公开(公告)号：US10343424B2

公开(公告)日：2019-07-09

申请号：US15846843

申请日：2017-12-19

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Hitoshi Aoyagi ,  Junsuke Komito

IPC: B41J11/00 ,  A61J3/06 ,  B41J2/01

Abstract: According to one embodiment, a tablet printing apparatus includes: a first conveyor conveying a tablet while holding a other surface of the tablet; a second conveyor conveying the tablet transferred from the first conveyor while holding a one surface of the tablet; a first print head performing printing on the one surface of the tablet; a second print head performing printing on the other surface of the tablet; a first detection mechanism detecting the one surface of the tablet; a second detection mechanism detecting the other surface of the tablet; and a controller sending a printing instruction to the first and the second print heads based on information related to the state of a split line included in detection information on the one surface of the tablet or detection information on the other surface of the tablet.

公开(公告)号：US10325787B2

公开(公告)日：2019-06-18

申请号：US14781077

申请日：2014-03-25

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Konosuke Hayashi ,  Takashi Ootagaki ,  Yuji Nagashima ,  Akinori Iso

IPC: B05D1/00 ,  B08B3/10 ,  H01L21/02 ,  H01L21/66 ,  H01L21/67 ,  H01L21/306 ,  H01L21/687

Abstract: According to one embodiment, a substrate processing apparatus (1) includes: a support (4) configured to support a substrate (W) in a plane; a rotation mechanism (5) configured to rotate the support (4) about an axis that crosses a surface of the substrate (W) supported by the support (4) as a rotation axis; a plurality of nozzles (6a, 6b, 6c), which are aligned from the center toward the periphery of the substrate (W) supported by the support (4), configured to eject a treatment liquid to the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5), and a controller (9) configured to control the nozzles to eject the treatment liquid at different ejection timings according to the thickness of a film of the treatment liquid formed on the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5).

公开(公告)号：US10276406B2

公开(公告)日：2019-04-30

申请号：US14212899

申请日：2014-03-14

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Konosuke Hayashi ,  Masaaki Furuya ,  Takashi Ootagaki ,  Yuji Nagashima ,  Atsushi Kinase ,  Masahiro Abe

IPC: B08B3/10 ,  H01L21/67

Abstract: A substrate processing device includes a suction drying section drying a surface of a substrate by absorbing and removing a liquid droplet of volatile solvent formed on the surface of the substrate by a heating operation of a heating section.

公开(公告)号：US20190103300A1

公开(公告)日：2019-04-04

申请号：US16143927

申请日：2018-09-27

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Daisuke ONO

IPC: H01L21/687 ,  H01J37/32 ,  C23C14/34

Abstract: A film formation apparatus includes a film formation unit which includes a film formation room having an opening at one end, has a target formed of a film formation material in the film formation room, and deposits the film formation material of the target on a surface of a workpiece facing the opening by plasma produced by a sputter gas in the film formation room, and a carrier that carries the workpiece along a predetermined carrying path so that the workpiece repeatedly pass through a facing region which faces the opening of the film formation room and a non-facing region which does not face the opening of the film formation room. The carrier includes a low-pressure position where the workpiece is placed and which causes an interior of the film formation room to be lower than a plasma ignition lower limit pressure and to be equal to or higher than a plasma electric discharge maintaining lower limit pressure when passing through the facing region, and a high-pressure position where workpiece is not placed and which causes the interior of the film formation room to be equal to or higher than the plasma ignition lower limit pressure when passing through the facing region.

公开(公告)号：US20190099996A1

公开(公告)日：2019-04-04

申请号：US16206338

申请日：2018-11-30

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Ryo IKUTA ,  Junsuke KOMITO ,  Shinichi OGIMOTO

IPC: B41F17/36 ,  A61J3/00 ,  B41J2/135 ,  B41M5/00

Abstract: According to one embodiment, a tablet printing apparatus includes a conveying device, an inkjet printing device, and a control device. The conveying device is configured to convey a tablet. The printing device includes a nozzle array in which a plurality of nozzles are arranged in a direction crossing a conveying path where the tablet is conveyed by the conveying device, and performs printing by ejecting ink from the nozzles to the tablet being conveyed by the conveying device. The control device increases either one of a resolution in the conveying direction of the tablet at the time of performing the printing and a resolution in the array direction of the nozzles at the time of performing the printing higher than the other according to a print density or a print shape on the tablet, and controls the printing device to perform the printing.

公开(公告)号：US10220640B2

公开(公告)日：2019-03-05

申请号：US15963549

申请日：2018-04-26

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Yasutsugu Tsuruoka ,  Hironori Haijima ,  Toru Kuribayashi ,  Yuki Umemura

IPC: B41J11/00 ,  B65G15/58 ,  B41J3/407

Abstract: According to one embodiment, a tablet printing apparatus includes: a conveyor belt including a suction hole to suck a tablet; and an ink jet print head configured to perform printing on the tablet; wherein the conveyor belt further includes a plurality of protrusions formed around the suction hole and configured to support the tablet in contact with the tablet, and a recess formed between the protrusions and communicated with the suction hole, each of the protrusions has a bottom surface, an upper surface, area of which is smaller than that of the bottom surface, and a side surface having an inclined surface, the protrusions support the tablet such that a gap is formed between a surface of the tablet on conveyor belt side and the suction hole, and a suction force is applied to the gap and space of the recess through the suction hole to suck the tablet.

