Hirose ,  Keiichi Nishikawa ,  Takahiro Minatani

IPC: H01L21/67

CPC classification number: H01L21/67103 ,  G05D23/1934 ,  H01L21/67109 ,  H01L21/67248

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract translation: 温度控制系统包括：第一温度调节单元，其在第一温度下存储流体; 第二温度调节单元，其在高于第一温度的第二温度下存储流体; 用于使从第一温度调节单元供应的流体通过的低温流路; 用于使从第二温度调节单元供给的流体通过的高温流路; 用于循环流体的旁路流路; 用于使来自低温流路的流体，高温流路和在合流部合流的旁通流路的组合流路; 温度调节部，其使来自所述组合流路的流体冷却/加热半导体制造装置的构件; 以及控制装置，其控制附接到合流部上游的三个流路的可变阀的阀位，并调节三个流路的流量分配比。

公开(公告)号：US08794261B2

公开(公告)日：2014-08-05

申请号：US13758498

申请日：2013-02-04

Applicant: CKD Corporation

Inventor： Masayuki Watanabe ,  Yoshiyuki Yamada ,  Shunsuke Umezawa

IPC: F16K31/02

CPC classification number: F17D3/00 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86485

Abstract: A fluid control system includes a vacuum chamber, a gas supply source to supply gas as a fluid, an exhaust pipe to discharge the fluid from the vacuum chamber, a gas supply pipe to connect the vacuum chamber to the gas supply source, and a pressure sensor to detect an internal pressure of the vacuum chamber. This system further includes a flowmeter placed between the gas supply source and the vacuum chamber, a proportional valve placed between the flowmeter and the vacuum chamber, a pressure controller to control the proportional valve based on output of the pressure sensor, a metering valve placed on the exhaust pipe, and a flow controller to control the metering valve based on an output of the flowmeter.

Abstract translation: 流体控制系统包括真空室，用于供应气体作为流体的气体供应源，用于从真空室排放流体的排气管，将真空室连接到气体供应源的气体供应管，以及压力 传感器来检测真空室的内部压力。 该系统还包括设置在气体供应源和真空室之间的流量计，放置在流量计和真空室之间的比例阀，压力控制器，用于基于压力传感器的输出来控制比例阀;计量阀， 排气管和流量控制器，以根据流量计的输出来控制计量阀。

公开(公告)号：US20140200700A1

公开(公告)日：2014-07-17

申请号：US14109560

申请日：2013-12-17

Applicant: CKD Corporation

Inventor： Yosuke Kamioka ,  Manabu Okuda ,  Shingo Suzuki

IPC: G05B19/418

CPC classification number: G05B19/41875 ,  G05B2219/32209 ,  G05B2219/37217 ,  H05K13/08 ,  H05K13/0817 ,  H05K13/083 ,  Y02P90/22

Abstract: In a monitoring system, when there is an evaluation that a product is defective, in a solder print inspecting device that is subject to monitoring, that information is sent to a mobile terminal possessed by an operator. The operator who views the notification performs, through the mobile terminal, a checking task for evaluating whether or not the evaluation result regarding the printed substrate that has been evaluated as a defective product is correct. Depending on the evaluation result, an operating instruction is sent to the solder print inspecting device, which has temporarily stopped the printed substrate. If correction information instructing that the defective-product evaluation be corrected to a non-defective-product evaluation is sent from a mobile terminal to the solder print inspecting device, the solder print inspecting device corrects the defective-product evaluation to a non-defective-product evaluation, and releases the temporary stop of the printed substrate.

Abstract translation: 在监视系统中，当评估产品有缺陷时，在要进行监视的焊料印刷检查装置中，将该信息发送给操作者拥有的移动终端。 查看通知的操作者通过移动终端执行用于评估关于已被评估为缺陷产品的打印基板的评估结果是否正确的检查任务。 根据评估结果，将操作指令发送到已经暂时停止印刷基板的焊料印刷检查装置。 如果从移动终端向焊接印刷检查装置发送指示将缺陷品评价修正为无缺陷品评价的修正信息，则焊料印刷检查装置将缺陷品评价校正为无缺陷品评价， 产品评估，并释放印刷基板的临时停止。

公开(公告)号：US20140034684A1

公开(公告)日：2014-02-06

申请号：US14047895

申请日：2013-10-07

Applicant: CKD CORPORATION ,  GIGAPHOTON, INC.

Inventor： Takanobu ISHIHARA ,  Hiroshi ITAFUJI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Abstract translation: 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。

公开(公告)号：US20130343909A1

公开(公告)日：2013-12-26

申请号：US14012820

申请日：2013-08-28

Applicant: CKD CORPORATION

Inventor： Shinichi NITTA

IPC: F04B43/04

CPC classification number: F04B43/046 ,  F04B43/02 ,  F04B43/021 ,  F04B43/04

Abstract: A liquid feed pump includes a pump housing, a diaphragm forming a pump chamber together with the recessed portion surface and partitioning the pump chamber from the hole, a reciprocating member reciprocatably inserted into the hole and reciprocating to press the diaphragm to deform, a driving member displacing the reciprocating member periodically in a direction of reciprocation, a seal portion sandwiching the diaphragm to seal the diaphragm in a position around an outer peripheral side of the recessed portion surface, a diaphragm receiving surface provided between the seal portion and the opening portion, and its contact area contacting the diaphragm decreases in response to an increase in the displacement of the reciprocating member to the recessed portion surface side and increases in response to an increase in the internal pressure of the pump chamber.

