SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

    公开(公告)号:US20180024159A1

    公开(公告)日:2018-01-25

    申请号:US15549421

    申请日:2016-02-01

    Abstract: A method for manufacturing a semiconductor device includes: preparing a first substrate; forming a metal film having a Ti layer as the most outermost surface on one surface of the first substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a first pad portion; preparing a second substrate; forming on one surface of the second substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a second pad portion; vacuum annealing the first substrate and the second substrate to remove an oxide film formed on the Ti layer in the first pad portion and the second pad portion; and bonding the first pad portion and the second pad portion together.

    VERY LOW POWER MICROELECTROMECHANICAL DEVICES FOR THE INTERNET OF EVERYTHING

    公开(公告)号:US20170148592A1

    公开(公告)日:2017-05-25

    申请号:US15360508

    申请日:2016-11-23

    Abstract: A microelectromechanical device is disclosed and described. The microelectromechanical device can include a base having a raised support structure. The microelectromechanical device can also include a biasing electrode supported by the base. The microelectromechanical device can further include a displacement member supported by the raised support structure. The displacement member can have a movable portion extending from the raised support structure and spaced from the biasing electrode by a gap. The movable portion can be movable relative to the base by deflection of the displacement member. The displacement member can also have a piezoelectric material associated with the movable portion. In addition, the microelectromechanical device can include a voltage source electrically coupled to the piezoelectric material and the biasing electrode. The voltage source can apply a biasing voltage to the piezoelectric material and the biasing electrode to cause deflection of the displacement member toward the biasing electrode, thereby reducing the gap between the movable portion and the biasing electrode. Further deflection of the displacement member can cause an increase in voltage across the piezoelectric material and the biasing electrode sufficient to pull the movable portion into contact with the biasing electrode.

    OPTICAL ACCELEROMETER
    257.
    发明申请
    OPTICAL ACCELEROMETER 审中-公开
    光学加速度计

    公开(公告)号:US20170059606A1

    公开(公告)日:2017-03-02

    申请号:US15246759

    申请日:2016-08-25

    Abstract: The invention relates to an optical accelerometer, comprising a seismic mass, equipped with a mobile reflective surface, according to a rotating axis, an emitting optical fiber, coupled with a light source, intended to emit a light beam, through one of its edges, in the direction of the reflective surface, and a receiving optical fiber, coupled with an optical detector, intended to receive, through one of its edges-, the light beam sent back by the reflective surface. The arrangement of the ensemble is such that a rotating movement of the reflective surface leads to a deflection of the light beam and a variation in the light intensity received by the receiving fiber. According to the invention, a convergent lens is interposed, on the optical path of the light beam, between the optical fibers and the seismic mass.

    Abstract translation: 本发明涉及一种光学加速度计,该光学加速度计包括一个地震质量块,其配备有根据旋转轴线的移动反射表面,发射光纤,与光源耦合,旨在发射光束,通过其一个边缘, 以及与光学检测器耦合的接收光纤,旨在通过其一个边缘接收由反射表面反射的光束。 该组合的布置使得反射表面的旋转运动导致光束的偏转和由接收光纤接收的光强度的变化。 根据本发明,在光纤的光路上插入聚光透镜在光纤和地震块之间。

    PIEZOELECTRIC SHOCK SENSOR AND METHOD OF MANUFACTURING THE SAME
    258.
    发明申请
    PIEZOELECTRIC SHOCK SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    压电式传感器及其制造方法

    公开(公告)号:US20170038408A1

    公开(公告)日:2017-02-09

    申请号:US15041509

    申请日:2016-02-11

    CPC classification number: G01P15/0922 G01P2015/0828 H01L41/27 H01L41/29

    Abstract: A piezoelectric shock sensor includes a lower cover, a piezoelectric element in which first and second piezoelectric sheets are stacked, and an upper cover. Each of the first and second piezoelectric sheets has a cantilever portion and a frame portion formed integrally with each other. First and second internal electrodes are formed on the first and second piezoelectric sheets, respectively. First and second lead portions, respectively electrically connected to the first and second internal electrodes, are exposed through opposing side surfaces of the piezoelectric element.

    Abstract translation: 一种压电式震动传感器包括下盖,堆叠第一和第二压电片的压电元件和上盖。 第一和第二压电片中的每一个具有彼此一体形成的悬臂部和框部。 第一和第二内部电极分别形成在第一和第二压电片上。 分别电连接到第一和第二内部电极的第一和第二引线部分通过压电元件的相对的侧表面暴露。

    ACCELERATION SENSOR
    259.
    发明申请
    ACCELERATION SENSOR 审中-公开
    加速传感器

    公开(公告)号:US20160258975A1

    公开(公告)日:2016-09-08

    申请号:US15156329

    申请日:2016-05-17

    Abstract: An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.

    Abstract translation: 加速度传感器包括检测装置,相对电极和顶盖。 检测装置包括有源层,基底层,设置在有源层和基底层之间的氧化物层,第一绝缘层,接触部分和自检电极。 第一绝缘层在与氧化物层相对的一侧设置在有源层上并且设置有第一开口。 接触部分在与有源层相对的一侧设置在第一绝缘层的一部分上,并且包括通过第一开口连接到有源层的第一金属层。 相对电极设置在与自检电极相对的位置,顶盖支撑相对电极。

    Method and apparatus for sensing underwater signals
    260.
    发明授权
    Method and apparatus for sensing underwater signals 有权
    用于检测水下信号的方法和装置

    公开(公告)号:US09294011B2

    公开(公告)日:2016-03-22

    申请号:US13984255

    申请日:2012-02-07

    Applicant: Ken Kan Deng

    Inventor: Ken Kan Deng

    Abstract: Methods and apparatuses are disclosed that assist in sensing underwater signals in connection with geophysical surveys. One embodiment relates to a transducer including a cantilever coupled to a base. The cantilever may include a beam and a first coupling surface angularly oriented from the beam, and the base may include a second coupling surface angularly oriented from the beam and substantially parallel to the first coupling surface of the cantilever. The transducer may further include a sensing material coupled between the first coupling surface of the cantilever and the second coupling surface of the base.

    Abstract translation: 公开了协助感测与地球物理勘测有关的水下信号的方法和装置。 一个实施例涉及一种包括耦合到基座的悬臂的换能器。 悬臂可以包括梁和从梁成角度地定向的第一联接表面,并且基座可以包括从梁成角度地取向并基本上平行于悬臂的第一联接表面的第二联接表面。 换能器还可以包括耦合在悬臂的第一联接表面和基座的第二联接表面之间的感测材料。

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