公开(公告)号：US10124580B2

公开(公告)日：2018-11-13

申请号：US15740465

申请日：2016-05-30

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Azusa Hirano ,  Yasutsugu Tsuruoka ,  Junsuke Komito

IPC: B41J2/045 ,  B41J2/145 ,  B41J3/407 ,  B41M5/00 ,  B41J2/125 ,  B41J2/14

Abstract: [Problem to be Solved] To provide a tablet printing apparatus and a tablet printing method that can perform printing with high quality by ejecting ink droplets to a tablet with a various posture from a plurality of nozzles.[Solution] A tablet printing apparatus includes: inclined posture detector (23, 100) that detects an inclined posture of a conveyed tablet with respect to a conveying surface; a printer including an inkjet head 21 equipped with a plurality of nozzles for ejecting an ink droplet, the printer performing printing on the conveyed tablet by ejecting ink to the conveyed tablet from the plurality of nozzles; and a controller 100 for adjusting preset printing data corresponding to an inclined posture of the tablet detected by the inclined posture detector such that predetermined printing is performed on the tablet, wherein the printer performs printing on the tablet based on printing data adjusted by the printing data adjuster.

公开(公告)号：US20180194132A1

公开(公告)日：2018-07-12

申请号：US15740465

申请日：2016-05-30

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Azusa HIRANO ,  Yasutsugu TSURUOKA ,  Junsuke KOMITO

IPC: B41J2/045 ,  B41J3/407 ,  B41M5/00 ,  B41J2/145

CPC classification number: B41J2/04526 ,  A61J3/06 ,  B41J2/04581 ,  B41J2/125 ,  B41J2/14153 ,  B41J2/145 ,  B41J2/1714 ,  B41J2/2135 ,  B41J3/4073 ,  B41J11/008 ,  B41J11/0095 ,  B41J29/17 ,  B41M5/0088

Abstract: [Problem to be Solved] To provide a tablet printing apparatus and a tablet printing method that can perform printing with high quality by ejecting ink droplets to a tablet with a various posture from a plurality of nozzles.[Solution] A tablet printing apparatus includes: inclined posture detector (23, 100) that detects an inclined posture of a conveyed tablet with respect to a conveying surface; a printer including an inkjet head 21 equipped with a plurality of nozzles for ejecting an ink droplet, the printer performing printing on the conveyed tablet by ejecting ink to the conveyed tablet from the plurality of nozzles; and a controller 100 for adjusting preset printing data corresponding to an inclined posture of the tablet detected by the inclined posture detector such that predetermined printing is performed on the tablet, wherein the printer performs printing on the tablet based on printing data adjusted by the printing data adjuster.

公开(公告)号：US09972513B2

公开(公告)日：2018-05-15

申请号：US15450542

申请日：2017-03-06

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Yuki Saito ,  Konosuke Hayashi ,  Takashi Ootagaki ,  Yuji Nagashima

IPC: H01L21/00 ,  H01L21/67

CPC classification number: H01L21/6708 ,  H01L21/67017 ,  H01L21/67253

Abstract: According to the embodiment, a substrate treating device 10 for treating a semiconductor wafer W using an etchant L containing hydrofluoric acid and nitric acid includes a storage tank 210 that stores the etchant L; a concentration sensor 256 that measures a concentration of nitrous acid in the etchant L; an alcohol feeding line 280 that feeds IPA to the etchant L and maintains the concentration of nitrous acid to a predetermined value or more; and a substrate treating unit 100 that feeds the etchant L in the storage tank 210 to the semiconductor wafer W. The substrate treating device can improve the etching efficiency by efficiently generating nitrous acid, and thereby producing an etchant having a nitrous acid concentration suitable for etching.

公开(公告)号：US20180110162A1

公开(公告)日：2018-04-19

申请号：US15730361

申请日：2017-10-11

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Akihiko ITO ,  Yoshinao KAMO ,  Shigeki MATSUNAKA ,  Atsushi FUJITA

IPC: H05K9/00 ,  H01L21/56

CPC classification number: H05K9/0084 ,  H01L21/561 ,  H01L21/565 ,  H01L21/67092 ,  H01L21/6835 ,  H01L21/68764 ,  H01L21/68771 ,  H01L23/552 ,  H05K9/0024

Abstract: An electronic component, an electronic component manufacturing apparatus, and an electronic component manufacturing method are provided which enable an electromagnetic wave shielding film formed on a package to achieve an excellent shielding characteristic. An electronic component 10 includes an electromagnetic wave shielding film 13 formed on the top face of a package sealing elements. The thickness of the electromagnetic wave shielding film 13 on the top face of the package 12 is 0.5 to 9 μm, and the relationship between the average height Rc of the roughness curvature factor of the top face of the package 12 and the thickness Te of the electromagnetic wave shielding film 13 is Rc≤2Te.