Abstract translation: 液体供给泵包括泵壳体，隔膜，与凹部表面一起形成泵室并将泵室与孔分隔开;往复运动件，其可往复运动地插入孔中并往复运动以推压膜片变形;驱动构件 在往复运动方向周期性地移动往复运动件，密封部分夹住隔膜以将隔膜密封在凹部表面的外周侧的位置，设置在密封部和开口部之间的隔膜接收面，以及 响应于往复运动构件向凹部表面侧的位移的增加而与隔膜接触的接触面积减小，并且响应于泵室的内部压力的增加而增加。

公开(公告)号：US20130146151A1

公开(公告)日：2013-06-13

申请号：US13708244

申请日：2012-12-07

Applicant: CKD CORPORATION

Inventor： Hiroki IWATA ,  Hideyuki TAKEDA

IPC: F16K27/00

CPC classification number: F16K27/00 ,  F16K27/0236 ,  Y10T137/598

Abstract: A fluid control valve includes: a valve main body including an inlet port and an outlet port, each being formed on opposite side surfaces; and a mounting plate attached to a lower end of the valve main body; wherein the valve main body has side surfaces located perpendicular to the opposite side surfaces and formed with locking protrusions, the mounting plate is formed with locking arms each extending from an upper end of the mounting plate, the locking arms each having a locking pawl facing and engaging with the protrusion, the valve main body is formed with an annular rib about an central axis on the lower end of the valve main body, and the upper end of the mounting plate is formed with a press-fit rib including a press-fit portion press-fitted in a wall surface of the annular rib.

Abstract translation: 流体控制阀包括：阀主体，包括入口和出口，每个形成在相对的侧表面上; 以及安装板，安装在阀主体的下端; 其中所述阀主体具有垂直于所述相对侧表面并形成有锁定突起的侧表面，所述安装板形成有从所述安装板的上端延伸的锁定臂，所述锁定臂各自具有锁定爪， 与主体接合，阀主体在阀主体的下端围绕中心轴线形成有环形肋，并且安装板的上端形成有压配合肋，该压配合肋包括压配合 部分压配合在环形肋的壁表面中。

公开(公告)号：US20130142675A1

公开(公告)日：2013-06-06

申请号：US13756361

申请日：2013-01-31

Applicant: CKD CORPORATION

Inventor： Tatsushi NABEI ,  Yukie NAKAMURA

IPC: F04B27/00

CPC classification number: F16K31/046 ,  F16K31/508 ,  F16K41/103

Abstract: In a fluid control device, a valve body is prevented from being pressed forcefully against a valve seat or the like, and an excessive load is prevented from acting on a motor. A flow rate adjustment device includes a first engagement portion, and a second engagement portion that is capable of moving relative to the first engagement portion and transmitting and receiving rotary force. The flow rate adjustment device includes a valve body that adjusts an opening of a flow passage, and a rod that is coupled to the valve body. The flow rate adjustment device further includes a male screw portion and a female screw portion that are intermeshed so as to be fed relative to each other in the axial direction, a projecting portion that restricts movement of the second engagement portion, and a first cylinder that restricts movement of the rod.

Abstract translation: 在流体控制装置中，防止阀体被强制地压靠在阀座等上，并且防止过大的负载作用在电动机上。 流量调节装置包括第一接合部和能够相对于第一接合部移动并且发送和接收旋转力的第二接合部。 流量调节装置包括调节流路的开口的阀体和与阀体连结的杆。 流量调节装置还包括外螺纹部和内螺纹部，所述外螺纹部和内螺纹部相互相对于彼此沿轴向供给，限制第二接合部的移动的突出部和第一圆筒， 限制杆的运动。

公开(公告)号：US20130140480A1

公开(公告)日：2013-06-06

申请号：US13688934

申请日：2012-11-29

Applicant: CKD CORPORATION

Inventor： Hiroki IWATA ,  Akinori URAKI ,  Hideyuki TAKEDA

IPC: F16K27/00

CPC classification number: F16K27/00 ,  F16K27/003 ,  F16K27/02

Abstract: A fluid control valve includes: a resin valve main body including inlet and outlet ports in opposite side surfaces, a valve chamber communicating between the inlet and outlet ports and opening at the upper surface center of the main body, and a valve seat provided in an inner wall of the chamber; a valve element movable into or out of contact with the valve seat; and a valve upper body including a drive part to drive the valve element. An inflow passage is formed like an L shape extending through the inner wall to communicate between the inlet port and the chamber via the valve seat. The inner wall is cylindrical having a thick-wall portion to have a wall thickness thicker on the inlet port side than on the outlet port side. The valve main body is provided, at a center of a lower surface, with a resin injected part.

Abstract translation: 流体控制阀包括：树脂阀主体，其包括在相对侧表面中的入口和出口，在入口和出口之间连通的阀室和在主体的上表面中心处的开口;以及阀座， 室内壁; 可移动到与阀座接触或脱离的阀元件; 以及包括驱动阀元件的驱动部的阀上部主体。 流入通道形成为延伸穿过内壁的L形，以经由阀座在入口和室之间连通。 内壁是圆柱形的，具有厚壁部分，其壁厚在入口侧比在出口侧更厚。 阀主体在下表面的中心处设置有树脂注入部。