Abstract:
A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.
Abstract:
The method and system for determining position with improved calibration allows a device to initiate activity at the proper location, such as navigating a drill bit through a rock formation. A pair of position sensors in opposite orientations generates position data signals. A temperature sensor detects temperature and duration of the temperature. An adjusted plastic bias value is determined by a processor module based on the temperature data signal, the duration of the temperature, and the position data signals so as to account for bias and hysteresis errors and error correction based on the opposing orientations of the pair of position sensors. A position value is set according to the adjusted plastic bias value so that the position value is more accurate. The activity of the terminal device is initiated or maintained according to the position value calibrated by the adjusted plastic bias value.
Abstract:
Systems and methods are described herein for determining an inertial parameter. In particular, the systems and methods relate to multiple degrees of freedom inertial sensors implementing time-domain sensing techniques. Within a multiple degrees of freedom inertial sensor system, sense masses may respond to actuation with more than one natural frequency mode, each corresponding to a characteristic motion. Measurement of the inertial parameter can be conducted in the differential natural frequency mode using differential sensing techniques to remove common mode error. The inertial parameter can be acceleration in the vertical dimension. The inertial parameter can be acceleration in the horizontal dimension.
Abstract:
A method for manufacturing a semiconductor device includes: preparing a first substrate; forming a metal film having a Ti layer as the most outermost surface on one surface of the first substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a first pad portion; preparing a second substrate; forming on one surface of the second substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a second pad portion; vacuum annealing the first substrate and the second substrate to remove an oxide film formed on the Ti layer in the first pad portion and the second pad portion; and bonding the first pad portion and the second pad portion together.
Abstract:
One embodiment includes a method for dynamic self-calibration of an accelerometer system. The method includes forcing a proof-mass associated with a sensor of the accelerometer system in a first direction to a first predetermined position and obtaining a first measurement associated with the sensor in the first predetermined position via at least one force/detection element of the sensor. The method also includes forcing the proof-mass to a second predetermined position and obtaining a second measurement associated with the sensor in the second predetermined position via the at least one force/detection element of the sensor. The method further includes calibrating the accelerometer system based on the first and second measurements.
Abstract:
A microelectromechanical device is disclosed and described. The microelectromechanical device can include a base having a raised support structure. The microelectromechanical device can also include a biasing electrode supported by the base. The microelectromechanical device can further include a displacement member supported by the raised support structure. The displacement member can have a movable portion extending from the raised support structure and spaced from the biasing electrode by a gap. The movable portion can be movable relative to the base by deflection of the displacement member. The displacement member can also have a piezoelectric material associated with the movable portion. In addition, the microelectromechanical device can include a voltage source electrically coupled to the piezoelectric material and the biasing electrode. The voltage source can apply a biasing voltage to the piezoelectric material and the biasing electrode to cause deflection of the displacement member toward the biasing electrode, thereby reducing the gap between the movable portion and the biasing electrode. Further deflection of the displacement member can cause an increase in voltage across the piezoelectric material and the biasing electrode sufficient to pull the movable portion into contact with the biasing electrode.
Abstract:
The invention relates to an optical accelerometer, comprising a seismic mass, equipped with a mobile reflective surface, according to a rotating axis, an emitting optical fiber, coupled with a light source, intended to emit a light beam, through one of its edges, in the direction of the reflective surface, and a receiving optical fiber, coupled with an optical detector, intended to receive, through one of its edges-, the light beam sent back by the reflective surface. The arrangement of the ensemble is such that a rotating movement of the reflective surface leads to a deflection of the light beam and a variation in the light intensity received by the receiving fiber. According to the invention, a convergent lens is interposed, on the optical path of the light beam, between the optical fibers and the seismic mass.
Abstract:
A piezoelectric shock sensor includes a lower cover, a piezoelectric element in which first and second piezoelectric sheets are stacked, and an upper cover. Each of the first and second piezoelectric sheets has a cantilever portion and a frame portion formed integrally with each other. First and second internal electrodes are formed on the first and second piezoelectric sheets, respectively. First and second lead portions, respectively electrically connected to the first and second internal electrodes, are exposed through opposing side surfaces of the piezoelectric element.
Abstract:
An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.
Abstract:
Methods and apparatuses are disclosed that assist in sensing underwater signals in connection with geophysical surveys. One embodiment relates to a transducer including a cantilever coupled to a base. The cantilever may include a beam and a first coupling surface angularly oriented from the beam, and the base may include a second coupling surface angularly oriented from the beam and substantially parallel to the first coupling surface of the cantilever. The transducer may further include a sensing material coupled between the first coupling surface of the cantilever and the second coupling surface of the base.