公开(公告)号：US07205226B1

公开(公告)日：2007-04-17

申请号：US11138848

申请日：2005-05-25

Applicant: David Schaefer ,  Robert Charatan

Inventor： David Schaefer ,  Robert Charatan

IPC: H01L21/4763

CPC classification number: H01L21/76898 ,  H01L21/30655 ,  H01L21/3086

Abstract: A method for etching a trench is provided. The method initiates with providing a substrate having a patterned feature. The method includes alternating between deposition of a protective layer onto inner surfaces of the patterned feature and etching the trench into the substrate. The alternating may be achieved through a gas modulation technique and in one embodiment, the deposition and the etching are performed in the same chamber, i.e., the substrate does not move to a different chamber between the etch and deposition processes. The alternating is continued until the trench is completed and then the trench is filled. A semiconductor processing system is also provided.

Abstract translation: 提供了一种蚀刻沟槽的方法。 该方法通过提供具有图案化特征的衬底来启动。 该方法包括将保护层沉积在图案化特征的内表面上并将沟槽蚀刻到衬底中交替。 可以通过气体调制技术实现交替，并且在一个实施例中，沉积和蚀刻在相同的腔室中进行，即，衬底不会移动到蚀刻和沉积工艺之间的不同室。 继续交替，直到沟槽完成，然后填充沟槽。 还提供了半导体处理系统。

公开(公告)号：US20050274861A1

公开(公告)日：2005-12-15

申请号：US11135695

申请日：2005-05-24

Applicant: David Schaefer

Inventor： David Schaefer

IPC: A47K1/08 ,  B60R9/06

CPC classification number: B60R9/06

Abstract: A device to increase the stowage capacity of vehicles that comprises a fabric, box-like or cylindrical shaped receptacle and primary support straps and tie down straps to mount the receptacle on the rear or side of a vehicle and to minimize sway of the receptacle when the vehicle is in motion.

Abstract translation: 一种用于增加包括织物，盒状或圆柱形形状的容器和主要支撑带和绑带的车辆的装载能力的装置，以将插座安装在车辆的后部或侧面上，并且当最小化插座的摆动时 车辆在运动。

公开(公告)号：US08844106B2

公开(公告)日：2014-09-30

申请号：US13293972

申请日：2011-11-10

Applicant: Rish Chhatre ,  David Schaefer ,  Sung Lee ,  Dan Haber

Inventor： Rish Chhatre ,  David Schaefer ,  Sung Lee ,  Dan Haber

IPC: B23P11/02 ,  H01L21/67

CPC classification number: H01L21/68735 ,  H01L21/67069 ,  H01L21/6719 ,  Y10T29/49826 ,  Y10T29/49863 ,  Y10T29/53 ,  Y10T29/53657

Abstract: A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.

Abstract translation: 提供一种包括安装夹具，多个机械紧固件和嵌入工具的套件，其允许弹性体带以减轻弹性体带的内部应力的方式设置在半导体衬底支撑件周围的安装槽中，引导 到具有更长使用寿命的弹性体带。 安装夹具用机械紧固件固定到基板支架上。 弹性体带围绕安装夹具的外周放置并且来回旋转以减轻弹性体带的内应力。 夹具被倒置，弹性体带从夹具垂直滑入安装槽。 可以使用嵌入工具将弹性体带完全插入到安装槽中。

公开(公告)号：US20130340942A1

公开(公告)日：2013-12-26

申请号：US13528194

申请日：2012-06-20

Applicant: David Schaefer ,  Ambarish Chhatre ,  Keith William Gaff ,  Brooke Mesler Lai

Inventor： David Schaefer ,  Ambarish Chhatre ,  Keith William Gaff ,  Sung Lee ,  Brooke Mesler Lai

IPC: F16J15/02 ,  H02N13/00

CPC classification number: F16J15/021 ,  H01J37/32495 ,  H01J37/32532 ,  H01J37/3255 ,  H01J37/32568 ,  H01J37/32715 ,  H01J37/32724 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/6838 ,  H02N13/00 ,  Y10T29/49908

Abstract: A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.

Abstract translation: 用于在等离子体处理室中支撑半导体衬底的下部电极组件包括温度控制的下部基板，上部板，围绕结合层的安装槽和边缘密封件，该边缘密封件包括具有未压缩的外凹面的弹性带 状态，安装在槽中的带，使得带的上端和下端被轴向压缩，并且带的最大向外膨胀不大于预定距离。

公开(公告)号：USD649227S1

公开(公告)日：2011-11-22

申请号：US29369871

申请日：2010-09-14

Applicant: David Schaefer

Designer： David Schaefer

公开(公告)号：US20090225078A1

公开(公告)日：2009-09-10

申请号：US12399829

申请日：2009-03-06

Applicant: Jaroslaw Roman Rossignac ,  Scott David Schaefer

Inventor： Jaroslaw Roman Rossignac ,  Scott David Schaefer

IPC: G06T17/20

CPC classification number: G06T11/203 ,  G06T17/20

Abstract: Systems and methods of rendering curves through iterative refinement are disclosed. One such method of rendering a curve from a polygonal control loop 0P comprises iteratively applying k subdivisions described by Js to a series of polygons starting with 0P, where each subdivision is applied to the previous polygon.

