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    Optical beam steering switching system
    261.
    发明申请
    Optical beam steering switching system 有权
    光束转向开关系统

    公开(公告)号：US20010043386A1

    公开(公告)日：2001-11-22

    申请号：US09917431

    申请日：2001-07-28

    Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

    IPC: G02B026/00

    CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

    Abstract: A beam steering module and switching system. The steering module is composed of a NnullM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NnullM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NnullM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

    Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

    Micro-electro-mechanical optical device
    262.
    发明授权
    Micro-electro-mechanical optical device 有权
    微机电光学装置

    公开(公告)号：US06300619B1

    公开(公告)日：2001-10-09

    申请号：US09415178

    申请日：1999-10-08

    Applicant: Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  Randy Clinton Giles ,  Flavio Pardo

    Inventor： Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  Randy Clinton Giles ,  Flavio Pardo

    IPC: G02B2600

    CPC classification number: B81B7/0003 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0866

    Abstract: A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.

    Abstract translation: 一种微机电（MEM）光学装置，其具有减小的占地面积，以增加基板上的产量。 MEM装置包括具有外边缘并由设置在基板上的支撑结构支撑的光学元件。 支撑结构通过第一和第二对梁将其机械地连接到基板，所述梁将结构移动到用于将光学装置升高到基板上方的活动位置。 当处于升高位置时，可以选择性地倾斜光学装置以偏转光信号。 梁在一端连接到支撑结构，另一端连接到基板，并且被布置成使得第一和第二梁端部位于光学装置外边缘附近。 在优选实施例中，在光学装置的外边缘上包括一个减小降低力的元件，用于减小光学元件边缘和基板之间的接触面积。

    Flexureless multi-stable micromirrors for optical switching
    263.
    发明授权
    Flexureless multi-stable micromirrors for optical switching 失效
    用于光学开关的无挠曲多平台微镜

    公开(公告)号：US6040935A

    公开(公告)日：2000-03-21

    申请号：US237140

    申请日：1999-01-25

    Applicant: M. Adrian Michalicek

    Inventor： M. Adrian Michalicek

    IPC: B81B3/00 ,  G02B26/08

    CPC classification number: B81B5/00 ,  G02B26/0841 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/0307 ,  B81B2203/058

    Abstract: An array of micromirror devices is fabricated using standard surface-micromachining techniques such that the reflective mirror surfaces are anchored by a trapped joint rather than by rigid support flexures. These devices are therefore multi-stable in actuation rather than continuous like typical micromirror devices in which the restoring spring force of the flexures is used to balance the force of electrostatic actuation. As a result, the flexureless micromirror can be actuated to specific stable positions that make it ideal for optical switching. Since no direct mechanical connection is required to support the mirror surfaces, these devices can be switched between stable positions in binary fashion and at higher speeds.

    Abstract translation: 使用标准表面微加工技术制造微镜器件阵列，使得反射镜表面被捕获的接头而不是刚性支撑挠曲锚定。 因此，这些装置在诸如典型的微镜装置中的致动而不是连续地是多稳定的，其中弯曲的恢复弹簧力用于平衡静电致动的力。 因此，柔性微镜可以启动到特定的稳定位置，使其成为光学开关的理想选择。 由于不需要直接的机械连接来支撑镜面，所以这些装置可以在二进制稳定的位置和更高的速度之间切换。

    Actuator device
    266.
    发明授权
    Actuator device 有权

    公开(公告)号：US11673794B2

    公开(公告)日：2023-06-13

    申请号：US17950323

    申请日：2022-09-22

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Daiki Suzuki ,  Takuma Osaki ,  Naoto Sakurai

    IPC: H02K33/02 ,  B81B3/00 ,  B06B1/04

    CPC classification number: B81B3/0021 ,  H02K33/02 ,  B06B1/04 ,  B81B2201/045

    Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of each of the pair of the first connection portions includes a first linear portion that extends along a second axis direction. An outer edge of each of the pair of the second connection portions includes a second linear portion that extends along a first axis direction.

    MEMS actuator with discretely controlled multiple motions
    269.
    发明授权
    MEMS actuator with discretely controlled multiple motions 有权
    具有离散控制的多个运动的MEMS致动器

    公开(公告)号：US09505606B2

    公开(公告)日：2016-11-29

    申请号：US11762683

    申请日：2007-06-13

    Applicant: Jin Young Sohn ,  Gyoung II Cho ,  Cheong Soo Seo

    Inventor： Jin Young Sohn ,  Gyoung II Cho ,  Cheong Soo Seo

    IPC: H02N1/00 ,  G02B26/08 ,  B81B3/00

    CPC classification number: B81B3/0062 ,  B81B2201/037 ,  B81B2201/045

    Abstract: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

    Abstract translation: 具有离散控制的多个运动的MEMS（微机电系统）致动器包括底层，步进板，支撑和运动板。 运动板的多重运动由静电驱动的步进板和几何预定的支撑件产生。 通过引入具有离散控制的多个运动的MEMS致动器，可以通过数字控制实现简单的运动控制，并且仅需要运动控制板的单个电压。

    Device and Method for Micro-Electro-Mechanical-System Photonic Switch
    270.
    发明申请
    Device and Method for Micro-Electro-Mechanical-System Photonic Switch 有权
    微电子机械系统光电开关的装置和方法

    公开(公告)号：US20160097927A1

    公开(公告)日：2016-04-07

    申请号：US14506413

    申请日：2014-10-03

    Applicant: Huawei Technologies Co., Ltd.

    Inventor： Alan Frank Graves

    IPC: G02B26/08 ,  B81B7/02 ,  G01D5/30 ,  B81B7/00

    CPC classification number: G02B26/0841 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/045 ,  G01D5/30

    Abstract: In one embodiment, a method of controlling a micro-electro-mechanical-system (MEMS) photonic switch includes applying a voltage to an electrode of an initial mirror of a first mirror array of the MEMS photonic switch and illuminating a control beam. The method also includes reflecting the control beam off the initial mirror to form a control beam spot on a second mirror array of the MEMS photonic switch and detecting an initial location of the control beam spot to produce an initial optical response. Additionally, the method includes adjusting the voltage in accordance with the initial optical response while the control beam spot has a nonzero velocity.

    Abstract translation: 在一个实施例中，一种控制微电子机械系统（MEMS）光子开关的方法包括向MEMS光子开关的第一反射镜阵列的初始反射镜的电极施加电压并照射控制光束。 该方法还包括将控制光束反射离开初始反射镜，以在MEMS光子开关的第二反射镜阵列上形成控制光束点，并且检测控制光束点的初始位置以产生初始光学响应。 此外，该方法包括根据初始光学响应调整电压，同时控制光斑具有非零速度。

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