Abstract translation: 公开了通过迭代细化渲染曲线的系统和方法。 从多边形控制循环0P呈现曲线的一种这样的方法包括将由Js描述的k个细分迭代地应用于以0P开始的一系列多边形，其中每个细分被应用于先前的多边形。

公开(公告)号：US07532131B2

公开(公告)日：2009-05-12

申请号：US10829493

申请日：2004-04-22

Applicant: William David Schaefer ,  David W. Caldwell

Inventor： William David Schaefer ,  David W. Caldwell

IPC: H03K17/96

CPC classification number: H01H13/702 ,  H01H13/703 ,  H01H2209/014 ,  H01H2209/038 ,  H01H2209/06 ,  H01H2209/082 ,  H01H2219/002

Abstract: A keypad includes a substrate and one or more layers of decorative material on the substrate. Transparent and/or conventional conductive materials are disposed on the decorative material. Electrical circuit components are soldered to the conductive layers.

Abstract translation: 键盘包括衬底和衬底上的一层或多层装饰材料。 透明和/或常规的导电材料设置在装饰材料上。 电路元件焊接到导电层。

公开(公告)号：US07479457B2

公开(公告)日：2009-01-20

申请号：US11220710

申请日：2005-09-08

Applicant: Cristian Paduraru ,  Alan Jensen ,  David Schaefer ,  Robert Charatan ,  Tom Choi

Inventor： Cristian Paduraru ,  Alan Jensen ,  David Schaefer ,  Robert Charatan ,  Tom Choi

IPC: H01L21/461

CPC classification number: G03F7/427

Abstract: Atomic oxygen generated in oxygen stripping plasmas reacts with and damages low-k dielectric materials during stripping of dielectric post etch residues. While damage of low-k dielectric materials during stripping of dielectric post etch residues is lower with hydrogen stripping plasmas, hydrogen stripping plasmas exhibit lower strip rates. Inclusion of oxygen in a hydrogen stripping plasma improves both photoresist strip rate and uniformity, while maintaining a hydrogen to oxygen ratio avoids low-k dielectric material damage.

Abstract translation: 在氧气剥离等离子体中产生的原子氧在电介质蚀刻残留物的剥离期间与低k电介质材料反应并损坏。 尽管在剥离电介质后蚀刻残留物时低k电介质材料的损伤随氢气剥离等离子体而降低，但氢气剥离等离子体显示较低的剥离速率。 在氢气剥离等离子体中包含氧气可改善光致抗蚀剂剥离速率和均匀性，同时保持氢气与氧气的比例可以避免低k电介质材料损坏。

公开(公告)号：US20060224711A1

公开(公告)日：2006-10-05

申请号：US11091979

申请日：2005-03-29

Applicant: Joseph Engel ,  Daniel Hosko ,  James Lagree ,  Kevin Parker ,  Gary Saletta ,  David Schaefer ,  John Schlotterer

Inventor： Joseph Engel ,  Daniel Hosko ,  James Lagree ,  Kevin Parker ,  Gary Saletta ,  David Schaefer ,  John Schlotterer

IPC: G06F15/173

CPC classification number: H04L67/12 ,  H04L67/02

Abstract: A system includes a first communication network, such as the Internet, having a client; a second INCOM communication network including a plurality of communicating devices; and a server. The server includes a first Ethernet transceiver communicating with the Internet, a second INCOM transceiver communicating with the INCOM communication network and the communicating devices, and a processor cooperating with the first and second transceivers. The processor being adapted to learn at least some of the communicating devices, to periodically obtain a plurality of values from the communicating devices, to associate the values with a web page, to communicate the web page to the client over the Internet, and to periodically communicate the values associated with the web page to the client over the Internet.

Abstract translation: 系统包括具有客户端的诸如因特网的第一通信网络; 包括多个通信设备的第二INCOM通信网络; 和服务器。 服务器包括与因特网通信的第一以太网收发器，与INCOM通信网络和通信设备通信的第二INCOM收发器，以及与第一和第二收发器协作的处理器。 所述处理器适于学习至少一些所述通信设备，以周期性地从所述通信设备获得多个值，以将所述值与网页相关联，以通过因特网将所述网页传送到所述客户端，并周期性地 通过互联网将与网页相关联的值传递给客户端。

公开(公告)号：US20050151312A1

公开(公告)日：2005-07-14

申请号：US10753606

申请日：2004-01-08

Applicant: Isaac Frazier ,  Jos Jacobs ,  Carl Urban ,  David Schaefer

Inventor： Isaac Frazier ,  Jos Jacobs ,  Carl Urban ,  David Schaefer

IPC: B65H3/06 ,  B65H3/52 ,  B65H5/00

CPC classification number: B65H3/5261 ,  B65H3/06 ,  B65H2402/52 ,  B65H2405/31 ,  B65H2601/324

Abstract: A sheet feeder and separator assembly for separating and sequentially feeding individual print media sheets from a stack thereof includes a frame having at least one bearing recess. A removable print media tray is carried by the frame. A separator is connected to the removable print media tray. A pick module assembly is removably connected to the frame adjacent the removable print media tray. The pick module assembly includes a pick roller adjacent the separator to form a nip and at least one flexible bearing is removably received in the at least one bearing recess to removably connect the pick module assembly to the frame.

Abstract translation: 用于从其堆叠中分离和顺序地馈送各个打印介质片的片材进给器和分离器组件包括具有至少一个轴承凹部的框架。 可拆卸的打印介质托盘由框架承载。 分离器连接到可移动的打印介质托盘。 拾取模块组件可移除地连接到邻近可拆卸打印介质托盘的框架。 拾取模块组件包括邻近分离器以形成辊隙的拾取辊，并且至少一个柔性轴承可移除地容纳在至少一个轴承凹部中，以将拾取模块组件可拆卸地连接到框架。